JP2011141223A - 圧力感知ユニット、及び圧力センサー - Google Patents

圧力感知ユニット、及び圧力センサー Download PDF

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Publication number
JP2011141223A
JP2011141223A JP2010002662A JP2010002662A JP2011141223A JP 2011141223 A JP2011141223 A JP 2011141223A JP 2010002662 A JP2010002662 A JP 2010002662A JP 2010002662 A JP2010002662 A JP 2010002662A JP 2011141223 A JP2011141223 A JP 2011141223A
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Japan
Prior art keywords
pressure
sensing unit
pressure sensing
force
center shaft
Prior art date
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Withdrawn
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JP2010002662A
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English (en)
Japanese (ja)
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JP2011141223A5 (enExample
Inventor
Hisao Motoyama
久雄 本山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010002662A priority Critical patent/JP2011141223A/ja
Publication of JP2011141223A publication Critical patent/JP2011141223A/ja
Publication of JP2011141223A5 publication Critical patent/JP2011141223A5/ja
Withdrawn legal-status Critical Current

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JP2010002662A 2010-01-08 2010-01-08 圧力感知ユニット、及び圧力センサー Withdrawn JP2011141223A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010002662A JP2011141223A (ja) 2010-01-08 2010-01-08 圧力感知ユニット、及び圧力センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010002662A JP2011141223A (ja) 2010-01-08 2010-01-08 圧力感知ユニット、及び圧力センサー

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JP2011141223A true JP2011141223A (ja) 2011-07-21
JP2011141223A5 JP2011141223A5 (enExample) 2013-01-31

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JP2010002662A Withdrawn JP2011141223A (ja) 2010-01-08 2010-01-08 圧力感知ユニット、及び圧力センサー

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101760561B1 (ko) * 2015-04-06 2017-07-24 (주)센서시스템기술 압력 변환기
WO2025076784A1 (zh) * 2023-10-12 2025-04-17 瑞声光电科技(常州)有限公司 振动马达

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984445U (ja) * 1983-08-31 1984-06-07 明星電気株式会社 水晶振動子を用いた力センサ
JPH0272947U (enExample) * 1988-11-25 1990-06-04
JP2006220507A (ja) * 2005-02-09 2006-08-24 Denso Corp 荷重検出装置
JP2008232886A (ja) * 2007-03-22 2008-10-02 Epson Toyocom Corp 圧力センサ
US20090308168A1 (en) * 2008-06-11 2009-12-17 Epson Toyocom Corporation Diaphragm for pressure sensor and pressure sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984445U (ja) * 1983-08-31 1984-06-07 明星電気株式会社 水晶振動子を用いた力センサ
JPH0272947U (enExample) * 1988-11-25 1990-06-04
JP2006220507A (ja) * 2005-02-09 2006-08-24 Denso Corp 荷重検出装置
JP2008232886A (ja) * 2007-03-22 2008-10-02 Epson Toyocom Corp 圧力センサ
US20090308168A1 (en) * 2008-06-11 2009-12-17 Epson Toyocom Corporation Diaphragm for pressure sensor and pressure sensor
JP2010019828A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー用ダイアフラムおよび圧力センサー

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101760561B1 (ko) * 2015-04-06 2017-07-24 (주)센서시스템기술 압력 변환기
WO2025076784A1 (zh) * 2023-10-12 2025-04-17 瑞声光电科技(常州)有限公司 振动马达

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