JP2021131412A - Display system, analyzer, method for control, and control program - Google Patents

Abstract

To provide a technique that allows a user to visually confirm, by a second display device, a screen of the same size as that of a screen related to analysis of a sample displayed in the first display device.SOLUTION: The present invention includes: a first display 12; a second display 22; a first computer 10 for controlling the first display 12; and a second computer 20 for controlling the second display 22. The first computer 10 displays a first screen related to analysis of a sample in the first display 12, generates a second display by duplicating the first screen, and displays the second screen in the second display 22.SELECTED DRAWING: Figure 1

Description

The present invention relates to display systems, analyzers, control methods, and control programs.

An analyzer such as an electron probe microanalyzer (EPMA) and a scanning electron microscope (SEM) irradiates a sample with a charged particle beam such as an electron beam and an ion beam. The analyzer is configured to observe and analyze the sample by detecting signals (secondary electron beam, backscattered electron beam, characteristic X-ray, etc.) generated from the sample by this irradiation.

Japanese Unexamined Patent Publication No. 2015-17971 (Patent Document 1) discloses a spectroscopic measuring device for observing a sample using a spectroscopic microscope. The spectroscopic measuring device described in Patent Document 1 has an image processing device that displays spectroscopic data acquired by a spectroscopic microscope on a display device (hereinafter, referred to as a first display device).

Japanese Unexamined Patent Publication No. 2015-17971

By the way, the user may want to visually recognize the screen displayed on the first display device at a place different from the place where the first display device is installed. In such a case, it is conceivable that the second display device is installed at a place different from the first display device, and the screen displayed on the first display device is also displayed on the second display device. However, in the case of this configuration, the screen having a size different from the screen displayed on the first display device is the first because the size of the display area of the first display device and the display area of the second display device are different. 2 Displayed on the display device. In this case, there may be a problem that the user cannot visually recognize a screen having the same size as the screen displayed on the first display device on the second display device.

The present invention has been made to solve the above problems, and an object of the present invention is to display a screen having the same size as the screen related to sample analysis displayed on the first display device on the second display device. It is to provide a technique for visually recognizing the sample.

A display system according to a certain aspect of the present disclosure includes a first display device, a second display device, and a control device for controlling the first display device and the second display device. The control device displays the first screen related to the analysis of the sample on the first display device, generates the second screen by duplicating the first screen, and displays the second screen on the second display device.

According to the technique of the present disclosure, since the second screen is displayed on the second display device so as to be the same size as the size of the first screen displayed on the first display device, the user can use the first display device. A screen having the same size as the screen related to sample analysis displayed in is visible on the second display device.

It is the schematic explaining the structural example of the analyzer and the display system according to embodiment of this invention. It is a figure which shows the structural example of the analysis part schematicly. It is a figure which shows schematic the hardware composition of the 1st computer, the 2nd computer, and the 3rd computer. It is a figure which shows the display example of the 1st display and the 3rd display. This is an example of an observation image displayed by a remote display in the display system of the comparative example. This is an example of a capture screen displayed by the second display of the present embodiment. It is a figure for demonstrating that the display area of a capture screen is changed according to a user's operation. It is a figure for demonstrating the remote operation by a 2nd user. It is a figure for demonstrating an example in which a 2nd computer integrally displays a 2nd analysis screen and a 2nd observation screen. It is a figure for demonstrating an example in which a 2nd computer displays a 2nd analysis screen and a 2nd observation screen in a switchable manner. It is a functional block diagram of the 3rd computer. It is a functional block diagram of the 1st computer and the 2nd computer. It is a flowchart which shows the process executed in the 1st computer and the 2nd computer.

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The same or corresponding parts in the drawings are designated by the same reference numerals, and the description thereof will not be repeated. Further, in the drawings, some parts are not shown according to the actual dimensional ratios, and some parts are shown by changing the ratios so that the structure becomes clear in order to facilitate understanding of the structure.

[Display system and analyzer]
FIG. 1 is a schematic diagram illustrating a configuration example of an analyzer 1000 and a display system 100 according to an embodiment of the present invention. The analyzer according to the present embodiment is configured to irradiate the sample with a charged particle beam, detect a signal generated from the sample, and observe and analyze the sample. The analyzer 1000 is, for example, an electron probe microanalyzer (EPMA).

In FIG. 1, the analysis unit 50, the first computer 10, the second computer 20, the third computer 30, the first input device 11, the second input device 21, the first display 12, the second display 22, the third display 32, And network 700 are shown. The first display 12 corresponds to the "first display device" of the present disclosure, the second display 22 corresponds to the "second display device" of the present disclosure, and the third display 32 corresponds to the "third display device" of the present disclosure. Corresponds to "display device". Further, the first computer 10, the second computer 20, and the third computer 30 correspond to the "control device" of the present disclosure.

With reference to FIG. 1, the analyzer 1000 according to this embodiment includes an analyzer 50, a first computer 10, a third computer 30, a first display 12, a third display 32, and a first input device 11.

The analysis unit 50 is, for example, an electron beam irradiation device. The analysis unit 50 may be another device. The analysis unit 50 is configured to irradiate the surface of the sample with an electron beam and detect a signal emitted from the surface of the sample. The detection signal includes characteristic X-rays, secondary electrons, backscattered electrons, etc., which have energies peculiar to the elements contained in the sample surface. The analyzer 1000 can identify and quantify the elements present at the analytical position on the sample surface by analyzing the energy and intensity of the detected characteristic X-rays.

The first display 12 and the third display 32 display the shape and composition image of the sample surface and the uneven shape by the detected secondary electrons and backscattered electrons. An analyst (hereinafter, also referred to as “first user”) can observe the shape, composition image, and uneven shape of the sample surface. The first user can search for the analysis position on the sample surface while observing the secondary electron image or the backscattered electron image. Specifically, the first user can set the irradiation position of the electron beam on the sample surface (that is, the measurement position on the sample surface) and specify the analysis target area on the sample surface while observing the electron image. can.

In the analyzer 1000, in general, each of the process related to the control of the electron beam irradiator and the process related to the analysis of the characteristic X-ray detected by the electron beam irradiator handles a large amount of information, so that the amount of calculation of the information is large. It tends to increase. Therefore, in the analyzer 1000 according to the present embodiment, the load is distributed by executing the process related to the control of the analysis unit 50 and the process related to the analysis of the characteristic X-ray in separate processing units.

Specifically, the first computer 10 is an analysis computer for analyzing the characteristic X-rays detected by the analysis unit 50. The third computer 30 is a control computer for controlling the analysis unit 50.

