JP2011042025A - Wire saw - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a single wire saw reducing drive sources and compact. <P>SOLUTION: In the wire saw 1 in which a fixed abrasive grain wire 7 is wound by a winding reel 5 after starting from a feeding reel 4 and passing through groove rollers 8 and the wire 7 runs between the groove rollers 8 in one direction or reciprocatingly to cut a workpiece W, a feeding side pressing roller 9 rotating the feeding reel 4 by a friction force, a winding side pressing roller 10 rotating the winding reel 5 by a friction force, an endless belt 15 making both the pressing rollers 9, 10 contact and rotating both the pressing rollers 9, 10 by their friction force, and a drive motor 13 driving running of the endless belt 15 are arranged, and, by driving rotation of the endless belt 15 in one direction by the drive motor 13, the feeding reel 4 and the winding reel 5 are rotated through the friction force of the feeding side pressing roller 9 and the winding side pressing roller 10 so as to allow the wire 7 to run. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a wire saw using a fixed abrasive wire. More specifically, the present invention relates to a single wire saw in which one fixed abrasive wire is wound to cut one row of highly brittle materials such as silicon and sapphire.

  Conventionally, a fixed abrasive wire in which abrasive grains such as diamond are fixed to a core wire by electrodeposition or resin is used, and the fixed abrasive wire is wound around a plurality of groove rollers in which a plurality of grooves are engraved. A multi-wire saw is known in which a highly brittle material such as silicon or sapphire is pressed against a wire array formed between rollers and cut into a plurality of wafers (for example, Patent Document 1).

  There is also known a single wire saw in which a fixed abrasive wire is formed in an endless shape and this fixed abrasive wire is stretched over a resin pulley to cut one row.

  By the way, the crystal orientation is important for producing semiconductor materials from ingots such as silicon and sapphire, and an orientation flat (hereinafter referred to as orientation flat) is provided to indicate the crystal orientation before cutting the ingot with a multi-wire saw. It is done.

  In order to provide the orientation flat described above, it is necessary to cut the ingot with one wire instead of a plurality of wire rows, and a single wire saw is required for the cutting.

  When cutting a thick wafer into chips, or cutting a thick wafer or grooving a specific part, use multiple wires to process parts that are not necessary. In some cases, a single wire saw may be required.

  In addition, there is a demand for special processing such as jewelry, special processing of highly brittle materials, various types of multi-faced cutting, etc., and a compact single wire saw is required.

JP-A-11-291154

  By the way, in the conventional multi-wire saw as disclosed in Patent Document 1, since a plurality of wafers are obtained at one time for cutting out a wafer from silicon or the like, the multi-wire saw is very efficient. It becomes a large-scale device for cutting while holding the wire row, and there is a motor that drives the processing roller with a plurality of grooves engraved to drive the wire row and a large capacity motor that drives the supply reel and take-up reel. There is a problem that is needed.

  Further, in the above multi-wire saw, it is necessary to drive all the motors for driving the processing roller, the supply reel and the take-up reel in synchronism with each other, and there is a problem that the control mechanism is complicated and the cost is high. is there.

  Therefore, the wire saw of Patent Document 1 is provided with a roller that is pressed against the supply reel and the take-up reel, and both the supply-side and take-up-side pressure contact rollers are driven to indirectly drive the supply reel and the take-up reel. The tension change that occurs without being synchronized between the supply reel and the take-up reel is absorbed by slipping the pressure roller, thereby stabilizing the wire tension.

  However, in the wire saw of the above-mentioned Patent Document 1, the supply reel and the take-up reel are driven by rollers that press-contact each of the reels. However, each of these press-contact rollers is provided with a drive motor. The portion where the synchronization cannot be completed (that is, the rotational difference cannot be absorbed) is absorbed by the slip between the pressure roller and the reel, and at least the supply reel and the take-up reel must be driven by two drive motors.

  In addition, the method of connecting a fixed abrasive wire in an endless manner and cutting with this endless fixed abrasive wire allows the device to be made compact to some extent, but the wire strength of the connecting portion is weak, and the wire is There is a problem that it is not suitable for the cutting of a single ingot or the formation of an orientation flat because the wire is short or the wire length is short so that it is clogged and cannot be cut immediately. Further, it is necessary to frequently replace the wire, and there is a problem that the work becomes complicated.

