JP2011117936A - Testing device for tabular test object - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a test object from falling down on a contact. <P>SOLUTION: The testing device includes a panel receptacle having a rectangular panel receptacle surface for receiving a tabular test object, a probe unit with a probe block having a plurality of contacts to be depressed by an electrode on the test object, and a plurality of protective members located at the outside of the panel receptacle surface. A plurality of protective members are placed at intervals toward at least one side of the rectangular panel receptacle surface, and the top end of each protective member is located above the height position of each contact. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an apparatus for testing a flat inspection object such as a liquid crystal display panel.

  An apparatus for performing a lighting test of a display panel such as a liquid crystal display panel is generally arranged around an inspection stage that receives an object to be inspected or a panel receiver such as a work table, and a θ axis extending in three directions of XYZ and Z direction. There is a technique that includes a stage moving mechanism that is displaced and a probe unit that includes a plurality of probe blocks having a plurality of contacts that are in contact with electrodes of an object to be inspected (see Patent Documents 1, 2, 3, 4, etc.).

  In any of these prior arts, the inspection object is transferred from above to the panel receiver by the transport device with the probe block retracted to the side of the panel receiving surface. During the test of the object to be inspected, the probe block is moved in the X direction or the Y direction so that the needle tip of the contact is in contact with the electrode of the object to be inspected, and the probe block and the panel receiver are moved in the direction of mutual contact. The

  In the test apparatus as described above, the object to be inspected may drop from the conveying apparatus when the object to be inspected is transferred to and transported from the panel receiver. In such a case, when the object to be inspected collides with the probe block, particularly the contact, the contact is damaged and becomes unusable.

JP 2006-119031 A JP 2006-138634 A JP 2007-40747 A

  An object of the present invention is to prevent an object to be inspected from falling on a contact.

  An inspection apparatus according to the present invention includes a panel receiver having a rectangular panel receiving surface for receiving a flat plate-shaped object to be inspected, and a probe unit including a probe block having a plurality of contacts pressed against the electrodes of the object to be inspected, A protection device for protecting the contact from an object to be inspected delivered to the panel receiving surface, the protection device comprising a plurality of protection members positioned outside the panel receiving surface. The plurality of protection members are spaced in the direction of at least one side of the rectangle, and the upper end of each protection member is positioned above the height position of the contact.

  The protection device may include an alignment device that jointly positions an object to be inspected received by the panel receiver with respect to the contact. The alignment apparatus includes a pair of first pusher mechanisms and a pair of first pushers arranged at intervals corresponding to one and the other of the pair of opposing sides of the rectangle, respectively, in the longitudinal direction of the corresponding sides. One positioning mechanism and a second pusher mechanism and a second positioning mechanism arranged at locations corresponding to one and the other of the pair of opposite sides of the rectangle may be included. The pusher mechanism or the positioning mechanism may act as the protective member.

  Each of the pusher mechanism and the positioning mechanism is a pressing member that is placed at the same height as the object to be inspected received by the panel receiver, and a supporting member that supports the pressing member, the supporting member having the upper end. A member and a drive mechanism that moves the support member to move the pressing member forward and backward with respect to the object to be inspected can be provided.

  The driving mechanism of each positioning mechanism can maintain the position of the pressing member in the advancing / retreating direction of the corresponding pressing member so as to be releasable against the pressing force of the opposing pusher mechanism.

  Each protection member may include a base portion attached to the panel receiver and an extending portion extending upward from the base portion.

  The plurality of protection members may be arranged on the panel receiver so as to be selectively attachable to appropriate locations of a plurality of locations spaced in the direction in which the protection members are separated.

  The panel receiver may further include an elongated member extending in a direction in which the plurality of protection members are separated from each other. The elongate member is a plurality of screw holes into which screw members for removably screwing the plurality of protective members are selectively screwed, and the plurality of screw holes spaced in the separating direction are provided. Can have.

  The probe block can be retracted to a position where the needle tip of the contact is located on a side opposite to the panel receiving surface with respect to the position of the protection member in a direction intersecting the side direction. Can be arranged.

  The panel receiver may include four side members that jointly form a rectangular opening, and may include four side members that jointly form the panel receiving surface. It may correspond to one side, and each probe unit and each protection member may be arranged on the same side member.

  The test apparatus according to the present invention can further include a table base. Each side member may include a moving piece disposed on the table base so as to be movable in the X direction and the Y direction so that the size of the opening can be changed. The moving piece is connected to the table base and the table base. A first piece disposed in parallel; and a second piece having a top surface that forms a part of the panel receiving surface and rises upward from the panel receiving surface side of the first piece. The probe unit and the protection member may be disposed on the first piece.

  The pair of opposing moving pieces and the other pair of opposing moving pieces may extend in parallel to the X direction and the Y direction with an interval in the Y direction and the X direction, respectively. The opening may be formed jointly, the panel receiving surface may be formed jointly, and the opening may be variably arranged on the table base. May be combined without being prevented from independently moving in the Y direction or the X direction.

  The said 1st and 2nd piece part of each moving piece can contain a plate-shaped part long in the moving direction.

  The test apparatus according to the present invention may further include an alignment apparatus that jointly positions an object to be inspected received by the panel receiver with respect to the contact. The alignment apparatus may include at least one pusher mechanism or positioning mechanism disposed at a location corresponding to each side of the rectangle. Each of the pusher mechanism and the positioning mechanism is located at the same height as the object to be inspected received by the panel receiver and is positioned outside the panel receiving surface. And a drive mechanism for advancing and retracting the body. The upper end of each protection member may be located above the height position of the pressing member.

  The alignment device includes a pair of first pusher mechanisms and a pair of parts arranged at intervals in the longitudinal direction of the corresponding sides at locations corresponding to one and the other of the pair of opposing sides of the rectangle. And a second pusher mechanism and a second positioning mechanism respectively disposed at locations corresponding to one and the other of the pair of opposite sides of the rectangle. . The driving mechanism of each positioning mechanism can maintain the position of the pressing member in the advancing / retreating direction of the corresponding pressing member so as to be releasable against the pressing force of the opposing pusher mechanism.

  In the present invention, the plurality of protective members are spaced in the direction of at least one side of the rectangle, and the upper ends of the respective protective members are positioned above the height position of the contactor. Even if the body falls in a state where it collides with the contact, the object to be inspected is received by the protective member. As a result, the test object is prevented from dropping onto the contact, and damage to the contact is prevented.

