CN209567999U - Cutter for substrate - Google Patents
Cutter for substrate Download PDFInfo
- Publication number
- CN209567999U CN209567999U CN201821911245.XU CN201821911245U CN209567999U CN 209567999 U CN209567999 U CN 209567999U CN 201821911245 U CN201821911245 U CN 201821911245U CN 209567999 U CN209567999 U CN 209567999U
- Authority
- CN
- China
- Prior art keywords
- substrate
- supporting table
- pair
- connecting portion
- cutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The cutter for substrate of embodiment according to the present utility model may include: scribing unit, and scribing line is formed on substrate；And supply unit, the substrate is delivered to the scribing unit, the supply unit includes: supporting table, has the supporting surface for supporting the substrate；Fixture module holds the substrate；And link block, connect the fixture module and the supporting table.
Description
Technical field
The utility model relates to the cutter for substrate for cutting substrate.
Background technique
Liquid crystal display panel, organic electroluminescent display panel, the inorganic EL for being commonly used for panel display screen are aobvious
Show panel, transmissive type projection instrument substrate, reflection type projector substrate etc. use from the brittle female glass panel such as such as glass (with
Under, referred to as " substrate ") to preset the unit glass panel (hereinafter referred to as " unit substrate ") that size is cut.
It at the process of unit substrate include scribing process by substrate cut, which is along as cutting substrate
The cutting preset lines of benchmark on substrate and move the pressurization of the stitch marker as made of the materials such as diamond, in substrate
Upper formation scribing line.
In this scribing process, in the state that substrate is supported by multiple belts, the rear row end of substrate is held simultaneously by fixture
It is transported to scribing unit.The direction that multiple belts are directly handed over along the direction with conveying substrate arranges at each interval, fixture position
Space between multiple belts.In addition, being moved to scribing unit in the state that fixture holds the rear row end of substrate, drive simultaneously
Multiple belts are moved, substrate is transported to scribing unit as a result,.
But in the composition of multiple belt compartment of terrain arrangement, the problem is that: the unit substrate of cutting passes through multiple
Space falls downward between belt.Additionally, there are the problem of be: because of many reasons, the height of multiple belts may become not
Together, the flatness decline of substrate, substrate cannot be cut well as a result,.
Utility model content
The utility model to solve the above-mentioned problems, can stablize holding substrate its purpose is to provide one kind and carry out defeated
The cutter for substrate sent.
In order to achieve the above object, the cutter for substrate of embodiment according to the present utility model includes: scribing unit,
Scribing line is formed on substrate；And supply unit, scribing unit is delivered the substrate to, supply unit includes: supporting table, has branch
The supporting surface of support group plate；Fixture module holds substrate；And link block, jockey module and supporting table.
Link block may include: first connecting portion, be arranged in supporting table；And second connecting portion, it is connected to fixture
It is connect in module and with first connecting portion.
First connecting portion is configured to be arranged in the insertion section in supporting table, and second connecting portion is configured to be inserted into
The connecting component of the insertion section of first connecting portion.
First connecting portion is configured to be arranged in a pair of of support member in supporting table, and second connecting portion is configured to
The connecting component being inserted between a pair of of support member.
Elastic cushion can be attached on the face opposite to one another of a pair of of support member.
Can connect at least one of a pair of of support member makes at least one of a pair of of support member along one
The mobile mechanism mobile to the direction that support member is adjacent to each other.
Second connecting portion can also include driver, which makes connecting component along the side adjacent with first connecting portion
It is moved to direction (or separate direction) spaced apart.
Fixture module can be housed in the receiving portion being formed in supporting table.
Cutter for substrate according to the present utility model, the fixture module for holding the rear row end of substrate, which is accommodated in, is formed in branch
In the receiving portion for supportting platform, therefore substrate can be held in height identical with the supporting surface of supporting table.Therefore, substrate can be steady
Surely it is held while being supported in supporting table by fixture module stability.Therefore, substrate can be delivered to scribing unit by stabilization.
In addition, the cutter for substrate of embodiment according to the present utility model, supporting table and fixture module can pass through
Link block links into an integrated entity, and therefore, supporting table and fixture module being capable of stable movements together.Therefore, it can prevent because of support
Platform and fixture module are individually moved and the friction between the substrate that may occur and supporting table, so as to prevent substrate and branch
Support the damage of platform.
Detailed description of the invention
Fig. 1 and Fig. 2 is the figure for diagrammatically showing the cutter for substrate of embodiment according to the present utility model.
Fig. 3 and Fig. 4 be diagrammatically show embodiment according to the present utility model cutter for substrate it is first defeated
Send the figure of unit and link block.
Fig. 5 and Fig. 6 is the jig plate for diagrammatically showing the cutter for substrate of embodiment according to the present utility model
The figure of block.
