CN102022403A - Clamping mechanism for probe card and test device - Google Patents
Clamping mechanism for probe card and test device Download PDFInfo
- Publication number
- CN102022403A CN102022403A CN2010102906544A CN201010290654A CN102022403A CN 102022403 A CN102022403 A CN 102022403A CN 2010102906544 A CN2010102906544 A CN 2010102906544A CN 201010290654 A CN201010290654 A CN 201010290654A CN 102022403 A CN102022403 A CN 102022403A
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- ring
- probe card
- piston ring
- deep trouth
- fastening device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The invention provides a clamping mechanism for a probe card for reliably preventing the probe card from dropping off and a test device. The clamping mechanism (10) comprises a cylinder ring (11) fixed on the lower surface of an inserted ring (21), a piston ring (12) for hoisting in the manner of jogged with the cylinder ring, an outer ring (13) connected to the piston ring and supporting the probe card (30), a deep groove (21A) formed on the peripheral edge and around the periphery of the lower surface of the inserted ring (21) for discharging the compressed air, an O-shaped sealing ring (14) for keeping a preset pressure of the compressed air in the deep groove, an annular bulge formed around the periphery of the upper surface of the piston ring and hoisting a sealing part in the deep groove under the action of the piston ring, and a plurality of spiral springs (15) arranged between a flange part (11B) of the cylinder ring and an annular part (12B) of the piston ring in the manner of being elastically arranged at an preset interval along the peripheral direction.
Description
Technical field
The present invention relates to the fastening device and the testing fixture of probe card, relate more particularly to a kind of fastening device and testing fixture that can when checking, prevent the probe card that probe card drops reliably.
Background technique
Existing testing fixture, for example shown in Figure 3, have the loader chamber 1 and the probe chamber 2 that adjoin each other.Loader chamber 1 comprises: the loader container, and it is that many pieces of semiconductor wafer W are taken in by unit with the loader; Wafer transfer mechanism, it is moved into from the each one piece of ground of loader and takes out of semiconductor wafer W; And prealignment mechanism, it carries out prealignment to semiconductor wafer W by wafer transfer mechanism conveyance semiconductor wafer W the time.Probe chamber 2 constitutes and comprises: wafer chuck 3, and it is constituted as the maintenance semiconductor wafer W and can moves to X, Y, Z and θ direction; Probe card 4, it has a plurality of probe 4A that contact with a plurality of electrode pads that form on the semiconductor wafer W on this wafer chuck 3; And fastening device 5, it fixes this probe card 4 by deck (not shown), under the control of control gear, is formed on the electrical characteristic inspection of each device on the semiconductor wafer W.And in Fig. 3,6 is the aligning guide that carries out the contraposition of semiconductor wafer W and probe card 4 with wafer chuck 3 concerted actions, and 6A is last photographic camera, and 6B is following photographic camera.
As shown in Figure 3, fastening device 5 is installed on the opening portion of the top board 7 that forms probe chamber 2 upper surfaces.Existing fastening device 5, the fastening device of putting down in writing in the patent documentation 1 that for example has the applicant to propose.Therefore, below, according to Fig. 4, Fig. 5, the fastening device that patent documentation 1 is put down in writing describes.
Shown in Fig. 4,5, fastening device 5 comprises: locking ring 51, thereby its insertion ring 8 on making the center and being fixed on top board 7 is consistent can be with positive and negative its lower surface that is installed in rotatably of the arrow A direction of Fig. 4; Supporting ring 52 is installed in the lower surface that inserts ring 8 with the state that surrounds this locking ring 51; Operation ring 53 links with this supporting ring 52, being used for as described later locking ring 51 being carried out positive and negative rotary manipulation, and can positive and negatively be supported rotatably by the arrow B direction of this supporting ring 52 at Fig. 4; And cylinder 55, link by rod member 54 and this operation ring 53.Bar 55A's by cylinder 55 is flexible, makes operation ring 53 positive and negative rotation predetermined angle theta.