  The protection device has a pair of first pusher mechanisms and a pair of first firsts arranged at intervals corresponding to one and the other of the pair of opposite sides of the rectangle, respectively, in the longitudinal direction of the corresponding sides. If the pusher mechanism or the positioning mechanism acts as a protective member including the alignment device including the positioning mechanism, the number of parts is reduced as compared with the case where the protective member is separately provided as a member other than the pusher mechanism or the positioning mechanism.

  In an inspection apparatus that includes an alignment device that jointly positions an object to be inspected received by a panel receiver with respect to the contact, and each protection member is provided separately from the alignment device, the upper end of each protection member is If the object to be inspected falls above the height position of the pressing member, it comes into contact with the protective member before contacting the alignment device. As a result, the test subject is prevented from dropping onto the pressing member.

The perspective view which shows one Example of the testing apparatus which concerns on this invention. The top view of the testing apparatus shown in FIG. Sectional drawing obtained along the 3-3 line in FIG. FIG. 2 is a perspective view of the test apparatus shown in FIG. 1 with the platform and table unit removed. FIG. 2 is a partial cross-sectional view of the test apparatus shown in FIG. 1 with the platform and table unit removed. The perspective view which shows the combined state of a panel receiver, an alignment apparatus, and a protection member. The perspective view which decomposes | disassembles and shows a panel receiver and the table base which receives this, in order to demonstrate one Example of a coupling device. Plan view of FIG. Sectional drawing obtained along the 9-9 line in FIG. Sectional drawing obtained along the 10-10 line in FIG. It is a figure explaining the displacement state of an alignment apparatus and a probe unit, Comprising: (A) shows the state which delivers a to-be-inspected object to a panel receptacle, (B) shows the state which clamped the to-be-inspected object with the alignment apparatus. , (C) shows a state in which the object to be inspected is aligned. It is a figure for demonstrating positioning by the test apparatus shown in FIG. 1, Comprising: The figure explaining the state which rotates a to-be-inspected object angularly around the (theta) axis line. FIG. 5 is a perspective view showing a second embodiment of the test apparatus according to the present invention, in which a platform, a table base, and a coupling mechanism are omitted. FIG. 14 is a perspective view showing a panel receiver, a probe unit, a unit support mechanism, and an alignment device in the test apparatus shown in FIG. 13. FIG. 15 is a cross-sectional view taken along line 15-15 in FIG. The enlarged view for demonstrating the height positional relationship of a panel receiver, a press member, and a contact in the test apparatus shown in FIG.

  [Explanation of terms]

  In the present invention, in FIG. 2, the vertical direction is referred to as the Z direction or the vertical direction, the horizontal direction is referred to as the X direction or the horizontal direction, and the paper back direction is referred to as the Y direction or the front-back direction. However, these directions differ depending on the posture of the test object at the time of the test.

  Therefore, the test apparatus according to the present invention may be used in any state such as a state in which the XY plane defined by the X direction and the Y direction is a horizontal plane, and a state in which the XY plane is inclined with respect to the horizontal plane.

  [Example]

  1 to 4, the test apparatus 10 uses a display panel such as a liquid crystal display panel in which liquid crystal is sealed as a flat test object 12 (see FIGS. 3, 5, 11, 12, etc.). The device under test 12 is connected to a predetermined electric circuit and used as an apparatus for performing an electrical test such as a lighting test.

  The device under test 12 has a rectangular shape, and includes a plurality of electrodes on each of the edges corresponding to some sides of the rectangle. Hereinafter, in order to facilitate understanding, the inspected object 12 will be described as having a rectangular shape that is long in the X direction. In the example shown in the drawing, a plurality of electrodes are provided at intervals in the longitudinal direction of the corresponding edge portion at each of two edge portions corresponding to two adjacent sides of the rectangle.

  [Test equipment]

  The test apparatus 10 includes an instrument base, that is, a platform 14, a table base 16 that is spaced above the platform 14, and a panel receiver 18 that is disposed above the table base 16 and receives the object 12 to be inspected. A plurality of probe units 20 arranged on the upper side of the panel receiver 16, a unit support mechanism 22 for supporting each probe unit 20 on the panel receiver 16, and a mark portion of the device under test 12 received by the panel receiver 18 from above. A plurality of camera devices 24 attached to the probe unit 20 so as to photograph, an alignment device described later for positioning the object 12 received by the panel receiver 18 with respect to the panel receiver 18, and the panel receiver 18 And a plurality of protective members 26 disposed on the surface.

  In the illustrated example, the probe unit 20 is disposed at each of the locations corresponding to two adjacent sides of the rectangle, and a plurality of protection members 26 are disposed at each of the locations where the probe unit 20 is disposed. Yes. However, the arrangement location of the probe unit 20 and the protection member 26 is determined according to the arrangement position of the electrode of the device under test 12.

  In other words, the object to be inspected 12 does not have the object to be inspected as described above, but includes a plurality of electrodes arranged at locations corresponding to one side of the rectangle, and two opposite sides of the rectangle. There are those arranged at each of the locations, those arranged at each of the locations corresponding to the three sides of the rectangle, and the like. Therefore, the probe unit 20 is disposed at the position where the electrode is disposed, and the protective member 26 for protecting the contact is disposed at the position where the probe unit is disposed.

  In the illustrated example, the unit support mechanism 22 is disposed at each of the locations corresponding to the sides of the rectangle. However, the unit support mechanism 22 may not be disposed at a location where the probe unit 20 is not disposed.

  In the example shown in the drawing, two camera devices 24 are further arranged at positions corresponding to one of two adjacent sides of the rectangle with a space in the longitudinal direction of the sides, and one camera device 24 is It arrange | positions in the location corresponding to the other of two adjacent sides. However, the two camera devices 24 may be arranged at intervals in the longitudinal direction of the probe unit 20 in each of the probe units 20.

  The platform 14 is supported by a frame (not shown) of the test apparatus 10. However, the platform 14 may be part of the frame. The platform 14 and the table base 16 have a rectangular plate shape, and are spaced apart in the Z (vertical) direction so that the table base 16 is positioned above the platform 14.

  The table base 16 is supported on the platform 14 by a plurality of support columns 30 (see FIG. 4), and has a rectangular opening 16a (see FIG. 3) larger than the device under test 12 in the central region. A known backlight unit 32 (see FIG. 4) is disposed between the platform 14 and the table base 16. The backlight unit 32 is a known device that irradiates light to the back surface of the inspection object 12 through openings such as the table base 16 and the panel receiver 18.