As shown in FIG. 1, the first computer 10 and the third computer 30 are communicably connected. The third computer 30 is further communicably connected to the analysis unit 50. The third computer 30 generates a control signal for controlling the operation of each unit of the analysis unit 50, and outputs the generated control signal to the analysis unit 50. In addition, the third computer 30 receives signals (at least one of secondary electrons and backscattered electrons, and characteristic X-rays) detected by the analysis unit 50. The third computer 30 receives signals of at least one of secondary electrons and backscattered electrons from the analysis unit 50 and generates an observation image (at least one of the secondary electron image and backscattered electron image) at the analysis position. Further, the third computer 30 generates an element distribution image (X-ray image) at the analysis position according to the position scanning of the electron beam at the analysis position on the sample surface.

The first computer 10 receives a characteristic X-ray signal from the third computer 30, and performs qualitative and quantitative analysis of the elements contained in the analysis position on the sample surface based on the received characteristic X-ray signal. Specifically, the first computer 10 creates an X-ray spectrum corresponding to the wavelength scan of the characteristic X-ray, and performs qualitative analysis and quantitative analysis based on the X-ray spectrum.

The analyzer 1000 has a display as an output device for providing various information such as the generated observation image and the analysis result to the first user. As described above, since the amount of information of each of the processing related to the control of the analysis unit 50 and the processing related to the analysis of the characteristic X-ray is large, the first display 12 and the third display 32 are used in the present embodiment. The first display 12 is connected to the first computer 10 and has a first display area 120. The first computer 10 controls the first display 12. The first display 12 displays information on processing related to the analysis of characteristic X-rays. In the first display area 120, the X-ray spectrum and the results of qualitative analysis and quantitative analysis based on the X-ray spectrum are displayed.

The third display 32 is connected to the third computer 30 and has a third display area 320. The third computer 30 controls the third display 32. The third display 32 displays information on processing related to the control of the analysis unit 50. In the third display area 320, an image (at least one of the secondary electron image and the backscattered electron image, and an X-ray image) observed by the first user when setting the analysis position of the sample is displayed.

As shown in FIG. 1, the first display 12 and the third display 32 are arranged close to each other for the operability of the first user.

The first input device 11 is connected to the first computer 10. The first input device 11 is configured to be able to communicate with the first computer 10 and the third computer 30. The first input device 11 is a device for inputting a command of the first user to the first computer 10. The first input device 11 is a keyboard, a mouse, a touch panel, and the like.

By designating a position on the first display area 120 with the pointer P1 using the first input device 11, the first user reads out the coordinates of the designated position and performs an input operation to the position. be able to. Specifically, in the first display area 120, an icon indicating an analysis item such as qualitative analysis or quantitative analysis is displayed. The first user uses the first input device 11 to specify the icon corresponding to the desired analysis item with the pointer P1. The first computer 10 converts the operation input to the first input device 11 into the operation of the pointer P1 displayed in the first display area 120. Thereby, the first user can specify the analysis item and the analysis condition such as the detailed setting of the analysis item by using the first input device 11. The icon is displayed in the first display area 120 and the third display area 320. The icon is not particularly limited as long as it is an image to be used for the operation of the analyzer 1000 or the analysis by the analyzer 1000 (for example, identification or quantification of a substance).

The pointer P1 corresponding to the first input device 11 normally functions on the first display area 120, but as the pointer P1 indicates by arrow A1, the end of the first display area 120 (first display in FIG. 1). When it moves beyond the right end of the area 120 to the end of the third display area 320 (the left end of the third display area 320 in FIG. 1), it is configured to function in the third display area 320. That is, the pointer P1 functions so that the right end of the first display area 120 and the left end of the third display area 320 are virtually connected.

According to this, the first user uses the first input device 11 to specify the position on the second display screen 200 with the pointer P1 to read out the coordinates of the commanded position and to the position. Input operations can be performed. Specifically, in the third display area 320, an icon indicating a control item of the analysis unit 50 is displayed. The first user uses the first input device 11 to specify an icon corresponding to a desired control item with the pointer P1. The first computer 10 converts the operation input to the first input device 11 into the operation of the pointer P1 displayed in the third display area 320. As a result, the first user can specify the conditions of desired control items and the like by using the first input device 11.

The display system 100 according to the present embodiment includes a first computer 10, a second computer 20, a third computer 30, a first display 12, a second display 22, a third display 32, a first input device 11, and a second input device. 21 and network 700.

The display system 100 displays at least a part of the “screen capture screen displayed on the first display 12” and at least a part of the “screen capture screen displayed on the third display 32” on the second display 22. do. The screen displayed on the first display 12 may be referred to as a "first screen", and the screen displayed on the third display 32 may be referred to as a "third screen". The "capture screen of the first screen" and the "capture screen of the third screen" may be comprehensively referred to as a "capture screen". Here, the "capture screen" is obtained by capturing the screen displayed on the displays (first display 12 and third display 32) by the computers (first computer 10 and third computer 30) on the analyzer 1000 side. This is the generated screen. The capture screen may be referred to as a "second screen". The second display 22 displays at least a part of the entire area of the second screen (see FIG. 7 and the like).

Further, each of the first screen, the second screen, and the third screen contains one or more images. In the present embodiment, the image is an icon described later, an observation image, or the like. Further, when the image is included in the image that can be operated by the user on the first screen or the third screen (for example, the icon described below), the image of this icon is also included in the capture screen. When the user operates on the icon displayed on the first screen or the third screen, the icon is displayed in the operated mode (for example, the mode in which the icon is pressed). On the other hand, even when the user operates the icon displayed on the capture screen, the display mode of the icon is not changed. As will be described in FIG. 8, when the user operates the icon displayed on the capture screen, the processing corresponding to the icon is executed by the first computer 10 or the third computer 30. ..

Further, the size of the first screen and the capture screen of the first screen are the same. Here, "the size is the same as the capture screen of the first screen" typically means that the dimensions and scale of the first screen and the capture screen of the first screen are the same. Further, "the size is the same as the capture screen of the first screen" means that the dimensions and scale of the image included in the first screen and the image included in the capture screen of the first screen are the same. say. Further, the size of the third screen and the capture screen of the third screen are the same.

In the present embodiment, an example in which the second display area 220 of the second display 22 is smaller than the first display area 120 of the first display 12 and the third display area 320 of the third display 32 will be described. Therefore, the second display 22 displays a part of the whole area of the capture screen of the first screen or a part of the whole area of the capture screen of the third screen. The area of the second display area 220 of the second display 22 is equal to or larger than the area of the first display area 120 of the first display 12 and equal to or larger than the area of the third display area 320 of the third display 32. There may be. In this case, the second display 22 displays the entire area of the capture screen of the first screen and the entire area of the capture screen of the third screen. As described above, the second display 22 displays the screen of at least a part of the entire area of the capture screen of the first screen and the screen of at least a part of the entire area of the capture screen of the third screen. do.

