JP5407887B2 - Display processing device for X-ray analysis - Google Patents

Description

  The present invention relates to an X-ray analyzer for detecting X-rays emitted from a sample by using an electron beam or an X-ray as an excitation ray, such as an electron probe microanalyzer, a scanning electron microscope, or a fluorescent X-ray analyzer. The present invention relates to a display processing device for displaying a result.

  With an electron beam probe microanalyzer (hereinafter referred to as “EPMA”), the type and amount of contained elements can be examined for each minute region in a two-dimensional region on a sample by performing mapping analysis. When analyzing the results obtained by mapping analysis, create a scatter plot of the characteristic X-ray intensity for two or three elements, and use the distribution of plot points on the chart to determine the type of compound contained in the sample. And a method of confirming the content ratio, that is, phase analysis (synonymous with phase analysis) is frequently used.

  FIG. 11 is a display example of a general binary scatter diagram, in which the characteristic X-ray intensity of Al is assigned to the horizontal axis and the characteristic X-ray intensity of Ca is assigned to the vertical axis. One data point on the drawing corresponds to one minute region on the sample. Here, since a plurality of compounds containing at least one of the two elements of Al and Ca are included, a plurality of regions where the density of plot points is high appear in the binary scatter diagram.

FIG. 12 is a display example of a ternary scatter diagram (also called a ternary system state diagram) and an explanatory diagram thereof (see Patent Document 1, Non-Patent Document 1, etc.). As shown in FIG. 12 (b), the ternary scatter diagram is obtained by assigning each side of the equilateral triangle graph to the intensity axes (A axis, B axis, C axis) of different elements. And plot the data of the minute region at the corresponding intensity position. In order to uniquely determine the plot position, it is necessary to standardize the total strength of the three elements for each data point. Therefore, the strength of each element is normalized so that the total strength of the three elements becomes 100%. That is, the A-axis, B-axis, and C-axis intensity axes each range from 0 to 100%, and the intensity of the three elements is I ₁ , I ₂ , I ₃ , and the sum of the intensity of the three elements is I _sum. The plot positions of the data points are (I ₁ / I _sum , I ₂ / I _sum , I ₃ / I _sum ).

  When the data points obtained in each minute region in the two-dimensional region on the sample are positioned in the ternary scatter diagram, for example, as shown in FIG. In the ternary scatter diagram shown in FIG. 12A, one data point corresponds to one minute region on the sample. Here, since a plurality of compounds containing at least one of the three elements of Al, Si, and Ca are included, a plurality of regions where the density of plot points is high appear in the ternary scatter diagram. A compound can be identified from the content ratio of the three elements in these regions.

  When a large number of elements are included in the sample, the analyst needs to determine which element combination should be subjected to phase analysis. Therefore, as shown in FIG. 13, there is conventionally known an apparatus that displays a list of binary scatter diagrams for different combinations of two elements in a matrix and allows an analyst to select and analyze one of them. Yes. For example, when one binary scatter diagram indicated by an arrow in FIG. 13 is clicked with a mouse or the like (that is, two elements of Al and Ca are selected), a detailed binary scatter diagram as shown in FIG. 11 is obtained. It is displayed on a separate screen so that detailed phase analysis can be performed.

  While the selection of two elements can be conventionally performed simply as described above, a method for simply selecting three elements for a ternary scatter diagram as shown in FIG. 12 has not been proposed. For this reason, it is necessary for the analyst to select an element to be analyzed while comparing, for example, binary scatter diagrams or mapping data one by one. There is a problem that it is impossible to make an appropriate judgment without sufficient skill and experience.

Japanese Patent Laid-Open No. 11-269584

"Phase analysis color map by EPMA", [Searched on December 9, 2009], UBE Science Analysis Center, Inc., Internet <URL: http://www.ube-ind.co.jp/usal/service/local /s268b.pdf>

  The present invention has been made to solve the above-mentioned problems, and the object of the present invention is to analyze among a large number of elements when performing a three-element phase analysis using a ternary scatter diagram. An object of the present invention is to provide a display processing apparatus for X-ray analysis capable of simply and accurately selecting three elements.