  [Panel receptacle]

  As shown in detail in FIG. 7, the panel receiver 18 includes four piece members, that is, moving pieces 34 combined in a cross beam shape or a saddle shape. Each moving piece 34 includes a plate-shaped first piece 34a having a rectangular shape with a small width dimension, and a plate-shaped second piece 34b having a rectangular shape with a small width dimension. It is parallel to the table base 16 and is joined in an L shape so that the width direction of the second piece 34b is the vertical direction.

  One opposing moving piece 34 extends in parallel in the X direction with a spacing in the Y direction in the XY plane, and the other moving piece 34 facing in the Y direction has a spacing in the X direction in the XY plane. It extends in parallel. These moving pieces 34 are coupled to the table base 16 by a coupling mechanism 40 so as to be movable in a two-dimensional manner (in the X direction and the Y direction) in a plane (XY plane) parallel to the table base 16.

  The four moving pieces 34 jointly form a rectangular opening 36 similar to the device under test 12, and a rectangular panel receiving surface 38 is formed around the opening 36 and the top surface of the second piece 34 b. Is formed. The opening 36 is opposed to the opening 16 a of the table base 16 so as to allow the light from the backlight unit 32 to travel to the device under test 12 received by the panel receiving surface 38.

  The four moving pieces 34 are coupled to the table base 16 so that the size of the opening 36 can be changed (that is, two-dimensionally movable in the XY plane).

  Each of the two adjacent moving pieces 34 can be moved integrally in the X direction or the Y direction (longitudinal direction of the moving piece 34), and can be moved individually in the Y direction or the X direction. One moving portion 34 in one width direction (the end portion on the opening 36 side) and one end portion in the other longitudinal direction of the two adjacent moving pieces 34 are coupled by appropriate coupling means. . As a result, the adjacent moving pieces 34 are joined without preventing the other moving piece 34 from moving independently in the Y direction or the X direction.

  As such a coupling means, for example, a so-called dovetail that extends in the X direction (or Y direction) and opens to the opening 36 side, and has a truncated triangular cross-sectional shape, and is slidably fitted in the dovetail. A combination with a so-called ant pattern having a combined triangular cross-sectional shape can be used.

  The dovetail groove is formed at the end edge of the adjacent two moving pieces 34 on the side of the opening 36 in the width direction, and the dovetail pattern is formed at one end edge in the other longitudinal direction of the two adjacent moving pieces 34. The

  However, instead of the combination of the dovetail groove and the dovetail pattern, other coupling means such as a combination of a guide rail and a guide that is slidably and non-detachably coupled to the guide rail may be used.

  Although not shown, each moving piece 34 is provided with a suction device that sucks the device under test 12 to the panel receiving surface 38 and a levitation device that floats the device under test 12 from the panel receiving surface 38.

  As the suction device, a vacuum suction device using a plurality of grooves or holes opened on the panel receiving surface 38 and connected to a reduced pressure source such as a vacuum device can be used.

  The levitation device floats the device under test 12 from the panel receiving surface 38 when the device under test 12 is displaced by the alignment device described above, thereby facilitating movement of the device under test 12 during alignment.

  As such a levitation device, a ball partially disposed on the cylindrical member so as to be able to project and retract with respect to the panel receiving surface 38, and a spring that urges a part of the ball to be exposed to the panel receiving surface 38 were used. A mechanical levitation device, a pneumatic levitation device that levitates the inspection object 12 from the panel receiving surface 38 with compressed air, or the like can be used.

  The inspected object 12 is vacuum-adsorbed to the panel receiving surface 38 by the adsorbing device during the electrical test and is reliably maintained, and the adsorbing is released when the inspected object 12 is delivered to the panel receiving surface 38. At the time of alignment, the suction is released and the surface is slightly lifted from the panel receiving surface 38 by the floating device.

  [Coupling mechanism]

  As shown in FIGS. 1, 2, 3, 7, 8, 9, 10 and the like, the coupling mechanism 40 has a table for coupling the four movable pieces 34 to the table base 16 so as to be movable in the X direction and the Y direction. It is arranged between the base 16 and the panel receiver 18.

  In the illustrated example, the coupling mechanism 40 includes a pair of strip-like first sliders 42 that extend in parallel to the Y direction with an interval in the X direction and are arranged on the table base 16 so as to be movable in the X direction. A pair of strip-like second sliders 44 that extend in parallel to the X direction with an interval in the Y direction above one slider 42 and are arranged on the table base 16 so as to be movable in the Y direction, and two sets of couplings The members 46a and 46b, a pair of guides 47a and 47b provided on the lower surface of the first member 34a of each moving piece 34 extending in the X direction at intervals in the longitudinal direction, and each moving piece 34 extending in the X direction. A pair of rails 49a provided on the lower surface of the first member 34a with a gap in the Y direction, and a lower surface of the first member 34a of each moving piece 34 extending in the YX direction with a gap in the Y direction. A pair of rails 49b provided That.

  Each of the sliders 42 and 44 is coupled to a pair of rails 48 and 48 provided on the upper surface of the table base 16 at one end and the other end of each slider so as to be movable in the X direction or the Y direction.

  Each coupling member 46a is coupled to a pair of rails 50 provided on the corresponding first slider 42 and extending in the Y direction so as to be movable in the Y direction, and rails provided on the moving piece 34 extending in the X direction. A guide 51a fitted to 49a so as to be movable in the X direction is provided at the top (see FIG. 9).

  Each coupling member 46b is coupled to a pair of rails 50 provided on the corresponding first slider 42 and extending in the Y direction so as to be movable in the Y direction, and rails provided on the moving piece 34 extending in the Y direction. A guide 51b fitted to 49b so as to be movable in the Y direction is provided at the top (see FIG. 10).

  A pair of guides 47 a and 47 b provided on each moving piece 34 extending in the X direction is fitted to a rail 50 provided on the corresponding second slider 44.

  As a result, each moving piece 34 is supported by being coupled to the table base 16 so as to be movable two-dimensionally in the XY plane.

  Each of the first and second sliders 42 and 44 is moved in the X direction (or Y direction) by the moving piece moving mechanism 52 and is releasably maintained at an appropriate position in such a moving direction.

  In the illustrated example, each moving piece moving mechanism 52 includes a motor installed on the upper surface of the table base 16 and a ball connected to the motor so as to extend in the X direction (or Y direction) and rotated by the motor. A mechanism using a screw and a nut screwed to the ball screw and connected to the slider 42 or 44 by a connector is used. The motor is a position-controllable motor so as to maintain the rotational angle position so as to be releasable like a pulse motor.

