JP2011054286A - Charged particle beam device and its operation screen - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve such problems that, when consolidating functions dispersed on a GUI into one position to improve operability, consolidating work itself is troublesome, the consolidation to improve the operability is hardly benefited because it's not known which functions should be consolidated, troubles may occur in a device or a sample due to improper operation (including operation errors), and it is difficult for a manager to improve processes using PDCA cycles. <P>SOLUTION: To solve the problems, this charged particle beam device includes an operation screen for displaying a plurality of functions to set the device conditions of the charged particle beam device, wherein a custom window is provided on the operation screen where the functions displayed on the operation screen are displayed. The limited functions are given to the custom window. A recording device is provided for recording a time when using the functions in the custom window. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a charged particle beam apparatus and an operation screen thereof, and more particularly to an operation screen creation method for a charged particle beam apparatus.

  The charged particle beam apparatus has diversified needs and is equipped with a great number of functions to meet the needs of various customers. For this reason, it is difficult for a user to find a target function from a large number of functions, and an operation for using the function is complicated.

  For devices that are complicated to operate, there are devices that are improved in operability by the technique described in Patent Document 1.

  In addition, very expensive charged particle beam devices are often shared and used by a plurality of users, such as leasing to outside parties. And when it is used for simple inspection work etc., the opportunity that a beginner uses is increasing. Therefore, it is necessary to manage the setting status of each device for each user. At the same time, the device administrator wants to improve the usage efficiency by grasping the function restrictions of the device and the usage status of the user. There are many needs.

JP 2007-328569 A

  When operability is improved by consolidating functions scattered on the GUI in one place, it is a problem that a user who uses a large number of functions is troublesome to perform the operation itself. In addition, when the sample to be observed or the user to be used changes, the functions to be used change greatly, so that the work of consolidating the functions occurs again, and the work itself for improving the operability is a great effort. End up. Furthermore, when a beginner uses it, it is difficult to know which functions should be aggregated, and it is difficult to receive the benefits of operability improvement by aggregation.

  In addition, when a beginner uses it or leases it to an outsider concerned, there is a concern about troubles on the device or the sample due to inappropriate operation (including erroneous operation). The system administrator is always concerned about the above problems.

  For example, if the filament current is applied too much, the filament life will be drastically reduced and parts will need to be replaced. If this is done, the sample will be damaged. In addition, when the stigma or the alignment setting is changed, there is a problem that a normal image cannot be acquired and a complicated adjustment is required again, thereby reducing the usage rate of the apparatus.

  Furthermore, in routine work such as inspections, it is difficult for the administrator to grasp the difference in work time due to the difference in skill level of the operator and the throughput decrease due to problems in the work process. It was difficult to improve the process. Another problem was that the cost and time of education related to usage increased due to changes in inspection contents and workers.

  In order to solve the above problems, in the charged particle beam apparatus having an operation screen for displaying a plurality of functions for setting the apparatus conditions of the charged particle beam apparatus, a custom window is provided on the operation screen, and the custom window In addition, a charged particle beam device is provided that displays the function displayed on the operation screen.

  In addition, restrictions were placed on the functions provided in the custom window. Furthermore, a recording device was provided for recording the time when the function in the custom window was used.

  According to the present invention, when a plurality of users use, even if the same user uses each time for different purposes, it is possible to create and use a GUI with good operability suitable for each user. The burden is reduced. In addition, device and sample troubles due to operational mistakes can be avoided by restricting device operation and function management. As a result, it is possible to greatly widen the user's range including beginners, which is highly effective in improving operability.

  Due to the above effects, it is possible to reduce the working time and improve the device utilization rate. In addition, since the operation status of the apparatus can be analyzed, it contributes to improvement of work processes (work efficiency) in inspection work and the like.

The figure explaining the basic composition of a scanning electron microscope. The figure explaining the system configuration | structure of this invention. The GUI operation screen which is an example of this invention. The figure which showed the classification | category example of the log | history referred for candidate display. The GUI operation screen which is an example of this invention. The GUI operation screen which is an example of this invention. The GUI operation screen (operation time detailed analysis screen) which is an example of this invention. Usage history distribution chart. Explanatory drawing of the algorithm of k-means method which is a clustering method. Initial value of k-means method.

