JP2011064659A - Clamp mechanism of probe card and inspection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a clamp mechanism of a probe card capable of reliably preventing the probe card from falling. <P>SOLUTION: The clamp mechanism 10 includes: a cylinder ring 11 fixed to a lower surface of an insert ring 21; a piston ring 12 elevated while being fitted to the cylinder ring 11; and an outer ring 13 connected to the piston ring 12 and supporting the probe card 30. Further, the clamp mechanism 10 includes: a deep groove 21A formed over the entire periphery of an outer peripheral section on a lower surface of the insert ring 21 and supplying and discharging compressed air; an O-ring 14 for maintaining internal compressed air at prescribed pressure within the deep groove 21A; an annular projection formed over the entire periphery on an upper surface of the piston ring 12 and elevating a seal member within the deep groove 21A by the piston ring 12; and a plurality of coil springs 15 elastically installed between a flange section 11B of the cylinder ring 11 and a ring section 12B of the piston ring 12 with a prescribed interval in a circumferential direction. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a probe card clamp mechanism and an inspection apparatus, and more particularly to a probe card clamp mechanism and an inspection apparatus that can reliably prevent a probe card from falling during an inspection.

  A conventional inspection apparatus includes a loader chamber 1 and a prober chamber 2 adjacent to each other as shown in FIG. The loader chamber 1 includes a cassette storage unit that stores a plurality of semiconductor wafers W in units of cassettes, a wafer transfer mechanism that transfers the semiconductor wafers W from the cassette one by one, and a time during which the semiconductor wafers W are transferred by the wafer transfer mechanism. And a pre-alignment mechanism for pre-aligning the semiconductor wafer W. The prober chamber 2 is in contact with a wafer chuck 3 configured to hold a semiconductor wafer W and move in the X, Y, Z, and θ directions, and a plurality of electrode pads formed on the semiconductor wafer W on the wafer chuck 3. A probe card 4 having a plurality of probes 4A, and a clamp mechanism 5 for fixing the probe card 4 via a card holder (not shown), and each formed on the semiconductor wafer W under the control of a control device The device is configured to inspect the electrical characteristics of the device. In FIG. 3, 6 is an alignment mechanism for aligning the semiconductor wafer W and the probe card 4 in cooperation with the wafer chuck 3, 6A is an upper camera, and 6B is a lower camera.

  As shown in FIG. 3, the clamp mechanism 5 is attached to the opening of the head plate 7 that forms the upper surface of the prober chamber 2. For example, the conventional clamping mechanism 5 is disclosed in Patent Document 1 proposed by the present applicant. Therefore, hereinafter, the clamping mechanism described in Patent Document 1 will be described with reference to FIGS. 4 and 5.

  As shown in FIGS. 4 and 5, the clamp mechanism 5 is a lock that is aligned with the center of the insert ring 8 fixed to the head plate 7 and is attached to the lower surface thereof in the direction of arrow A in FIG. A ring 51, a support ring 52 attached to the lower surface of the insert ring 8 so as to surround the lock ring 51, and the support ring 52 and the support ring 52 can be rotated forward and backward in the direction of arrow B in FIG. And an air cylinder 55 coupled to the lock ring 51 for forward / reverse rotation operation as will be described later, and an air cylinder 55 coupled to the operation ring 53 via a lever 54. The operation ring 53 is rotated forward and backward by a predetermined angle θ by expansion and contraction of the 55 rod 55A.

  As shown in FIG. 5, the lock ring 51 is mounted on a cylinder ring 511 fitted to the cylindrical portion 8 </ b> A of the inner periphery of the insert ring 8 and an upper surface of the flange portion of the outer periphery of the cylinder ring 511 to form an airtight chamber 512. An O-ring 513, a piston ring 514 that has a downward groove in which the O-ring 513 can be fitted to form an airtight chamber 512 and that moves up and down according to the cylinder ring 511, and is formed over the entire circumference of the piston ring 514. A card receiving ring 515 that engages with the groove and is rotatable in the circumferential direction. Further, a plurality of depressions are formed in the lower surface of the insert ring 8 at equal intervals in the circumferential direction so as to be positioned directly above the piston ring 514, and a coil spring 516 is mounted on these depressions. The piston ring 514 is always urged downward by the plurality of coil springs 516.