  For example, when each slider 42 extending in the Y direction is moved in the X direction by the corresponding moving piece moving mechanism 52, the moving piece 34 extending in the Y direction connected to the slider 44 through the coupling member 46 b becomes the rail 49 b and the guide. The moving piece 34 connected to the moving piece 34 and extending in the X direction is moved in the X direction by pushing and pulling.

  Further, when each slider 44 extending in the X direction is moved in the Y direction by the corresponding moving piece moving mechanism 52, the moving piece 34 connected to the slider 44 via the coupling member 46a and extending in the X direction becomes the rail 49a and the guide. The moving piece 34 connected to the moving piece 34 and extending in the Y direction is moved in the Y direction by pushing and pulling.

  For this reason, the four moving pieces 34 are moved two-dimensionally so that the size of the opening 36 changes. As a result, the size of the opening 36 and thus the panel receiving surface 38 can be changed according to the size of the device under test 12 to be tested. This operation is performed prior to the lighting test of the inspection object 12.

  [Alignment device]

  Referring to FIGS. 1 to 3, the alignment device described above is disposed on one and the other of a pair of opposing sides (X sides) of the panel receiving surface 38 at intervals in the longitudinal direction of the corresponding sides. A pair of first pusher mechanisms 60 and a pair of first positioning mechanisms 62 and a second pair of sides (Y sides) opposite to each other of the panel receiving surface 38 are respectively disposed on the second and second sides. A pusher mechanism 64 and a second positioning mechanism 66 are included.

  Each of the pusher mechanisms 60 and 64 advances and retracts the device under test 12 with respect to the positioning mechanism 62 or 66 disposed on the side opposite to the side on which the pusher mechanism 60 or 64 is disposed. On the other hand, each of the positioning mechanisms 62 and 66 determines the reference position of the device under test 12 in the X direction (or Y direction).

  Each of the pusher mechanisms 60 and 64 and the positioning mechanisms 62 and 66 is located at the same height as the panel receiving surface 38 as shown in FIG. 5 and FIG. A pressing member 70 positioned outside the panel receiving surface 38, a columnar moving body 72 that supports the pressing member 70, and a driving mechanism 74 that moves the moving body 72 and the pressing member 70 forward and backward with respect to the panel receiving surface 38. And a support plate 76 for supporting them.

  In the illustrated example, the moving body 72 has a columnar shape extending in the vertical direction. The pressing member 70 is a roller attached to the upper end portion of the moving body 72 by an attachment pin 78 so as to be rotatable around an axis extending in the Z direction, but may be another member.

  The support plate 76 can be moved in the longitudinal direction (X direction or Y direction) of the first piece 34 a by a pair of rails 80 provided on the upper surface of the first piece 34 a of the movable piece 34 of the panel receiver 18. It is assembled. Both rails 80 extend in parallel to the longitudinal direction (X direction or Y direction) at an interval in the width direction (Y direction or X direction) of the first piece 34a.

  The support plate 76 is assembled to one rail 80 by a guide 82, and is placed on the upper surface of the other rail 80. For this reason, one rail 80 acts as a guide rail. The other rail 80 is provided with female screw holes 84 opened upward at each of a plurality of positions spaced in the longitudinal direction (X direction or Y direction) of the rail 80 (see FIG. 6).

  As shown in FIG. 6, the other rail 80 is provided with a belt-like stopper 88 having a long hole 86 extending in the X direction (or Y direction) and is relatively immovable relative to the support plate 76. Is provided. The fastener 88 is removably attached to the other rail 80 by a bolt 90 inserted into the elongated hole 86 from above and screwed into the female screw hole 104. Thereby, each support plate 76 is releasably fixed at a predetermined position in the X direction (or Y direction).

  As a result, each of the pusher mechanisms 60 and 64 and the positioning mechanisms 62 and 66 is releasably fixed at a predetermined position in the X direction (or Y direction). For this reason, the other rail 80 acts as a fixed rail for releasably fixing the positions of the pusher mechanism and the positioning mechanism in the X direction (or Y direction).

  However, the positions of the pusher mechanism and the positioning mechanism in the X direction (or Y direction) can be changed by changing the positions of the female screw hole 84 into which the bolt 90 is screwed and the stopper 88 with respect to the bolt 90. The size can be selected depending on the size.

  Each drive mechanism 74 includes a pair of rails 92 extending in the width direction (Y direction or X direction) of the first piece portion 34a with an interval in the longitudinal direction (X direction or Y direction) of the first piece portion 34a. The slider 94 fitted to each rail 92 so as to be movable in the width direction of the first piece 34a, the connecting plate 96 connecting the sliders 94, and the pressing member 70 are moved in the width direction of the support plate 76. And a drive source 98.

  The slider 94 is attached to the lower surface of the connecting plate 96. The drive source 98 is shown floating in the air in FIGS. 5 and 6, but is actually supported by the support plate 76 so as not to move. The moving body 72 is mounted on the connecting plate 96 in an upright state. However, the moving body 72 and the connecting plate 96 may be integrated.

  Each drive source 98 of the pusher mechanisms 60 and 64 is a fluid pressure cylinder mechanism such as a pneumatic cylinder or a hydraulic cylinder. In the cylinder mechanism, the cylinder is attached to the support plate 76, and the piston rod is connected to the moving body 72. The piston rod may be connected to the slider 94.

  Each drive mechanism 74 of the pusher mechanisms 60 and 64 moves the moving body 72 forward and backward with respect to the second piece 34 b by the drive source 98, so that the pressing member 70 is moved relative to the panel receiving surface 38, and consequently the object 12 to be inspected. Advance and retreat.

  Each drive source 98 of the positioning mechanisms 62 and 66 is a motor capable of controlling the rotational angle position, such as a pulse motor. For this reason, each drive mechanism 74 of the positioning mechanisms 62 and 66 further extends in the width direction of the support plate 76 from the corresponding drive source 98 and is rotated by the corresponding drive source 98 (not shown). And a nut (not shown) screwed into the ball screw. The nut is attached to the moving body 72 (or the connecting plate 96).

  The drive mechanisms 74 of the positioning mechanisms 62 and 66 rotate the ball screw by the drive source 98 to advance and retract the nut with respect to the second piece 34b, thereby causing the pressing member 70 to move to the panel receiving surface 38 and thus to be covered. The test object 12 is advanced and retracted. However, the position of the pressing member 70 in the advancing / retreating direction of the corresponding pressing member 70 is maintained so that it can be released against the pressing force of the opposing pusher mechanism 60 or 64.

