JP2011140101A5 - - Google Patents
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- Publication number
- JP2011140101A5 JP2011140101A5 JP2010002884A JP2010002884A JP2011140101A5 JP 2011140101 A5 JP2011140101 A5 JP 2011140101A5 JP 2010002884 A JP2010002884 A JP 2010002884A JP 2010002884 A JP2010002884 A JP 2010002884A JP 2011140101 A5 JP2011140101 A5 JP 2011140101A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal material
- conductive metal
- resist layer
- sacrificial layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000007769 metal material Substances 0.000 claims 5
- 238000010030 laminating Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010002884A JP2011140101A (ja) | 2010-01-08 | 2010-01-08 | Ｍｅｍｓデバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010002884A JP2011140101A (ja) | 2010-01-08 | 2010-01-08 | Ｍｅｍｓデバイスの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011140101A JP2011140101A (ja) | 2011-07-21 |
| JP2011140101A5 true JP2011140101A5 (https=) | 2013-01-10 |
Family
ID=44456324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010002884A Withdrawn JP2011140101A (ja) | 2010-01-08 | 2010-01-08 | Ｍｅｍｓデバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011140101A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5477711B2 (ja) * | 2010-02-01 | 2014-04-23 | 日本電子材料株式会社 | Ｍｅｍｓデバイスの製造方法 |
| CN111983272B (zh) * | 2020-08-14 | 2021-02-12 | 强一半导体（苏州）有限公司 | 一种导引板mems探针结构制作方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3842318B2 (ja) * | 1994-10-27 | 2006-11-08 | Ｔｄｋ株式会社 | マイクロマシン部品の取り扱い方法 |
-
2010
- 2010-01-08 JP JP2010002884A patent/JP2011140101A/ja not_active Withdrawn
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