Fig. 7 to Figure 10 is the first conveying list for successively showing the cutter for substrate of embodiment according to the present utility model
The figure of first, scribing unit and the second supply unit operating process.
Figure 11 and Figure 12 is the cutter for substrate for diagrammatically showing another embodiment according to the present utility model
The first supply unit and link block figure.
Figure 13 and Figure 14 is the cutter for substrate for diagrammatically showing another embodiment according to the present utility model
The first supply unit and link block figure.
Description of symbols
10 first supply units
20 second supply units
30 scribing units
90 control units
Specific embodiment
Hereinafter, illustrating the cutter for substrate of embodiment according to the present utility model referring to attached drawing.
The object of the cutter for substrate cutting of embodiment according to the present utility model, which can be, is bonded with first substrate
With the adhesive base plate of the second substrate.For example, first substrate can have thin film transistor (TFT), the second substrate can have colorized optical filtering
Piece.In contrast, first substrate can have colored filter, and the second substrate can have thin film transistor (TFT).Hereinafter, will bonding
Substrate is referred to as substrate, and the surface for being exposed to external first substrate is known as the first face, will be exposed to external the second substrate
Surface be known as the second face.
In addition, being Y direction by the direction definition for the substrate for conveying pending substrate cut process, conveying base will be perpendicular to
The direction definition in the direction (Y direction) of plate is X-direction.In addition, the direction that will be perpendicular to place the X-Y plane of substrate is known as
Z-direction.
As shown in Figure 1 to Figure 3, the cutter for substrate of embodiment according to the present utility model may include: that scribing line is single
Member 30, for forming scribing line on substrate S；Substrate S is delivered to scribing unit 30 by the first supply unit 10；Second conveying is single
Member 20, is delivered to subsequent handling from scribing unit 30 for substrate S；And control unit 90, the composition of control base board cutter device
The operation of element.
Scribing unit 30 is configured to be respectively formed scribing line along the x axis on the first face and the second face of substrate S.
Scribing unit 30 may include: the first frame 31, extend along the x axis；First scribe head 32, in the first frame 31
On be movably disposed along the x axis；Second frame 33, in the lower section of the first frame 31 and the first frame 31 in parallel along X-axis
Direction extends；And second scribe head 34, it is movably disposed along the x axis on the second frame 33.
Multiple first scribe heads 32 can be installed along the x axis on first frame 31, it can be along X-axis on the second frame 33
Direction is equipped with multiple second scribe heads 34.It could be formed with the sky that substrate S passes through between first frame 31 and the second frame 33
Between.First frame 31 and the second frame 33 can be made into individual component and be assembled, and also can be made into one.
First scribe head 32 and the second scribe head 34 can be arranged opposite to one anotherly along Z-direction.First scribe head, 32 He
The wheel support 35 for keeping stitch marker 351 can be set on second scribe head 34.The stitch marker being mounted on the first scribe head 32
351 and be mounted on the second scribe head 34 stitch marker 351 can along Z-direction it is opposite to one another arrange.
A pair of of stitch marker 351 can pressurize the first face and the second face of substrate S respectively.Add respectively in a pair of of stitch marker 351
In the state of the first face and the second face of pressing substrate S, by the first scribe head 32 and the second scribe head 34 relative to substrate S along X
Axis direction is mobile, and the first face and the second face of substrate S can be formed with scribing line along the x axis.
On the other hand, the first scribe head 32 and the second scribe head 34 are configured to be respectively relative to the first frame 31 and
Two frames 33 are removable along Z-direction.For this purpose, the first scribe head 32, the second scribe head 34 and the first frame 31, the second frame 33
Between can be set just like the linear motor or ball wire for using air pressure or hydraulic actuator, being operated by electromagnetic interaction
Thick stick isoline mobile mechanism.
As the first scribe head 32 and the second scribe head 34 are respectively relative to the first frame 31 and the second frame 33 along Z axis side
To movement, a pair of of stitch marker 351 can pressurize substrate S or from substrate S be spaced apart.In addition, by adjusting the first scribe head 32
The degree moved with the second scribe head 34 along Z-direction, adjustable a pair of stitch marker 351 are applied to the plus-pressure of substrate S.This
Outside, it is moved by the first scribe head 32 and the second scribe head 34 along Z-direction, adjustable a pair of stitch marker 351 is on substrate S
Cutting depth.
First supply unit 10 may include: supporting table 11, supporting substrate S；Fixture module 12, holding are supported on supporting table
The rear row end (trailing edge) of substrate S on 11；Support frame 13 connect with fixture module 12 and extends along the x axis；
First guide rail 14, connect with support frame 13 and extends along the y axis；First plate 15 is adjacently positioned and by base with scribing unit 30
Plate S is suspended or is adsorbed and is supported；And link block 16, fixture module 12 is selectively coupled in supporting table 11.