  As shown in FIGS. 4 and 5, a plurality of engaging portions 515 </ b> A extend toward the center on the inner peripheral surface of the card receiving ring 515, and the outer peripheral surface of the card holder 41 has a circumferential direction. A plurality of engaging portions 41A are extended outward at equal intervals. Each engagement portion 41A of the card holder 41 passes between each engagement portion 515A of the card receiving ring 515, and each engagement portion 515A and each engagement portion 41A are engaged by rotating the card receiving ring 515 in the circumferential direction. Together, the card holder 41 is supported by the card receiving ring 515. The insert ring 8 and the cylinder ring 511 are each formed with a flow path that leads from the outside to the hermetic chamber 512, and compressed air is supplied from the air supply source into the hermetic chamber 512 through the flow path.

  Therefore, in the airtight chamber 512, the card holder 41 is sandwiched between the card receiving ring 515 and the cylinder ring 511 which are lifted together with the piston ring 514 by the air pressure increased by receiving compressed air as shown in FIG. When the probe card is replaced, the card receiving ring 515 is lowered via the piston ring 514 by the urging force of the coil spring 516 and the exhaust in the airtight chamber 512, and the card holder 41 is released in this state. 515 is rotated to remove the probe card.

  Further, the card receiving ring 515 is formed with a reverse L-shaped groove having a vertical groove and a horizontal groove, and an operation pin (not shown) attached to the inner peripheral surface of the operation ring 53 is reverse L-shaped. The operation ring 53 and the card receiving ring 515 are connected to each other by being fitted into a groove (not shown). Further, a first engagement portion (not shown) is provided on the inner peripheral surface of the operation ring 53 at a predetermined interval in the circumferential direction from the operation pin, and a circumferential direction is provided below the first engagement portion. An inclined surface that is inclined in the direction is formed. A second engagement portion (not shown) is provided on the outer peripheral surface of the card receiving ring 515 at a predetermined interval in the circumferential direction from the longitudinal groove, and the first engagement portion is provided below the second engagement portion. An inclined surface having the same inclination angle that can be engaged with the inclined surface is formed. Then, when the operation ring 53 is operated and the card receiving ring 515 is rotated via the operation pin to hold the card holder 41 between the card receiving ring 515 and the cylinder ring 511, the compressed air in the airtight chamber 512 is caused by some cause. Even if it comes off, the first engaging portion, the inclined surface, and the inclined surface of the second engaging portion are engaged, so that the card receiving ring 515 and thus the probe card do not fall.

Japanese Patent Laid-Open No. 10-308424

  However, the clamp mechanism 5 of Patent Document 1 has a first inclined surface on each of the operation ring 53 and the card receiving ring 515 as a measure for preventing the probe card 4 from dropping when the compressed air escapes from the airtight chamber 512 for some reason. The second engaging portion must be provided, and the structure of the clamp mechanism 5 becomes complicated, resulting in a problem that the processing cost increases.

  The present invention has been made to solve the above problems, and provides a probe card clamping mechanism and an inspection apparatus that can reliably prevent the probe card from dropping and can simplify the structure and reduce the cost. It is intended to provide.

  The probe card clamping mechanism according to claim 1 of the present invention is a probe card clamping mechanism fixed to an insert ring fixed to a head plate of an inspection apparatus and detachably fixing the probe card. A cylinder ring fixed to the cylinder ring, a piston ring that moves up and down in a state of being fitted to the cylinder ring from the outside, and an outer ring that is connected to the piston ring and supports the probe card. A deep groove formed over the entire circumference of the outer peripheral edge of the lower surface and for supplying and discharging gas; a ring-shaped seal member mounted in the deep groove so as to keep the gas therein at a predetermined pressure; and the piston The seal member is formed on the upper surface of the ring over the entire circumference and is moved up and down by the piston ring. A ring-shaped protrusion that moves up and down in the deep groove; and a plurality of springs elastically spaced at predetermined intervals in the circumferential direction between the flange portion of the cylinder ring and the upper surface of the piston ring. To do.