As shown in Figure 5, locking ring 51 comprises: cylinder ring 511, and it is chimeric with the cylindrical portion 8A that inserts week in the ring 8; O-ring seals 513, it is installed on the lip part upper surface of these cylinder ring 511 peripheries and forms sealed chamber 512; Piston ring 514, it is followed cylinder ring 511 and carries out lifting, and has the groove towards the below, this O-ring seals 513 of setting-in in this groove and can form sealed chamber 512; Card bears ring 515, and it engages with the groove that forms in the mode that spreads all over 514 full weeks of this piston ring and the edge circumferentially can rotate freely.And then, the lower surface that inserts ring 8 along circumferentially equally spaced be formed with a plurality of recesses and make this recess be positioned at piston ring 514 directly over, helical spring 516 is installed in these recesses.By a plurality of helical springs 516 always downwards to piston ring 514 application of forces.
As Fig. 4, shown in Figure 5, bear at card on the inner peripheral surface of ring 515, be provided with a plurality of engagement portion 515A along circumferentially equally spaced extending towards the center, and, at the outer circumferential face of deck 41, be provided with a plurality of engagement portion 41A along circumferentially equally spaced extending toward the outer side.Each engagement portion 41A of deck 41 passes card and bears between ring each engagement portion 515A of 515, bears ring 515 along rotating in a circumferential direction by card, and each engagement portion 41A engage with each engagement portion 515A thus, thereby encircles 515 and support decks 41 with blocking to bear.And, on insertion ring 8 and cylinder ring 511, be formed with the stream that leads to sealed chamber 512 from the outside respectively, in sealed chamber 512, supply with pressurized air via this stream from the air supply source.
Therefore, in sealed chamber 512, use and born ring 515 by the air pressure of accepting pressurized air and rising by the card of jack-up with piston ring 514 1 causes and cylinder ring 511 is seized deck 41 on both sides by the arms as illustrated in fig. 5.And when changing probe card, by the active force of helical spring 516 with to the exhaust in the sealed chamber 512, card bears ring 515 and descends by piston ring 514, thereby removes deck 41, under this state, makes card bear ring 515 rotations, dismounting probe card.
And, bear on the ring 515 at card, be formed with the groove that the side view that is made of pod and translot is the word of falling L shape, the operation that is installed in operation ring 53 inner peripheral surfaces is embedded in the groove (not shown) of the word of falling L shape with pin (not shown), thereby binding operation ring 53 and card bear ring 515.And then, at the inner peripheral surface of operation ring 53, being provided with from operation and using pin to first engagement portion of circumferentially spaced predetermined interval (not shown), the downside in this first engagement portion is formed with the plane of inclination to peripheral, oblique.Bear ring 515 outer circumferential face at card, be provided with from pod to second engagement portion of circumferentially spaced predetermined interval (not shown), the downside in second engagement portion, be formed with can with the identical plane of inclination, tilt angle of the plane of inclination engaging of first engagement portion.Then, when operation ring 53 is operated, make card bear ring 515 rotations by operative pin, when bearing ring 515 and cylinder ring 511 clamping decks 41 with card, even the pressurized air in the sealed chamber 512 is owing to some reasons are revealed, the plane of inclination of the plane of inclination of first engagement portion and second engagement portion also engages, and card bears ring 515 even probe card can not drop.
Patent documentation 1: Japanese kokai publication hei 10-308424 communique
But, the fastening device 5 of patent documentation 1, it is as the countermeasure that prevents that probe card 4 from dropping because of some reasons at pressurized air when sealed chamber 512 is revealed, must and block at operation ring 53 to bear first, second engagement portion with plane of inclination is set respectively on the ring 515, therefore the structure of fastening device 5 becomes complicated, the problem that exists processing cost to increase.
Summary of the invention
The present invention makes for solving above-mentioned problem, and its purpose is, a kind of fastening device and testing fixture that can prevent the probe card that drops and can reduce cost by simplified structure of probe card reliably is provided.
The fastening device of technological scheme 1 described probe card of the present invention, on the insertion ring that its top board that is fixed on testing fixture is fixed, and can install and remove ground stationary probe card, it is characterized in that, comprise: be fixed on the cylinder ring of described insertion ring lower surface, to carry out the piston ring of lifting and to link and support the outer shroud of described probe card from its chimeric state in outside with described piston ring with described cylinder ring, also comprise: deep trouth, its outer periphery portion at described insertion ring lower surface forms in the mode that spreads all over full week, is used for for the exhaust body; The sealed member of ring-type, it is installed in described deep trouth its gas inside is remained predetermined pressure; The projection of ring-type, it forms in the mode that spreads all over full week at described piston ring upper surface, and makes the lifting in described deep trouth of described sealed member by the lifting of described piston ring; And a plurality of springs, between the upper surface of the lip part of described cylinder ring and described piston ring, install with elastic type along the circumferentially spaced predetermined interval.