First plate 15 is configured to that substrate S can be made to suspend or adsorb.For example, can be formed on the surface of the first plate 15
There are the multiple slits connecting with gas supply source and vacuum source.When from gas supply source to multiple slits of the first plate 15 supply gas
When body, substrate S can suspend from the first plate 15.In addition, passing through the multiple of the first plate 15 when the negative pressure by being formed by vacuum source
When slit sucks gas, substrate S can be adsorbed on the first plate 15.
In the state that substrate S suspends from the first plate 15, substrate S can frictionally not moved with the first plate 15.In addition,
During forming scribing line on the first face of substrate S and the second face, substrate S can be absorbed and fixed on the first plate 15.
Supporting table 11 can move back and forth along the y axis.It is moved along the y axis according to supporting table 11, is supported on supporting table
Substrate S on 11 can be moved along the y axis.Supporting table 11 being capable of supporting substrate S and along level by vaccum bench, belt etc.
Mobile various structures are constituted.
Supporting table 11 can be made of a belt of the area more than entire area with substrate S.Due to supporting table
11 are made of a belt, can prevent the problem of may occurring due to multiple belts spaced apart structure along the x axis.
When supporting table 11 is made of belt, supporting table 11 is supported by multiple belt wheels 111.At least one of multiple belt wheels 111 can be with
It is for providing the driving pulley for the driving force for rotating supporting table 11.
It can have supporting surface in supporting table 11, the first face of substrate S and the support of the second face are on the support surface.In supporting table
It could be formed with receiving portion 112 on 11 supporting surface, fixture module 12 is inserted into and is housed in receiving portion 112.Multiple receiving portions 112
It can be arranged to correspond to multiple fixture modules 12 along the x axis.The number of receiving portion 112 can be with the number of fixture module 12
It is identical.Receiving portion 112 can be formed as the form for the through hole for penetrating through supporting table 11 along Z-direction.But the utility model
Without being limited thereto, when supporting table 11 is thick, receiving portion 112 can be formed as not penetrating through supporting table 11, but in 11 fovea superior of supporting table
Fall into the form of the slot formed.When receiving portion 112 is formed completely through the form in hole or recessed groove, 112 He of receiving portion can be prevented
Interference between substrate S.
As an example, it is housed in receiving portion 112 to 12 property of can choose of fixture module.That is, fixture module 12 can be with
Receiving portion 112 is moved and be housed in along Z-direction or is spaced apart from receiving portion 112.As another example, fixture module 12 can
To be always maintained at the state for being housed in receiving portion 112.
In this way, fixture module 12 can be housed in the receiving portion 112 being formed in supporting table 11, there is no need in order to accommodate
Fixture module 12 and supporting table 11 is divided into multiple portions.Accordingly it is possible to prevent because multiple supporting tables 11 are spaced along the x axis
The structure of arrangement and the problem of may occur.
Can be set between support frame 13 and the first guide rail 14 just like use air pressure or hydraulic actuator, by electromagnetism phase
The linear motor of interaction operation or ball-screw isoline mobile mechanism.Therefore, the rear row of substrate S is held in fixture module 12
In the state of end, support frame 13 is moved along the y axis by linear moving mechanism, and thus substrate S can be defeated along the y axis
It send.At this point, the mobile synchronizing moving of supporting table 11 and fixture module 12, and supporting substrate S can be stablized.
Fixture module 12 can pressurize substrate S rear row end and keep.As another example, fixture module 12 can be with structure
As there is the vacuum hole that connect with vacuum source with being capable of sorbing substrate S.
Multiple fixture modules 12 can arrange along the x axis along support frame 13.Fixture module 12 can be with along support
The guide part 18 that frame 13 extends is movably disposed along the x axis.For this purpose, can be set between fixture module 12 and guide part 18
It is mobile just like the linear motor or ball-screw isoline for using air pressure or hydraulic actuator, being operated by electromagnetic interaction
Mechanism.Therefore, it is moved along the x axis by multiple fixture modules 12 by linear moving mechanism, adjustable multiple jig plates
Interval between block 12.Therefore, the width that multiple fixture modules 12 can correspond to substrate S is suitably arranged, so as to steady
Surely substrate S is held.Multiple fixture modules 12 are moved along the x axis by linear moving mechanism, and thus fixture module 12 can be with
Positioned at the position for the multiple receiving portions 112 for corresponding respectively to supporting table 11.
