CN101155506A - Substrate supporting device - Google Patents

Substrate supporting device Download PDF

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Publication number
CN101155506A
CN101155506A CNA2007101528005A CN200710152800A CN101155506A CN 101155506 A CN101155506 A CN 101155506A CN A2007101528005 A CNA2007101528005 A CN A2007101528005A CN 200710152800 A CN200710152800 A CN 200710152800A CN 101155506 A CN101155506 A CN 101155506A
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CN
China
Prior art keywords
substrate
slide mechanism
along
placing stage
clamp system
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Granted
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CNA2007101528005A
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Chinese (zh)
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CN101155506B (en
Inventor
伊藤茂树
三田胜也
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Omron Corp
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Omron Corp
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  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

The present invention relates to a substrate support device which can process clamping state setting and clamping state relieving automatically without drive source. On the clamp part (2) set along A, B direction vertical to the moving direction of the substrate supporting platform, arranging clamping mechanism (30) comprising clamping claw (32), and arranging a moveable sliding mechanism (20) along A, B direction under it. If the substrate supporting platform moves from initial location, then the sliding mechanism (20) lower roller (27) shifts along A direction by a guiding part arranged on the supporting table of the supporting platform, and a sliding frame (21) integrated with the lower roller (27) and a guiding component (28) move along A direction. Thereby, it can hoist upper roller (31) of the clamping mechanism (30) due to the guiding component (28) shifting, and a clamping claw supporting block (31) processes axle rotating to the substrate toward back side, thereby leads the clamping claw (32) to contact with the upper surface of the substrate.

Description

Baseplate support device
Technical field
The present invention relates to be used for the base plate supports (clamping) as process object is the baseplate support device of stationary state in manufacturing installation (solder printing device, chip mounter etc.) at printed base plate or testing fixture etc.
Background technology
This baseplate support device generally has the clamp system of substrate placing stage and the printed base plate on this plummer of end edge portion fixed support (following only be called " substrate ").Though have by manually adjusting the situation of clamp system, what known by people is to drive clamp system (for example, with reference to patent documentation 1) by drive sources such as cylinder, motors.
Patent documentation 1:JP spy opens the 2005-26280 communique.
But in a class device that adopts drive source, not only device becomes huge, and needs to set the operational environment (preparing air device or the adjustment service voltage to motor) of drive source, therefore spends cost and time.On the other hand, in by a class device that manually makes the clamp system action, spended time on the location of substrate might reduce operating efficiency.
Summary of the invention
The present invention puts in view of the above problems and proposes, and its purpose is to provide a kind of baseplate support device, does not use the drive source that clamps usefulness just can carry out the setting of clamped condition and the releasing of clamped condition automatically.
In the baseplate support device that addresses the above problem, be used for printed base plate is supported for the support portion that the stationary state substrate placing stage is arranged on given width, and can move back and forth along a specific at least axle, substrate placing stage has: clamp system, and it is pushed the end edge portion of substrate and substrate is fixed from any direction up and down; Slide mechanism, its translocation that makes self switch the state (clamped condition) of fixing base and remove fixing state (unclamped state) by clamp system on clamp system.In addition, the support portion is provided with guide portion, this guide portion substrate placing stage move along a specific axle during, contact with slide mechanism, and make the displacement of this mechanism.
In above-mentioned baseplate support device, clamp system for example comprises clamp jaw, and this clamp jaw is pushed from the top and fixedly is in the substrate that is supported on the state on the substrate placing stage.In addition, for example, also can be for having from the structure of the pressing member of following thruster substrate.
Substrate placing stage preferably will be along the axle conduct " a specific axle " as any limit in two vertical limits of the substrate that supports object.Substrate placing stage only moves back and forth along a specific axle and gets final product, but also can move back and forth along the axle vertical with a specific axle.
According to above-mentioned structure, substrate placing stage moves along a specific axle, if slide mechanism contacts with the guide portion of support portion, then by the effect of this guide portion, slide mechanism is shifted, and is further, is shifted by this and switches the state of clamp system.For example,, and substrate placing stage is moved along a specific axle, then switch to clamped condition from unclamped state if substrate is arranged on the substrate placing stage that is under the unclamped state.In addition, if make this clamped condition substrate placing stage moving direction counter-rotating and return to original position, then switch to unclamped state from clamped condition.
Like this, owing to can automatically switch the state of clamp system along with moving of substrate placing stage, so do not need to be provided with the drive source that clamp system is used.Thereby, the miniaturization that can implement device and the reduction of cost, and, about the localization process of substrate, also can guarantee the identical efficient of device with existing employing drive source one class.
In a preferred mode of aforesaid substrate bracing or strutting arrangement, clamp system and slide mechanism slide mechanism be positioned at clamp system below and two mechanisms make mutually under a part of state of contact and be set up, in addition, an ora terminalis along substrate moves slide mechanism by contacting with guide portion, and the height with the contacted part of clamp system in this moving process changes.On the other hand, clamp system is shifted according to the height change of the contact portion of slide mechanism, fixes to clamp state and unclamped state thereby switch.
In aforesaid way, if substrate placing stage moves along a specific axle, then slide mechanism moves along the ora terminalis of substrate.Along with this moves, change with the height of the contacted part of clamp system, and move by this and to switch clamped condition and unclamped state.