  As shown in FIG. 12, each drive source (cylinder mechanism) 98 of the pusher mechanisms 60 and 64 has two pressure fluid sources 100 storing pressure fluids such as compressed air and oil having different pressures. , 102 are selectively connected by a valve device 104.

  The valve device 104 includes a plurality of valves that are selectively driven by a valve driver 106. Each valve selectively connects one of the drive sources 98 of the pusher mechanisms 60, 64 to one of the pressure fluid sources 100 and 102. As a result, the piston rod of the cylinder mechanism described above is advanced and retracted with respect to the cylinder, and the pressing member 70 is advanced and retracted with respect to the panel receiving surface 38 and, consequently, the device under test 12.

  Each drive source (position-controllable motor) 74 of the positioning mechanisms 62 and 66 is driven by a motor driver 108 and determines the reference position of the device under test 12 in the X direction (or Y direction) by the corresponding pressing member 70. To do. Each reference position is determined in advance according to the type, size, and the like of the inspection object 12.

  The alignment apparatus having the above-described structure moves the pressing member 70 of the X-direction positioning mechanism 66 forward and backward in the X direction to maintain the reference position of the inspection object 12 in the X direction, and for the X direction. The object to be inspected 12 is pressed against the pressing member 70 of the positioning mechanism 66 for the X direction by the pressing member 70 of the pusher mechanism 64. Thereby, the inspection object 12 is aligned in the X direction.

  The alignment of the inspection object 12 in the Y direction is performed by operating the Y-direction positioning mechanisms 62 and 62 and the Y-direction pusher mechanisms 60 and 60 as described above.

  For example, as shown in FIG. 12, the alignment of the test object 12 around the θ axis extending in the Z direction is performed by using the Y-direction positioning mechanisms 62 and 66 and the pressing members 70 of the Y-direction pusher mechanisms 60 and 64, respectively. This can be done by moving in the X and Y directions.

  During the alignment as described above, the drive source of each pusher mechanism is connected to the pressure fluid source 100 having a low pressure. Thereby, the device under test 12 is sandwiched by the pressing member 70 with a weak force. As a result, the impact acting on the inspection object 12 when the inspection object 12 collides with the pressing member 70 is small, and the inspection object 12 is prevented from being damaged due to the impact.

  During the alignment, the inspection object 12 is levitated from the panel receiving surface 38 by the levitation device described above. For this reason, the to-be-inspected object 12 moves smoothly at the time of alignment, and exact alignment is performed.

  As described above, at the time of alignment, the pressing member 70 of each positioning mechanism determines the reference position of the object 12 to be inspected. Therefore, the pressing member 70 of each positioning mechanism is difficult to elastically deform at least in the moving direction or It is made of a material that does not, or does not wear easily, such as a hard resin.

  Thereby, even if the to-be-inspected object 12 is pressed by the pressing member 70 of the pusher mechanism, the pressing member 70 of the positioning mechanism maintains the reference position together with the use of a position-controllable motor as a driving source. Further, since the rotation amount of the motor as the drive source can be determined without considering the elastic deformation of the pressing member 70, the position control of the motor is facilitated.

  However, when the amount of rotation of the motor as the drive source is determined in consideration of the elastic deformation of the pressing member 70, the pressing member 70 of the positioning mechanism may be made of an elastically deformable material.

  On the other hand, the pressing member 70 of the pusher mechanism can be made of a material such as a resin having a height that does not damage the device under test 12. Therefore, the pressing member 70 of the pusher mechanism may be either a material that does not elastically deform or a material that elastically deforms.

  When the alignment is completed, the driving source of each pusher mechanism is connected to the pressurized fluid source 102 having a high pressure. Thereby, the device under test 12 is sandwiched by the pressing member 70 with a strong force. The inspected body 12 is maintained in a state of being strongly sandwiched by the pressing member 70 until the lighting test is completed.

  [Probe unit]

  As shown in FIG. 5, each probe unit 20 includes a plate-like support base 110 that extends along a rectangular side (in the X direction or the Y direction) and is supported by a unit support mechanism 22, and the longitudinal length of the support base 110. A plurality of support blocks 112 attached to the support base 110 at intervals in the direction, a movement block 114 supported by each support block 112 so as to be movable in the Z direction, and a probe block 116 attached to each movement block 114 Including.

  The support base 110 is detachably attached to the upper surface of the unit support mechanism 22 by a plurality of screw members (not shown). Each support block 112 has a protruding portion 112a that protrudes from the upper end portion thereof to the panel receiving surface 38 side.

  Each moving block 114 is provided on the support block 112 by a rail 120 provided on the front side (opening 36 side) of the support base 110 and extending in the vertical direction, and a guide 122 coupled to be movable in the vertical direction of the rail 120. The position in the vertical direction can be adjusted by an adjustment screw 124 that passes through the protruding portion 112a of the support block 112 in the vertical direction and is screwed to the moving block 114.

  Each probe block 116 is a known one having a plurality of contacts 118 aligned at intervals in the X direction (or Y direction), and the tips of the contacts 118 are directed to the panel receiver 18. It is supported by the moving block 114.

  [Unit support mechanism]

  As shown in FIG. 5, the unit support mechanism 22 includes a plate-like moving body receiver 130 disposed on the first piece 34 a of the panel receiver 18 and extending in the longitudinal direction of the first piece 34 a, and a moving body receiver. 130, a second moving body 134 coupled to the first moving body 132 so as to be movable in a direction inclined with respect to the panel receiving surface 38, and a first moving body 132. A top plate 136 attached to the upper end of the first moving body, a probe moving mechanism 138 that moves the first moving body 132 in the width direction of the first piece 34a, and the most advanced position of the second moving body 134 (of the opening 36). And a stopper 140 that regulates the position on the side.

  The movable body receiver 130 is provided in the first piece 34 a so as to extend in parallel with the longitudinal direction (X direction or Y direction) of the movable body receiver 130 with an interval in the width direction of the movable body receiver 130. A pair of rails 142 and a pair of rails 142 and a guide 144 supported by each rail 142 so as to be movable in the longitudinal direction and assembled to the lower side of the movable body receiver 130 are coupled onto the first piece 34a. ing. For this reason, the movable body receiver 130 is movable in the longitudinal direction of the first piece 34a.

  The first moving body 132 is provided in the moving body receiver 130 so as to extend in parallel to the width direction of the moving body receiver 130 with an interval in the longitudinal direction of the moving body receiver 130 (first piece 34a). A plurality of rails 146 and guides 148 supported on the rails 146 so as to be movable in the longitudinal direction of the rails 146 and assembled to the lower side of the first moving body 132 are coupled onto the moving body receiver 130. Yes. Therefore, the first moving body 132 is movable in the width direction of the moving body receiver 130 (or the first piece portion 34a).