The second display 22 is a display located at a location away from the analyzer 1000, and is a so-called remote display. According to the configuration as shown in FIG. 1, even at a place away from the analyzer 1000, the screen displayed on the first display 12 and the screen displayed on the third display 32 can be displayed on the second display 22 by the user (hereinafter, “the first”. (Also referred to as "two users") can be visually recognized.

The first computer 10 and the second computer 20 are connected to the network 700 and are configured to be able to communicate with each other. The second computer 20 controls the second display 22. The second display 22 has a second display area 220. The second computer 20 displays a capture screen of the screen displayed on the first display 12 and the screen displayed on the third display 32 in the second display area 220.

The second input device 21 is connected to the second computer 20. The second input device 21 is configured to be able to communicate with the second computer 20. The second input device 21 is a device for inputting a command of the second user to the second computer 20. The second input device 21 is a keyboard, a mouse, a touch panel, and the like. The second user can use the second input device 21 to specify the position on the second display area 220 with the pointer P2. Further, the second computer 20 can transmit the information input from the second input device 21 to the first computer 10. The first computer 10 can further transmit this information to the third computer 30. As a result, the second user can remotely operate the analyzer 1000 by using the second input device 21.

In the present embodiment, the second user may be a maintenance company for the analyzer 1000. The maintenance company confirms, for example, whether or not an appropriate screen is displayed on the first display 12 and the third display 32. In this case, the second user can visually recognize the screen displayed on the first display 12 and the screen displayed on the third display 32 on the second display even if the second user is located at a place away from the analyzer 1000. .. At the same time, the second user can remotely operate the analyzer 1000 by using the second input device 21. Therefore, the second user can appropriately perform remote maintenance of the analyzer 1000.

Further, in the present embodiment, the second user may be a sample analyst. In this case, the second user can appropriately analyze the sample even if it is located at a place away from the analyzer 1000.

[Structure of analysis department]
FIG. 2 is a diagram schematically showing a configuration example of the analysis unit 50 shown in FIG. With reference to FIG. 2, the analysis unit 50 includes an electron gun 1, a deflection coil 2, an objective lens 3, a sample stage 4, a sample stage drive unit 5, a plurality of spectroscopes 6a, 6b, and a deflection coil. A control unit 7 and an electron detector 8 are provided. The electron gun 1, the deflection coil 2, the objective lens 3, the sample stage 4, the spectroscopes 6a and 6b, and the electron detector 8 are provided in a measurement chamber (not shown). During X-ray measurement, the measurement chamber is exhausted to a state close to vacuum.

The electron gun 1 is an excitation source that generates an electron beam E irradiated to the sample S on the sample stage 4, and the beam current of the electron beam E can be adjusted by controlling a condensing lens (not shown). can. The deflection coil 2 forms a magnetic field by the drive current supplied from the deflection coil control unit 7. The electron beam E can be deflected by the magnetic field formed by the deflection coil 2.

The objective lens 3 is provided between the deflection coil 2 and the sample S placed on the sample stage 4, and narrows the electron beam E that has passed through the deflection coil 2 to a minute diameter. The sample stage 4 is a stage on which the sample S is placed, and is configured to be movable in a horizontal plane by the sample stage driving unit 5.

The analysis unit 50 two-dimensionally scans the irradiation position of the electron beam E on the sample S by driving the sample stage 4 by the sample stage driving unit 5 and / or driving the deflection coil 2 by the deflection coil control unit 7. be able to. The deflection coil 2 and / or the sample stage 4 constitutes a "scanning unit" that scans the electron beam E on the sample S. Normally, when the scanning range is relatively narrow, scanning by the deflection coil 2 is performed, and when the scanning range is relatively wide, scanning is performed by moving the sample stage 4.

The spectroscopes 6a and 6b are devices for detecting characteristic X-rays emitted from the sample S irradiated with the electron beam E. Although only two spectroscopes 6a and 6b are shown in FIG. 2, in reality, the analysis unit 50 is provided with a total of four spectroscopes so as to surround the sample S. The configuration of each spectroscope is the same except for the spectroscopic crystal, and in the following, each spectroscope may be simply referred to as "spectrometer 6".

The spectroscope 6a includes a spectroscopic crystal 61a, a detector 63a, and a slit 64a. The irradiation position of the electron beam E on the sample S, the spectroscopic crystal 61a, and the detector 63a are arranged on a Roland circle (not shown). The spectroscopic crystal 61a is tilted while moving on the straight line 62a by a drive mechanism (not shown). The detector 63a is as shown in the drawing according to the movement of the spectroscopic crystal 61a so that the incident angle of the characteristic X-ray and the emission angle of the diffracted X-ray with respect to the spectroscopic crystal 61a satisfy Bragg's diffraction condition by a drive mechanism (not shown). Rotates to. As a result, wavelength scanning of the characteristic X-rays emitted from the sample S can be performed.

The spectroscope 6b includes a spectroscopic crystal 61b, a detector 63b, and a slit 64b. Since the configurations of the spectroscope 6b and the spectroscope not shown are the same as those of the spectroscope 6a except for the spectroscopic crystals, the description will not be repeated. The configuration of each spectroscope is not limited to the above configuration, and various conventionally known configurations can be adopted.

The electron detector 8 is a device for detecting an electron beam emitted from the sample S irradiated with the electron beam E. The electron detector 8 detects secondary electrons. The detection signal of the electronic detector 8 is sent to the third computer 30.

In addition, reflected electrons are also detected by an electron detector (not shown). The reflected electron detection signal is also sent to the third computer 30.

The deflection coil control unit 7 controls the drive current supplied to the deflection coil 2 according to the instruction from the third computer 30. By controlling the drive current according to a predetermined drive current pattern (magnitude and change speed), the irradiation position of the electron beam E can be scanned at a desired scanning speed on the sample S.

The third computer 30 executes various processes related to the control of the analysis unit 50 according to the built-in program and table. Further, the third computer 30 generates an observation image in the analysis target region according to the position scan of the electron beam E in the analysis target region on the sample S. Specifically, the third computer 30 generates a secondary electron image of the analysis target region of the sample S based on the secondary electrons detected by the electron detector 8. Further, the third computer 30 generates a distribution image (X-ray image) of the analysis target element in the analysis target region of the sample S based on the characteristic X-rays detected by the four spectroscopes 6.