And, the fastening device of technological scheme 2 described probe card of the present invention, it is fixed on and inserts on the ring, and can install and remove ground stationary probe card, described insertion ring is fixed on the top board of testing fixture, it is characterized in that, comprise cylinder ring with the lip part that is fixed on described insertion ring lower surface, with described cylinder ring from the piston ring of its outside chimeric status lifting and have with at the outer circumferential face of described piston ring along the chimeric jut of the groove of circumferential formation and have the outer shroud of the support that supports described probe card; Lower surface at described insertion ring, be formed with the deep trouth that is connected with the gas supply source in the mode that spreads all over full week, and the sealed member that ring-type is installed in described deep trouth is to keep the airtight of its inside, on described piston ring, be formed with the circular protrusion of the described sealed member in the described deep trouth of supporting, and, between the upper surface of the lip part of described cylinder ring and described piston ring, circumferentially with elastic type a plurality of springs are being installed across predetermined interval, with the pressure that supplies to the air in the described deep trouth the described relatively cylinder ring of described piston ring is descended, thereby dismantle described probe card, and discharge the gas in the described deep trouth, and described piston ring is risen, thereby with the described probe card of support clamping of described cylinder ring and described outer shroud by described a plurality of springs.
And the fastening device of technological scheme 3 described probe card of the present invention in technological scheme 1 or technological scheme 2 described inventions, is characterized in that described outer shroud supports described probe card via deck.
And the fastening device of technological scheme 4 described probe card of the present invention in the described invention of arbitrary mode, is characterized in that to the technological scheme 3 in technological scheme 1, is connected with the gas supply source on described deep trouth.
And technological scheme 5 described testing fixtures of the present invention comprise: probe card, and it is by checking with tested electrical the contact electrically of having a medical check-up; Fastening device, it can keep described probe card with installing and removing; And top board, it is via inserting the fixing described fastening device of ring, it is characterized in that, described fastening device comprises the cylinder ring that is fixed on described insertion ring lower surface, to link and to support the outer shroud of described probe card from the piston ring of the chimeric state lifting in its outside with described piston ring with described cylinder ring, also comprise: deep trouth, its outer periphery portion at described insertion ring lower surface forms in the mode that spreads all over full week, and is used for for the exhaust body; The sealed member of ring-type, it is installed in described deep trouth its gas inside is remained predetermined pressure; The projection of ring-type, it forms in the mode that spreads all over full week at described piston ring upper surface, and makes the lifting in described deep trouth of described sealed member by the lifting of described piston ring; And a plurality of springs, between the upper surface of the lip part of described cylinder ring and described piston ring, circumferentially installing with elastic type across predetermined interval.
And technological scheme 6 described testing fixtures of the present invention comprise: probe card, and it is by checking with tested electrical the contact electrically of having a medical check-up; Fastening device, it can keep described probe card with installing and removing; And top board, by inserting the fixing described fastening device of ring, it is characterized in that, described fastening device comprises the cylinder ring with the lip part that is fixed on described insertion ring lower surface, with with described cylinder ring from the piston ring of its chimeric state lifting in outside and have with at the outer circumferential face of described piston ring along the chimeric jut of the groove of circumferential formation and have the outer shroud of the support of the described probe card of supporting, lower surface at described insertion ring, be formed with the deep trouth that is connected with the gas supply source in the mode that spreads all over full week, and the sealed member that ring-type is installed in described deep trouth is to keep the airtight of its inside, on described piston ring, be formed with the circular protrusion of the described sealed member in the described deep trouth of supporting, and, between the upper surface of the lip part of described cylinder ring and described piston ring, circumferentially with elastic type a plurality of springs are being installed across predetermined interval, with the pressure that supplies to the gas in the described deep trouth the described relatively cylinder ring of described piston ring is descended, thereby dismantle described probe card, and discharge the gas in the described deep trouth, and described piston ring is risen, thereby with the described probe card of support clamping of described cylinder ring and described outer shroud by described a plurality of springs.
And technological scheme 7 described testing fixtures of the present invention in technological scheme 5 or technological scheme 6 described inventions, is characterized in that described outer shroud supports described probe card by deck.