The mobile module for moving fixture module 12 along Z-direction can be set between fixture module 12 and supporting table 13
19.Mobile module 19 can be using as using air pressure or hydraulic actuator, passed through the linear motor of electromagnetic interaction operation
Or ball-screw isoline mobile mechanism.When substrate S is admitted to supporting table 11 or sends out from supporting table 11, fixture module 12
It is spaced apart by mobile module 19 from supporting table 11 and mobile, it is dry between fixture module 12 and substrate S thereby, it is possible to prevent
It relates to.
Fixture module 12 is moved along Z-direction by mobile module 19 and can be housed in the receiving portion 112 of supporting table 11
Or it is detached from from receiving portion 112.
As shown in figure 3, being spaced apart in mobile state in fixture module 12 from supporting table 11, fixture module 12 can be from branch
The receiving portion 112 for supportting platform 11 is spaced apart.Therefore, during substrate S is admitted to supporting table 11, substrate S and folder can be prevented
Has the interference between module 12.
As shown in figure 4, fixture module 12 can be moved by mobile module 19 along Z-direction, to be housed in supporting table
In 11 receiving portion 112.Therefore, substrate S can be in height identical with the supporting surface of supporting table 11 by fixture module 12
It holds.
As shown in Figure 5 and Figure 6, fixture module 12 may include: substrate parts 121, be connected to support frame 13；Chuck body
123, it is movably disposed on substrate parts 121；A pair of of clamp member 124 is mounted in chuck body 123 and adjacent to each other
Ground it is mobile or be separated from each other it is mobile；Driver 127 drives a pair of of clamp member 124.
Substrate parts 121 can be fixed at interval on support frame 13, and fixture module 12 can be supported on support frame as a result,
On 13.
By a pair of of clamp member 124 by substrate S be placed in it is intermediate move adjacent to each other, the rear row end of substrate S can be by
A pair of of clamp member 124 is held.The part of substrate S held by a pair of of clamp member 124, which can be, is actually not used in product
Function part.For example, the part of substrate S held by a pair of of clamp member 124 is dropped after can be cutting substrate S
Dummy portions.A pair of of clamp member 124 can be rotated by being subject to respective central axis, be moved adjacent to each other or at interval
It is dynamic.For this purpose, the driving force that output from driver in future 127 can be set is transformed into the rotation for rotating a pair of of clamp member 124
Turn the mechanism of power.In the state that a pair of of clamp member 124 rotates to be separated from each other, substrate S can be from a pair of of fixture
The top of component 124 is conveyed along Z-direction, and the rear row end of substrate S can be located between a pair of of clamp member 124 as a result,.
But the utility model is not limited to this structure, being configured to a pair of of clamp member 124 can be along Z axis side
To with linear movement.For this purpose, the driving force that output from driver in future 127 can be set is transformed into a pair of of clamp member 124
With the mechanism of the mobile driving force of linear.
A pair of of clamp member 124 it is relative to each other to face, that is, a pair of of 124 phase of clamp member against substrate S
On one side with engagement pad 125 can be set on the face in the second face.Engagement pad 125 can be made of flexible materials such as such as polyurethane.
Engagement pad 125 absorbs the impact generated when a pair of of clamp member 124 holds the rear row end of substrate S, to prevent a pair of of fixture
Component 124 or substrate S are damaged.In addition, after engagement pad 125 makes a pair of of clamp member 124 hold substrate S with uniform plus-pressure
Row end.
Chuck body 123 is configured to removable relative to substrate parts 121.Thus, it is possible to adjust relative to substrate
The position of the chuck body 123 of component 121.It, can be with by adjusting the position of the chuck body 123 relative to substrate parts 121
Accurately adjust the position of a pair of of clamp member 124.For example, chuck body 123 can be relative to substrate parts 121 along X-axis side
It is movably constituted to, Y direction and/or Z-direction.Therefore, the adjustable chuck body relative to substrate parts 121
123 position along the x axis, in Y direction and/or Z-direction, thus, it is possible to adjust a pair of of clamp member 124 along X
Position in axis direction, Y direction and/or Z-direction.
It, can be in substrate parts 121 and fixture in order to adjust the position of the chuck body 123 relative to substrate parts 121
Position-regulation portion 122 is set between ontology 123.For example, position-regulation portion 122 may include bolt and the rotation for rotating bolt
Rotation mechanism.Therefore, it is rotated by bolt by rotating mechanism, chuck body 123 can be moved relative to substrate parts 121
It is dynamic, therefore, the position of adjustable a pair of clamp member 124.The bolt of position-regulation portion 122 is configured to can be by working
Personnel's manual operation.