The baseplate support device of aforesaid way, for example, clamp system comprises: the clamp jaw support portion, it rotatably is supported on the axle of an ora terminalis of substrate; Give the clamp jaw of determined number, it is supported on this clamp jaw support portion; Reciprocating mechanism, it is arranged between clamp jaw support portion and the slide mechanism.In addition, reciprocating mechanism is along with the height of contact portion changes because of the mobile of slide mechanism, and moves up and down.Further, the clamp jaw support portion, when reciprocating mechanism rises, by to towards the rotation of the direction of substrate, and by the upper surface of clamp jaw fixing base; When reciprocating mechanism descends, by to the rotation of the direction left from substrate, and remove the stationary state of clamp jaw.
In said structure, reciprocating mechanism is risen, then the clamp jaw support portion is to the direction rotation towards substrate, and by the upper surface of clamp jaw fixing base, sets clamped condition thus.In addition, if under this clamped condition, reduce reciprocating mechanism by the moving direction that switches substrate placing stage, then the clamp jaw support portion rotates to the direction of leaving substrate, and removes the stationary state of clamp jaw, thereby switches to unclamped state from clamped condition.
When adopting said structure, preferably also constitute the support portion of supporting substrate lower surface:, and when removing pressing force, return to original position according to the pressing force displacement downwards of clamp jaw by following mode.So, clamp jaw drops to the extreme position of mobile range, so under clamped condition, can make the constant height of upper surface of base plate.
And then in the baseplate support device of optimal way, clamp system and slide mechanism are arranged on the position corresponding with the ora terminalis vertical with a specific axle of substrate.In addition, slide mechanism comprises: sliding frame, and its above-mentioned ora terminalis along substrate can reciprocatingly be set up; Roller, its with this sliding frame in be connected corresponding to the part of guide portion.Guide portion substrate placing stage move along a specific axle during, make roller along the direction vertical displacement with this moving direction.At this moment, sliding frame moves to the direction identical with the direction of displacement of roller.
In the baseplate support device of said structure, substrate placing stage move along a specific axle during, by being arranged on clamped condition and the unclamped state that guide portion on the support portion and slide mechanism contact and switch clamp system.Thereby, also can be automatically and make clamp system action simply even without drive source, and can realize the reduction of cost and the miniaturization of device.And, can similarly carry out the localization process of substrate with the device of a class effectively with drive source.
Description of drawings
Fig. 1 is the stereogram of the outward appearance of expression base board checking device.
Fig. 2 is the vertical view of the structure of the brace table in the expression baseplate support device.
Fig. 3 is the front view of brace table.
Fig. 4 is the integrally-built vertical view of expression substrate placing stage.
Fig. 5 is the front view of the structure of the fixation side anchor clamps (holder) of contrast expression substrate placing stage under unclamped state and clamped condition.
Fig. 6 is the figure that amplifies the side of the fixation side anchor clamps in the presentation graphs 5.
Fig. 7 is the rearview of fixation side anchor clamps.
Fig. 8 A is the stereogram of the state of the fixation side anchor clamps under the expression unclamped state.
Fig. 8 B is the stereogram of the state of the fixation side anchor clamps under the expression clamped condition.
Fig. 9 is the front view of the structure of the movable side anchor clamps of contrast expression substrate placing stage under unclamped state and clamped condition.
Figure 10 is the end view of the structure of the 3rd guide portion used of expression locking mechanism
Figure 11 is the structure of expression locking mechanism and the enlarged front view of state variation thereof.
Figure 12 is the front view of the structure of the fixation side anchor clamps that contrast expression variant embodiment relates under unclamped state and clamped condition.
Figure 13 is the figure that amplifies the side of the fixation side anchor clamps among expression Figure 12.
Figure 14 is the enlarged side view of the structure of the fixation side anchor clamps that contrast expression variant embodiment relates under unclamped state and clamped condition.
Embodiment
Fig. 1 has represented to use the structure of base board checking device 1 of the present invention.
This base board checking device 1 is by taking as the substrate of checking object and handle the device that the image that is generated comes the installment state of inspection part automatically and welded condition etc., and it is made of baseplate support device 100, upper box body 101, monitor 102, controller 103 etc.
Baseplate support device 100 is assembled into substrate placing stage (stage) 10 and travel mechanism thereof etc. in the framework 104 of upper surface open, and is arranged on the top board 107 of workbench 106 of given width.Upper box body 101 is box-shaped bodies of lower surface opening, rectangular shape, ccontaining not shown video camera and the light source in inside, and baseplate support device 100 near inboard position, be set up in the mode of crossing its Width.
Monitor 102 is installed on the appropriate location of front surface of upper box body 101.In addition, controller 103 is arranged on the supporting bracket 109 that is provided with in the bottom of workbench 106.In addition, on the lower surface of the top board 107 of workbench 106, end tab 110 is installed, is provided with the equipment to controller 103 input usefulness such as keyboard and mouse thereon.
In addition, the upper surface at baseplate support device 100 is provided with power knob 111, starting button 112, stop button 113, emergency stop push button 114.