And technological scheme 8 described testing fixtures of the present invention in the described invention of arbitrary mode, are connected with the gas supply source in technological scheme 5 to the technological scheme 7 on described deep trouth.
According to the present invention, can provide the fastening device and the testing fixture of the probe card that drops and reduce cost by simplified structure that can prevent probe card reliably.
Description of drawings
Fig. 1 is the sectional view of the right half part of a mode of execution of the fastening device of expression probe card of the present invention.
Fig. 2 (a), Fig. 2 (b) are respectively and the suitable sectional view of Fig. 1 of representing the fastening device of probe card shown in Figure 1, (a) have fixed the figure of the state of probe card for expression, (b) are the figure of the state of expression dismounting probe card.
Fig. 3 is for cutting the part of existing testing fixture open the plan view of expression.
Fig. 4 is the plan view of the fastening device of the existing probe card of expression.
Fig. 5 is the sectional view along IV-IV of Fig. 3.
The explanation of label
10... fastening device, 11... cylinder ring, 11B... lip part, 12... piston ring, 12D... ring-shaped protrusion, 13... outer shroud, 13C... card bear portion's (support), 14...O shape seal ring (sealed member), 15... helical spring, 20... top board, 21... insertion ring, 21A... deep trouth, 30... probe card, 31... deck.
Embodiment
Below, according to Fig. 1, mode of execution shown in Figure 2, the present invention will be described.
The testing fixture of present embodiment has loader chamber and probe chamber, remove the fastening device be located at the probe card in the probe chamber (below, abbreviate " fastening device " as.) outside, be configured according to existing testing fixture.Therefore, below, the fastening device 10 that centers on present embodiment describes.
For example shown in Figure 1, the fastening device 10 of present embodiment constitutes and comprises: cylinder ring 11, and it is fixed on the inner circumference edge portion that inserts ring 21 lower surfaces, and described insertion ring 21 is fixed on the top board 20; Piston ring 12, it carries out lifting with the state chimeric from the outside of cylinder ring 11; And outer shroud 13, this outer shroud 13 links with the underpart of piston ring 12, and bears ring as the card of supporting probe card 30, and as described later, is used to install and remove probe card 30.Set up deck 31 on probe card 30, fastening device 10 is by deck 31 mounting or dismounting probe card 30.Insert ring 21, cylinder ring 11, piston ring 12 and outer shroud 13 and all share the axle core.
The fastening device 10 of present embodiment constitutes, except that each above-mentioned structure member, with existing the same, also have Fig. 4, supporting ring shown in Figure 5, can the positive and negative operation ring that is supported rotatably on supporting ring, the rod member that makes the positive and negative rotation of operation ring and cylinder etc., and be used for outer shroud 13 is carried out positive and negative rotary manipulation.Therefore these parts do not illustrate in Fig. 1 and Fig. 2 owing to constitute in the same manner with existing.
As shown in Figure 1, in the outer periphery portion that inserts ring 21 lower surfaces, for example be formed with the deep trouth 21A of ring-type in the mode that spreads all over full week, and, in inserting ring 21, formed from its outer circumferential face towards the gas passageway of radially inner side 21B at a plurality of positions.The radial cross section shape of deep trouth 21A narrows down in the whereabouts bosom more more, and is communicated with the gas passageway 21B at a plurality of positions at its top.Opening at these gas passageways 21B is connected with for example air supply source (not shown) respectively, from the air supply source via a plurality of gas passageway 21B to shown in arrow X, supply with pressurized air in the deep trouth 12A suchly, and, shown in arrow Y, pressurized air is carried out exhaust to the outside via a plurality of gas passageway 21B from deep trouth 21A suchly.Compressed-air actuated pressure in the deep trouth 21A can suitably be set with regard to the use of testing fixture.
As mentioned above, gas passageway 21B opens mode at the outer circumferential face that inserts ring 21 with its opening, the air pipe arrangement that is used for being connected, outer shroud 13 is rotated the air pipe arrangement of operation,, thereby has guaranteed the convenience of pipe distribution operation all by the upper surface side of pipe arrangement at top board 20 with gas passageway 21B.In the past, because these air pipe arrangements are by the lower face side of pipe arrangement at top board, so the operation of pipe distribution operation is poor, pipe distribution operation had to expend a large amount of time.And, because air pipe arrangement etc. has been configured in the upper surface of top board 20, therefore can make the lower surface of the top board 20 that probe card 30 has been installed smooth, thereby can prevent the generation of the bad situation that causes that screw fluffs etc. and cause because of heat, vibration etc.