When the first computer 10 receives the wavelength scan of the X-ray to be analyzed from the third computer 30, the first computer 10 creates an X-ray spectrum based on the received wavelength scan. The first computer 10 performs qualitative analysis and / or quantitative analysis based on the X-ray spectrum.

[Hardware configuration of each computer]
FIG. 3 is a diagram schematically showing the hardware configurations of the first computer 10, the second computer 20, and the third computer 30.

With reference to FIG. 3, the first computer 10 includes a CPU 13, a memory 14, an input interface (hereinafter, also referred to as an input I / F15), a display controller 16, and a communication interface (hereinafter, also referred to as a communication I / F17). ) And.

The first computer 10 is configured to operate according to a program stored in the memory 14. The memory 14 includes a ROM (Read Only Memory), a RAM (Random Access Memory), and an HDD (Hard Disk Drive) (not shown).

The ROM can store a program executed by the CPU 13. The program includes a program related to a process of analyzing characteristic X-rays detected by the analysis unit 50 and received via the third computer 30. The RAM can temporarily store data used during the execution of the program in the CPU 13, and can function as a temporary data memory used as a work area. The HDD is a non-volatile storage device, and can store characteristic X-rays received from the third computer 30, analysis results of the characteristic X-rays, and the like. In addition to the HDD, or instead of the HDD, a semiconductor storage device such as a flash memory may be adopted.

The CPU 13 controls the first computer 10. The CPU 13 expands the program stored in the ROM of the memory 14 into a RAM or the like and executes the program.

The input I / F 15 is connected to the first input device 11. The input I / F 15 is an interface for the first computer 10 to communicate with the first input device 11, and receives various signals from the first input device 11.

The display controller 16 is connected to the first display 12. The display controller 16 outputs a signal instructing the display contents in the first display area 120 to the first display 12. When the first display 12 is a display including a touch panel, the display controller 16 receives a signal indicating a touch operation of the first user from the first display 12.

The communication I / F 17 is connected to the communication I / F 27 of the second computer 20 and the communication I / F 37 of the third computer 30. The communication I / F 17 is an interface for the first computer 10 to communicate with the second computer 20 and the third computer 30, and inputs and outputs various signals to and from the second computer 20 and the third computer 30.

The first computer 10 is realized by installing software related to characteristic X-ray analysis on a computer having general functions and storing a dedicated program and data in the memory 14. Specifically, a basic software program called an operating system (OS) is always running on the first computer 10. This basic software program is in charge of display on the first display 12, processing of operation input to the first input device 11, access to the memory 14, and can be processed in parallel.

On the other hand, the software program related to the analysis of characteristic X-rays is executed on the basic software program. The software program related to the analysis of characteristic X-rays is supplied to the memory 14 of the first computer 10 from the outside, and is realized by the CPU 13 reading and executing the supplied program code.

The second computer 20 includes a CPU 23, a memory 24, an input I / F 25, a display controller 26, and a communication I / F 27. The second computer 20 is configured to operate according to a program stored in the memory 24. The memory 24 includes a ROM, RAM and HDD (not shown).

The ROM can store a program executed by the CPU 23. The program includes a program for processing related to control of the second display 22 and control based on information from the second input device 21. The RAM can temporarily store data used during the execution of the program in the CPU 23, and can function as a temporary data memory used as a work area. The HDD is a non-volatile storage device, and can store the detection signal by the analysis unit 50 and the information generated by the second computer 20. In addition to the HDD, or instead of the HDD, a semiconductor storage device such as a flash memory may be adopted.

The CPU 23 controls the analysis unit 50 and the entire analysis device 1000. The CPU 23 expands the program stored in the ROM of the memory 24 into a RAM or the like and executes the program.

The input I / F 25 is connected to the second input device 21. The input I / F 25 is an interface for the second computer 20 to communicate with the second input device 21, and receives various signals from the second input device 21.

The display controller 26 is connected to the second display 22. The display controller 26 outputs a signal instructing the display contents of the second display area 220 to the second display 22. When the second display 22 is a display including a touch panel, the display controller 26 receives a signal from the second display 22 indicating an analyst's touch operation to the second display area 220.

The communication I / F 27 is connected to the communication I / F 17 of the first computer 10. The communication I / F 27 is an interface for the second computer 20 to communicate with the first computer 10, and inputs and outputs various signals to and from the first computer 10.

The second computer 20 can be realized by installing software related to the control of the second display 22 on a computer having general functions and storing a dedicated program and data in the memory 24. This program displays the capture screen transmitted from the first computer 10 on the second display 22 in the same size as the capture screen. Further, this program may display the capture screen transmitted from the first computer 10 on the second display 22 at the same resolution as the capture screen. Specifically, regarding this program, a basic software program called an OS is always running on the second computer 20. This basic software program is in charge of displaying on the second display 22, processing the operation input to the second input device 21, accessing the memory 24, and the like, and can process in parallel.

The third computer 30 includes a CPU 33, a memory 34, an input I / F 25, a display controller 36, and a communication I / F 37. The third computer 30 is configured to operate according to a program stored in the memory 34. The memory 34 includes a ROM, RAM and HDD (not shown).

The ROM can store a program executed by the CPU 33. The program includes a processing program related to the control of the analysis unit 50. The RAM can temporarily store data used during the execution of the program in the CPU 33, and can function as a temporary data memory used as a work area. The HDD is a non-volatile storage device, and can store the detection signal by the analysis unit 50 and the information generated by the third computer 30. In addition to the HDD, or instead of the HDD, a semiconductor storage device such as a flash memory may be adopted.

The CPU 33 controls the analysis unit 50 and the entire analysis device 1000. The CPU 33 expands the program stored in the ROM of the memory 34 into a RAM or the like and executes the program.

The display controller 36 is connected to the third display 32. The display controller 36 outputs a signal instructing the display contents of the third display area 320 to the third display 32. When the third display 32 is a display including a touch panel, the display controller 36 receives a signal from the third display 32 indicating a touch operation of the first user to the third display area 320.

The communication I / F 37 is connected to the communication I / F 17 of the analysis unit 50 and the first computer 10. The communication I / F 37 is an interface for the third computer 30 to communicate with the analysis unit 50 and the first computer 10, and inputs and outputs various signals to and from the analysis unit 50 and the first computer 10.

The third computer 30 can be realized by installing software related to the control of the analysis unit 50 on a computer having a general function and storing a dedicated program and data in the memory 34. Specifically, a basic software program called an OS is always running on the third computer 30. This basic software program is in charge of displaying on the third display 32, accessing the memory 34, and the like, and can process in parallel.

On the other hand, the software program related to the control of the analysis unit 50 is executed on the basic software program. The software program related to the control of the analysis unit 50 is supplied to the memory 34 of the third computer 30 from the outside, and is realized by the CPU 33 reading and executing the supplied program code.