In this base board checking device 1, with Width as X-axis, with the depth direction as Y-axis, by not shown travel mechanism video camera and light source in the upper box body 101 are moved back and forth along X-axis, and substrate placing stage 10 is moved back and forth along Y direction, the position alignment of substrate and video camera is taken.The action of each travel mechanism is controlled by controller 103.
Substrate placing stage 10 is provided with clamp system 30, this clamp system 30 with substrate relatively to a pair of ora terminalis be supported for stationary state.Before beginning inspection, substrate placing stage 10 is positioned at the front side (part that peristome is not covered by upper box body 101) of baseplate support device 100, accepts as the substrate of checking object.Afterwards, when making clamp system 30 action behind the fixing base, begin to check based on the control of controller 103.
In this embodiment, design in as follows mode: after operating personnel are installed in substrate on the substrate placing stage 10 by manual operation, by operation starting button 112, thereby substrate placing stage 10 moves, and clamp system 30 moves automatically and fixes substrate.Below, be elaborated about this substrate placing stage 10 and mechanism that this substrate placing stage 10 is supported.
In addition, in each figure, the direction at the past direction rear of baseplate support device 100 is made as the positive direction of Y-axis, and represents its direction (still, in the figure that is in the Y-axis relation vertical, omitting arrow) with paper with arrow.On the other hand,,, the direction that moves from right to left is made as the A direction, will be made as the B direction in the opposite direction with A side, and represents all directions independently with arrow towards the front of baseplate support device 100 about X-axis.In addition, for convenience's sake, also have with the A direction be made as the left side, with the B direction be made as the right side represent each one about the relation situation.In addition, the chain-dotted line S among the figure represents substrate.
In the framework 104 of baseplate support device 100, be incorporated with the brace table 108 (a kind of form of support portion) of supporting substrate plummer 10.Fig. 2 represents the state of observed this brace table 108 from the top, and Fig. 3 represents from the state of the observed brace table 108 of front side.
Be equipped with ball screw mechanism 60 in the position of the close right side edge of brace table 108, and the length direction of the axle of this ball screw mechanism 60 is consistent with Y-axis as the travel mechanism of substrate placing stage 10.Ball screw mechanism 60 is provided with movable block 61, shaft coupling 63, motor 64 etc.
In the left side of ball screw mechanism 60, separate to set a distance and be provided with sliding axle 65, and then the position of the close left side edge of brace table 108 is provided with line slideway 66.Sliding axle 65 and line slideway 66 are also so that the length direction mode consistent with Y-axis of axle and disposing.In addition, two movable blocks 67 are installed on sliding axle 65, and two movable blocks 68 are installed on line slideway 66.
Each movable block 61,67,68 of ball screw mechanism 60, sliding axle 65, line slideway 66 is connected with substrate placing stage 10 respectively.Thereby if motor 64 is rotated, then substrate placing stage 10 moves with the positive direction or the negative direction of each movable block 61,67,68 along Y direction.This amount of movement and moving direction are controlled by the rotating speed and the rotation direction of conversion motor 64.
On the right side of ball screw 60, be provided with the transducer 69a~69d of the position that is used to detect substrate placing stage 10, wherein, transducer 69a~69c is arranged on front side, and transducer 69d is arranged on rear side.These transducers 69a~69d be light-projecting portion relative with light accepting part to the through mode photoelectric sensor, start and carry out work when the shadow shield 62 on being installed in the movable block 61 of ball screw 60 enters between light-projecting portion and the light accepting part.Three transducers of front side are along the sequence arrangement of Y-axis positive direction according to 69b, 69a, 69c, and when the transducer 69a that is positioned at central authorities therein was in starting state, the position of the substrate placing stage 10 of this moment was set to the initial position of plummer.Before beginning inspection and after finishing to check, substrate placing stage 10 must be positioned at this initial position.
In addition, be arranged on initial position and detect transducer 69c with the behind of transducer 69a and be used to detect substrate placing stage 10, and the transducer 69b that is configured in the forefront is used to detect the transducer that substrate placing stage 10 has arrived extreme position with the transducer 69d that is configured in rear just near the transducer of initial position.When transducer 69b and 69d are in starting state, for promptly being stopped, substrate placing stage 10 cuts off supply to the power supply of plummer.
Except said structure, be provided with three guide portion 51,52,53 (following order by Reference numeral is called " first guide portion 51 ", " second guide portion 52 ", " the 3rd guide portion 53 ") at the upper surface of brace table 108.First guide portion 51 is arranged on the corresponding position of moving range with the leading section of substrate placing stage 10, and second, third guide portion 52,53 is arranged on the corresponding position of moving range with the rearward end of substrate placing stage 10.Function about these guide portion 51,52,53 is elaborated in the back.
Fig. 4 represents the total of substrate placing stage 10.This routine substrate placing stage 10 is the box-shaped bodies with a pair of clamp portion 2,3 in front and back and pair of right and left frame section 4,5, and is formed with the blank part 6 that is used to be provided with substrate S in inside.On each clamp portion 2,3, be respectively arranged with clamp system 30 and be used for switching the slide mechanism 20 (later figure represents at Fig. 5) of the on-off action of this clamp system 30.