As shown in Figure 1, cylinder ring 11 has the stretched 11A of portion cylindraceous and is formed on the lip part 11B of cylinder portion 11A lower end, and the upper-end surface of the 11A of cylinder portion is connected and fixed on the lower surface that inserts ring 21.
And as shown in Figure 1, piston ring 12 comprises: the stretched 12A of portion cylindraceous, and its diameter forms greatly than cylinder ring 11; The ring portion 12B of wide cut, the 12A of stretched portion upper end slightly below form in the mode that intersects vertically with the 12A of stretched portion; Lip part 12C is formed on the lower end of the 12A of stretched portion; And on the elongation line of the 12A of stretched portion from the outstanding ring-shaped protrusion 12D of ring portion 12B, and as described later, constitute in the mode of relative cylinder ring 11 liftings.Ring-shaped protrusion 12D is chimeric with the deep trouth 21A of the ring-type of inserting ring 21, supports hereinafter described sealed member.And, be formed with the groove that is used to connect outer shroud 13 in the mode that spreads all over full week between ring portion 12B and the lip part 12C.
As shown in Figure 1, in deep trouth 21A, embed the sealed member (for example, O-ring seals) 14 of toroidal,, thereby the pressurized air of inside is remained predetermined pressure by the opening portion of O-ring seals 14 shutoff deep trouth 21A in the mode that spreads all over full week.And, in deep trouth 21A, embed the ring-shaped protrusion 12D that piston ring 12 is arranged, supporting the O-ring seals 14 in the deep trouth 21A.
And then, as shown in Figure 1, on the lower surface of the ring portion 12B of the upper surface of the lip part 11B of cylinder ring 11 and piston ring 12, respectively along circumferentially spreading all over the recess that full week is provided with a plurality of for example toroidals with separating predetermined interval, with elastic type helical spring 15 is installed respectively between these recesses, it is always executed upward with level piston ring 12 and puts forth effort.Therefore, by in the deep trouth 21A that inserts ring 21, supplying with pressurized air, O-ring seals 14 and piston ring 12 are descended, and by discharging the pressurized air in the deep trouth 21A, piston ring 12 is risen by a plurality of helical spring 15 application of forces.
And as shown in Figure 1, outer shroud 13 comprises: engagement portion 13A, and it is formed on outer periphery, and engages with groove between ring portion 12B that is formed on piston ring 12 and the lip part 12C; Ring portion 13B, its below and engagement portion 13A from engagement portion 13A has the extension setting of predetermined width ground abreast towards the center; And the card of many places bears the 13C of portion, and its Zhou Duan in the ring portion 13B extends towards the center in the position of circumferentially spaced predetermined interval and is provided with.And the card of adjacency bears between the 13C of portion and forms notch part, and makes and extend a plurality of engagement portion 31A that are provided with from the outer circumference end of the deck 31 of ring-type to substantially horizontal and pass this notch part.And card bears the 13C of portion and forms the wall shape thinner than ring portion 13B, thereby at its boundary formation end difference with ring portion 13B.The height of this end difference forms identical size in fact with the wall thickness of the engagement portion 31A of deck 31.
Therefore, piston ring 12 rises by a plurality of helical springs 15, bears the engagement portion 31A of the lip part 11B clamping deck 31 of 13C of portion and cylinder ring 11 thus with the card of outer shroud 13, thereby probe card 30 can be fixed on the fastening device 10.
Then, with reference to Fig. 2, the action of fastening device 10 is described.For example, when replacing is fixed on probe card 30 on the fastening device 10, for example block transport mechanism move to fastening device 10 under rise thereafter and become the situation of accepting probe card 30.
At this moment, when the pressurized air of gas supply source is supplied in the deep trouth 21A and during the pressure rises in the deep trouth 21A, because the air pressure in the deep trouth 21A overcomes the active force of helical spring 15, O-ring seals 14 descends from the gas passageway 21B that inserts ring 21.Follow in this, the piston ring 12 and the outer shroud 13 of supporting O-ring seals 14 descend from the state shown in Fig. 2 (a), and shown in this figure (b), the engagement portion 31A of deck 31 separates from the lip part 11B of cylinder ring 11, thereby releasing is fixing to probe card, simultaneously with card transport mechanism supporting probe card 30.Thus, the engagement portion 31A of deck 31 bears the 13C of portion from the card of outer shroud 13 and floats slightly.