Particularly, when being provided with multiple fixture modules 12 on support frame 13, pass through the position tune of multiple fixture modules 12
Section portion 122, the position of adjustable multiple respective a pair of of clamp members 124 of fixture module 12, makes multiple fixture modules as a result,
12 can uniformly hold the rear row end of substrate S.Since multiple fixture modules 12 uniformly hold the rear row end of substrate S, in handle
During holding the rear row end of substrate S and conveying substrate S, it can prevent bending of substrate S etc. from deforming.
Driver 127 can be made of electric motor, especially servo motor.As another example, driver 127 can
By the linear motor for such as using air pressure or hydraulic actuator, operate by electromagnetic interaction or the shifting of ball-screw isoline
Motivation structure is constituted.Driver 127 plays the role of the electric power using supply to driver 127 to drive a pair of of clamp member 124.
Driver 127 can be connect with control unit 90 and controlled unit 90 controls.
Link block 16 may include the first connecting portion 161 being arranged in supporting table 11 and be connected in fixture module 12
Second connecting portion 162.Second connecting portion 162 can be set on support frame 13 and be connected to fixture module by support frame 13
On 12.But it is not limited to the structure that second connecting portion 162 is arranged on support frame 13, can use can be by fixture module
12 are connected to the various structures in supporting table 11.First connecting portion 161 and second connecting portion 162 are arranged to ground opposite to each other.The
One interconnecting piece 161 and second connecting portion 162 can be combined selectively each other.
First connecting portion 161 may include insertion section 165, which is formed completely through supporting table 11 and is formed
The form or recess of through hole are formed in the form of the slot in supporting table 11.When insertion section 165 is formed completely through hole or recess
When the form of slot, the interference between insertion section 165 and substrate S can be prevented.
Second connecting portion 162 may include being inserted in the connecting component 163 of insertion section 165.In addition, second connecting portion 162
It can also include the driver 164 that connecting component 163 is moved to insertion section 165.
Insertion section 165 can have the size and shape of the size and shape corresponding to connecting component 163.Connecting component
163 can be made of for example rod-shaped component.Connecting component 163 can be tightly inserted into insertion section 165.Therefore, pass through company
Relay part 163 is inserted into insertion section 165, and supporting table 11 and fixture module 12 can connect integrally.Due to 11 He of supporting table
Fixture module 12 can connect integrally, and supporting table 11 and fixture module 12 can be moved integrally along the y axis.That is, support
Platform 11 can be moved along the y axis with fixture module 12 with synchronous speed.Accordingly it is possible to prevent because of supporting table 11 and jig plate
Block 12 is individually moved and sliding may occur, between substrate S and supporting table 11 and friction and the substrate S therefore generated
The problems such as with the damage of supporting table 11.
Driver 164 can be using as using air pressure or hydraulic actuator, passed through the straight line of electromagnetic interaction operation
Motor or ball-screw isoline mobile mechanism.
On the other hand, connecting component 163 is following structure by the mobile structure of driver 164: as shown in figure 3, working as
Substrate S prevents substrate S and connecting component 163 from interfering when (Y direction) is conveyed and be sent into supporting table 11 in transverse direction.
Therefore, when substrate S is conveyed along the direction that do not interfere with connecting component 163, that is, substrate S is sent from the upside of supporting table 11
When entering in supporting table 11, connecting component 163 can remain inserted in the state in insertion section 165.That is, by link block 16,
Fixture module 12 can keep the state being integrally attached in supporting table 11.In the case, link block 16 can play
The effect for the block piece for preventing fixture module 12 from moving along arbitrary transverse direction.In addition, link block 16, which can play, to make to press from both sides
Tool module 12 is housed in the canonical action on the accurate location in receiving portion 112.
As shown in figure 3, during substrate S is admitted in supporting table 11, connecting component 163 by driver 164 from
Supporting table 11 moves at interval, thus, it is possible to prevent the interference between connecting component 163 and substrate S.
As shown in figure 4, fixture module 12 is mobile and is housed in the receiving portion 112 of supporting table 11, at the rear row end of substrate S
In the state of being held by fixture module 12, connecting component 163 is mobile by driver 164 and is inserted into insertion section 165.Cause
This, supporting table 11 and fixture module 12 can be linked into an integrated entity by connecting component 163, as a result, supporting table 11 and fixture module
12 can be mobile simultaneously together.
On the other hand, the second supply unit 20 may include: the second plate 25, be disposed adjacently with scribing unit 30 and by base
Plate S is suspended or is adsorbed and is supported；Conveyer belt 21 is disposed adjacently with the second plate 25；Mobile device 26, by 25 He of the second plate
Conveyer belt 21 moves back and forth along the y axis.Mobile device 26 is played the second plate 25 and conveyer belt 21 with extending along the y axis
The effect that moves back and forth along the y axis of the second guide rail 24.Mobile device 26 can be using as used air pressure or hydraulic actuating
Device, the linear motor by electromagnetic interaction operation or ball-screw isoline mobile mechanism.