The present invention, which has been made to solve the above-described problems, sequentially detects X-rays emitted from the excitation-ray irradiation site while moving the irradiation position of the excitation beam one-dimensionally or two-dimensionally on the sample. An X-ray analysis apparatus capable of mapping analysis of each element in a sample, processing data obtained from a large number of minute regions in a one-dimensional region or a two-dimensional region on the sample and displaying them on a display unit A display processing device for X-ray analysis,
a two-dimensional area or three-dimensional space to a) an absolute or relative intensity information of the specified four or more elements or al selection has been three elements each shaft, the 3 obtained for each minute region Scatter charts in which data points based on X-ray intensity data for elements are plotted are created for a combination of a plurality of three elements in which each element is selected a plurality of times, and the axes indicating the same intensity information are common. the 3-dimensional scatter diagram formed by placed them scatter plot as a three-dimensional display processing means for displaying 3-dimensional display screen,
b) a position indicating means for the analyzer to indicate an arbitrary position on the three-dimensional scatter diagram displayed on the display screen;
c) a three-element selection unit that selects a combination of three elements corresponding to the position indicated on the three-dimensional scatter diagram by the position indicating unit, and displays a ternary scatter diagram of the three elements on the display screen;
It is characterized by having.

  According to one aspect of the present invention, the three-dimensional scatter diagram is divided into six directions of + x, + y, + z, −x, −y, and −z with respect to the origin on three axes x, y, and z orthogonal to each other. It is a three-dimensional graph taking intensity information of different elements, and the position indicating means can virtually indicate any one of the eight quadrants of the graph.

  That is, in this configuration, X-ray intensity data of a maximum of 6 elements and 8 types of 3 elements are plotted in a 3D space composed of 3 axes of x, y, and z, and 8 3D Each corresponds to a combination of three elements with different quadrants. When an arbitrary position on the graph is instructed by the position indicating means, the three-element selecting means displays the x, y and z axis positions of the graph currently displayed on the display screen and the position of the designated point. The quadrant selected from the above is estimated, and the combination of the three elements is determined. Then, the three-element scatter diagram of the three elements is displayed in the same window as the three-dimensional scatter diagram or in a different window. The analyst can use this ternary scatter diagram to perform a phase analysis of the three elements.

  In order to select any one of the eight quadrants according to the instructed position, the three element selection means, for example, according to the visual field direction (that is, the position of the axis on the display screen) of the three-dimensional scatter diagram at that time Then, the area in the three-dimensional scatter diagram displayed two-dimensionally is divided into two or more, and the divided areas and the quadrants are associated with each other. Then, if an inside of a certain divided area is instructed, it may be considered that a quadrant corresponding to the divided area is designated. In this case, it is not possible to select a quadrant on the far side that is hidden in the front quadrant in a certain visual field direction, but it is possible to select all quadrants by changing the visual field direction of the three-dimensional scatter diagram. is there.

  In another aspect of the present invention, the three-dimensional scatter diagram is a three-dimensional graph in which different elements are assigned to four vertices of a triangular pyramid and different three-way scatter diagrams are arranged on four surfaces, respectively. The position indicating means may be configured to indicate one of four surfaces. That is, in this configuration, X-ray intensity data of a combination of three elements exists only on each surface of the triangular pyramid, so that it is possible to specify 4 by specifying any one of the surfaces of the three-dimensional scatter diagram displayed two-dimensionally. Any of the three element combinations of species can be specified.