About frame section 4,5 than each clamp portion 2,3 about end more outstanding.Distance between the frame section 4,5 is corresponding with line slideway 66 and the distance between the sliding axle 65 on the brace table 108, the bottom surface of left side frame portion 4 is connected with the movable block 68 of line slideway 66 sides, and the bottom surface of right side frame portion 5 is connected with the movable block 67 of sliding axle 65 sides.And then, form the outstanding rectangular-shaped protrusion tab 7 in the oriented outside at the upper surface of right side frame portion 5.This protrusion tab 7 is connected with the movable block 61 of ball screw mechanism 60.
In the clamp portion 2,3 of front and back, the clamp portion 2 in the place ahead is fixed, and the clamp portion 3 at rear can be along supported slidingly back and forth.And then, about clamp portion 2, be provided with the guide plate 8,9 of the left and right sides ora terminalis that is used for supporting substrate S.Wherein, the guide plate 8 in left side is fixed on the upper surface of left side frame portion 4, and the guide plate 9 on right side is installed on the slot part 17, and this slot part 17 is formed on the upper surface of clamp portion 2 along left and right directions.The clamp portion 3 at rear and the position of right side guide plate 9 are adjusted according to the width of substrate S.
Fig. 5 represents to be fixed on the structure in front (corresponding to the front of substrate placing stage 10) of the clamp portion 2 (hereinafter referred to as " fixation side anchor clamps 2 ") in the place ahead.In addition, Fig. 6 represents the structure of the observed fixation side anchor clamps 2 from the left side, and Fig. 7 represents the back side (faces of blank part 6 sides) of fixation side anchor clamps 2.Fig. 8 A and Fig. 8 B take out the clamp system 30 of expression fixation side anchor clamps 2 and the stereogram of slide mechanism 20.In each figure except that Fig. 7, the state (unclamped state) before the contrast expression supporting substrate and the state (clamped condition) of fixed support substrate.
Below, utilize above-mentioned Fig. 5~Fig. 8 B and above-mentioned Fig. 2~4, describe the structure and the action of fixation side anchor clamps 2 in detail.
The fixation side anchor clamps 2 of this embodiment have the underframe 11 that vertically erects.In the rear side of underframe 11, supporting movable framework 12 with given thickness, this movable framework 12 can be displaced to below (with reference to Fig. 7) by a plurality of compression springs 14.In addition, be formed with laminal base plate supports plate 13 continuously in the upper end at the back side of this movable framework 12.This base plate supports plate 13 is the plates that are used for from the end edge portion of supported underneath substrate S, and its upper surface is set for higher than the upper surface of movable framework 12.
The protection piece 15 of long chi shape on underframe 11 and movable framework 12, is equipped with.This protection piece 15 is supported by the pair of tracks 16 (being illustrated among Fig. 6,7) that setting is arranged between underframe 11 and the movable framework 12.In addition, protection piece 15 is provided with slot part 17, and this slot part 17 is used for the guide plate 9 of the right side ora terminalis support usefulness of installation base plate S.
Front face side at underframe 11 is provided with the slide mechanism 20 with sliding frame 21.This sliding frame 21 by about respectively be provided with two horizontal rail 22 and be arranged on the left side extension spring 23 and can be supported along move left and right ground.In addition, about sliding frame 21, be respectively arranged with the brake 24,25 of the moving range that is used to limit this framework 21.
Roller 27 (following this roller 27 is called " lower rollers 27 ") is installed via forwards outstanding installation component 26 in the bottom of sliding frame 21.This lower rollers 27 disposes for vertical mode with the direction of its rotating shaft.
In Fig. 3, represent the position of lower rollers 27 with stipple pattern.As shown in the drawing, lower rollers 27 contacts with the right flank of first guide portion 51 on being arranged on brace table 108.
Shown in Fig. 2, Fig. 8 B, direction rear width is more and more narrow in the past for first guide portion 51, and its contact-making surface that contacts with lower rollers 27 is crooked.When substrate placing stage 10 was in initial position, lower rollers 27 was in the leading section (position of the P1 among Fig. 2) of first guide portion 51.Afterwards, along with substrate placing stage 10 moves along the Y-axis positive direction, lower rollers 27 is shifted along the A direction by first guide portion 51.That is, move on the path that the P1 in Fig. 2, P2, P3 represent.Sliding frame 21 moves along the A direction on underframe 11 because of the displacement of this lower rollers 27.
The central portion of the last ora terminalis of sliding frame 21 is U font ground and is cut, this cut the part about be respectively arranged with ways 28.Each ways 28 is that section is the member of L font, and its top edge is more outstanding than sliding frame 21.And then the edge is formed with inclined plane 29 thereon, and this inclined plane 29 generals direction (B direction) from left to right is as ascent direction.
Above-mentioned horizontal rail 22, extension spring 23, brake 24,25, installation component 26, lower rollers 27 and ways 28 and sliding frame 21 constitute slide mechanism 20 together.This slide mechanism 20 possesses the function of switching clamped condition and unclamped state by the translocation that makes self in clamp system 30.
The clamp jaw 32 that clamp system 30 supports by the clamp jaw back-up block 31 of a pair of long chi shape, by clamp jaw back-up block 31, be supported on the formations such as roller 33 (below, be called " upper roll 33 ") of the front of each clamp jaw back-up block 31 by axle.Upper roll 33 is a kind of forms of reciprocating mechanism.
