JP2011008189A5 - - Google Patents

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Publication number
JP2011008189A5
JP2011008189A5 JP2009154025A JP2009154025A JP2011008189A5 JP 2011008189 A5 JP2011008189 A5 JP 2011008189A5 JP 2009154025 A JP2009154025 A JP 2009154025A JP 2009154025 A JP2009154025 A JP 2009154025A JP 2011008189 A5 JP2011008189 A5 JP 2011008189A5
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JP
Japan
Prior art keywords
objective lens
reflecting mirror
pupil
focus detection
magnification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009154025A
Other languages
English (en)
Japanese (ja)
Other versions
JP5400499B2 (ja
JP2011008189A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009154025A priority Critical patent/JP5400499B2/ja
Priority claimed from JP2009154025A external-priority patent/JP5400499B2/ja
Publication of JP2011008189A publication Critical patent/JP2011008189A/ja
Publication of JP2011008189A5 publication Critical patent/JP2011008189A5/ja
Application granted granted Critical
Publication of JP5400499B2 publication Critical patent/JP5400499B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009154025A 2009-06-29 2009-06-29 焦点検出装置 Expired - Fee Related JP5400499B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009154025A JP5400499B2 (ja) 2009-06-29 2009-06-29 焦点検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009154025A JP5400499B2 (ja) 2009-06-29 2009-06-29 焦点検出装置

Publications (3)

Publication Number Publication Date
JP2011008189A JP2011008189A (ja) 2011-01-13
JP2011008189A5 true JP2011008189A5 (enExample) 2012-08-02
JP5400499B2 JP5400499B2 (ja) 2014-01-29

Family

ID=43564894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009154025A Expired - Fee Related JP5400499B2 (ja) 2009-06-29 2009-06-29 焦点検出装置

Country Status (1)

Country Link
JP (1) JP5400499B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021036820A (ja) * 2019-09-03 2021-03-11 シンフォニアテクノロジー株式会社 細胞観察装置
CN113030090B (zh) * 2021-03-22 2024-08-30 广东粤港澳大湾区黄埔材料研究院 一种显微镜锁焦系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863906A (ja) * 1981-10-14 1983-04-16 Olympus Optical Co Ltd 顕微鏡用合焦位置検出装置
JPS62143010A (ja) * 1985-12-17 1987-06-26 Olympus Optical Co Ltd 焦点検出装置
JPS63163313A (ja) * 1986-12-25 1988-07-06 Mitaka Koki Kk 非接触自動焦点位置合わせ装置
JPH0244709U (enExample) * 1988-09-20 1990-03-28
JP3237023B2 (ja) * 1992-05-08 2001-12-10 株式会社ニコン 位置検出装置

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