  According to the display processing apparatus for X-ray analysis according to the present invention, an analyst selects appropriate three elements in a state where X-ray intensity information of a combination of a plurality of three elements, that is, a three-dimensional scatter diagram is displayed on the display screen. It can be easily selected. That is, it becomes possible to select the combination of the elements even with the three elements while comprehensively confirming the visual analysis result as conventionally performed with the selection of the two elements. As a result, the selection of the three elements for the phase analysis reduces elements that depend on the experience and skill of the analyst, and allows more accurate analysis to proceed efficiently. Further, since the three elements can be selected by a simple operation such as a mouse (or other pointing device) click operation, reselection when an inappropriate selection is performed can be easily performed.

The block diagram of the principal part of EPMA using the display processing apparatus which is one Example of this invention. The figure which shows an example of the element selection screen displayed by EPMA of a present Example. The figure which shows an example of the phase analysis screen displayed by EPMA of a present Example. The figure which shows an example of the XYZ display screen displayed by EPMA of a present Example. The figure which shows an example of the triangle display screen displayed by EPMA of a present Example. The figure which shows an example of the pyramid display screen displayed by EPMA of a present Example. Explanatory drawing of an XYZ display graph. Explanatory drawing of a triangle display graph. Explanatory drawing of a pyramid display graph. Explanatory drawing of the procedure and screen transition of 3 element selection on the display screen in EPMA of a present Example. The figure which shows the example of a display of a general binary scatter diagram. A display example (a) of a general ternary scatter diagram and an explanatory diagram (b) thereof. The figure which shows an example of the matrix-like list display of the conventional binary scatter diagram for 2 element selection.

  An embodiment of EPMA using a display processing apparatus according to the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic configuration diagram of an EPMA according to the present embodiment.

  In FIG. 1, an electron beam irradiation unit 1 includes an electron gun 2, a deflection coil (not shown), and the like, and irradiates a sample 3 placed on a sample stage 4 with a minute diameter electron beam. Upon receiving the electron beam, characteristic X-rays having a wavelength characteristic of the element are emitted from the surface of the sample 3. This characteristic X-ray is wavelength-dispersed by the spectral crystal 5, and a diffracted X-ray having a specific wavelength is detected by the X-ray detector 6. For example, the electron beam irradiation position on the sample 3, the spectroscopic crystal 5 and the X-ray detector 6 are always located on the Roland circle, and the spectroscopic crystal 5 is inclined while moving linearly by a drive mechanism (not shown). The X-ray detector 6 is rotated in conjunction with the movement. Thus, wavelength scanning of the X-ray to be analyzed is achieved so as to satisfy the black diffraction condition, that is, while maintaining the state where the incident angle of the characteristic X-ray with respect to the spectral crystal 5 is equal to the emission angle of the diffracted X-ray. . The detection signal of the X-ray intensity by the X-ray detector 6 is input to the data processing unit 9, and the data processing unit 9 creates an X-ray spectrum corresponding to the wavelength scanning.

  The sample stage 4 can be moved in the x-axis and y-axis directions by the sample stage drive unit 7, and the electron beam irradiation position on the sample 3 is scanned by this movement. The analysis control unit 8 controls operations of the sample stage driving unit 7, the driving mechanism that moves the spectroscopic crystal 5 and the X-ray detector 6, the data processing unit 9, and the like in order to execute the analysis on the sample 3. The central control unit 10 includes an operation unit 12 including a keyboard and a mouse (or other pointing device) for an analyzer (operator) to give instructions, and a display unit 13 that provides information such as analysis results to the analyst. Is connected, and it has a function of setting analysis conditions and outputting analysis results. Normally, all or part of the central control unit 10, the analysis control unit 8, and the data processing unit 9 are configured by a personal computer (PC), and by executing dedicated control / processing software installed in the PC. Each function is achieved.