During this, rotary manipulation ring (not shown) makes outer shroud 13 rotations, bears the 13C of portion thereby the engagement portion 31A of deck 31 departs from the card of outer shroud 13.Then, the card transport mechanism descends, and from the outside conveyance of fastening device 10 to the probe chamber.Thereafter, if with the conveyance of next probe card 30 usefulness card transport mechanism to fastening device 10, use operation opposite when dismantling probe card 30 that outer shroud 13 is rotated, then the engagement portion 31A of the deck 31 of probe card 30 card that is positioned at outer shroud 13 bears the 13C of portion.At this moment, when the pressurized air in discharging deep trouth 21A reduces air pressure, the active force of helical spring 15 overcomes the air pressure in the deep trouth 21A, by piston ring 12 and outer shroud 13 jack-up probe card 30, bear the lip part 11B clamping deck 31 of 13C of portion and cylinder ring 11 with the card of outer shroud 13, probe card 30 usefulness fastening devices 10 are fixing.Thus, can enough probe card 30 carry out the electrical characteristic inspection of semiconductor wafer.
Even when the electrical characteristic of carrying out semiconductor wafer by probe card 30 is checked, sometimes owing to the compressed-air actuated pressure in the deep trouth 21A of some reasons insertion rings 21 descends, also owing in the fastening device 10 of present embodiment, use the active force stationary probe card 30 of helical spring 15, therefore probe card 30 can not drop from fastening device 10, and probe card 30 can damage probe card 30 and semiconductor wafer, the just inspection that can be scheduled to reliably with the semiconductor wafer collision.
As the above explanation of carrying out, according to present embodiment, because with the existing active force stationary probe card 30 of differently using helical spring 15, even therefore insert the interior air pressure of the deep trouth 21A of ring 21 owing to some reasons descend, probe card 30 yet can not drop and damages probe card 30, semiconductor wafer from fastening device 10, just can carry out stable inspection.
And,, owing to will be used in the upper surface that the air pipe arrangement etc. of fastening device 10 has been configured in top board 20, the operating efficiency of upkeep operation etc. is improved extraordinarily according to present embodiment.And,, therefore can eliminate fluffing of the screw that causes because of heat, vibration etc. because the lower surface of top board 20 is smooth.
And the present invention is not limited to above-mentioned mode of execution, can suitably change each constituting component as required.
Industrial applicibility
The present invention can utilize in the testing fixture of field of semiconductor manufacture rightly.
Claims (8)
1. the fastening device of a probe card, on the insertion ring that its top board that is fixed on testing fixture is fixed, and can install and remove ground stationary probe card, it is characterized in that, comprise: be fixed on the cylinder ring of described insertion ring lower surface, to carry out the piston ring of lifting and to link and support the outer shroud of described probe card from its chimeric state in outside with described piston ring with described cylinder ring, also comprise: deep trouth, its outer periphery portion at described insertion ring lower surface forms in the mode that spreads all over full week, is used for for the exhaust body; The sealed member of ring-type, it is installed in described deep trouth its gas inside is remained predetermined pressure; The projection of ring-type, it forms in the mode that spreads all over full week at described piston ring upper surface, and makes the lifting in described deep trouth of described sealed member by the lifting of described piston ring; And a plurality of springs, between the upper surface of the lip part of described cylinder ring and described piston ring, install with elastic type along the circumferentially spaced predetermined interval.
