JP2011097499A - 音叉型振動素子、音叉型振動子及び発振器 - Google Patents
音叉型振動素子、音叉型振動子及び発振器 Download PDFInfo
- Publication number
- JP2011097499A JP2011097499A JP2009251732A JP2009251732A JP2011097499A JP 2011097499 A JP2011097499 A JP 2011097499A JP 2009251732 A JP2009251732 A JP 2009251732A JP 2009251732 A JP2009251732 A JP 2009251732A JP 2011097499 A JP2011097499 A JP 2011097499A
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- JP
- Japan
- Prior art keywords
- tuning fork
- fork type
- drive electrode
- vibration element
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000005684 electric field Effects 0.000 claims abstract description 4
- 239000010453 quartz Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 17
- 230000000694 effects Effects 0.000 description 16
- 238000005530 etching Methods 0.000 description 12
- 239000013078 crystal Substances 0.000 description 10
- 238000005452 bending Methods 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009251732A JP2011097499A (ja) | 2009-11-02 | 2009-11-02 | 音叉型振動素子、音叉型振動子及び発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009251732A JP2011097499A (ja) | 2009-11-02 | 2009-11-02 | 音叉型振動素子、音叉型振動子及び発振器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011097499A true JP2011097499A (ja) | 2011-05-12 |
| JP2011097499A5 JP2011097499A5 (OSRAM) | 2012-08-30 |
Family
ID=44113911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009251732A Withdrawn JP2011097499A (ja) | 2009-11-02 | 2009-11-02 | 音叉型振動素子、音叉型振動子及び発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011097499A (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5689118A (en) * | 1979-12-21 | 1981-07-20 | Citizen Watch Co Ltd | Longitudinal oscillator |
| JPS5853215A (ja) * | 1981-09-25 | 1983-03-29 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
-
2009
- 2009-11-02 JP JP2009251732A patent/JP2011097499A/ja not_active Withdrawn
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5689118A (en) * | 1979-12-21 | 1981-07-20 | Citizen Watch Co Ltd | Longitudinal oscillator |
| JPS5853215A (ja) * | 1981-09-25 | 1983-03-29 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
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