  According to a second aspect of the present invention, there is provided a probe card clamping mechanism, wherein the probe card clamping mechanism is fixed to an insert ring fixed to a head plate of an inspection apparatus and the probe card is detachably fixed. A cylinder ring having a flange portion fixed to the lower surface of the ring; a piston ring that moves up and down in a state of being fitted to the cylinder ring from the outside; and a groove formed on the outer peripheral surface of the piston ring along the circumferential direction; And an outer ring having a support part for supporting the probe card, and a deep groove connected to a gas supply source is formed on the entire lower surface of the insert ring. At the same time, a ring-shaped seal member is attached to the deep groove so as to keep the inside airtight. A ring-shaped protrusion for supporting the seal member in the deep groove is formed on the ton ring, and a plurality of circumferentially spaced intervals are provided between the flange portion of the cylinder ring and the upper surface of the piston ring. The piston ring is lowered with respect to the cylinder ring by the pressure of the gas supplied into the deep groove, and the probe card is removed, and the gas in the deep groove is exhausted to exhaust the gas. The piston ring is raised by a plurality of springs, and the probe card is sandwiched between the support portions of the cylinder ring and the outer ring.

  According to a third aspect of the present invention, there is provided the probe card clamping mechanism according to the first or second aspect, wherein the outer ring supports the probe card via a card holder. It is what.

  According to a fourth aspect of the present invention, there is provided the clamp mechanism for a probe card according to any one of the first to third aspects, wherein a gas supply source is connected to the deep groove. It is a feature.

  According to a fifth aspect of the present invention, there is provided an inspection apparatus comprising: a probe card that performs electrical inspection by making electrical contact with an object to be inspected; a clamp mechanism that detachably holds the probe card; and the clamp mechanism In the inspection apparatus provided with a head plate fixed through an insert ring, the clamp mechanism moves up and down in a state where the cylinder ring is fixed to the lower surface of the insert ring and the cylinder ring is fitted from the outside. A deep ring formed on the outer peripheral edge of the lower surface of the insert ring and for supplying and discharging gas; and a piston ring; and an outer ring connected to the piston ring and supporting the probe card; A ring-shaped seal member mounted in the deep groove so as to keep the gas therein at a predetermined pressure; and the piston ring. A ring-shaped projection formed over the entire circumference and moving the seal member up and down in the deep groove by raising and lowering the piston ring, and a circumferential direction between the flange portion of the cylinder ring and the upper surface of the piston ring. And a plurality of springs mounted at predetermined intervals.

  According to a sixth aspect of the present invention, there is provided an inspection apparatus according to the present invention, wherein a flow card that performs electrical inspection by making electrical contact with an object to be inspected, a clamp mechanism that detachably holds the probe card, and the clamp mechanism In the inspection apparatus including the head plate fixed through the insert ring, the clamp mechanism is fitted to the cylinder ring having a flange portion fixed to the lower surface of the insert ring and the cylinder ring from the outside. A piston ring that moves up and down in a state, and an outer ring that has a protrusion that fits into a groove formed on the outer peripheral surface of the piston ring along the circumferential direction and that has a support portion that supports the probe card. In addition, a deep groove connected to a gas supply source is formed on the lower surface of the insert ring over the entire circumference, and the deep groove has a groove. A ring-shaped seal member is mounted so as to keep the inside airtight, and the piston ring has a ring-shaped projection for supporting the seal member in the deep groove, and the cylinder ring has a flange portion. A plurality of springs are elastically mounted at predetermined intervals in the circumferential direction between the upper surface of the piston ring and the piston ring, and the piston ring is lowered with respect to the cylinder ring by the pressure of gas supplied into the deep groove. The probe card is removed, the gas in the deep groove is exhausted, the piston ring is raised by the plurality of springs, and the probe card is sandwiched between the support portions of the cylinder ring and the outer ring. It is what.