2. the fastening device of a probe card, on the insertion ring that its top board that is fixed on testing fixture is fixed, and can install and remove ground stationary probe card, it is characterized in that, comprising: have the lip part that is fixed on described insertion ring lower surface the cylinder ring, with described cylinder ring from the piston ring of its outside chimeric status lifting and have with at the outer circumferential face of described piston ring along the chimeric jut of the groove of circumferential formation and have the outer shroud of the support that supports described probe card; Lower surface at described insertion ring, be formed with the deep trouth that is connected with the gas supply source in the mode that spreads all over full week, and the sealed member that ring-type is installed in described deep trouth is to keep the airtight of its inside, on described piston ring, be formed with the circular protrusion of the described sealed member in the described deep trouth of supporting, and, between the upper surface of the lip part of described cylinder ring and described piston ring, with elastic type a plurality of springs are installed along the circumferentially spaced predetermined interval, with the pressure that supplies to the gas in the described deep trouth the described relatively cylinder ring of described piston ring is descended to dismantle described probe card, and discharge the gas in the described deep trouth, by described a plurality of springs described piston ring is risen, thereby with the described probe card of support clamping of described cylinder ring and described outer shroud.
3. the fastening device of probe card as claimed in claim 1 or 2 is characterized in that, described outer shroud supports described probe card by deck.
4. as the fastening device of each described probe card in the claim 1～3, it is characterized in that, on described deep trouth, be connected with the gas supply source.
5. testing fixture comprises: probe card, its by with tested have a medical check-up electrically to contact electrically check; Fastening device, it can keep described probe card with installing and removing; And top board, it is by inserting the fixing described fastening device of ring, it is characterized in that, described fastening device comprises the cylinder ring that is fixed on described insertion ring lower surface, to link and to support the outer shroud of described probe card from the piston ring of the chimeric state lifting in its outside with described piston ring with described cylinder ring, also comprise: deep trouth, its outer periphery portion at described insertion ring lower surface forms in the mode that spreads all over full week, and is used for for the exhaust body; The sealed member of ring-type, it is installed in described deep trouth its gas inside is remained predetermined pressure; The projection of ring-type, it forms in the mode that spreads all over full week at described piston ring upper surface, and makes the lifting in described deep trouth of described sealed member by the lifting of described piston ring; And a plurality of springs, between the upper surface of the lip part of described cylinder ring and described piston ring, install with elastic type along the circumferentially spaced predetermined interval.
6. testing fixture comprises: probe card, its by with tested have a medical check-up electrically to contact electrically check; Fastening device, it can keep described probe card with installing and removing; And top board, by inserting the fixing described fastening device of ring, it is characterized in that, described fastening device comprises: the cylinder ring with the lip part that is fixed on described insertion ring lower surface, with with described cylinder ring from the piston ring of its chimeric state lifting in outside and have with at the outer circumferential face of described piston ring along the chimeric jut of the groove of circumferential formation and have the outer shroud of the support of the described probe card of supporting, lower surface at described insertion ring, be formed with the deep trouth that is connected with the gas supply source in the mode that spreads all over full week, and the sealed member that ring-type is installed in described deep trouth is to keep the airtight of its inside, on described piston ring, be formed with the circular protrusion of the described sealed member in the described deep trouth of supporting, and, between the upper surface of the lip part of described cylinder ring and described piston ring, with elastic type a plurality of springs are installed along the circumferentially spaced predetermined interval, with the pressure that supplies to the gas in the described deep trouth the described relatively cylinder ring of described piston ring is descended to dismantle described probe card, and discharge the gas in the described deep trouth, and described piston ring is risen, thereby with the described probe card of support clamping of described cylinder ring and described outer shroud by described a plurality of springs.
7. as claim 5 or 6 described testing fixtures, it is characterized in that described outer shroud supports described probe card by deck.