  The first and second moving bodies 132 and 134 are obliquely coupled to the panel receiving surface 38 so that the second moving body 134 is located on the panel receiving surface 38 side. For this reason, the 1st and 2nd moving bodies 132 and 134 have a diagonally downward surface and a diagonally upward surface, respectively. The second moving body 134 extends in the longitudinal direction of the first piece 34 a and extends obliquely so that the upper part is closer to the panel receiving surface 38.

  The second moving body 134 is also provided on the obliquely downward surface of the first moving body 132, and is spaced in the longitudinal direction of the first piece 34a in the width direction of the first piece 34a. Coupled to the first moving body 132 by a pair of rails 152 extending in parallel and a guide 154 coupled to each rail 152 so as to be movable in the longitudinal direction and provided on the obliquely downward surface of the second moving body 134. Has been. Therefore, the second moving body 134 can move in an oblique direction with respect to the first moving body 132.

  The top plate 136 has a rectangular shape that is long in the longitudinal direction of the first piece 34 a, and is attached to the top of the second moving body 134. The probe unit 20 is mounted on the top plate 136 and supported by the second moving body 134.

  Each probe moving mechanism 138 includes a motor 156 installed on the upper surface of the moving body receiver 130, a ball screw 158 connected to the motor 156 so as to extend in the X direction (or Y direction), and rotated by the motor 156. A mechanism using a nut 160 screwed to the ball screw 158 and attached to the second moving body 134 is used.

  The motor 156 is a motor whose position can be controlled so as to maintain the rotational angle position so as to be releasable like a pulse motor, and is supported by the movable body receiver 130 via a bracket 164. The ball screw 158 is connected to the rotating shaft of the motor 156 and supported by the moving body receiver 130 via another bracket 166.

  The first and second moving bodies 132 and 134 also have a hole 168 formed in the first moving body 132 so as to extend obliquely upward and open to the upper end, and a rod 170 inserted into the hole 168 from above. Thus, the relative displacement in the direction perpendicular to the obliquely downward surface and the obliquely upward surface and the relative displacement in the longitudinal direction of the first and second moving bodies 132 and 154 are prevented.

  The first and second moving bodies 132 and 134 are separated from each other in the longitudinal direction of the rod 170 by a compression coil spring 172 disposed around the rod 170. It is relatively energized. Actually, since the first moving body 132 is prevented from being displaced in the longitudinal direction of the rod 170 by the rail 146 and the guide 148, the second moving body 134 is biased obliquely upward by the spring 172. .

  The unit support mechanism 22 also includes a stopper 174 provided on the first moving body 132 so as to regulate the highest position of the second moving body 134. The stoppers 174 and 193 are arranged so that the guide 154 comes into contact with the stopper 174 and 193 when the second moving body 134 is raised, and the first moving body 132 is prevented from being lifted. It is provided on the upward surface.

  In the unit support mechanism 22 as described above, when the first moving body 132 is moved toward the device under test 12 by the normal rotation of the motor 156, the second moving body 134 is also moved in the same direction. At this time, a pair of displacement generating mechanisms 176 for displacing the second moving body 134 obliquely downward against the urging force of the spring 172 is provided on each second moving mechanism 154 in which the probe unit 20 is disposed. It is provided at intervals in the direction.

  Each displacement generating mechanism 176 includes a U-shaped bracket 178 provided on a diagonally downward surface of the second moving body 134 on the inspection object 12 side, and an axis extending in the longitudinal direction of the second moving body 134. And a roller 180 attached to the bracket 178 so as to be rotatable and abuttable against the stopper 140.

  In the unit support mechanism 22, when the first and second moving bodies 132 and 154 are moved toward the device under test 12 by the motor 156, the roller 180 contacts the stopper 140.

  When the first and second moving bodies 132 and 134 are further moved toward the device under test 12 by the motor 156, the second moving body 134 is prevented from advancing by the stopper 140. Thereby, a displacement force that displaces the second moving body 134 obliquely downward is generated in the fitting portion between the rail 152 and the guide 154.

  With such a displacement force, the second moving body 134 is moved downward as the first moving body 134 further advances. As a result, the probe unit 20 is moved downward, and the needle tip of the contact provided in the probe block 116 is pressed against the electrode of the device under test 12.

  At this time, the fact that the device under test 12 is sandwiched between the pressing members 70 with a strong force and the fact that the device under test 12 is attracted to the panel receiving surface 38 presses the needle tip of the contact against the electrode of the device under test 12. Even if it is done, displacement of the device under test 12 with respect to the panel receiver 18 and the probe unit 20 is reliably prevented.

  In the above state, when the motor 156 is reversely rotated, the first moving body 132 is moved backward with respect to the panel receiving surface 38 and the second moving body 134 with the roller 180 in contact with the stopper 140. During this time, the second moving body 134 is raised with respect to the first moving body 132 by the force of the spring 172, and the probe block 116 is separated upward from the device under test 12.

  When the motor 156 is further reversed, the first moving body 132 continues to move backward. However, the second moving body 134 stops rising when the guide 154 comes into contact with the stopper 174, and in this state, the second moving body 134 is moved back together with the first moving body 142 toward the retracted position with respect to the panel receiving surface 38. The

  As described above, the second moving body 134 and the probe block 116 are advanced and lowered by the normal rotation of the motor 156 with respect to the panel receiving surface 38 and the device under test 12, and can be released to the advanced and lowered positions. It is maintained and lifted and retracted by the reverse rotation of the motor 156, and is releasably maintained at the retracted position.

  In the state in which the second moving body 134 and thus the probe block 116 are retracted to the retracted position, the inspection object 12 is exchanged for the panel receiving surface 38. At this time, the fact that the object to be inspected 12 is levitated from the panel receiving surface 38 and the fact that the probe unit 20 is largely retracted from the panel receiving surface 38 is combined. Easy delivery.

  [Camera device]

  As shown in FIG. 5, each camera device 24 photographs an inverted L-shaped support block 182 supported by the support base 110 of the probe unit 20 and a mark portion (not shown) on the support block 182 from above. And a camera 184.

  The mark part is a mark itself provided on the object to be inspected 12, a needle tip of a specific contact, or the like. The camera 184 is an area sensor such as a video camera that takes an image of the vicinity of the mark portion of the inspection object 12 and generates an image signal, and a CCD area sensor can be used.