  The inspection device according to claim 7 of the present invention is the inspection device according to claim 5 or 6, wherein the outer ring supports the probe card via a card holder. It is.

  An inspection apparatus according to an eighth aspect of the present invention is the inspection apparatus according to any one of the fifth to seventh aspects, wherein a gas supply source is connected to the deep groove. Is.

  According to the present invention, it is possible to provide a probe card clamping mechanism and an inspection apparatus that can surely prevent the probe card from dropping and can simplify the structure and reduce the cost.

It is sectional drawing which shows the right half of one Embodiment of the clamp mechanism of the probe card | curd of this invention. (A), (b) is sectional drawing equivalent to FIG. 1 which respectively shows the clamp mechanism of the probe card | curd shown in FIG. 1, (a) is a figure which shows the state which fixed the probe card, (b) is a probe card. It is a figure which shows the state to remove. It is a front view which fractures | ruptures and shows a part of conventional inspection apparatus. It is a top view which shows the clamp mechanism of the conventional probe card. It is sectional drawing which follows IV-IV of FIG.

  Hereinafter, the present invention will be described based on the embodiment shown in FIGS.

  The inspection apparatus of the present embodiment includes a loader chamber and a prober chamber, and is configured according to a conventional inspection apparatus except for a probe card clamping mechanism (hereinafter simply referred to as a “clamp mechanism”) provided in the prober chamber. ing. Therefore, in the following, the description will focus on the clamp mechanism 10 of the present embodiment.

  For example, as shown in FIG. 1, the clamp mechanism 10 of the present embodiment is fitted from the outside of the cylinder ring 11 to the cylinder ring 11 fixed to the inner peripheral edge of the lower surface of the insert ring 21 fixed to the head plate 20. A piston ring 12 that moves up and down in a state, and an outer ring 13 that is connected to the lower end of the piston ring 12 and supports the probe card 30, and attaches and detaches the probe card 30 as described later. It is configured. A card holder 31 is attached to the probe card 30, and the clamp mechanism 10 attaches and detaches the probe card 30 via the card holder 31. The insert ring 21, the cylinder ring 11, the piston ring 12, and the outer ring 13 all share an axis.

  The clamp mechanism 10 according to the present embodiment has a support ring shown in FIGS. 4 and 5 and an operation ring supported by the support ring so as to be able to rotate in the forward and reverse directions. A lever to be rotated, an air cylinder, and the like are provided, and the outer ring 13 is configured to rotate forward and backward. Since these members are configured in the same manner as in the prior art, they are not shown in FIGS.

  As shown in FIG. 1, for example, a ring-shaped deep groove 21 </ b> A is formed on the outer peripheral edge of the lower surface of the insert ring 21 over the entire circumference, and the insert ring 21 has a gas directed radially inward from the outer peripheral surface thereof. The passage 21B is formed at a plurality of locations. The cross-sectional shape in the radial direction of the deep groove 21A becomes narrower toward the innermost part, and communicates with the gas passages 21B at a plurality of locations at the top. For example, an air supply source (not shown) is connected to the openings of these gas passages 21B, and compressed air is supplied from the air supply source into the deep groove 12A through the plurality of gas passages 21B as indicated by an arrow X. In addition, the compressed air is exhausted from the deep groove 21A to the outside through a plurality of gas passages 21B as indicated by an arrow Y. The pressure of the compressed air in the deep groove 21A can be appropriately set according to the use of the inspection device.

  As described above, the air pipe connected to the gas passage 21B and the air pipe for rotating the outer ring 13 are both the head plate 20 so that the gas passage 21B is opened at the outer peripheral surface of the insert ring 21. It is piped on the upper surface side, ensuring the convenience of piping work. Conventionally, since these air pipes are piped on the lower surface side of the head plate, the workability of the pipe work is poor, and much time has to be spent on the pipe work. In addition, since air piping or the like is arranged on the upper surface of the head plate 20, the lower surface of the head plate 20 to which the probe card 30 is attached can be flattened, and troubles due to loosening of screws due to heat, vibration, etc. can be prevented. Can do.