Further, at least one of the program stored in the memory 14, the program stored in the memory 24, and the program stored in the memory 34 is stored in the storage medium and distributed as a program product. May be good. Alternatively, the program may be provided by an information provider as a program product that can be downloaded via the so-called Internet or the like. The controller reads a program provided by a storage medium, the Internet, or the like. The controller stores the read program in a predetermined storage area (for example, ROM). The controller executes the above-mentioned display process by executing the stored program.

The storage medium is not limited to DVD-ROM (Digital Versatile Disk Read Only Memory), CD-ROM (compact disc read-only memory), FD (Flexible Disk), and hard disk, but also magnetic tape, cassette tape, and optical disc (MO (Magnetic)). Semiconductors such as optical discs) / MDs (Mini Discs) / DVDs (Digital Versatile Discs), optical cards, mask ROMs, EPROMs (Electronically Programmable Read-Only Memory), EEPROMs (Electronically Erasable Programmable Read-Only Memory), flash ROMs, etc. It may be a medium such as a memory that stably carries the program. The recording medium is a non-temporary medium in which a computer can read a program or the like.

[Display example of the first display and the second display]
FIG. 4 is a diagram showing a display example of the first display 12 and the third display 32. With reference to FIG. 4, the third display 32 displays information regarding the control of the analysis unit 50. The first user can give various instructions to the third computer 30 for controlling the analysis unit 50 by using the first input device 11 based on the display. In the third display area 320 of the third display 32, an icon indicating the observation conditions in the analysis unit 50, a numerical value indicating the observation conditions, and an observation image I1 (one of the secondary electron image and the backscattered electron image, and X). Line image) can be displayed. The third computer 30 generates the observation image I1 based on the characteristic X-ray signal transmitted from the analysis unit 50 to the third computer 30.

The icons indicating the observation conditions include the icon 221 and the icon 222, the icon 223, and the icon 224. The icon 221 is an icon for adjusting the position of the sample stage 4 (see FIG. 2). The numerical value M1 is a numerical value indicating a numerical value relating to the driving of the sample stage 4 (for example, the driving amount of the sample stage 4). The icon 222 is an icon for adjusting the focus of the electron beam. The numerical value M2 is a numerical value relating to focus. The icon 223 is an icon for adjusting the astigmatism correction. The numerical value M3 is a numerical value relating to astigmatism correction. The icon 224 is an icon for adjusting the magnification of the observation image I1. The numerical value M4 is a numerical value relating to the magnification. The first user can adjust each of the numerical values M1 to M4 by using the first input device 11 while looking at the observation image I1. As described above, the screen displayed by the third display 32 is a screen including the observation conditions (icons indicating the observation conditions) and the observation image I1 of the sample. Hereinafter, the screen displayed by the third display 32 is also referred to as a “first observation screen”. As a modification, the first observation screen may be a screen that does not include observation conditions (icons indicating observation conditions).

On the other hand, in the first display area 120 of the first display 12, an icon for processing and analyzing characteristic X-rays transmitted from the third computer 30 to the first computer 10, a window W1 showing the analysis result, and a first display. 1 The image I2 obtained by processing the observation image I1 displayed on the display 12 is displayed.

The icon includes icon 121, icon 122, and icon 123. The icon 121, the icon 122, and the icon 123 are icons indicating the analysis contents. Icon 121 is an icon indicating qualitative analysis. The icon 122 is an icon indicating a quantitative analysis. The icon 123 is an icon indicating a surface analysis.

The first user can use the first input device 11 to select an observation image to be analyzed, select the analysis content with an icon or the like, and confirm the analysis and processing results in the windows W1 and the image I2 and the like. Note that image I2 in FIG. 4 shows an example in which a process of increasing the contrast of the observed image I1 is performed to improve the visibility of the first user.

As described above, the screen displayed by the first display 12 is a screen including the analysis content of the sample and the analysis result of the sample. Hereinafter, the screen displayed by the first display 12 is also referred to as a “first analysis screen”. As a modification, the first analysis screen may be a screen including the analysis content of the sample or the analysis result of the sample.

As described above, in the sample observation in the analyzer 1000, when the sample S to be observed is changed, each part of the analysis unit 50 is controlled such as the alignment of the sample S, the change of the focus and the magnification of the electron beam, and the like. .. The information from the analysis unit 50 is transmitted to the third computer 30 that controls the analysis unit 50, and is displayed on the third display 32 that displays the information related to the control. The first user gives an instruction regarding control of each part of the analysis unit 50 to the third computer 30 based on the information displayed on the third display 32. The third computer 30 reflects the instruction of the first user in the control of the analysis unit 50.

FIG. 5 is an example of the observation image I100 displayed by the remote display in the display system of the comparative example. The third display 32 on the analyzer side and the remote display have different resolutions, or the display area of the third display 32 on the analyzer side and the display area of the remote display are different. The observed images displayed on the display 32 are displayed on the remote display in different sizes. In the example of FIG. 5, a vertically long observation image I100 is displayed. Further, when the display on the analyzer side displays a plurality of observation images on one screen, the sizes of the observation images are displayed differently, so that the plurality of observation images are displayed in a state where the arrangement of the plurality of observation images is different. It may also be shown on a remote display.

When the observation image displayed on the display on the analyzer side is displayed on the remote display in a different size, the second user can use the actual observation image (observation image of the same size as the observation image displayed on the display on the analyzer side). ) Can no longer be seen. As a result, for example, when the second user is a maintenance company, the remote maintenance work may be hindered and appropriate remote maintenance may not be performed. Further, when the second user is an analyst, there is a possibility that an appropriate analysis of the sample cannot be performed.

Therefore, the first computer 10 generates a capture screen of the first analysis screen displayed on the first display 12. Further, the third computer 30 generates a capture screen of the first observation screen displayed on the third display 32. Hereinafter, the capture screen of the first observation screen is also referred to as a “second observation screen”, and the capture screen of the first analysis screen is also referred to as a “second analysis screen”.

The second computer 20 displays the capture screen (second observation screen and second analysis screen) generated by the first computer on the second display 22.

FIG. 6 is an example of a capture screen displayed by the second display 22 of the present embodiment. In the example of FIG. 6, the observation image I1 included in the second analysis screen is displayed. As shown in FIG. 6, in the present embodiment, the second display 22 displays a capture screen of the screen displayed on the display on the analyzer 1000 side (that is, the first display 12 and the third display 32). Further, the second computer 20 stores a program that displays the capture screen in the same size as the transmitted capture screen (see the explanation in FIG. 3). Therefore, the size of the screen displayed on the display on the analyzer 1000 side and the screen displayed on the second display 22 can be made the same. Therefore, a screen having the same size as the screen displayed on the display on the analyzer 1000 side can be visually recognized by the second user on the second display 22. Further, when the resolution of the display on the analyzer 1000 side and the resolution of the second display 22 are about the same, the screen displayed on the display on the analyzer 1000 side and the screen displayed on the second display 22. The resolution of and can be the same.