  Embodiments of the present invention will be described below with reference to the drawings. A scanning electron microscope (hereinafter abbreviated as SEM) will be described as an example of the charged particle beam apparatus. However, the present invention is not limited to SEM. The present invention can be applied to a charged particle beam apparatus that performs inspection and processing in general.

  FIG. 1 is a diagram illustrating an example of a basic configuration of one embodiment of an SEM. The primary electron beam 4 emitted from the electron gun 1 is controlled and accelerated by the anode 2, and converges and irradiates the sample 18 placed on the sample stage 9 by the condenser lens 3 and the objective lens 6. These controls are performed by the main control unit 15. A deflector 5 is provided in the path of the primary electron beam 4, and the deflection control unit 19 follows the arbitrary setting magnification set from the mouse 20 or keyboard 21 and the dedicated operation panel 23 connected to the computer unit 16. A predetermined deflection current is supplied, whereby the primary electron beam 4 is deflected, and the surface of the sample is secondarily scanned. The movement to the observation position is configured such that the stage control unit 10 controls the sample stage 9 and can be positioned at an arbitrary position.

  Secondary electrons 7 generated by irradiating the sample with an electron beam are detected by the secondary electron detector 11, amplified by the amplifier 12, and stored in the image storage unit 13. The image signal at this time is displayed on the display unit 17.

  In the configuration described above, a program for executing control / data analysis processing operates in a computer unit for controlling the entire device and for analyzing data obtained by the device. The program has a GUI and visually notifies various apparatus states and receives instructions for apparatus control and data analysis processing from the user.

  FIG. 2 shows a system configuration and usage form of a control / data analysis processing program having a GUI. The GUI unit 24 includes a GUI operation unit 25, a GUI creation unit 26, and an operation candidate display unit 27.

  The GUI operation unit 25 receives instructions from the user 28 for controlling the electron microscope and for data analysis processing.

  The GUI creation unit 26 realizes that the user 28 creates a favorite GUI unit 24. The created GUI is reflected in the GUI operation unit 25 by the GUI reconfiguration unit 29. In addition, by holding and managing the created GUI configuration information 30 in the external storage, the user 28 can use the favorite GUI again.

  The operation candidate display unit 27 provides a function for enumerating candidates and assisting GUI creation when the user creates a GUI. The operation candidate display unit 27 uses the operation prediction unit 31 to estimate the purpose of use of the apparatus from the current user operation information and the operation history 33 recorded and accumulated by the operation recording unit 32 and display operation candidates.

  In the above configuration, FIG. 3 shows the configuration of the GUI, and actual operation details will be described. Various functions such as a button 34 for instructing control and processing and a text box 35 for setting each parameter exist on the GUI.

There are the following two windows that are characteristic of the present invention.
(1) A window that allows the user to freely aggregate functions (hereinafter abbreviated as custom window 36).
(2) A window (hereinafter abbreviated as “candidate window 47”) that automatically enumerates candidates of functions that the user wants to add by inferring the user's purpose of using the device from past usage history.

  When the user gives an additional instruction to the custom window 36 for functions scattered in various positions, a function equivalent to the function scattered in the normal window (slider 37 in the example) is generated in the custom window 36. . At that time, an item name for the function (in the example, the item name “setting 5” of the slider 38) can be generated together in order to easily make a determination for each function. The equivalent (slider 37) generated in the custom window 36 operates exactly the same as the original function (slider 38).

  Next, a method when the user adds functions scattered on the screen to the custom window will be described. The user specifies a function to be added to the custom window 36 using a pointing device or the like. Then, usually, an operation other than the operation using the function is performed, and a pop-up menu 39 is displayed as shown in FIG.

  In addition, when a function is added to the custom window 36, it can be added in the same manner from the candidate window 47 in which the operation purpose of the user is estimated and operation candidates are predicted and listed (FIG. 3B).