  As shown in FIG. 1, the cylinder ring 11 includes a cylindrical straight body portion 11A and a flange portion 11B formed at the lower end of the cylinder portion 11A, and the upper end surface of the cylinder portion 11A is the lower surface of the insert ring 21. The connection is fixed.

  Further, as shown in FIG. 1, the piston ring 12 has a cylindrical straight body portion 12 </ b> A formed larger in diameter than the cylinder ring 11, and is orthogonal to the straight body portion 12 </ b> A slightly below the upper end of the straight body portion 12 </ b> A. A wide ring portion 12B formed as described above, a flange portion 12C formed at the lower end of the straight body portion 12A, and an annular projection portion 12D protruding from the ring portion 12B on an extension line of the straight body portion 12A. As described later, the cylinder ring 11 is configured to move up and down. The annular protrusion 12D is fitted into the ring-shaped deep groove 21A of the insert ring 21 and supports a seal member described later. A groove for connecting the outer ring 13 is formed over the entire circumference between the ring portion 12B and the flange portion 12C.

  As shown in FIG. 1, a circular seal member (for example, an O-ring) 14 is fitted over the entire circumference of the deep groove 21A, and the O-ring 14 closes the opening of the deep groove 21A, and the compressed air inside is predetermined. Maintaining pressure. Further, the annular protrusion 12A of the piston ring 12 is fitted into the deep groove 21A, and the O-ring 14 in the deep groove 21A is supported.

  Further, as shown in FIG. 1, a plurality of, for example, circular recesses are provided on the upper surface of the flange portion 11B of the cylinder ring 11 and the lower surface of the ring portion 12B of the piston ring 12 at predetermined intervals over the entire circumference. The coil springs 15 are elastically mounted between these recesses, and the piston ring 12 is always urged upward in a horizontal state. Accordingly, the compressed air is supplied into the deep groove 21A of the insert ring 21 to lower the O-ring 14 and the piston ring 12, and the compressed air in the deep groove 21A is exhausted to attach the piston ring 12 to the plurality of coil springs 15. Ascends and rises.

  Further, as shown in FIG. 1, the outer ring 13 includes an engaging portion 13A that is formed on the outer peripheral edge and engages with a groove formed between the ring portion 12B and the flange portion 12C of the piston ring 12, and an engaging portion. A ring portion 13B extending from the lower side of 13A in parallel with the engaging portion 13A toward the center and having a predetermined width, and a position at a predetermined interval in the circumferential direction of the inner peripheral end of the ring portion 13B from the position toward the center And a plurality of card receiving portions 13 </ b> C that are extended. And between the adjacent card receiving parts 13C is formed as a notch part, and a plurality of engaging parts 31A extending in the horizontal direction from the outer peripheral end of the ring-shaped card holder 31 pass through this notch part. Yes. Further, the card receiving portion 13C is formed thinner than the ring portion 13B and forms a step portion at the boundary with the ring portion 13B. The height of the stepped portion is formed to be substantially the same as the thickness of the engaging portion 31A of the card holder 31.

  Accordingly, when the piston ring 12 is lifted via the plurality of coil springs 15, the card receiving portion 13 </ b> C of the outer ring 13 and the flange portion 11 </ b> B of the cylinder ring 11 sandwich the engaging portion 31 </ b> A of the card holder 31. 30 can be fixed to the clamping mechanism 10.

  Next, the operation of the clamp mechanism 10 will be described with reference to FIG. For example, when the probe card 30 fixed to the clamp mechanism 10 is exchanged, for example, the card transport mechanism moves up to just below the clamp mechanism 10 and then rises to receive the probe card 30.