In addition, the second display 22 displays the screen of at least a part of the entire area of the capture screen. The second computer 20 can change the area displayed by the second display 22 out of the entire area of the capture screen according to the operation of the user. FIG. 7 is a diagram showing that the area displayed by the second display 22 in the entire area of the capture screen is changed. In FIGS. 7 to 10, the solid line indicates the area displayed in the second display area 220 of the second display 22 out of the entire area of the capture screen. Further, the broken line indicates an area of the entire area of the capture screen that is not displayed on the second display 22. In FIG. 7A, the icon 221 and the icon 222 are displayed. The second display 22 is shown in FIG. 7B when the screen of FIG. 7 (the screen surrounded by the solid line) is displayed and, for example, a downward scrolling operation is performed by the user. Display the screen (screen surrounded by a solid line). In FIG. 7B, the icon 223 and the icon 224 are displayed. According to such a configuration, the second user can display the area of the capture screen that the user wants to see on the second display 22.

Further, the second user can execute the remote operation of the analyzer 1000 by using the capture screen displayed on the second display 22. FIG. 8 is a diagram for explaining a remote operation by the second user.

FIG. 8A is a first observation screen displayed by the third display 32, and FIG. 8B is a second observation screen displayed by the second display 22. As shown in FIG. 8B, when the icon 224 of the second observation screen (capture screen) is designated by the second user, the third computer 30 virtually designates the icon 224 of the first observation screen. It is determined that this has been done (see pointer P1 shown by a broken line in FIG. 8 (A)). In this way, the third computer 30 determines that the location designated by the second user in the area of the second observation screen and the same location on the first observation screen are virtually designated. The third computer 30 causes the analysis unit 50 to execute the process corresponding to the designated icon 224. A specific example of the process of FIG. 8 will be described below.

A first reference point is set on the first observation screen. In the example of FIG. 8A, the upper left point of the first observation screen is set as the first reference point. A second reference point is set on the second observation screen. In the example of FIG. 8B, the upper left point of the entire area of the second observation screen is set as the second reference point. In this way, the position indicated by the first reference point and the position indicated by the second reference point are the same. Both the first reference point and the second reference point are indicated by (X coordinate, Y coordinate). In the example of FIG. 8, both the first reference point and the second reference point are indicated by (0, 0).

Further, as shown in FIG. 8B, it is assumed that the icon 224 in the area of the second observation screen is designated by the pointer P2 based on the operation of the second user. Let (X, Y) be the coordinates of the position specified by the pointer P2. The second computer 20 acquires a relative position with respect to the second reference point (0, 0) of the position designated by the second user on the second observation screen. The relative position is (X, Y).

Next, the second computer 20 transmits the relative positions (X, Y) to the third computer 30 via the first computer 10. The third computer 30 identifies the relative position at the first reference point on the first observation screen based on the transmitted relative position (X, Y). In the example of FIG. 8A, the third computer 30 specifies the position designated by the pointer P1 indicated by the broken line as a relative position. The third computer 30 executes the process according to the specified relative position (the position designated by the pointer P1 indicated by the broken line). In the example of FIG. 8A, the third computer 30 executes a process of changing the magnification of the observation image I1. In the example of FIG. 8, the case where the second display 22 is displaying the second observation screen has been described, but even when the second display 22 is displaying the second analysis screen, the second user is the second user. Remote operation can be performed on the analysis screen.

According to such a configuration, the second user can remotely operate the analyzer 1000 by using the capture screens (second analysis screen and second observation screen) displayed by the second display 22.

Next, another display example of the second analysis screen and the second observation screen by the second computer 20 will be described. The second computer 20 can integrally display the second analysis screen and the second observation screen on the second display 22. FIG. 9 is a diagram for explaining an example in which the second computer 20 integrally displays the second analysis screen and the second observation screen in the second display area 220. Hereinafter, the screen in which the second analysis screen and the second observation screen are integrated may be referred to as an “integrated screen”.

The second computer 20 generates an integrated screen by combining the end portion A1 of the second analysis screen and the end portion A2 of the second observation screen. The second computer 20 displays at least a part of all the areas of the integrated screen on the second display 22. In addition, the second user can change the area displayed on the second display out of the entire area of the integrated screen (see the description of FIG. 7).

By displaying the integrated screen on the second display 22 in this way, the user can visually recognize the second analysis screen and the second observation screen on the same screen.

Next, another display example of the second analysis screen and the second observation screen by the second computer 20 will be described. The second computer 20 can switch between the second analysis screen and the second observation screen and display them in the second display area 220.

FIG. 10 is a diagram for explaining an example in which the second computer 20 displays the second analysis screen and the second observation screen in the second display area 220 so as to be switchable. When the second computer 20 is displaying one of the second analysis screen and the second observation screen, and the second user performs a predetermined operation, the second computer 20 switches to the other screen. In the example of FIG. 10, the predetermined operation is an operation of moving the pointer P2 to the edge of the second analysis screen. The predetermined operation may be another operation, for example, an operation to a switching button (not shown) displayed on the second display. In this way, since the second computer 20 displays the second analysis screen and the second observation screen in a switchable manner, the second user desires the second user among the second observation screen and the second screen. You can see the screen.

Further, whether the second display 22 integrally displays the second observation screen and the second screen (see FIG. 9) or the second observation screen and the second screen can be switched to display (see FIG. 10). May be selectable by the second user.

[Functional block diagram of the first computer and the second computer]
FIG. 11 is a functional block diagram of the third computer 30. The third computer 30 has a receiving unit 402, a generating unit 406, a display control unit 410, a capturing unit 404, and a transmitting unit 408.

The analysis unit 50 transmits data such as characteristic X-rays to the third computer 30. The receiving unit 402 of the third computer 30 receives data such as characteristic X-rays. The generation unit 406 generates the first observation screen based on the characteristic X-ray data. The display control unit 410 displays the generated first observation screen on the third display 32. The capture unit 404 generates the second observation screen by capturing the first observation screen. The transmission unit 408 of the third computer 30 transmits the data of the second observation screen and the data of the characteristic X-ray to the first computer 10.