  Therefore, a fixed abrasive wire supply reel and a take-up reel are provided, a servo motor is connected to both of these reels, the supply reel and the take-up reel are driven in synchronism, and the wire row is wound in one row to make 1 Although it is conceivable to disconnect the rows, it is necessary to synchronize both motors, which complicates the control and requires the provision of two motors, and there is a problem that the cost is high as described above.

  Therefore, an object of the present invention is to provide a wire saw that is compact and inexpensive and that can be cut for a long time to some extent.

  Accordingly, in the first aspect of the present invention, the single fixed abrasive wire supplied from the supply reel is wound around the plurality of groove rollers so that the wire is arranged in a line, and then wound around the take-up reel. In a wire saw configured to cut the workpiece by traveling between the groove rollers so that the wire moves in one direction or reciprocally, the wire is pressed against the supply reel, and the supply reel is rotated by a frictional force. A supply-side pressure contact roller, a winding-side pressure contact roller that is pressed against the take-up reel and rotates the take-up reel by friction force, and the supply-side pressure contact roller and the take-up side pressure contact roller are brought into contact with each other to generate friction force. To provide an endless belt for rotating the supply-side pressure contact roller and the winding-side pressure contact roller, and a drive motor for driving the endless belt. By adopting a configuration in which the endless belt is driven to rotate in one direction, the supply reel and the take-up reel are rotated via the friction force of the supply-side pressure contact roller and the take-up-side pressure contact roller to run the wire. It is a wire saw.

  If a supply-side driven roller and a winding-side driven roller that press the endless belt toward both the pressure-contacting rollers are provided at positions facing the supply-side pressure contact roller and the winding-side pressure contact roller, respectively, The frictional force between the pressure roller and the endless belt is increased, and the supply reel and the take-up reel can be stably driven and rotated. If the endless belt is pressed against the pressure roller as well as the two driven rollers, the frictional force between the pressure roller and the endless belt can be further increased, and the wire with a stable and accurate tension can be obtained. It is possible to run.

  According to a second aspect of the present invention, in the wire saw of the first aspect, the front support plate that supports the groove roller of the wire saw, the machine frame that is erected and fixed to the rear of the front support plate, and the front support plate are fixed. And at one end thereof, a swing shaft that is fitted and supported by the machine frame, a swing plate fixed to the other end of the swing shaft, and a swing shaft fixed to the swing plate. A rotary shaft whose one end is pivotally supported at a position spaced apart from each other, a vertically movable slide member fixed to the other end of the rotary shaft, and a horizontal slide member fixed to the slide member and movable in the horizontal direction. A nut member, a ball screw threadedly engaged with the nut member, and a servo motor that drives the ball screw are provided, and by moving the servo motor forward and backward, the moving force of the nut member in the horizontal direction is passed through the slide member. Up and down A wire saw that adopts a configuration in which the front support plate is caused to swing by rotating the swing shaft fixed to the swing plate by dividing the movement into the pendulum motion of the swing plate. .

  Since the supply reel and take-up reel can be driven by a single motor as described above, the wire saw can be reduced in size, and there is no need to synchronize the motors required when driving by multiple motors. Can be simplified, and the cost can be reduced. Since the groove roller has a small amount of winding of the wire, the groove roller rotates following the traveling of the wire, and no driving means for the groove roller is necessary.

  In addition, since a supply reel and a take-up reel are provided, even a workpiece that takes a long time to process can be accurately cut as compared with a wire saw that is cut with a single endless wire, and there is no need to replace the wire. Therefore, cutting can be performed without exchanging wires even in orientation flat processing or the like for surface orientation of sapphire, gallium nitride, silicon carbide or the like that has recently been increased in diameter.

  In addition, the swinging movement of the wire portion of the wire saw is performed by a ball screw drive by a servo motor. Therefore, the swinging angle and the swinging speed are improved with better resolution than when the swinging shaft is rotated using a timing belt or the like. The speed can be finely controlled.