Second plate 25 and conveyer belt 21 are configured to move along the y axis together.That is, the second plate 25 and conveyer belt 21
It is configured to removable along the direction (Y direction) parallel with the direction of conveying substrate S together.
When being respectively formed scribing line on the first face and the second face of substrate S by scribing unit 30,25 direction of the second plate
First plate 15 is mobile, and the first scribe head 32 and the second scribe head 34 can be between the first plate 15 and the second plates 25 as a result,.When
Through scribing unit 30 when the first face of substrate S and the second face are respectively formed scribing line, since the second plate 25 is towards the first plate 15
It is mobile, therefore substrate S can be supported steadily on the first plate 15 and the second plate 25.
Conveyer belt 21 can be set multiple, and multiple conveyer belts 21 can be spaced each other along the x axis.Each conveyer belt 21
It is supported by multiple belt wheels 211, at least one of multiple belt wheels 211 can be to provide the drive for the driving force for rotating conveyer belt 21
Movable belt pulley.
Second plate 25 is configured to make that substrate S is suspended or adsorbed.For example, can be with shape on the surface of the second plate 25
Multiple slits that Cheng Youyu gas supply source is connected with vacuum source.It is supplied when from gas supply source to multiple slits of the second plate 25
When gas, substrate S can suspend from the second plate 25.In addition, passing through the more of the second plate 25 when the negative pressure by being formed by vacuum source
When a slit sucking gas, substrate S can be adsorbed on the second plate 25.
, can be to the slit supply gas of the second plate 25 during substrate S is transported to the second plate 25, base as a result,
Plate S can frictionally not moved with the second plate 25.
In addition, substrate S can be absorbed and fixed at the during forming scribing line on the first face of substrate S and the second face
On two plates 25.
In addition, being adsorbed on the first plate 15 in substrate S after being respectively formed scribing line on the first face and the second face of substrate S
In the state of the second plate 25, as the second plate 25 is moved away from from the first plate 15, substrate S can be divided on the basis of scribing line
It cuts.
It on the other hand, can be to the slit of the second plate 25 during substrate S is moved to subsequent handling from the second plate 25
Supply gas, substrate S can frictionally not moved with the second plate 25 as a result,.
Hereinafter, being carried out referring to Fig. 7 to Figure 10 to the operation of the cutter for substrate of embodiment according to the present utility model
Explanation.
As shown in Fig. 2, fixture module 12 and connecting component 163 can be from supporting tables before substrate S is sent into supporting table 11
11 move at interval.In this state, substrate S is admitted to supporting table 11.When substrate S is admitted to supporting table 11, substrate S
Rear row end can be positioned corresponding to the position of fixture module 12.As another example, support frame 13 moves along the y axis
When, fixture module 12 can be moved to the position for being suitble to hold the rear row end of substrate S.
As shown in fig. 7, fixture module 12 is mobile by mobile module 19 and is housed in the receiving portion 112 of supporting table 11.
In addition, holding the rear row end of substrate S by a pair of of clamp member 124 of fixture module 12.Since fixture module 12 is being contained in branch
The rear row end of substrate S is held in the state of supportting in the receiving portion 112 of platform 11, therefore substrate S can be in the support with supporting table 11
It is supported in fixture module 12 in the identical height in face.
In addition, connecting component 163 is mobile by driver 164 and is inserted into the insertion section 165 of supporting table 11, prop up as a result,
Support platform 11 and fixture module 12 can be linked into an integrated entity by connecting component 163.
As shown in figure 8, substrate S is supported on the supporting surface of supporting table 11, at the rear row end of substrate S by fixture module 12
In the state of holding, supporting table 11 and fixture module 12 move along the y axis towards scribing unit 30.At this point, due to supporting table 11
It is linked into an integrated entity with fixture module 12 by connecting component 163, therefore supporting table 11 and fixture module 12 can be together along Y-axis sides
To movement.
During substrate S is transported to scribing unit 30 by the first supply unit 10, substrate S can be by from the
One plate 15 injection gas and from the first plate 15 suspend.
In addition, second plate 25 moves along the y axis towards the first plate 15 in the state that the first plate 15 is fixed.As a result,
Narrower intervals between one plate 15 and the second plate 25, so that substrate S can be supported steadily on the first plate 15 and the second plate 25.
During substrate S is transported towards scribing unit 30, substrate S can pass through supply to the first plate 15 and second
The gas of plate 25 suspends from the first plate 15 and the second plate 25.
In addition, as shown in figure 9, substrate S is attracted to the first plate when substrate S is located on the first plate 15 and the second plate 25
15 and second on plate 25.At this point, after the stitch marker 351 of scribe head 32,34 contacts substrate S respectively, with moving along the x axis
It is dynamic, X-axis cutting line is formed on substrate S.