FIG. 12 is a functional block diagram of the first computer 10 and the second computer 20. The first computer 10 includes a receiving unit 502, a capturing unit 504, a generating unit 506, a transmitting unit 508, and a display control unit 510. The second computer 20 has a receiving unit 602, a display control unit 604, an input unit 606, an acquisition unit 608, and a transmission unit 610.

The receiving unit 502 of the first computer 10 receives the data of the second observation screen and the data of the characteristic X-ray from the third computer 30. The generation unit 506 generates the first analysis screen based on the characteristic X-ray data from the third computer 30. The display control unit 510 displays the generated first analysis screen on the first display 12.

The capture unit 504 generates the second analysis screen by capturing the first analysis screen. The transmission unit 508 transmits the data of the second observation screen received by the reception unit 502 and the data of the second analysis screen generated by the capture unit 504 to the second computer 20.

The receiving unit 602 of the second computer 20 receives the data of the second analysis screen and the data of the second observation screen from the first computer 10. The second computer 20 stores the data on the second analysis screen and the data on the second observation screen in a predetermined storage area. The display control unit 604 displays the second analysis screen and the second observation screen on the second display 22.

Further, the second user can input a command to the second computer 20 by using the second input device 21 such as a mouse. The input unit 606 receives a command from the second input device 21. When the command received by the input unit 606 is a command to move the pointer P2, the display control unit 604 moves the pointer P2 displayed on the second display 22 in response to the command. When the command received by the input unit 606 is a command for designating an icon, the acquisition unit 608 acquires a relative position with reference to a second reference point (see FIG. 8) at the designated position.

The transmission unit 610 transmits the relative position acquired by the acquisition unit 608 to the first computer 10. Upon receiving the relative position, the first computer 10 transmits the relative position to the third computer 30. Upon receiving the relative position, the third computer 30 identifies the relative position on the first observation screen from the first reference point based on the relative position (see FIG. 8). The third computer 30 executes the process according to the specified relative position.

[Flowchart of 1st computer and 2nd computer]
FIG. 13 is a flowchart showing the processing executed by the first computer 10 and the second computer 20. In step S2, the second computer 20 determines whether or not the remote start operation has been executed by the second user. The remote start operation is, for example, an operation on the remote start button (not shown) displayed on the second display 22.

If the remote start operation has not been executed (NO in step S2), the second computer 20 repeats the process of step S2 until the remote start operation is executed. If it is determined that the remote start operation has been executed (YES in step S2), the process proceeds to step S4. In step S4, the second computer 20 transmits the request signal to the first computer 10. The request signal is a signal for requesting the second observation screen and the second analysis screen.

In step S102, the first computer 10 receives the request signal. Next, in step S104, the capture unit 504 of the first computer 10 generates the second analysis screen and the second observation screen by capturing the first analysis screen and the first observation screen. Next, in step S106, the first computer 10 transmits the second analysis screen and the second observation screen to the second computer 20.

In step S6, the second computer 20 receives the second analysis screen and the second observation screen. Next, in step S8, the second analysis screen and the second observation screen are displayed on the second display 22.

[Modification example]
(1) In the above-described embodiment, the first computer 10 captures as an example of a method of displaying the screens displayed on the first display 12 and the third display 32 on the second display 22 so as to have the same size. The configuration to generate the screen was explained. However, this method may be another method. For example, the first computer 10 sends the data of the first analysis screen and the data of the first observation screen and the control signal for displaying the first analysis screen and the first observation screen in the same size to the second computer 20. You may send it. The second display 22 displays an analysis screen and an observation screen having the same size as the first analysis screen and the first observation screen based on the control signal. Even in the case of this configuration, the second display 22 can display the analysis screen and the observation screen having the same size as the first analysis screen and the first observation screen.

(2) In the above-described embodiment, the configuration in which the analyzer 1000 includes two displays (first display 12 and third display 32) has been described. However, the analyzer 1000 may have a configuration including one display, or may adopt a configuration including three or more displays. Further, the number of the second displays 22 may be plural. Even with such a configuration, the first process (for example, the process of generating a capture screen) for displaying a screen having the same size as the screen displayed by the display included in the analyzer 1000 on the second display 22. Computer 10 runs.

(3) In the above-described embodiment, the configuration in which the analyzer 1000 includes the first computer 10 and the third computer 30 has been described. However, the analyzer 1000 may include one computer or may employ a configuration including three or more computers.

(4) In the above-described embodiment, the configuration in which the second display area 220 of the second display 22 is smaller than the first display area 120 of the first display 12 and the third display area 320 of the third display 32 has been described. .. However, the second display area 220 of the second display 22 may be larger than the first display area 120 of the first display 12 and the third display area 320 of the third display 32.

(5) In the above-described embodiment, the configuration in which the first computer 10 is connected to the network 700 has been described. However, the first computer 10 may be connected to another computer by wire. In the case of this configuration, the other computer and the second computer 20 may be connected to the network 700 so that they can communicate with each other.

[Aspect]
It will be understood by those skilled in the art that the plurality of exemplary embodiments described above are specific examples of the following embodiments.

(Item 1) The display system according to one aspect includes a first display device, a second display device, and a control device for controlling the first display device and the second display device. The control device displays the first screen related to the analysis of the sample on the first display device, generates the second screen by duplicating the first screen, and displays the second screen on the second display device.

According to the display system described in paragraph 1, the second screen is displayed on the second display device so as to have the same size as the size of the first screen displayed on the first display device. Therefore, the user can visually recognize the screen having the same size as the screen related to the analysis of the sample displayed on the first display device on the second display device.

(Item 2) In the display system of the item 1, the control device generates the second screen by capturing the first screen.

According to the display system described in the second item, a screen having the same size as the screen displayed by the first display device can be appropriately generated.

(Item 3) In the display system according to the first or second item, the control unit can change the area displayed by the second display device on the second screen according to the operation of the user.

According to the display device according to the third item, the user can display the area of the second image that the user wants to see on the second display device.

(Clause 4) In the display system according to any one of paragraphs 1 to 3, a first reference point is set on the first screen, and a first reference point is shown on the second screen. A second reference point indicating the same position as the designated position is set, the control device accepts the user's designation for the second screen, and the second reference point at the position designated by the user on the second screen is used as a reference. Based on the relative position, the position corresponding to the relative position with respect to the first reference point is specified on the first screen, and the process related to the analysis of the sample is executed according to the specified position.

According to the display device according to the fourth item, the user can cause the analyzer to execute the process related to the analysis of the sample by remote operation.

(Clause 5) In the display system according to any one of paragraphs 1 to 4, the display system includes a third display device, and the first screen is at least one of the analysis contents and analysis results of the sample. It is a screen including one, and the control device displays the first observation screen including the observation image of the sample on the third display device, generates the second observation screen by duplicating the first observation screen, and generates the second observation screen. The screen and the second observation screen are displayed on the second display device.