Each clamp jaw back-up block 31 rotatably is supported on the top position of sliding frame 21 via the axle 34 that is provided with along A, B direction (along the direction of the ora terminalis of substrate S); in addition; with the protection piece 15 similarly; its length direction and A, B direction are set up corresponding, and are connected with protecting piece 15 via the compression spring 35 of giving determined number.
Upper surface at clamp jaw back-up block 31 is formed with the slot part 36 that extends in the longitudinal direction.Clamp jaw 32 is fixed on this slot part 36 by screw 37.In addition, in illustrated example, about clamp jaw back-up block 31 on be separately installed with two clamp jaws 32, but the quantity of clamp jaw 32 and fixed position can freely be changed.
Upper roll 33 so that the inclined plane 29 contacted modes of the ways 28 of its outer peripheral face and sliding frame 21 be set up.Thereby, if ways 28 and sliding frame 21 be together along move left and right,, so rise or descend upper roll 33 rotations the time then owing to change with the height of upper roll 33 contacted parts.
In addition, shown in Fig. 6 (1), when upper roll 33 contacted with the extreme lower position on inclined plane 29, front face side became the state of decline.In addition, be in so following time of state in upper roll 33, the posture of clamp jaw back-up block 31 is adjusted, and makes clamp jaw 32 be raised and becomes the state (that is unclamped state) that leaves substrate S.
If ways 28 moves along the A direction from above-mentioned state, then upper roll 33 is raised gradually, and the direction that finally becomes rotating shaft is near horizontal state.Clamp jaw back-up block 31 moves to carry out the axle rotation towards the direction of substrate S according to this upper roll 33.Thus, clamp jaw 32 also drops to substrate S side.In addition, by making clamp jaw back-up block 31 near protection pieces 15, thereby compression spring 35 between the two further is compressed.
In the fixation side anchor clamps 2 of said structure, when substrate placing stage 10 was in initial position, sliding frame 21 was supported under the state that connects with right side brake 25 by extension spring 23.At this moment, owing to upper roll 33 contacts with the extreme lower position on the inclined plane 29 of ways 28, so clamp jaw 32 is raised.That is, substrate S is not fixed, and is in so-called unclamped state (with reference to Fig. 5 (1), Fig. 6 (1), Fig. 8 A.)。In addition, when substrate placing stage 10 was in initial position, the position that is installed in the P1 among lower rollers 27 and the Fig. 2 on the sliding frame 21 contacted.
If substrate placing stage 10 moves to the Y-axis positive direction from initial position, then lower rollers 27 is guided by first guide portion 51, and is shifted along the A direction.Along with the displacement of this lower rollers 27, the ways 28 of sliding frame 21 and portion mounted thereto moves along the A direction, thereby the relation of the position between the inclined plane 29 of ways 28 and the upper roll 33 changes.Thus, upper roll 33 is thus lifted to the top, and clamp jaw back-up block 31 is to the direction rotation towards substrate, thereby the front end of clamp jaw 32 contacts with the upper surface of substrate S.Thereby substrate S becomes so-called clamped condition (with reference to Fig. 5 (2), Fig. 6 (2), Fig. 8 B) to be fixed to leading section and the tight state of base plate supports plate holder by clamp jaw 32.
And then at this moment, because the pressing force of clamp jaw 32, the base plate supports plate 13 of rear side and movable 12 declines of framework are equivalent to the distance of the thickness of substrate S.Thereby clamp jaw 32 drops to the extreme position of movable range and substrate S is supported.As hereinafter described, because the clamp portion 3 at rear also is in same state, so the upper surface of base plate after clamping can be remained on the certain height position.
When having realized above-mentioned clamped condition, lower rollers 27 is in the P3 position among Fig. 2.Afterwards, if substrate placing stage 10 further moves along the Y-axis positive direction, then lower rollers 27 is left first guide portion 51.But, because sliding frame 21 is stretched to the position that the brake 24 with the left side connects by extension spring 23, and upper roll 33 rise to ways 28 the highest part and and be fixed, so clamped condition is kept.Thereby, shown in the arrow P among Fig. 2, the position when lower rollers 27 is also keeping being in P3.
Afterwards, if the moving direction of substrate placing stage 10 is switched into the Y-axis negative direction and approaching to initial position, then lower rollers 27 contacts with first guide portion 51 once more.Current opposite with above-mentioned situation, the position of lower rollers 27 changes along B direction (according to the order of P3, P2, P1), so sliding frame 21 and ways 28 move along the B direction, thus upper roll 33 declines.
Clamp jaw back-up block 31 rotates on the direction of leaving substrate S because of the restoring force of the decline of upper roll 33 and compression spring 35.Thereby clamp jaw 32 also leaves substrate, returns to unclamped state.
Fig. 9 be the expression rear movable clamp portion 3 (below be called " movable side anchor clamps 3 ".) front (corresponding to the back side of substrate placing stage 10) structure.Identical with fixation side anchor clamps 2, also clamped condition and unclamped state are represented in contrast in the figure.
In addition, about the side of movable side anchor clamps 3 and the structure of inner face side, since approximate identical with fixation side anchor clamps 2, so the diagram of omission.In addition, about with fixation side anchor clamps 2 corresponding members, by giving the Reference numeral identical, thereby omit explanation or explanation simply with the counterpart member of fixation side anchor clamps 2.In addition, when concerning about mentioning in the following description, with identical before this, with the A direction as left side, B direction as the right side, and be not benchmark with the front of movable side anchor clamps 3.