In addition, as shown in Figure 10, formed after X-axis cutting line on substrate S, the stitch marker 351 of scribe head 32,34 is from base
Plate S is moved at interval.In addition, in substrate S in the state that the first plate 15 and the second plate 25 are absorption, when the second plate 25 from
When first plate 15 is moved away from, substrate S is divided along X-axis cutting line.
In addition, along the divided substrate S of X-axis cutting line subsequent handling can be transferred to by conveyer belt 21.
As is illustrated by figs. 11 and 12, had in the cutter for substrate of another embodiment according to the present utility model
Link block 16 may include the first connecting portion 161 being arranged in supporting table 11 and be connected in fixture module 12 second
Interconnecting piece 162.Second connecting portion 162 can be set on support frame 13 and is connected in fixture module 12 by support frame 13.
But it is not limited to the structure that second connecting portion 162 is arranged on support frame 13, can use can connect fixture module 12
Various structures in supporting table 11.First connecting portion 161 and second connecting portion 162 are arranged to ground opposite to each other.First connection
Portion 161 and second connecting portion 162 can be combined selectively each other.
First connecting portion 161 may include: a pair of of support member 166, arrange opposite to each other to ground；Mobile mechanism 167, with
A pair of of support member 166 connects, and a pair of of support member 166 is moved along direction adjacent to each other and the direction being separated from each other
It is dynamic.In the embodiments of the present invention, provides and be connected separately with mobile mechanism 167 in a pair of of support member 166
Structure.But the utility model is without being limited thereto, can use and be connected with shifting on one only in a pair of of support member 166
Motivation structure 167, so that one in only a pair of of support member 166 carries out mobile structure.
Mobile mechanism 167 can be using as straight in operated using air pressure or hydraulic actuator, by electromagnetic interaction
Line motor or ball-screw isoline mobile mechanism.
Second connecting portion 162 may include the connecting component 163 being arranged between a pair of of support member 166.In addition, second
Interconnecting piece 162 can also include the driver 164 being selectively moved to connecting component 163 between a pair of of support member 166.
Connecting component 163 can be made of for example rod-shaped component.When a pair of of support member 166 is along direction adjacent to each other
When mobile, connecting component 163 can be closely tightly attached between a pair of of support member 166.It is inserted into and is fixed by connecting component 163
Between a pair of of support member 166, supporting table 11 and fixture module 12 be can connect integrally.
Driver 164 can be using as using air pressure or hydraulic actuator, passed through the straight line of electromagnetic interaction operation
Motor or ball-screw isoline mobile mechanism.
In the cutter for substrate of another embodiment according to the present utility model, as shown in figure 11, it can pass through
Substrate S is sent into supporting table 11 from the top of supporting table 11 by manipulator, robot etc..
As shown in Figure 13 and Figure 14, had in the cutter for substrate of another embodiment according to the present utility model
Link block 16 may include the first connecting portion 161 being arranged in supporting table 11 and be connected in fixture module 12 second
Interconnecting piece 162.Second connecting portion 162 can be set on support frame 13 and be connected to fixture module 12 by support frame 13.But
It is the structure for being not limited to second connecting portion 162 and being arranged on support frame 13, can use can be connected to fixture module 12
Various structures in supporting table 11.First connecting portion 161 and second connecting portion 162 are arranged to ground opposite to each other.First connecting portion
161 and second connecting portion 162 can selectively combine each other.
First connecting portion 161 may include a pair of of the support member 168 arranged opposite to each other to ground.
Second connecting portion 162 may include the connecting component 163 being arranged between a pair of of support member 168.In addition, second
Interconnecting piece 162 may include the driver 164 being selectively moved to connecting component 163 between a pair of of support member 166.
Connecting component 163 can be made of for example rod-shaped component.A pair of of support member 168 it is relative to each other to face
On can be attached with elastic cushion 169.By this elastic cushion 169, connecting component 163 can be inserted in a pair of of support member 168
Between can be securely fixed.It is inserted between a pair of of support member 168 by connecting component 163 and fixed, supporting table 11
It can connect integrally with fixture module 12.The state that connecting component 163 is inserted between a pair of of support member 168 can be kept,
Or connecting component 163 is detached from by the way that driver 164 is mobile from a pair of of support member 168.Therefore, connecting component 163 can be with
It is optionally inserted in a pair of of support member 168.
Driver 164 can be using as using air pressure or hydraulic actuator, passed through the straight line of electromagnetic interaction operation
Motor or ball-screw isoline mobile mechanism.