  An output signal of each camera 184 is subjected to image processing in a control device (not shown), and is used to obtain a positional deviation of the object to be inspected 12 with respect to the test apparatus 10, particularly the panel receiver 18 and the probe unit 20. The obtained positional deviation is used as a signal for driving the alignment device.

  [Moving piece adjustment device]

  As shown in FIGS. 1, 2, and 4, each moving piece 34 of the panel receiver 18 is moved in the X direction (or Y direction) by the moving piece adjusting device 186, and the position in the X direction (or Y direction) is set. Adjusted.

  Each moving piece adjusting device 186 includes, for example, a position-controllable motor disposed in the first piece portion 34a, a ball screw rotated by the motor, a nut screwed to the ball screw, and the nut. And a coupler coupled to the mobile receiver 130.

  In the above case, the nut is moved in the X direction (or Y direction) by forward and reverse rotation of the motor, and the movable body receiver 130 is moved in the same direction. As a result, the position of the moving piece 34 in the X direction (or Y direction) with respect to the moving body receiver 130 is adjusted and maintained so as to be releasable. Therefore, the needle tip of each contact and the object 12 to be inspected. It is possible to reliably contact the electrode.

  [Protective member]

  5 and 6, in order to arrange a plurality of protective members 26 on each moving piece 34 on which the probe unit 20 is arranged at intervals in the longitudinal direction of the moving piece, the test apparatus 10 includes a probe unit. A rail 190 is fixed to each moving piece 34 on which 20 is arranged.

  Each rail 190 is on the upper surface of the first piece 34a of the corresponding moving piece 34 and extends on the second piece 34b side in the longitudinal direction of the second piece 34b. A plurality of screw holes 192 spaced in the longitudinal direction of the piece 34 are provided. Each screw hole 192 is open above the rail 190.

  Each protection bar, that is, the protection member 26 has an L-shaped shape that is long in the vertical direction, and has a base portion 26b having a slot 26a (see FIG. 6) long in the longitudinal direction of the rail 190, and a vertical direction from the base portion 26b And an extending portion 26c extending to the center. Each such protective member 26 is attached to the corresponding moving piece 34 by a bolt 194 threaded through the slot 26a from the top to the bottom and screwed into the screw hole 192 of the rail 190.

  The interval between the protection members 26 adjacent to each other in the longitudinal direction of the rail 190 is larger than the interval between the screw holes 192 adjacent to each other in the longitudinal direction of the rail 190, but is determined according to the type and size of the device under test 12. The length dimension of the extending portion 26 c of each protection member 26 has a value that is located above the height position of the probe block 116 and the pressing member 70 whose upper ends are in the retracted position.

  [Operation of inspection equipment]

  Delivery of the inspection object 12 to the panel receiver 18 of the inspection object 12 is performed from above the panel receiver 18 by a conveying device or manually.

  In the inspected object 12 that is not inspected, the other inspected object 12 does not exist in the panel receiver 18, and as shown in FIG. 11A, each pressing member 70 and each probe block 116 retract to the retracted position. In this state, it is passed to the panel receiver 18.

  Next, as shown in FIG. 11B, the uninspected object 12 is aligned as each pressing member 70 is advanced. During this time, each of the pusher mechanisms 60 and 64 is actuated by a low fluid pressure to prevent the object 12 to be inspected from being damaged.

  Next, as shown in FIG. 11C, each probe block 116 is advanced, and the needle point of each contact is moved above the electrode of the device under test 12. From this time, each of the pusher mechanisms 60 and 64 is operated by a high fluid pressure to prevent displacement of the device under test 12.

  Subsequently, each probe block 116 is lowered, and the tip of each contact is pressed against the electrode of the device under test 12. In this state, the test object 12 is energized, and a lighting test of the test object 12 is performed. During the lighting inspection, each of the pusher mechanisms 60 and 64 is operated by a high fluid pressure to prevent the inspection object 12 from being displaced.

  The lighting test may be a visual lighting test in which an operator visually checks the object 12 from above, or an automatic lighting test that uses an area sensor such as a video camera and performs image processing in a control device. May be.

  When the electrical test is completed, each pressing member 70 and each probe block 116 are retracted to the position shown in FIG. 11A, and the tested object 12 is lifted from the panel receiving surface 38 by the floating device. It is removed from the panel receiver 18 by a conveying device or manually.

  When the inspection object 12 is delivered to the panel receiver 18, the upper ends of the protection members 26 are positioned above the height positions of the pressing member 70 and the probe block 116 (contactor 118). Even if the test object 12 falls in a state of colliding with the contactor 118 or the pressing member 70, the inspection object 12 is received by the protection member 26. As a result, the test object 12 is prevented from dropping onto the probe block 116 (contactor 118) and the pressing member 70, and damage to the contactor 118 is prevented.

  Even if the probe block 116 is retracted to the retracted position, the inspection object 12 may fall so as to collide with the contactor 118 when the inspection object is delivered or conveyed. However, even in such a case, according to the inspection apparatus 10, since the inspected object 12 is received by the protection member 26, damage to the contact 118 is prevented.

  [Other embodiments]

  Referring to FIGS. 13 to 16, the test apparatus 200 uses a pusher mechanism or a positioning mechanism of a positioning device instead of the protective member 26 in the test apparatus 10 as a protective member that protects the contact 118 from the object to be inspected. ing. In the illustrated example, the first and second pusher mechanisms 62a and 66a located on the side where the probe unit 20 is disposed are used as protective members.

  Each of the first and second positioning mechanisms 62a and 66a has the same structure as the positioning mechanisms 62 and 66 described above except that the first and second positioning mechanisms 62a and 66a have an upper end that receives the object to be inspected. In the illustrated example, the upper end of the moving body 72 is made higher than the height position of the contactor 118 in the retracted position so that the object to be inspected is received at the upper end of the moving body 72 and the contactor 118 is protected. Yes.

  Also by the test apparatus 200, the inspected object to be dropped is received by the upper end of the positioning mechanism 62 or 66, so that the contact 118 is protected from the inspected object to be dropped, and damage is prevented.

  In the test apparatus 200, when the first or second pusher mechanism 64 or 68 is positioned on the arrangement side of the probe unit 20, the upper end of the moving body 72 is in the retracted position so that the pusher mechanism acts as a protective member. It is made higher than the height position of the contactor 118 in the. However, the height positions of all the pusher mechanisms and all the positioning mechanisms may be set to the above values, and all the pusher mechanisms and all the positioning mechanisms may act as protective members.