  When mapping analysis is performed in this EPMA, the characteristic X is scanned while scanning the electron beam irradiation position in an arbitrary two-dimensional region (specified by the analyst) on the sample 3 under the control of the analysis control unit 8. By repeating the detection of the line, an X-ray spectrum is created for each minute region set in the two-dimensional region. Since each element emits characteristic X-rays with a specific wavelength (energy), the intensity (concentration) of a specific element can be obtained by detecting the peak of a specific wavelength on the X-ray spectrum and obtaining the peak intensity. It is done. As a result, the intensity data of the contained elements can be acquired for each minute region in the two-dimensional region, and is stored in the data storage unit 90 in the data processing unit 9.

  The display processing unit 11 included as a part of the function in the central control unit 10 is characterized by using intensity data stored in the data storage unit 90 according to the operation of the operation unit 12 by the analyst. A dimensional scatter diagram or the like is created and displayed on the screen of the display unit 13. Hereinafter, the drawing process performed mainly by the display processing unit 11 when the analyst performs the phase analysis will be described in detail.

  When the analyst performs a predetermined operation on the operation unit 12 to perform the phase analysis, the display processing unit 11 displays a phase analysis screen (window) 20 as shown in FIG. 3 on the screen of the display unit 13. The phase analysis screen 20 is provided with a graph display region 21 for a state diagram (equilibrium state diagram, phase diagram) and a graph display region 22 for a binary or ternary scatter diagram. However, FIG. 3 is a diagram showing a screen after processing as described later is performed. In the initial state where the phase analysis screen is opened as described above, nothing is displayed in the graph display areas 21 and 22. It only shows the default graph.

  When the analyst clicks the [3D display] icon 23 on the phase analysis screen 20 with a mouse or the like, the display processing unit 11 receiving this instruction performs the phase analysis on the element selection screen (window) 30 shown in FIG. It is displayed on the screen 20 in an overlapping manner (or at another position). In this example, up to six elements can be designated for display. Specifically, an arbitrary element is selected from a plurality of elements prepared in advance by clicking the six element selection buttons 31 with a mouse or the like. FIG. 2 shows a state in which six elements of Al, Ca, Si, C, Cu, and Fe are selected. The selected order becomes a priority in the case of display described later.

  When the analyst clicks the “OK” button 32 with a mouse or the like after completing the element selection operation, the display processing unit 11 confirms the selected element and closes the element selection screen 30, instead, as shown in FIG. Such a three-dimensional scatter diagram screen (window) 40 is newly opened and superimposed on the phase analysis screen 20 for display.

  The three-dimensional scatter diagram screen 40 is provided with a graph display region 41, and a three-dimensional scatter diagram (graph) is displayed in this region 41. The three-dimensional scatter diagram includes three types of graphs of XYZ display, triangle display, and pyramid display. These are [XYZ] button 42, [triangle] provided in the graph style selection frame at the top of the graph display area 41. The button 43 and the [pyramid] button 44 can be alternatively selected by clicking with a mouse or the like. The selected graph style buttons 42, 43, and 44 have different display colors. FIG. 4 shows a state in which the XYZ display graph is selected, and the XYZ display is automatically displayed on the three-dimensional scatter diagram screen 40 opened after the “OK” button 32 is clicked on the element selection screen 30. Is set.

  FIG. 7 is a simple explanatory diagram of an XYZ display graph. The XYZ display graph is an element selection screen 30 in six directions of + x, + y, + z, -x, -y, and -z starting from the origin with respect to the x, y, and z axes orthogonal to each other in the three-dimensional space. 5 is a graph in which the strength of each element is taken according to the priority order of the maximum of six elements selected in (1). In the example of FIG. 4, the intensity of each element of Al, Ca, Si, C, Cu, and Fe is associated with each direction of + x, + y, + z, -x, -y, and -z. The three-dimensional space is divided into eight three-dimensional quadrants by the three axes x, y, and z. Each quadrant is a space composed of the strength axes of any three of the six elements. In FIG. 7, the first quadrant surrounded by + x, + y, and + z is schematically shown as a rectangular parallelepiped.