In the cutter for substrate of another embodiment according to the present utility model, as shown in figure 13, it can pass through
Substrate S is sent into supporting table 11 from the top of supporting table 11 by manipulator, robot etc..
The cutter for substrate of embodiment according to the present utility model holds the fixture module 12 at the rear row end of substrate S
It is contained in the receiving portion 112 being formed in supporting table 11, so as in height identical with the supporting surface of supporting table 11
Hold substrate S.Substrate S can stablize to be supported in supporting table 11 and stablized by fixture module 12 and hold as a result,.Substrate S as a result,
Scribing unit 30 can be delivered to by stabilization.
In addition, the cutter for substrate of embodiment according to the present utility model, supporting table 11 and fixture module 12 pass through
Link block 16 links into an integrated entity, and supporting table 11 and fixture module 12 can be moved steadily together as a result,.Therefore, Neng Goufang
Only friction due to supporting table 11 and fixture module 12 are individually moved between the substrate S that may occur and supporting table 11, thus
It can prevent substrate S and the damage of supporting table 11 etc..
Preferred embodiments of the present invention by exemplary illustrate, but the scope of the utility model is not limited to this
Kind particular implementation can suitably be changed in the range of claims are recorded.
Claims (8)
1. a kind of cutter for substrate, wherein the cutter for substrate includes:
Scribing unit forms scribing line on substrate；And
The substrate is delivered to the scribing unit by supply unit,
The supply unit includes:
Supporting table has the supporting surface for supporting the substrate；
Fixture module holds the substrate；And
Link block connects the fixture module and the supporting table.
2. cutter for substrate according to claim 1, wherein the link block includes:
First connecting portion is arranged in the supporting table；And
Second connecting portion is connected to the fixture module and connect with the first connecting portion.
3. cutter for substrate according to claim 2, wherein the first connecting portion is configured to be arranged in the support
Insertion section on platform, the second connecting portion are configured to the interconnecting piece being inserted into the insertion section of the first connecting portion
Part.
4. cutter for substrate according to claim 2, wherein the first connecting portion is configured to be arranged in the support
A pair of of support member on platform, the second connecting portion are configured to the connecting component being inserted between the pair of support member.
5. cutter for substrate according to claim 4, wherein the pair of support member it is relative to each other to face
On be attached with elastic cushion.
6. cutter for substrate according to claim 4, wherein connected at least one of the pair of support member
There is the moving machine for moving at least one of the pair of support member along the pair of support member direction adjacent to each other
Structure.
7. the cutter for substrate according to any one of claim 3 to 6, wherein the second connecting portion further includes
Driver, the driver move the connecting component along the direction adjacent with the first connecting portion and direction spaced apart
It is dynamic.
8. cutter for substrate according to claim 1, wherein the fixture module, which is housed in, is formed in the supporting table
On receiving portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2018-0038710 | 2018-04-03 | ||
| KR1020180038710A KR102147127B1 (en) | 2018-04-03 | 2018-04-03 | Apparatus for cutting substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209567999U true CN209567999U (en) | 2019-11-01 |
Family
ID=68171320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821911245.XU Expired - Fee Related CN209567999U (en) | 2018-04-03 | 2018-11-20 | Cutter for substrate |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR102147127B1 (en) |
| CN (1) | CN209567999U (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102304578B1 (en) * | 2019-12-20 | 2021-09-27 | 주식회사 탑 엔지니어링 | Scribing appatus |
| CN115677205B (en) * | 2022-10-28 | 2023-11-07 | 湖南邵虹特种玻璃股份有限公司 | Automatic feeding device for heat treatment of glass substrate |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1741527A1 (en) | 2004-03-15 | 2007-01-10 | Mitsuboshi Diamond Industrial Co., Ltd. | Substrate dividing system, substrate manufacturing equipment, substrate scribing method and substrate dividing method |
| KR101449487B1 (en) * | 2012-06-01 | 2014-10-14 | 한국미쯔보시다이아몬드공업(주) | Panel cutting device and method of transferring panel in the same |
| KR102310157B1 (en) * | 2015-03-16 | 2021-10-12 | 주식회사 탑 엔지니어링 | Scribing apparatus |
| JP6439716B2 (en) * | 2016-02-17 | 2018-12-19 | 三星ダイヤモンド工業株式会社 | Substrate processing equipment |
| KR102525334B1 (en) * | 2016-03-03 | 2023-04-27 | 주식회사 탑 엔지니어링 | Scribing apparatus |
-
2018
- 2018-04-03 KR KR1020180038710A patent/KR102147127B1/en active IP Right Grant
- 2018-11-20 CN CN201821911245.XU patent/CN209567999U/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20190115702A (en) | 2019-10-14 |
| KR102147127B1 (en) | 2020-08-25 |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191101 Termination date: 20201120 |