  Position control is possible for a motor as a drive source for a mechanism that relatively moves two members, such as the unit support mechanism 20, the coupling mechanism 40, the moving piece moving mechanism 52, the positioning mechanism 6, the backlight unit 326, and the probe moving mechanism 138. As long as it is, any of a rotary motor and a linear motor may be sufficient.

  Similarly, the drive source of each pusher mechanism may be any of a rotary motor and a linear motor that can change the rotational force or propulsive force in two stages within a range smaller than the motor of the positioning mechanism.

  However, since the volume of compressed air changes according to pressure, using a cylinder mechanism that uses compressed air as a drive source for the pusher mechanism greatly reduces the impact when the pressing member collides with the object to be inspected during alignment. Is done. Therefore, it is preferable to use a cylinder mechanism that uses compressed air.

  The panel receiver 18 may have a structure in which the size of the opening 36 cannot be changed, for example, a structure dedicated to the inspected object of the same size. Also, the structure of the positioning mechanism can be variously changed.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

DESCRIPTION OF SYMBOLS 10,200 Test apparatus 12 Inspected object 14 Platform 16 Table base 16a, 36 Opening 18 Panel receiver 20 Probe unit 22 Unit support mechanism 24 Camera apparatus 26 Protection member 32 Backlight unit 34 Moving piece 34a, 34b 1st and 2nd Single part 38 Panel receiving surface 40 Mechanism 42, 44 First and second slider 46 Coupling member 48, 50 Rail 52 Moving piece moving mechanism 60, 64 Pusher mechanism 62, 66 Positioning mechanism 62a, 66a Positioning mechanism 70 Pressing member 72 Movement Body 74 Drive mechanism 76 Support plate 78 Mounting pin 80 Rail 26a Slot 26b Base 26c Extension 118 Contact 192 Screw hole 194 Bolt

Claims (14)

A panel receiver having a rectangular panel receiving surface for receiving a plate-shaped object to be inspected, a probe unit having a probe block having a plurality of contacts pressed against the electrodes of the object to be inspected, and a receiver for the panel receiving surface A protection device for protecting the contact from a passed object to be inspected, comprising: a protection device comprising a plurality of protection members positioned outside the panel receiving surface;
The plurality of protective members are spaced in the direction of at least one side of the rectangle,
The upper end of each protection member is a testing apparatus for a flat specimen to be inspected, which is positioned above the height position of the contact. The protective device includes an alignment device that jointly positions an object to be inspected received by the panel receiver with respect to the contact;
The alignment apparatus includes a pair of first pusher mechanisms and a pair of first pushers arranged at intervals corresponding to one and the other of the pair of opposing sides of the rectangle, respectively, in the longitudinal direction of the corresponding sides. 1 positioning mechanism, and a second pusher mechanism and a second positioning mechanism respectively disposed at locations corresponding to one and the other of the pair of opposite sides of the rectangle,
The test apparatus according to claim 1, wherein the pusher mechanism or the positioning mechanism acts as the protective member.   Each of the pusher mechanism and the positioning mechanism is a pressing member that is positioned at the same height as the object to be inspected received by the panel receiver, and a support member that supports the pressing member, and has the upper end portion. The test apparatus according to claim 2, further comprising: a support member; and a drive mechanism that moves the support member to move the pressing member forward and backward with respect to the object to be inspected.   The test apparatus according to claim 3, wherein the driving mechanism of each positioning mechanism maintains the position of the pressing member in the advancing / retreating direction of the corresponding pressing member so as to be released against the pressing force of the opposing pusher mechanism.   The test apparatus according to claim 1, wherein each protection member includes a base portion attached to the panel receiver and an extending portion extending upward from the base portion.   The said some protection member is arrange | positioned at the said panel receiver so that it can selectively attach to the appropriate location of the several location spaced in the direction which this protection member leaves | separates. The test apparatus according to item 1.   The panel receiver further includes a long member extending in a direction in which the plurality of protective members are separated from each other, and the long member is selectively screwed with a screw member that removably screws the plurality of protective members. The test apparatus according to claim 1, wherein the test apparatus has a plurality of screw holes that are spaced apart in the separating direction.   The probe block can be retracted to a position where the needle tip of the contact is located on a side opposite to the panel receiving surface with respect to the position of the protection member in a direction intersecting the side direction. The test apparatus according to claim 1, which is disposed in The panel receiver is four side members that jointly form a rectangular opening, and includes four side members that jointly form the panel receiving surface,
Each side member corresponds to one side of the rectangle,
The test apparatus according to claim 1, wherein each probe unit and each protection member are disposed on the same side member. In addition, including a table base,
Each side member includes a movable piece disposed on the table base so as to be movable in the X direction and the Y direction so that the size of the opening can be changed.
The movable piece includes a first piece disposed on the table base in parallel with the table base, and a part of the panel receiving surface that rises upward from the panel receiving surface side of the first piece. A second piece having an upper surface forming
The test apparatus according to claim 9, wherein the probe unit and the protection member are disposed on the first piece. The pair of opposed moving pieces and the other pair of opposed moving pieces respectively extend in parallel to the X direction and the Y direction at intervals in the Y direction and the X direction.
The four moving pieces form the opening together, form the panel receiving surface together, and are arranged on the table base so that the size of the opening can be varied.
The test apparatus according to claim 10, wherein the adjacent moving pieces are coupled without being prevented from independently moving in the Y direction or the X direction.   The test apparatus according to claim 10, wherein the first and second pieces of each moving piece include a plate-like portion that is long in the moving direction. And an alignment device for jointly positioning an object to be inspected received by the panel receiver with respect to the contact,
The alignment apparatus includes at least one pusher mechanism or positioning mechanism disposed at a location corresponding to each side of the rectangle,
Each of the pusher mechanism and the positioning mechanism is located at the same height as the object to be inspected received by the panel receiver and is positioned outside the panel receiving surface. A drive mechanism that moves forward and backward with respect to the body,
The test apparatus according to any one of claims 4 to 12, wherein an upper end of each protection member is positioned above a height position of the pressing member. The alignment apparatus includes a pair of first pusher mechanisms and a pair of first pushers arranged at intervals corresponding to one and the other of the pair of opposing sides of the rectangle, respectively, in the longitudinal direction of the corresponding sides. 1 positioning mechanism, and a second pusher mechanism and a second positioning mechanism respectively disposed at locations corresponding to one and the other of the other pair of opposite sides of the rectangle,
The inspection device according to claim 13, wherein the driving mechanism of each positioning mechanism maintains the position of the pressing member in the advancing / retreating direction of the corresponding pressing member so as to be able to be released against the pressing force of the opposing pusher mechanism.

Images