Identical with fixation side anchor clamps 2, movable side anchor clamps 3 also have the underframe 11 that vertically erects.In addition, the rear side of this underframe 11 can be provided with up or down integrated have movable platen 12 this point of base plate supports plate 13 and in the above side be provided with protection piece 15 this point, also identical with fixation side anchor clamps 2.But, on the protection piece 15 of movable side anchor clamps 3, do not form slot part 17.
The slide mechanism 20 of the front face side of underframe 11, the basic structure of clamp system 30 are also identical with fixation side anchor clamps 2.But, because the front of movable side anchor clamps 3 is corresponding with the back side of substrate placing stage 10, so the inclined plane 29 of ways 28 forms in the ways 28 opposite modes of ascent direction and fixation side anchor clamps 2.
And then, in movable side anchor clamps 3, the right side of sliding frame 21 with relative with the left end of the horizontal rail 22 of right upper portion to this two place, position be provided with brake 24,25.In addition, the left side of sliding frame 21 is provided with locking mechanism 40.This locking mechanism 40 relates to keeping and removing of clamped condition with the moving range of brake 25 limit slippage frameworks 21 along the A direction.
At this,, adopt the front view of the amplification of Figure 11 to describe about the detailed structure of locking mechanism 40.
This locking mechanism 40 comprises as inferior mechanism: support portion 41 is supported on the axle vertical with the face of underframe 11 by axle; Locking bar 42 is installed on the axle of this support portion 41; Extension spring 43 is used to adjust the posture of locking bar 42.In addition, support portion 41 is more outstanding than underframe 11, and, on this ledge, for the rotating shaft 44 of level roller 45 is installed via direction of principal axis.In addition, sliding frame 21 sides be provided with guiding and the member 46 of fastening locking bar 42 (below, be called " guide card bonding part 46 ".)。These rotating shafts 44, roller 45, guide card bonding part 46 are also included within the locking mechanism 40.
Locking bar 42 is downward with the claw 42a of front end, and to be supported for length direction by extension spring 43 be horizontal state.On ora terminalis on the guide card bonding part 46, be formed with continuously on inclined plane 47 that the direction identical with ways 28 tilts with respect to the slot 48 of above-mentioned claw 42a.
The position of second guide portion 52 shown in Fig. 2 and the position of the 3rd guide portion 53 are adjusted, and make second guide portion 52 contact with the lower rollers 27 of slide mechanism 20, and the 3rd guide portion 53 contacts with the roller 45 of locking mechanism 40.In second guide portion 52, with lower rollers 27 contacted left surface bendings, so that lower rollers 27 is shifted along the A direction to moving of Y-axis positive direction according to substrate placing stage 10.Some Q1 among the track of this lower rollers 27 such as Fig. 2, Q2 is shown in Q3 and the arrow Q.
Other direction, as shown in figure 10, the 3rd guide portion 53 is formed with inclined plane 54,56 in the front and back of the tabular surface 55 of central authorities, and this inclined plane 54,56 respectively will be towards the direction of this tabular surface 55 as ascent direction.The roller 45 of locking mechanism 40 is directed to successively on these faces 54,55,56 and moves up and down.By moving up and down of this roller 45 and moving of sliding frame 21, the claw 42a of locking bar 42 and the relation of the position between the guide card bonding part 46 change.(1) (2) (3) of Figure 11 are represented the appearance of the variation of this locking mechanism 40 in order.
In the movable side anchor clamps 3 of said structure, be at substrate placing stage 10 under the state of initial position, sliding frame 21 is supported for the state that is stretched to the B direction by extension spring 23.In addition, because the upper roll 33 of this moment contacts with the extreme lower position of ways 28, so same with fixation side anchor clamps 2, clamp jaw 32 is raised, and substrate is in unclamped state.In addition, Ci Shi lower rollers 27 is in the position of the Q1 among Fig. 2.
At this, if substrate placing stage 10 moves towards the Y-axis positive direction, then lower rollers 27 is shifted along the A direction, thereby sliding frame 21 also moves to the A direction.Along with this moves, ways 28 moves similarly, thus with fixation side anchor clamps 2 in the same manner, upper roll 33 is raised, clamp jaw back-up block 31 is near the rotation of the direction of substrate S.Thereby clamp jaw 32 also descends to substrate S side, substrate S is clamped between base plate supports plate 13 and the clamp jaw 32, and becomes clamped condition.In addition, base plate supports plate 13 and movable platen 12 descend by the pressing force of clamp jaw 32.
On the other hand, the locking bar 42 of locking mechanism 40 is when substrate placing stage 10 is in initial position, with the left end of guide card bonding part 46, be that the extreme lower position on inclined plane 47 contacts.Afterwards, if substrate placing stage 10 moves along the Y-axis positive direction, then the roller 45 of locking mechanism 40 is risen by 53 guiding of the 3rd guide portion.In addition, because the close gradually locking mechanism 40 of sliding frame 21, so locking bar 42 contacts (with reference to Figure 11 (1) (2)) gradually with the high position on inclined plane 47.In addition, when roller 45 moves to inclined plane 56 and when descending from the tabular surface 55 of the 3rd guide portion 53, sliding frame 21 is braked device 25 and blocks and stop, and the claw 42 of locking bar 42 engages (with reference to Figure 11 (3)) with the slot 48 of guide card bonding part 46.Relation to each mechanism is adjusted, so that the moment that should engage is similar to identical with the moment that clamped condition is set up.