8. as each described testing fixture in the claim 5～7, it is characterized in that, on described deep trouth, be connected with the gas supply source.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009218242A JP2011064659A (en) | 2009-09-21 | 2009-09-21 | Clamp mechanism of probe card and inspection apparatus |
| JP2009-218242 | 2009-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102022403A true CN102022403A (en) | 2011-04-20 |
Family
ID=43864059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102906544A Pending CN102022403A (en) | 2009-09-21 | 2010-09-20 | Clamping mechanism for probe card and test device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2011064659A (en) |
| KR (1) | KR20110031886A (en) |
| CN (1) | CN102022403A (en) |
| TW (1) | TW201142304A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107526015A (en) * | 2016-06-22 | 2017-12-29 | 思达科技股份有限公司 | Testing device, clamping assembly and probe card carrier |
| CN111430232A (en) * | 2019-01-09 | 2020-07-17 | 东京毅力科创株式会社 | Plasma processing apparatus and mounting table of plasma processing apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102507996B (en) * | 2011-09-27 | 2014-02-26 | 沈玉良 | Probe card lifting mechanism |
| CN103629200B (en) * | 2012-08-22 | 2016-06-08 | 西门子公司 | Buckling device |
| KR101402982B1 (en) * | 2013-07-15 | 2014-06-11 | (주)케이코아 | Inspection apparatus of vacuum pump exhaust line for semiconductor manufacturing device |
| TWI583963B (en) | 2016-04-18 | 2017-05-21 | 旺矽科技股份有限公司 | Probe card |
| KR102654604B1 (en) | 2016-11-22 | 2024-04-03 | 세메스 주식회사 | Probe station |
| KR102021599B1 (en) * | 2018-01-12 | 2019-09-16 | 주식회사 제다온 | Contactor mount assembly for display panel inspection |
| JP7138004B2 (en) * | 2018-09-28 | 2022-09-15 | 株式会社日本マイクロニクス | Probe card holder |
| KR102673906B1 (en) | 2018-11-02 | 2024-06-10 | 세메스 주식회사 | Card holde and probe station including the same |
| CN109650285B (en) * | 2018-12-27 | 2021-10-15 | 安徽升业工程机械有限公司 | Lift for building engineering convenient to overhaul |
| JP7308776B2 (en) | 2020-02-17 | 2023-07-14 | 東京エレクトロン株式会社 | Probe card holding device and inspection device |
| KR102648394B1 (en) * | 2023-11-15 | 2024-03-18 | 주식회사 유니테스트 | Probe card holder for testing a wafer |
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| EP1331659A2 (en) * | 2002-01-28 | 2003-07-30 | Samsung Electronics Co., Ltd. | Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method |
| EP1416285A2 (en) * | 2002-11-01 | 2004-05-06 | Tokyo Electron Limited | Mechanism for fixing probe card |
| EP1736787A1 (en) * | 2004-03-19 | 2006-12-27 | Tokyo Electron Limited | Probe device capable of being used for plural kinds of testers |
| CN1932527A (en) * | 2005-09-16 | 2007-03-21 | 东京毅力科创株式会社 | Probe card clamp mechanism and probe apparatus |
| CN101109766A (en) * | 2006-07-19 | 2008-01-23 | 东京毅力科创株式会社 | Fixing mechanism of probe card, fixing method of probe card and probe device |
-
2009
- 2009-09-21 JP JP2009218242A patent/JP2011064659A/en active Pending
-
2010
- 2010-09-15 KR KR1020100090600A patent/KR20110031886A/en not_active Application Discontinuation
- 2010-09-20 TW TW099131855A patent/TW201142304A/en unknown
- 2010-09-20 CN CN2010102906544A patent/CN102022403A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1331659A2 (en) * | 2002-01-28 | 2003-07-30 | Samsung Electronics Co., Ltd. | Centering mechanism, centering unit, semiconductor manufacturing apparatus, and centering method |
| EP1416285A2 (en) * | 2002-11-01 | 2004-05-06 | Tokyo Electron Limited | Mechanism for fixing probe card |
| EP1736787A1 (en) * | 2004-03-19 | 2006-12-27 | Tokyo Electron Limited | Probe device capable of being used for plural kinds of testers |
| CN1932527A (en) * | 2005-09-16 | 2007-03-21 | 东京毅力科创株式会社 | Probe card clamp mechanism and probe apparatus |
| CN101109766A (en) * | 2006-07-19 | 2008-01-23 | 东京毅力科创株式会社 | Fixing mechanism of probe card, fixing method of probe card and probe device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107526015A (en) * | 2016-06-22 | 2017-12-29 | 思达科技股份有限公司 | Testing device, clamping assembly and probe card carrier |
| CN107526015B (en) * | 2016-06-22 | 2020-12-11 | 思达科技股份有限公司 | Testing device, clamping assembly and probe card carrier |
| CN111430232A (en) * | 2019-01-09 | 2020-07-17 | 东京毅力科创株式会社 | Plasma processing apparatus and mounting table of plasma processing apparatus |
| CN111430232B (en) * | 2019-01-09 | 2024-03-22 | 东京毅力科创株式会社 | Plasma processing apparatus and mounting table for plasma processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011064659A (en) | 2011-03-31 |
| KR20110031886A (en) | 2011-03-29 |
| TW201142304A (en) | 2011-12-01 |
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Application publication date: 20110420 |