It is a partially notched front view of the wire saw of this invention. It is a partially cutaway AA direction arrow side view of FIG. It is a BB direction arrow directional cross-sectional view of the wire saw of FIG. It is a CC direction arrow side view of the wire saw of FIG. It is a partially cutaway rear view of the wire saw of the present invention. It is an enlarged view of the rocking | fluctuation mechanism part of the wire saw of this invention. It is DD sectional view taken on the line of FIG. (A), (b) is explanatory drawing of the wire winding state of the wire saw of this invention. It is explanatory drawing explaining the drive mechanism of the wire saw of this invention. It is explanatory drawing explaining operation | movement of the rocking | fluctuation mechanism of the wire saw of this invention.

  An embodiment of the present invention will be described below with reference to FIGS.

  FIG. 1 is a front view in which a part of a lower portion of a wire saw according to the present invention is cut away. A front support plate 3 is provided so as to be swingable via a moving shaft 23.

  A supply reel 4 of a fixed abrasive wire 7 in which abrasive grains such as diamond are fixed on the wire surface by electrodeposition or the like is provided on the right upper side of the front support plate 3, and is fed out from the supply reel 4. The fixed abrasive wire 7 is wound around the groove rollers 8 a and 8 b via the traverse pulley 6 and the tension roller 11, and then passed to the winding roller 5 via the tension roller 11 and the traverse pulley 6 on the winding side. It is designed to be wound up.

  The groove rollers 8a and 8b are wound as shown in FIGS. 8A and 8B, and one row of wires 7 is supplied to the processed portion (for easy understanding of the illustration). A little exaggerated) FIG. 8A is a view of the groove rollers 8a and 8b as viewed from above, and each of the groove rollers 8a and 8b is formed with three rows of grooves, and obliquely on the upper surface side of the groove rollers 8a and 8b. It is being handed over. FIG. 8B is a view of the groove rollers 8a and 8b as viewed from the lower surface. By laying the wires 7 obliquely on the upper surface side of the groove rollers 8a and 8b, only one row of the wires 7 is placed on the processed portion. It comes to supply.

  Further, as shown in FIG. 1, a work table 51 that moves up and down by an appropriate mechanism (not shown) is provided below the groove rollers 8 a and 8 b, and carbon that fixes the work W when cutting is provided on the upper surface of the work table 51. A dummy member 50 such as ceramic or the like is fixed, and a workpiece W to be processed is bonded to the upper part thereof. Although not shown, a coolant such as water or glycol is discharged from the appropriate nozzle around the workpiece W.

  Each of the supply reel 4 and the take-up reel 5 is pivotally supported at the tip of a swing arm 20, and the swing arm 20 and a shaft 18 provided on a pressure roller support plate 19 formed in an L-shape. It is supported so that it can swing from the two-dot chain line position to the solid line position around the shaft 18. At this solid line position, a supply-side pressure roller 9 described later and a wire 7 wound around the supply reel 4 come into contact with each other. Similarly, the winding surface of the take-up reel 5 and the pressure contact roller 10 are in contact with each other. Since the supply side and the winding side are symmetrically configured, only one of the supply side and the winding side will be described unless otherwise specified.

  The supply reel 4 and the take-up reel 5 are configured so that the swing arm 20 is swung when the wire 7 is exchanged, and the wire 7 is exchanged at the two-dot chain line position. The reel 5 can be attached and detached with an appropriate screw.

  Further, a friction member 46 formed of an elastic member such as rubber for increasing the frictional force is provided on the surface of the pressure contact rollers 9 and 10, and the rotation of the pressure contact rollers 9 and 10 is caused by the supply reel 4 and the winding. It is transmitted to the take-up reel 5.

  As shown in FIG. 2, the supply-side pressure contact reel 9 has a shaft 38 fitted and supported by the pressure roller support plate 19, and a rear end portion of the shaft 38 is supported by the front support plate 3. The take-up reel 4 is pivotally supported by the swing arm 20 and is also pivotally supported by the pressure contact roller support plate 19 through the swing arm 20.