By the engaging between above-mentioned locking bar 42 and the guide card bonding part 46, sliding frame 21 is fixed, and the relation between upper roll 33 and the ways 28 also is held.Thereby, after lower rollers 27 is left second guide portion 52, also can keep clamped condition.
Afterwards, if the conveyance direction of substrate placing stage 10 is switched into the Y-axis negative direction, then by removing the engaging of locking bar 42 with above-mentioned opposite action, sliding frame 21 returns to original position by the loading force of extension spring 23.Thus, upper roll 33 descends, thereby removes clamped condition.
As mentioned above, owing to slide mechanism 20 along with substrate placing stage 10 is shifted along y-axis shift is moving, clamped condition and unclamped state so fixation side anchor clamps 2, movable side anchor clamps 3 also automatically switch.In addition, under clamped condition, because 21 declines of base plate supports plate 13 and sliding frame are equivalent to the distance of substrate thickness, so clamp jaw 32 can be dropped to extreme position and make the upper surface of substrate S consistent with the leading section of clamp jaw 32, and, irrelevant with the thickness of substrate S, can be so that its upper surface be in the mode supporting substrate S of certain altitude.Thereby, do not use the drive source except the motor 64 of ball screw mechanism 60, just stably supporting substrate S and execution are checked.
In addition, the baseplate support device 100 in the above-mentioned example has adopted the structure of pushing the upper surface of substrate S by clamp jaw 32, but clamp system 30 is not limited thereto.For example, also can adopt following structure: the inboard at fixation side anchor clamps 2 and movable side anchor clamps 3 is provided with the slide mechanism 20 identical with above-mentioned mechanism, and be equipped with the pressing member that promotes substrate from following side direction above it, pressing member moved up and down by slide mechanism 20 moving to the left and right.
In addition, the structure about slide mechanism and the guide portion that makes this mechanism's displacement also is not limited to the foregoing description.For example, can consider as Figure 12 and Figure 13 or variation as shown in Figure 14 (structure of all only representing fixation side anchor clamps 2 sides).
In the Figure 12 and first variation shown in Figure 13, main structure is identical with initial embodiment, and (though not shown, guide portion 51~53 is also identical.)。What changed is: the ways 28 of slide mechanism 20 is replaced as component-bar linkage 71; The upper roll 33 of clamp system 30 is replaced as fixing screw 72.Component-bar linkage 71 is to make a plurality of members connect into shaft-like member, is formed with the hole portion (not shown) that screw clamp is used on both ends 71a, 71b.
One end 71a of component-bar linkage 71 is fixed on the position identical with the upper roll 33 of clamp system 30 by fixing screw 72, other end 71b is fixed on the bottom of sliding frame 21 (below, 71a, 71b are called " upper end 71a ", " bottom 71b " respectively).In addition, when sliding frame 21 leaned on the leftmost side, lower end side 71b fixed position was adjusted, and makes component-bar linkage 71 become plumbness.In addition, component-bar linkage 71 is not limited to above-mentioned member, and also can adopt the member of single long chi shape.
In said structure, when substrate placing stage 10 was in initial position, sliding frame 21 also became by the rightmost side (state that connects with right side brake 25).Therefore, shown in Figure 12 (1), 13 (1), component-bar linkage 71 also becomes its bottom 71b than upper end 71a heeling condition more on the right side, thereby clamp jaw back-up block 31 becomes the state that is pulled to underframe 11 sides, promptly becomes state away from substrate S.Thereby clamp jaw 32 also leaves from substrate S, and unclamped state is set thus.
If substrate placing stage 10 moves along the Y-axis positive direction from initial position, then identical with first embodiment, lower rollers 27, is followed in this to the displacement of A direction side by guide portion 51, and sliding frame 21 moves along the A direction.Because should move, the posture of component-bar linkage 71 moves closer in plumbness, so clamp jaw back-up block 31 is to the direction rotation towards substrate S.Finally, move to the position that connects with left side brake 24 at sliding frame 21, and component-bar linkage 71 is when becoming plumbness, clamp jaw 32 contacts with substrate S, and clamped condition is set thus.In addition, by with above-mentioned opposite action, carry out the switching from the clamped condition to the unclamped state.
In second variation shown in Figure 14, sliding frame 21 is slided up and down, rather than horizontally slip, feasible displacement with its above-below direction is delivered to clamp jaw back-up block 31 via upper roll 33.Specifically, via axle along horizontal direction (direction parallel) with the face of sliding frame 21, with brace table 108 slidably mode the lower rollers 27 of slide mechanism 20 sides is installed, and, according to moving of this lower rollers 27, sliding frame 21 is moved up and down.In addition, in the drawings, the 74th, on underframe 11, erect the track that is provided with.Sliding frame 21 is supported on this track 74 slidably via supporting member 75.