  Therefore, in the space of the XYZ display graph, data of eight three element combinations obtained by extracting arbitrary three elements among the elements with a maximum of six elements are displayed. One data point represents the intensity (or concentration) of the three elements at a certain point (microregion) on the sample 3 obtained by mapping analysis. For example, a data point located in the first quadrant shown in FIG. 7 represents the intensity of three elements associated with + x, + y, and + z at a certain point on the sample 3. All data points have different colors for each quadrant, and it is easy to visually recognize in which quadrant the data points are present, that is, which three element combinations are used.

  Not only the XYZ display graph but also the three-dimensional graph displayed in the graph display area 41 can be rotated by operating the vertical slider 45 and the horizontal slider 46. That is, when the vertical slider 45 is moved up and down, the entire graph rotates so that the z-axis is tilted in a range of −90 ° to 90 °, and when the horizontal slider 46 is moved left and right, the entire graph is rotated 360 around the z-axis. Rotate. As a result, a graph viewed from an arbitrary viewing direction (angle) can be drawn. For example, the intensity data of, for example, Si, C, and Cu, which are hidden behind the graph shown in FIG. Can be confirmed. The graph can also be enlarged or reduced by clicking on the enlarge button 47 or the reduce button 48.

  When the analyst clicks the [Triangle] button 43 in the state of FIG. 4, the display processing unit 11 switches the graph displayed in the graph display area 41 to the triangle display as shown in FIG. 5. FIG. 8 is a simple explanatory diagram of a triangle display graph. As shown in FIG. 8, the triangle display shows the intensity of three elements that are not standardized in the direction perpendicular to the plane of the normal three-dimensional scatter diagram as shown in FIG. This is made three-dimensional by adding an axis indicating the total value (D-axis in FIG. 8B). That is, as shown in FIG. 8B, this graph has a triangular prism shape with a normal ternary scatter diagram as its bottom surface, and data points are located in the triangular prism space. Three elements (here, E1, E2, and E3) are selected in accordance with the above-mentioned priority order among the maximum six elements, but the selection can be switched, and any three of the six elements can be displayed as a triangle. It can be performed.

The three strength axes (A-axis, B-axis, and C-axis) on the bottom surface each indicate a strength ratio of 0 to 100%. Therefore, when the plot position of the data point is projected onto the bottom surface, the position of the projected point is (I ₁ / I _sum , I ₂ / I _sum , I ₃ / I _sum ). On the other hand, the height P of the data point is the sum I _sum (= I ₁ + I ₂ + I ₃ ) of the strengths of the three elements. That is, the absolute value of the element strength is not expressed in the normal planar ternary scatter diagram, whereas in the three-dimensional ternary scatter diagram displayed here, the sum (absolute value) of the strengths of the three elements is expressed. Expressed. In an ordinary ternary scatter diagram, data points having the same content ratio of three elements and different sums of strengths, that is, different absolute values, are plotted at the same position and cannot be distinguished. On the other hand, in this triangle display, even if the content ratios of the three elements are the same, if the sum of the intensity is different, the data points are plotted at different heights P, so that they can be clearly distinguished visually. Is possible.

  When the analyst clicks the [pyramid] button 44 in the state of FIG. 4 or FIG. 5, the display processing unit 11 switches the graph displayed in the graph display area 41 to the pyramid display as shown in FIG. FIG. 9 is a simple explanatory diagram of a pyramid display graph. In the pyramid display, four elements (here, E1, E2, E3, E4) according to the above priority among 6 elements at maximum are assigned to each vertex of the regular triangular pyramid, and each of the four faces of the regular triangular pyramid is usually Is a flat ternary scatter diagram. Therefore, in this graph, the data points exist only on the four planes constituting the equilateral triangular pyramid and do not exist in the internal space.

In the example of FIG. 6, four elements Al, Ca, Si, and C are assigned to the apex of the equilateral triangular pyramid, and the ternary scatter diagram of Al, Ca, and Si is hidden behind and cannot be seen. Since the graph of the pyramid display can also be rotated by operating the vertical slider 45 and the horizontal slider 46 as described above, a three-way scatter diagram of Al, Ca, and Si can also be confirmed by the operation.
As described above, in the EPMA of this embodiment, the result of mapping analysis of a sample containing multiple elements can be confirmed using various types of three-dimensional scatter diagrams.