  Further, as shown in FIGS. 1 and 4, an upper support plate 40 is provided forwardly in the upper center of the front support plate 3, and a motor fixing frame 12 is fixed vertically downward at the front end of the upper support plate 40. The motor fixing frame 12 is provided with a drive motor 13.

  Pulley support frames 41, 41 are arranged in parallel between the motor fixing frame 12 and the front support plate 3, and a drive pulley 14 is pivotally supported between the pulley support frames 41, 41 for driving. Connected to the motor 13, the drive pulley 14 is rotated by driving the motor 13.

  A supply side driven roller 16 and a winding side driven roller 17 are provided below the drive pulley 14 so as to face the supply side pressure contact roller 9 and the winding side pressure contact roller 10, and an endless belt is provided on each of these rollers. 15 is laid. The supply-side driven roller 16 and the winding-side driven roller 17 press the endless belt 15 against the supply-side pressing roller 9 and the winding-side pressing roller 10, respectively. It is directly transmitted to the both pressure contact rollers 9 and 10. The supply-side pressure contact roller 9 and the take-up-side pressure contact roller 10 are in contact with the endless belt 15 so as to rotate reversely to each other. Accordingly, by driving the drive motor 13, the supply reel 4 is supplied and rotated via the supply-side pressure contact roller 9, and the supplied wire 7 travels between the groove rollers 8a and 8b to process the workpiece W. The take-up reel 5 takes up and rotates through the take-up side pressure contact roller 10 to take up the wire 7.

  In this embodiment, the supply-side pressure contact roller 9 and the take-up-side pressure contact roller 10 are configured to rotate reversely to each other. However, the supply reel 4 is configured to rotate for supply and the take-up reel 5 is configured to rotate for take-up. For example, it is not limited to the structure which mutually reversely rotates.

  Further, the endless belt 15 can be arranged not only in a substantially triangular shape as shown in the figure but also in an appropriate shape, and the number of driven rollers can be further increased so that the frictional force can be transmitted more easily.

  Next, a traverse mechanism for traversing the wire 7 will be described with reference to FIGS. 1, 2, and 5. The traverse pulley 6 is rotatably supported on the front end side of a guide shaft 44 of a guide 48 provided on the front support plate 3, and the rear end side of the guide shaft 44 is coupled to a motor with a rack via a coupling 47. It is connected and fixed to 28 racks 29.

  The motor 28 with a rack is fixed to a support frame fixed to the rear of the front support plate 3. By driving the motor 28 with a rack, the rack 29 moves back and forth and the traverse pulley 6 moves back and forth. However, the wire 7 fed and wound on the supply reel 4 and the take-up reel 5 is guided according to the supply and take-up positions.

  Next, the tension pulley 11 will be described with reference to FIGS. 1, 2, and 5. The tension pulley 11 is pivotally supported at the front end of a shaft 21, and this shaft 21 passes through the opening 22 of the front support plate 3 and the rear end is fixed to a slide guide 27. By being configured to be movable up and down along the guide shaft 26, the tension pulley 11 is movable in the vertical direction.

  The slide guide 27 has a cylinder 25 connected to the upper side, and applies an appropriate pressure to apply an appropriate tension to the wire 7. Note that tension may be applied with a spring or the like instead of the cylinder 25.

  Next, the swing mechanism 30 will be described with reference to FIGS. 3 and 5 to 7. As shown in FIGS. 3 and 5, a swing mechanism 30 is provided near the center of the rear side of the machine casing 2. As shown in FIGS. 6 and 7, the swing mechanism 30 fixes the front end portion of the swing shaft 23 pivotally supported on the machine frame 2 by the bearing 60 and the guide 59 to the front support plate 3, and moves the machine frame 2 to the rear. The oscillating shaft 23 penetrating through the oscillating shaft passes through a fixed plate 32 fixed to the machine frame 2 via a guide 59, and the rear end of the oscillating shaft 23 is fixed to the upper center of the oscillating plate 31. .