  At this time, when compressed air of the air supply source is supplied from the gas passage 21B of the insert ring 21 into the deep groove 21A and the air pressure in the deep groove 21A rises, the air pressure in the deep groove 21A overcomes the urging force of the coil spring 15 and becomes O The ring 14 is lowered. Accordingly, the piston ring 12 and the outer ring 13 that support the O-ring 14 are lowered from the state shown in FIG. 2A, and the engaging portion 31A of the card holder 31 is moved as shown in FIG. The probe card 30 is released from being separated from the flange portion 11B of the cylinder ring 11, and the probe card 30 is supported by the card transport mechanism. As a result, the engaging portion 31 </ b> A of the card holder 31 slightly floats from the card receiving portion 13 </ b> C of the outer ring 13.

  During this time, a rotating operation ring (not shown) rotates the outer ring 13 so that the engaging portion 31A of the card holder 31 is disengaged from the card receiving portion 13C of the outer ring 13. Subsequently, the card transport mechanism is lowered and transported from the clamp mechanism 10 to the outside of the prober chamber. Thereafter, the next probe card 30 is conveyed to the clamp mechanism 10 by the card conveying mechanism, and when the outer ring 13 is rotated by the reverse operation to the removal of the probe card 30, the engaging portion of the card holder 31 of the probe card 30 is engaged. 31A is located on the card receiving portion 13C of the outer ring 13. At this time, if the compressed air in the deep groove 21A is exhausted to lower the air pressure, the urging force of the coil spring 15 overcomes the air pressure in the deep groove 21A, lifts the probe card 30 through the piston ring 12 and the outer ring 13, and The card holder 31 is sandwiched between the card receiving portion 13 </ b> C of the ring 13 and the flange portion 11 </ b> B of the cylinder ring 11, and the probe card 30 is fixed by the clamp mechanism 10. As a result, the electrical characteristics of the semiconductor wafer can be inspected with the probe card 30.

  Even if the pressure of the compressed air in the deep groove 21A of the insert ring 21 is lowered for some reason when the electrical characteristics of the semiconductor wafer is inspected by the probe card 30, the clamp mechanism 10 of the present embodiment uses a coil. Since the probe card 30 is fixed by the urging force of the spring 15, the probe card 30 does not fall from the clamp mechanism 10, and the probe card 30 hits the semiconductor wafer and the probe card 30 and the semiconductor wafer are damaged. Therefore, a predetermined inspection can be performed reliably.

  As described above, according to the present embodiment, the probe card 30 is fixed by the urging force of the coil spring 15 unlike the conventional case, so that the air pressure in the deep groove 21A of the insert ring 21 may decrease for some reason. However, the probe card 30 does not fall from the clamp mechanism 10 and does not damage the probe card 30 or the semiconductor wafer, so that stable inspection can always be performed.

  In addition, according to the present embodiment, since the air piping or the like used for the clamp mechanism 10 is arranged on the upper surface of the head plate 20, the work efficiency can be remarkably improved. Further, since the lower surface of the head plate 20 is flat, it is possible to eliminate the loosening of the screws due to heat, vibration, or the like.

  In addition, this invention is not restrict | limited to the said embodiment at all, Each component can be changed suitably as needed.

  The present invention can be suitably used for an inspection apparatus in the semiconductor manufacturing field.

DESCRIPTION OF SYMBOLS 10 Clamping mechanism 11 Cylinder ring 11B Flange part 12 Piston ring 12D Annular projection part 13 Outer ring 13C Card receiving part (support part)
14 O-ring (seal member)
15 Coil spring 20 Head plate 21 Insert ring 21A Deep groove 30 Probe card 31 Card holder

Claims (8)