On the upper end position of sliding frame 21 fronts, being provided with its cross section is the roller supporting member 73 of L font.This roller supporting member 73 is identical with the ways 28 of first embodiment, and its upper end is more outstanding than sliding frame 21, and contacts with the upper roll 33 of clamp system 30.Upper roll 33 is according to moving up and down of this roller supporting member 73 and to identical direction displacement.Clamp jaw back-up block 31 (not shown in Figure 14) moves up and down according to upper roll 33, and is that central shaft is to being rotated towards the direction of substrate S or to the direction away from substrate S with axle 34.
And then, on the brace table 108 of this embodiment, be equipped with along the guide portion 76 of Y-axis positive direction graded.Lower rollers 27 residing positions when the K1 in Figure 14 represents that substrate placing stage 10 is in initial position, K2 represents the position that the graded of guide portion 76 finishes.As shown in the drawing, the upper surface of guide portion rises to K2 lentamente from K1.And then the height of keeping K2 remains unchanged, always continuously till the position that fixation side anchor clamps 2 can move.
Shown in Figure 14 (1), when substrate placing stage 10 was in initial position, sliding frame 21 and roller supporting member 73 became state vertically downward.Therefore, upper roll 33 becomes the state that front face side descends, and clamp jaw back-up block 33 is away from substrate S.Thereby clamp jaw 32 also leaves from substrate S, becomes unclamped state.
Along with moving of substrate placing stage 10, if lower rollers 27 rises on the inclined plane of guide portion, then sliding frame 21 rises gradually.Because roller supporting member 73 rises similarly, so upper roll 33 is raised, thus, clamp jaw back-up block 31 is to the direction rotation towards substrate S, and clamp jaw 32 also drops to substrate S side.
In this embodiment, when lower rollers 27 arrives the position of K2, the variable quantity of the gradient between the K1-K2 is adjusted, made the axle of upper roll 33 become level of approximation.Thereby, shown in Figure 14 (2), when lower rollers 27 arrives the position of K2, become the leading section and the substrate S state of contact of clamp jaw 32, thereby realized clamped condition.
After having realized clamped condition, under the situation that substrate placing stage 10 is moved further, the height the when height of the upper surface of guide portion 76 also maintains K2 always, so clamped condition is kept.Afterwards, make substrate placing stage 10 on the contrary when the initial position side is returned if at given position the moving direction of substrate placing stage 10 is become, then opposite with above-mentioned situation, lower rollers 27 descends on the inclined plane of guide portion 76, thereby sliding frame 21 descends.Follow in this, upper roll 33 also descends, thereby removes the clamped condition of clamp jaw 32.

Claims (4)

1. a baseplate support device is characterized in that,
Be used for the substrate placing stage that printed base plate is supported for stationary state is arranged on the support portion of given width, and this substrate placing stage can move back and forth along a specific axle at least,
Described substrate placing stage has: clamp system, and it is pushed the end edge portion of described substrate and substrate is fixed from any direction up and down; Slide mechanism, its translocation that makes self switch the state of fixing base and remove fixing state by clamp system in described clamp system,
Described support portion is provided with guide portion, this guide portion described substrate placing stage move along a described specific axle during, contact with described slide mechanism, thereby make the displacement of this slide mechanism.
2. baseplate support device as claimed in claim 1 is characterized in that,
Described clamp system and slide mechanism are configured to below and two mechanisms that slide mechanism is positioned at clamp system and make a part of contacted state mutually,
Described slide mechanism constitutes: an ora terminalis by contacting with described guide portion along substrate moves, and the height with the contacted part of described clamp system in this moving process changes,
Described clamp system constitutes: the height change according to the contact portion of described slide mechanism is shifted, thereby switches the state of fixing base and remove fixing state.
3. baseplate support device as claimed in claim 2 is characterized in that,
Described clamp system comprises: the clamp jaw support portion, and it rotatably is supported on the axle of an ora terminalis of substrate; Give the clamp jaw of determined number, it is supported on this clamp jaw support portion; Reciprocating mechanism, it is arranged between clamp jaw support portion and the slide mechanism,
Along with the height of described contact portion changes because of moving of described slide mechanism, described reciprocating mechanism moves up and down,
Described clamp jaw support portion, when described reciprocating mechanism rises, by to direction rotation towards substrate, and by the upper surface of described clamp jaw fixing base; When reciprocating mechanism descends, by to the rotation of the direction left from substrate, and remove the stationary state of described clamp jaw.
4. baseplate support device as claimed in claim 2 is characterized in that,
Described clamp system and slide mechanism are arranged on the position corresponding with the ora terminalis perpendicular to a described specific axle of substrate,
Described slide mechanism comprises: sliding frame, and its described ora terminalis along substrate can reciprocatingly be set up; Roller, its with this sliding frame in be connected corresponding to the part of described guide portion,
Described guide portion, described substrate placing stage move along a described specific axle during, make described roller along the direction vertical displacement, and described sliding frame moves towards the direction identical with the direction of displacement of roller with this moving direction.
CN2007101528005A 2006-09-29 2007-09-21 Substrate supporting device Active CN101155506B (en)

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CN109643684A (en) * 2016-08-26 2019-04-16 韩华泰科株式会社 Tilt plummer system
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