  A servo motor 34 is provided on one of the side plates 35, 35 provided on the side surface of the fixed plate 32, and a ball screw 36 provided horizontally between the side plates 35, 35 is connected to the servo motor 34. ing.

  The ball screw 36 is provided with a nut member 58. By driving the ball screw 36, the nut member 58 is movable in the horizontal direction. Further, the nut member 58 is provided with a guide shaft 56 in the vertical direction behind it (right side in FIG. 7), and a slide guide 55 is provided so as to be slidable in the vertical direction along the guide shaft 56. The rotation shaft 33 is fixed at the center of the back surface of the slide guide 55.

  The other end of the rotary shaft 33 is pivotally supported at the lower center of the swing plate 31, and the servo motor 34 is driven to move the nut member 58 in the lateral direction through the slide guide 55. The front support plate 3 is swung by rotating the swing shaft 23 by converting it into a pendulum motion of the swing plate 31 centering on the center.

  The above is the configuration of the wire saw of the present invention. Next, the operation of the wire saw of the present invention will be described with reference to FIGS.

  FIG. 9 schematically shows only the drive portion in order to explain the drive principle of the wire 7. By driving the motor 14 in the direction of the arrow (clockwise), the endless belt 15 rotates in the direction of the arrow, and the supply-side pressure contact roller 9 circumscribing the endless belt 15 rotates in the counterclockwise direction. When the supply-side pressure roller 9 rotates, the supply reel 4 pressed against the supply-side pressure roller 9 rotates in the clockwise direction, and the wire 7 is fed out.

  On the other hand, the take-up pressure roller 10 is rotated counterclockwise by the endless belt 15, and the take-up reel 5 pressed against the take-up pressure roller 10 rotates in the clockwise direction, and the wire 7 is taken up.

  Here, even if the outer diameter of the supply reel 4 and the outer diameter of the take-up reel 5 are different, the supply-side press roller 9 and the take-up press roller 10 rotate in conjunction with the travel of the single endless belt 15. Therefore, even if the diameter of the supply reel 4 is large and the diameter of the take-up reel 5 is small, for example, if the supply-side pressure roller 9 and the take-up pressure roller 10 have the same diameter, supply The rotation of the reel 4 is delayed and the take-up reel 5 is rotated more rapidly. As a result, a constant amount of wire 7 is supplied and taken up, so that no fluctuation in tension occurs.

  Moreover, even if the diameters of the supply-side pressure roller 9 and the winding-side pressure roller 10 are different in the above, both the pressure rollers 9, 10 are rotated in conjunction with the travel of the one endless belt 15, so that each rotation The difference is absorbed by the difference in rotational speed between the supply reel 4 and the take-up reel 5, and the wire 7 travels in a constantly synchronized state. For example, when the diameter of the supply-side pressure contact roller 9 is large and the diameter of the take-up-side pressure contact roller 10 is small, the take-up side roller 10 rotates a lot during one rotation of the supply-side pressure contact roller 9, and as a result, the supply reel 4 is absorbed by the take-up reel 5 rotating faster than the supply reel 4 in one rotation of the supply-side pressure roller 9. That is, the wire supply amount and the wire recovery amount depend on the amount of travel of the endless belt 15 and do not depend on the diameters of the two pressure rollers 9, 10 and the supply reel 4 and the take-up reel 5. The reel 5 can be easily synchronized.

  Next, the operation of the swing mechanism 30 will be described with reference to FIG. 10. The front support plate 3 swings with respect to the machine frame 2 around the swing shaft 23, and the workpiece W When the swing mechanism 30 is reciprocated by the forward / reverse rotation drive of the servo motor 34 at the time of cutting, the wire 7 swings together with the front support plate 3 as in the two-dot chain line position, and the contact between the workpiece W and the wire 7 is linear Since the contact is changed to point contact, cutting efficiency is improved. Moreover, in order to cool the wire 7 or discharge the cutting waste at the time of processing, a cooling water to which a surfactant is added or a cooling liquid such as glycol is used. The cutting efficiency is improved.