  The added function can be freely changed or deleted according to the user's preference. Here, the functions that can be added to the custom window 36 mean various operation interfaces such as a button 34, a text box 35, a slider 38, a check box 41, a radio button 42, and a combo box 43. The created custom window 36 stores and manages its function and arrangement in a file and database by a save / recall function 40. By managing the configuration of the custom window 36 using a file or a database, the custom window 36 can be switched when the user changes or when the same user uses a different method.

  Next, a method for enumerating candidates in the candidate window 47 will be described. The function candidates 48, 49, 50, 51 displayed in the candidate window 47 are estimated and displayed from the operation history recorded and managed. The operation history is a record of the function name used by the user, the set parameter values, and the order of use, and can be generated for each observation. Since the present invention focuses on the difference in the characteristics of operations performed for each observation (each sample), the operation history is recorded when the observation purpose or sample is changed or when the user changes. It is preferable to newly generate. Therefore, the history is updated with a sample exchange operation for changing the observation sample as a trigger. When there is a method capable of changing the observation sample other than the sample exchange operation, it is preferable to update the operation history also in that case. When enumerating candidates, the plurality of generated operation histories are classified using the operation characteristics (function setting parameter range, function, etc.) as vectors. The list of candidates is determined with reference to the classified history.

  FIG. 4 shows an example in which usage histories are classified by detector type 55, vacuum degree 56, and acceleration voltage 57. The operation history 53 is an operation history in observation, and is classified into an operation history group 54 according to each parameter.

  The detector type 55 includes a secondary electron detector (hereinafter abbreviated as SE), a backscattered electron detector (hereinafter abbreviated as BSE), a wavelength dispersive detector (hereinafter abbreviated as WDX), an energy dispersive detector ( Hereafter, there are various types such as EDX).

  The acceleration voltage 57 needs to be adjusted according to the charge-up state of the sample, the influence of sample damage, the sharpness of surface information, and the like.

  The same applies to the degree of vacuum 56. In particular, when it is desired to observe a sample containing moisture without processing, a low vacuum is set.

  By classifying operation histories with such setting parameters, it is possible to classify operation histories observed to some extent with the same sample. By using this and referring to the operation history classified by the current operation state and setting value, an operation having a high correlation with the operation currently being observed can be predicted. By displaying the predicted highly correlated function in the candidate window, GUI creation can be assisted.

  For example, when observing a sample containing moisture without processing, a low vacuum is set. In addition, when it is necessary to suppress sample damage due to electron beam irradiation, the acceleration voltage is set low. The detector performs elemental analysis using EDX. Then, in order to perform elemental analysis, the probe current is set high, the focus is adjusted, and screen capture is performed. Such operation information is recorded in one operation history. When another user conducts elemental analysis on a sample containing similar moisture, and creates a new GUI using the GUI creation function, the acceleration voltage, detector, and vacuum are the same as the above settings. At such a setting stage, the operation history recorded so far is classified according to the classification parameter. The history is also included in a part of the classified operation history group 58, and candidates can be listed in the candidate window 47. In the above example, the probe current setting function and the screen capture function are displayed. The user aggregates the functions displayed in the candidate window into a newly created GUI, thereby saving time and labor for searching for related functions and efficiently creating a GUI.

  Although there are various types of classification vectors described above, the present invention does not limit the number of classification vectors and the types of classification vectors.

  The usage history classification will be briefly described. At the time of classification, numerical data such as the degree of vacuum, acceleration voltage, and probe current are continuous (strictly speaking, discrete numerical values), and classification is difficult. Therefore, classification is performed using a general clustering method. Clustering methods include hierarchical methods such as shortest distance method, longest distance method, group average method, and Ward method, and k-means method as a division optimization method.

The algorithm of the k-means method is as follows.
Process A: The centers (initial values) of K clusters are set at random.
Process B: Cluster each individual to the nearest center.
Process C: Recalculate the center (center of gravity) for each cluster.
Process D: End if the center of the cluster does not change. Otherwise, return to Process B.