  In the probe card clamping mechanism which is fixed to the insert ring fixed to the head plate of the inspection apparatus and detachably fixes the probe card, the cylinder ring fixed to the lower surface of the insert ring, and the cylinder ring from the outside A piston ring that moves up and down in a fitted state, and an outer ring that is connected to the piston ring and supports the probe card. Deep groove to be supplied / discharged, ring-shaped seal member mounted in the deep groove so as to keep the gas therein at a predetermined pressure, and lifting and lowering of the piston ring formed on the entire upper surface of the piston ring A ring-shaped protrusion for raising and lowering the seal member in the deep groove, and the cylinder The probe card of the clamping mechanism, characterized in that it comprises between the upper surface of the flange portion and the piston ring of grayed and a plurality of springs which are elastically at predetermined intervals in the circumferential direction.   In a probe card clamping mechanism which is fixed to an insert ring fixed to a head plate of an inspection apparatus and detachably fixes a probe card, a cylinder ring having a flange portion fixed to the lower surface of the insert ring, and the cylinder ring A piston ring that moves up and down in a state of being fitted from the outside, and a support portion that supports the probe card and has a protrusion that fits in a groove formed on the outer peripheral surface of the piston ring along the circumferential direction. And a deep groove connected to a gas supply source is formed over the entire circumference on the lower surface of the insert ring, and the deep groove has a ring-shaped seal so as to keep the airtight inside thereof. The piston ring is provided with a ring-shaped protrusion for supporting the seal member in the deep groove. In addition, a plurality of springs are elastically provided at predetermined intervals in the circumferential direction between the flange portion of the cylinder ring and the upper surface of the piston ring, and the gas supplied into the deep groove The piston ring is lowered with respect to the cylinder ring by the pressure of the cylinder ring and the probe card is removed, and the gas in the deep groove is exhausted and the piston ring is raised by the plurality of springs to raise the cylinder ring and the outer ring. A probe card clamping mechanism, wherein the probe card is clamped by a support portion of a ring.   3. The probe card clamping mechanism according to claim 1, wherein the outer ring supports the probe card via a card holder.   The probe card clamping mechanism according to claim 1, wherein a gas supply source is connected to the deep groove.   A flow card that performs electrical inspection by making electrical contact with an object to be inspected, a clamp mechanism that detachably holds the probe card, and an inspection that includes a head plate to which the clamp mechanism is fixed via an insert ring In the apparatus, the clamp mechanism includes: a cylinder ring fixed to the lower surface of the insert ring; a piston ring that moves up and down in a state of being fitted to the cylinder ring from the outside; and the probe card connected to the piston ring. A deep groove formed on the outer peripheral edge of the lower surface of the insert ring over the entire circumference and in which gas is supplied and discharged, and the gas inside the deep groove is maintained at a predetermined pressure. A ring-shaped seal member mounted on the piston ring, and the piston ring is formed over the entire circumference of the piston ring; A plurality of springs mounted at predetermined intervals in the circumferential direction between a ring-shaped projection for raising and lowering the seal member in the deep groove by raising and lowering the ring, and a flange portion of the cylinder ring and the upper surface of the piston ring And an inspection apparatus characterized by comprising:   A flow card that performs electrical inspection by making electrical contact with an object to be inspected, a clamp mechanism that detachably holds the probe card, and an inspection that includes a head plate to which the clamp mechanism is fixed via an insert ring In the apparatus, the clamp mechanism includes a cylinder ring having a flange portion fixed to the lower surface of the insert ring, a piston ring that moves up and down in a state of being fitted to the cylinder ring from the outside, and an outer peripheral surface on the piston ring. An outer ring having a protrusion that fits into a groove formed along the circumferential direction and having a support portion that supports the probe card, and is connected to a gas supply source on the lower surface of the insert ring A deep groove is formed over the entire circumference, and the deep groove has a ring-shaped seal portion so as to keep the inside airtight. The piston ring has a ring-shaped projection for supporting the seal member in the deep groove, and a circumferential direction is provided between the flange portion of the cylinder ring and the upper surface of the piston ring. A plurality of springs are mounted at predetermined intervals on the inner surface of the deep groove, the piston ring is lowered with respect to the cylinder ring by the pressure of the gas supplied into the deep groove, and the probe card is removed. An inspection apparatus characterized in that the gas is exhausted and the piston ring is raised by the plurality of springs so that the probe card is clamped between the support portions of the cylinder ring and the outer ring.   The inspection device according to claim 5 or 6, wherein the outer ring supports the probe card via a card holder. The inspection apparatus according to claim 5, wherein a gas supply source is connected to the deep groove.

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