According to the display device according to the fifth item, the second display device can display at least one of the analysis conditions and the analysis result of the analysis unit in the same size as the first analysis screen, and is the same as the first observation screen. The observation contents of the sample can be displayed in the same size.

(Section 6) In the display system according to any one of paragraph 5, the control device is at least a part of the screen in which the edge of the second screen and the edge of the second observation screen are combined. Is displayed on the second display device.

According to the display system according to the sixth item, since the second display device can display an integrated screen in which the end of the second observation screen and the end of the second screen are joined, the user can display the same screen. Both the second observation screen and the second screen can be visually recognized.

(Section 7) In the display system according to any one of paragraph 5, the control device switches the second screen and the second observation screen to the second display device for display.

According to the display device according to the seventh item, since the second display device can switch between the second observation screen and the second screen for display, the user can switch between the second observation screen and the second screen. Can be visually recognized.

(Item 8) The analyzer according to one aspect includes the first display device and control device according to any one of paragraphs 1 to 7, and an analysis unit for analyzing a sample.

According to the analyzer described in item 8, the second screen is displayed on the second display device so as to have the same size as the size of the first screen displayed on the first display device. Therefore, the user can visually recognize the screen having the same size as the screen related to the analysis of the sample by the analysis unit displayed on the first display device on the second display device.

(Item 9) The control method for controlling the first display device according to one aspect includes a step of generating a second screen by duplicating the first screen displayed on the first display device and relating to sample analysis. The control device for displaying the second screen on the second display device includes a step of transmitting the second screen.

According to the control method described in paragraph 9, the second screen is displayed on the second display device so as to have the same size as the size of the first screen displayed on the first display device. Therefore, the user can visually recognize the screen having the same size as the screen related to the analysis of the sample displayed on the first display device on the second display device.

(Item 10) The control program according to one aspect is a second screen by duplicating the first screen, which is a screen related to sample analysis and displayed on the first display device, on the control device that controls the first display device. And the step of transmitting the second screen to the control device that controls the second display device.

According to the control program according to the tenth item, the second screen is displayed on the second display device so as to have the same size as the size of the first screen displayed on the first display device. Therefore, the user can visually recognize the screen having the same size as the screen related to the analysis of the sample displayed on the first display device on the second display device.

(Item 11) The control method for controlling the second display device according to one aspect is a step of receiving a screen displayed on the first display device and duplicated by the control device in relation to sample analysis, and a second screen. It includes a step of displaying on a display device.

According to the display device according to the eleventh item, the second screen is displayed on the second display device so as to have the same size as the size of the first screen displayed on the first display device. Therefore, the user can visually recognize the screen having the same size as the screen related to the analysis of the sample displayed on the first display device on the second display device.

(Item 12) The control program according to one aspect is duplicated on the control device for controlling the second display device by the control device displayed on the first display device and controlling the first display device regarding the analysis of the sample. The step of receiving the screen and the step of displaying the screen on the second display device are executed.

According to the program described in paragraph 12, the second screen is displayed on the second display device so as to have the same size as the size of the first screen displayed on the first display device. Therefore, the user can visually recognize the screen having the same size as the screen related to the analysis of the sample displayed on the first display device on the second display device.

It is also planned that the embodiments disclosed this time will be appropriately combined and implemented within a technically consistent range. And it should be considered that the embodiments disclosed this time are exemplary in all respects and not restrictive. The scope of this embodiment is indicated by the scope of claims rather than the description of the above-described embodiment, and is intended to include all modifications within the meaning and scope equivalent to the scope of claims. ..

1 Electron gun, 2 Deflection coil, 3 Objective lens, 4 Sample stage, 5 Sample stage drive unit, 7 Deflection coil control unit, 8 Electron detector, 10 1st computer, 11 1st input device, 12 1st display, 20 2nd computer, 21 2nd input device, 22 2nd display, 30 3rd computer, 32 3rd display, 50 analysis unit, 100 display system, 120 1st display area, 200 2nd display screen, 220 2nd display area , 320 3rd display area, 502,602 receiver, 504 capture unit, 506 generator, 508,610 transmitter, 510,604 display control, 606 input, 608 acquisition, 1000 analyzer.

Claims (12)

The first display device and
The second display device and
A control device for controlling the first display device and the second display device is provided.
The control device is
The first screen relating to the analysis of the sample is displayed on the first display device, and the first screen is displayed.
A second screen is generated by duplicating the first screen.
A display system that displays the second screen on the second display device. The display system according to claim 1, wherein the control device generates the second screen by capturing the first screen. The display system according to claim 1 or 2, wherein the control device can change the area displayed by the second display device in the second screen according to a user operation. A first reference point is set on the first screen.
On the second screen, a second reference point indicating the same position as the position indicated by the first reference point is set.
The control device is
Accepting the user's designation for the second screen,
Corresponds to the relative position when the first reference point is used as a reference on the first screen based on the relative position of the position specified by the user on the second screen with respect to the second reference point. The display system according to any one of claims 1 to 3, wherein the position to be used is specified and processing is executed according to the specified position. The display system includes a third display device.
The first screen is a screen including at least one of the analysis contents and analysis results of the sample.
The control device is
The first observation screen including the observation image of the sample is displayed on the third display device.
A second observation screen is generated by duplicating the first observation screen.
The display system according to any one of claims 1 to 4, wherein the second screen and the second observation screen are displayed on the second display device. The display according to claim 5, wherein the control device displays at least a part of a screen in which the end of the second screen and the end of the second observation screen are combined on the second display device. system. The display system according to claim 5, wherein the control device switches the second screen and the second observation screen to the second display device for display. The first display device and control device according to any one of claims 1 to 7.
An analyzer including an analysis unit for analyzing the sample. It is a control method for controlling the first display device.
Regarding the analysis of the sample, and the step of generating the second screen by duplicating the first screen displayed on the first display device,
A control method including a step of transmitting the second screen to a control device for displaying the second screen on the second display device. For the control device that controls the first display device,
A step of generating a second screen by duplicating the first screen which is a screen related to sample analysis and displayed on the first display device, and
A control program that causes a control device that controls a second display device to execute a step of transmitting the second screen. It is a control method for controlling the second display device.
Regarding the analysis of the sample, the step of receiving the screen displayed on the first display device and duplicated by the control device, and
A control method including a step of displaying the screen on the second display device. For the control device that controls the second display device,
Regarding the analysis of the sample, the step of receiving the screen displayed on the first display device and duplicated by the control device controlling the first display device, and
A control program that executes a step of displaying the screen on the second display device.

Images