  A specific example will be described with reference to FIGS. In actual observation, there are various set values such as a degree of vacuum, an acceleration voltage, a filament current, and an observation magnification. As an example, a case where the degree of vacuum and the acceleration voltage are reduced to two dimensions is shown.

  In FIG. 8, the device usage history data is plotted with the acceleration voltage (Vacc) on the X-axis and the vacuum value on the Y-axis. FIG. 9 is a diagram for explaining the procedure of the k-means method (the number of clusters is 5). By repeating this calculation, the usage history can be classified.

  In the above method, when the initial value of (1) is set at random, it is known that the clustering result falls into a local solution (classified inappropriately), and the setting of the initial value is important. . When classifying by the k-means method in the history of various setting values in the electron microscope, it is conceivable to use appropriate setting values in order to avoid the above situation. An example of appropriate values is shown in FIG. 10 (example in the case of three-dimensional classification of acceleration voltage, magnification, and detector). As this appropriate value, the data used when the observation can be performed correctly can be used.

  In the first embodiment, the function of enumerating operation candidates is shown as assistance when creating a GUI. However, this function is not only used for GUI creation assistance but also used as assistance when a user performs a normal operation. good. When used as an auxiliary when the user performs normal operations, the frequency of operations to be performed next to the current operation is counted from the usage history, and the operations that are currently being performed are enumerated in descending order of frequency. The operation to be performed next can be predicted. Thereby, the operativity in normal operation can be improved.

  Although not specifically described in the first embodiment, as a means for adding a function to the custom window 36, a device such as a mouse, a keyboard, or a touch pad may be used, or a combination thereof may be used. Further, the operation of adding a function to the custom window may be performed by selecting an item to be added from a list of function tables by dragging and dropping, or by clicking other than the mouse click. When a function table list is used, conditions for addition may be specified in the table.

  In the first embodiment, it has been described that when a function is added to the custom window 36, the user can arrange the function at any position. However, the user window may be automatically arranged. For example, the frequency of use may be calculated from the operation history, and the order may be rearranged according to the frequency of use, or classified into tabs 45 for each feature of the function (such as one that affects the sample when it is changed, and the other that does not) Good.

  When a user creates a GUI using the GUI creation function, if a single process is realized by combining a plurality of operations among the created GUI functions, it is determined that the combination of functions can be performed simultaneously. However, it is possible to replace it with an equivalent function to be executed at the same time. For example, an electron microscope has a function of performing autofocus and a function of performing autostigma. In addition, there are composite functions such as autofocus and autostigma focus function for performing autostigma at the same time by combining them. When the user adds a function to the custom window 36, if the autofocus function and the autostigma function are added as described above, they are automatically replaced with the autofocus stigma function. Thereby, the frequency | count of a user's operation can be reduced.

  As one of the operation histories used in the first embodiment, the time of the used function may be held. When the function used is completely different depending on the time zone, the candidate window 47 can be displayed according to the time by using the time for classification of the use history.

  In the first embodiment, the user name is shown as one of the classifications of the operation history, but it is also possible to select to classify by the user name. For example, if a user has an operation history to some extent, the candidate window 47 can be displayed by reflecting the user's operation habit based on the usage history by performing classification based on the user name. If no new user uses it, the candidate window 47 cannot be displayed. In such a case, by selectively not classifying by user name, observation candidates windows 47 can be enumerated from the usage history of others when a user without a specification history performs observation.

In the first and second embodiments, when candidates are displayed in the candidate window 47, priority is given to the operation candidates to be displayed, and only those with higher priority are displayed, or the display order and arrangement are dynamically changed. You may do it. An example of calculating the priority order is shown below.
1. The operation history is referred to and displayed in order from the operation having the highest number of operations (operation frequency).
2. Based on the most recent operation, the operation history is referred to, the number of operations performed next to the operation is counted, and the operations with the most operations are displayed in order (correlation with recent operations).