  In order to perform the phase analysis, the analyst needs to select appropriate three elements and display a detailed ternary scatter diagram in the graph display area 22 of the phase analysis screen 20. Therefore, the EPMA of this embodiment has a function that allows an analyst to easily select three elements to be subjected to phase analysis while visually recognizing the three-dimensional scatter diagram as described above. When this function is schematically described, in the XYZ display graph shown in FIG. 4 and the pyramid display graph shown in FIG. 6, when an arbitrary position is clicked with a mouse or the like, three elements associated with the position are displayed. Is automatically selected, and the three-dimensional scatter diagram screen 40 switches to a triangle display corresponding to the three elements, while the graph display region 22 of the phase analysis screen 20 has a planar ternary scatter corresponding to the three elements. A figure is displayed.

  An example will be described with reference to FIG. Now, as shown in FIG. 10A, it is assumed that the same XYZ display graph as that shown in FIG. 4 is displayed on the three-dimensional scatter diagram screen 40. The analyst checks the distribution of data points from various directions using the graph rotation function as described above. When the combination of the three elements to be phase-analyzed is determined, the user clicks on a position typically indicating a quadrant corresponding to the three elements. The correspondence between the clicked position and the selected quadrant (that is, a combination of three elements) is determined by a predetermined calculation algorithm. For example, in the case of the example in FIG. 10, when an arbitrary position in the region above the dotted line P is clicked, a combination of three elements E1, E2, and E3 is selected, and an arbitrary region in the region below the dotted line P is selected. Is clicked, a combination of three elements E1, E2, and E6 is selected. In this case, the other three element combinations cannot be selected.

  On the other hand, for example, in a state where the graph is rotated so that the Y axis is orthogonal to the paper surface (the element E2 is on the near side and the element E5 is on the other side), any position in the four regions defined by the x axis and the z axis By clicking each of the four combinations, the three element combinations of E1, E2, and E3, the three element combinations of E2, E3, and E4, the three element combination of E2, E4, and E6, and the three element combination of E1, E2, and E6, 4 Three element combinations of species can be selected. Thus, a maximum of four types of three element combinations can be selected depending on the rotation position of the graph, and all eight types of three element combinations can be selected by appropriately rotating the graph.

  In the example of FIG. 10, when the combination of three elements E1, E2, and E3 is selected, the graph in the graph display area 41 of the three-dimensional scatter diagram screen 40 is displayed in a triangle display corresponding to the three elements E1, E2, and E3. Switch. As shown in FIG. 10B, the initial triangle display at this time is a state in which the intensity axis (D-axis in FIG. 8B is orthogonal to the screen (paper surface in the figure)), and is apparently flat. Of course, the graph can be seen from an arbitrary direction as shown in Fig. 5 by rotating the sliders 45 and 46.

  On the other hand, a planar ternary scatter diagram corresponding to the three elements E1, E2, and E3 is also displayed in the graph display area 22 of the phase analysis screen 20 at the same time. FIG. 3 shows a state in which this ternary scatter diagram is displayed. Thereby, on the phase analysis screen 20, the analyst can perform the phase analysis of the three elements E1, E2, and E3 (Al, Ca, and Si in the example of FIG. 3). In the phase analysis, for example, a cluster (set of data points) or the like is specified on the scatter diagram, and a distribution map (mapping) in which elements are color-coded for each region having a specific relationship can be obtained.