  Further, since the swing mechanism 30 is operated using the servo motor 34 and the ball screw 36, the swing mechanism 30 can be controlled with high resolution, and the swing angle, swing speed, and swing timing are finely controlled. be able to. Further, it is not necessary to provide a speed reduction mechanism or the like in the motor as compared with the case of driving using a timing belt or the like, and the swinging can be performed compactly and accurately.

  In addition, this rocking | fluctuation may be reciprocated, for example, it can cut | disconnect in the state inclined in one direction, and a rocking | fluctuation angle and rocking | fluctuation speed can also be set arbitrarily. In addition, the reciprocating operation may be performed constantly at a constant rocking angle, and the rocking angle and rocking speed can be displaced stepwise during cutting.

  The above is the configuration of the wire saw of the present invention, but it goes without saying that it can be appropriately changed within the scope of the invention.

  For example, in the embodiment of the present invention, the endless belt is directly circumscribed by the pressure roller and driven to travel, but a pulley or the like is provided on the pressure roller, and the endless belt is hung around the pulley to indirectly apply the pressure roller. You may make it rotate. That is, any structure can be used as long as the supply side pressure contact roller and the recovery side pressure contact roller are configured to rotate in accordance with the travel of the endless belt.

W Workpiece 1 Wire saw 2 Machine frame 3 Front support plate 4 Supply reel 5 Take-up reel 6 Traverse pulley 7 Wire 8a Groove roller 8b Groove roller 9 Supply-side press roller 10 Take-up press roller 11 Tension pulley 12 Motor fixed frame 13 Drive Motor 14 Drive pulley 15 Endless belt 16 Supply side driven roller 17 Winding side driven roller 18 Shaft 19 Pressure roller support plate 20 Swing arm 21 Shaft 22 Opening portion 23 Swing shaft 25 Cylinder 26 Guide shaft 27 Slide guide 28 Motor with rack 29 Rack 30 Swing mechanism 31 Swing plate 32 Fixed plate 33 Rotating shaft 34 Servo motor 35 Side plate 36 Ball screw 38 Shaft 40 Upper support plate 41 Pulley support frame 42 Coupling 43 Pulley shaft 44 Guide shaft 46 Friction member 47 Coupling 48 Slurry Dogaido 50 dummy member 51 sticking table 55 slide guides 56 guide shaft 57a tension pulley 57b tension pulley 58 the nut member 59 guide 60 bearing

Claims (2)

A single fixed abrasive wire supplied from a supply reel is wound around a plurality of groove rollers so that the wire is in a single row, and then wound around the take-up reel, and the wire is unidirectionally or In a wire saw that reciprocally moves between the groove rollers to cut the workpiece,
A supply-side pressure roller that presses against the supply reel and rotates the supply reel by a frictional force;
A winding-side pressure contact roller that press-contacts the winding reel and rotates the winding reel by a frictional force;
An endless belt that rotates the supply-side pressure contact roller and the winding-side pressure contact roller by bringing the supply-side pressure contact roller and the take-up-side pressure contact roller into contact with each other and the frictional force thereof;
A drive motor for driving and driving the endless belt;
By rotating and driving the endless belt in one direction by the drive motor, the supply reel and the take-up reel are rotated through the frictional force of the supply-side pressure contact roller and the take-up side pressure contact roller so that the wire can run. A wire saw characterized by that. The wire saw of claim 1,
A front support plate that supports the groove roller of the wire saw;
A machine frame erected and fixed behind the front support plate;
A swing shaft fixed to the front support plate and having one end fitted and supported by the machine frame;
A swing plate fixed to the other end of the swing shaft;
A rotary shaft whose one end is pivotally supported at a position away from the swing shaft fixed to the swing plate by a predetermined distance;
A sliding member that is fixed to the other end of the rotating shaft and is movable in the vertical direction;
A nut member fixed to the slide member and movable in the horizontal direction;
A ball screw screwed into the nut member;
A servo motor for driving the ball screw;
By driving the servo motor forward and backward, the moving force in the horizontal direction of the nut member is distributed to the vertical movement through the slide member and converted into the pendulum movement of the swing plate, thereby the swing plate A wire saw characterized in that the front support plate is caused to swing by rotating a swing shaft fixed to the base.

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