  In the above usage mode, the user who creates the custom window 36 is the same as the user who actually uses it, and the embodiment for improving operability has been described. Next, a description will be given of a usage form in the case where the user who creates the custom window 36 is an administrator and provides a function restriction for a general user to be used or provides an environment in which an operation procedure can be easily used in a wizard format.

  The administrator who creates the custom window 36 creates an interactive custom window (hereinafter abbreviated as a wizard window 59) shown in FIG. 5 so that operations desired to be performed by general users can be easily followed step by step. To do. The administrator can create the wizard window 59 and cannot be changed by a general user. When the wizard window 59 is used, substantial functions are restricted by prohibiting operations other than the wizard window 59. In this case, the administrator and the general user are distinguished by using a password or other authentication method. However, it is preferable that the administrator can select whether or not the function is restricted, and it is preferable that the operation other than the wizard window 59 can be selected.

  The creation of the wizard window 59 is performed by arranging scattered functions in the wizard window 59 as in the first embodiment. At that time, as shown in FIG. 5, detailed explanations of inspection and observation procedures, explanatory texts such as precautions, diagrams and photographs 61 can be arranged in a wizard window 59. A text editor can be newly displayed and an input text can be input by giving an additional instruction to the text 60 for explanation such as explanation and notes. Similarly, the editor for editing the figure and the photograph 61 is displayed by giving an addition instruction, and a figure such as an arrow indicating an operation procedure can be created and arranged. The figure and photograph 61 can be created by an editor, but can also be read and pasted from a file or the like. Thus, by showing a photograph of an actual work result to a general user, it is possible to prompt a correct operation or check whether the result is correct. At this time, it is preferable that the position and size of the added function (slider 64 in the example), the description 60, the figure, the photograph 61, and the like can be freely changed by drag and drop.

  The wizard window 59 has a forward button 62 and a return button 63 arranged in advance. Each time the forward button 62 is operated, a wizard window 59 showing the next operation appears. Conversely, if the return button 63 is operated, it is possible to return to the previous wizard window 59. As described above, a simple operation is instructed to one window and the procedure is followed, so that a general user can operate even a beginner. Also, when the administrator creates the wizard window 59, it is possible to create one step at a time by operating the forward button 62 and the return button 63. In addition, the created wizard window 59 can save and read the configuration, and can edit the read configuration again.

  In the ninth embodiment, it has been described that the function can be restricted to the general user by prohibiting operations other than the wizard window 59. However, the administrator can freely set and restrict the function setting parameter range in addition to that. The range may be changed. For example, there is a risk of destroying the observation sample, such as sample chamber vacuum, acceleration voltage setting, and stage coordinate value setting value limitations. FIG. 6A shows an example in which the parameter limit setting menu 66 is displayed and the upper and lower limit values of the parameter limit value 67 are set for the function (slider 64 in the example) that can set the parameter. When the user enters a parameter that deviates from the set value, an error is displayed. This setting parameter range can be set to a different value for each function arranged in the wizard window 59. In other words, it means that different ranges can be designated even when work for changing parameters appears a plurality of times while the work is proceeding in the wizard window 59.

  When a general user uses the wizard window 59 to proceed with observation or work, a time limit can be set for each window. In particular, when observing and inspecting with an electron microscope, the results of inspection and measurement may change or damage the sample depending on the irradiation time of the electron beam and the passage of time since the start of evacuation. There is. By limiting the time for each operation, the problem due to the influence of the passage of time can be eliminated. Specifically, as shown in FIG. 6B, a time limit setting menu 69 is displayed, and an operation time limit in one procedure is designated. If the general user does not proceed to the next procedure within the designated time, the detailed setting button 71 is used to set the designation such as invalidating the saved observation result or restarting the work.

  In the ninth embodiment, the wizard window created by the administrator may record the elapsed time for each procedure. The recorded time is recorded and managed for each user or operation, and is displayed as a graph 73 as shown in FIG. For each step of the wizard window 59, the graph 73 is color-coded 75 and displayed. Therefore, the tendency of the elapsed time of each procedure can be grasped visually. Moreover, a result can be displayed for every user name 74, and the difference in work time can be known. Thus, the administrator can easily analyze which process should be improved and which user should be educated. This is important in routine work such as inspections where throughput is important. In addition, if the export function 76 is used, the administrator can output data subjected to measurement management in a file format (such as EXEL or CVS format).