  In addition, when a pyramid display graph as shown in FIG. 6 is displayed on the three-dimensional scatter diagram screen 40, when an arbitrary position in the four-way ternary scatter diagram on the graph is clicked, the 3 Three elements corresponding to the original scatter diagram are selected, and switching to the triangle display and display of the ternary scatter diagram on the phase analysis screen 20 are executed as described above. In the case of pyramid display, only the intensity of four elements is originally reflected in the graph. Therefore, when five or more elements are selected on the element selection screen 30, the priority is changed and reflected in the pyramid display. What is necessary is just to find suitable 3 elements, changing 4 elements.

  As described above, in the EMPA of the present embodiment, an analyst can easily select three elements suitable for phase analysis while confirming a scatter diagram of a plurality of three elements on one screen. As a result, it is possible to easily and accurately perform the operation of selecting three elements, which conventionally required sufficient experience and complex judgment. In addition, since it is possible to select three elements by simply clicking with a mouse or the like, for example, even if an incorrect element is selected, it is possible to return from the triangle display to the XYZ display or the pyramid display and easily change another element combination. You can choose again. Thereby, phase analysis can be performed efficiently.

  Although the above embodiment has been described by taking EPMA as an example, the excitation lines are not limited to electron beams, but various X-rays that can be used for mapping analysis on a sample using other excitation lines such as X-rays and ion beams. It can be applied to an analyzer.

DESCRIPTION OF SYMBOLS 1 ... Electron beam irradiation part 2 ... Electron gun 3 ... Sample 4 ... Sample stage 5 ... Spectral crystal 6 ... X-ray detector 7 ... Sample stage drive part 8 ... Analysis control part 9 ... Data processing part 90 ... Data storage part 10 ... Central control unit 11 ... display processing unit 12 ... operation unit 13 ... display unit 20 ... phase analysis screen 21, 22 ... graph display area 23 ... [three-dimensional display] icon 30 ... element selection screen 31 ... element selection button 32 ... "OK""Button 40 ... 3D scatter diagram screen 41 ... graph display area 42 ... [XYZ] button 43 ... [triangle] button 44 ... [pyramid] button 45 ... vertical slider 46 ... horizontal slider 47 ... enlarge button 48 ... reduce button

Claims (3)

X-ray capable of mapping analysis of each element in the sample by sequentially detecting the X-rays emitted from the excitation-ray irradiation site while moving the irradiation position of the excitation beam on the sample one-dimensionally or two-dimensionally An X-ray analysis display processing apparatus for processing data obtained from a large number of microscopic regions in a one-dimensional region or a two-dimensional region on a sample and displaying the data on a display unit,
a two-dimensional area or three-dimensional space to a) an absolute or relative intensity information of the specified four or more elements or al selection has been three elements each shaft, the 3 obtained for each minute region Scatter charts in which data points based on X-ray intensity data for elements are plotted are created for a combination of a plurality of three elements in which each element is selected a plurality of times, and the axes indicating the same intensity information are common. the 3-dimensional scatter diagram formed by placed them scatter plot as a three-dimensional display processing means for displaying 3-dimensional display screen,
b) a position indicating means for the analyzer to indicate an arbitrary position on the three-dimensional scatter diagram displayed on the display screen;
c) a three-element selection unit that selects a combination of three elements corresponding to the position indicated on the three-dimensional scatter diagram by the position indicating unit, and displays a ternary scatter diagram of the three elements on the display screen;
A display processing apparatus for X-ray analysis, comprising:
The display processing apparatus for X-ray analysis according to claim 1,
The three-dimensional scatter diagram shows intensity information of different elements in six directions of + x, + y, + z, -x, -y, and -z with respect to the origin on three axes x, y, and z orthogonal to each other. A display processing apparatus for X-ray analysis, wherein the position indicating means virtually indicates any one of the eight quadrants of the graph. The display processing apparatus for X-ray analysis according to claim 1,
The three-dimensional scatter diagram is a three-dimensional graph in which different elements are assigned to the four vertices of the triangular pyramid and different ternary scatter diagrams are arranged on the four surfaces, respectively. A display processing apparatus for X-ray analysis characterized by indicating one of them.