  In the ninth embodiment, the wizard window 59 is created in advance, and the created window can be explicitly called. In addition to explicitly calling, the saved wizard window 59 may be automatically displayed in a planned manner. When an electron microscope is used for routine work such as inspection, it is conceivable that inspection items change depending on the date and time. If the schedule is registered in advance, the wizard window 59 suitable for the inspection item can be automatically changed according to the schedule.

DESCRIPTION OF SYMBOLS 1 Electron gun 2 Anode 3 Condenser lens 4 Primary electron beam 5 Deflector 6 Objective lens 7 Secondary electron 8 Size calibration sample 9 Sample stage 10 Stage control part 11 Secondary electron detector 12 Amplifier 13 Image storage part 14 Length measurement process Unit 15 Main control unit 16 Computer unit 17 Display unit 18 Sample 19 Deflection control unit 20 Mouse 21 Keyboard 22 Storage medium (database storage area)
23 Dedicated operation panel 24 GUI section 25 GUI operation section 26 GUI creation section 27 Operation candidate display section 28 User 29 GUI reconstruction section 30 GUI configuration information 31 Operation prediction section 32 Operation recording section 33 Operation history 34 Button 35 Text box 36 Custom window 37, 64 Slider (Duplicate)
38 Slider 39 Pop-up menu 40 Save / recall function 41 Check box 42 Radio button 43 Combo box 44 Existing GUI
45 Tab 46 Function Name (Duplicate)
47 Candidate window 48 Slider (candidate)
49, 50 button (candidate)
51 Radio button (candidate)
52 Radio button (Duplicate)
53 Operation History in One Observation 54 Classified Operation History Group 55 Detector Type 56 Degree of Vacuum 57 Acceleration Voltage 58 EDX Detector, Operation History Group Observed at Low Acceleration Voltage and Low Vacuum 59 Wizard Window 60 Description 61 Figure, Photo 62 Forward button 63 Back button 65 Procedure number 66 Parameter limit setting menu 67 Parameter limit value 68 Parameter limit setting / non-setting 69 Time limit setting menu 70 Time limit setting value 71 Detailed setting button 72 Time limit setting / non-setting 73 Graph 74 User name 75 Color coding (per procedure)
76 Export function

Claims (9)

In the charged particle beam apparatus having an operation screen for displaying a plurality of functions for setting the apparatus conditions of the charged particle beam apparatus,
A custom window is provided on the operation screen,
The charged particle beam apparatus, wherein the function displayed on the operation screen is displayed in the custom window. The charged particle beam apparatus according to claim 1.
A charged particle beam apparatus characterized in that a candidate window for displaying candidate functions to be displayed in the custom window is provided on the operation screen. The charged particle beam device according to claim 2,
The function displayed in the candidate window is displayed based on the classification of the use history of the function. The charged particle beam device according to claim 3.
The charged particle beam apparatus according to claim 1, wherein the order of the functions displayed in the candidate window is displayed in descending order of the number of attempts from the function usage history. The charged particle beam device according to claim 3.
The charged particle beam apparatus according to claim 1, wherein the order of the functions displayed in the candidate window is determined based on the functions displayed in the custom window. The charged particle beam apparatus according to claim 1.
A charged particle beam apparatus, wherein a plurality of functions in the custom window are replaced with one function. The charged particle beam apparatus according to claim 1.
A charged particle beam apparatus characterized by limiting a function provided in the custom window. The charged particle beam apparatus according to claim 1.
A charged particle beam apparatus comprising a recording device for recording a time during which the function in the custom window is used. The charged particle beam apparatus according to claim 1.
A charged particle beam apparatus provided with a calling function for calling the custom window when the charged particle beam apparatus is used.

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