JP2010541215A - 放射放出半導体チップ - Google Patents
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
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- H—ELECTRICITY
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2218—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special optical properties
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2218—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special optical properties
- H01S5/222—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special optical properties having a refractive index lower than that of the cladding layers or outer guiding layers
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Abstract
Description
Claims (15)
- ・波長λの放射を生成するための活性ゾーン(2)と、
・不規則に配置されたパターンエレメントを有するパターニング領域(3)
とを有する放射放出半導体チップ(1)において、
前記パターンエレメントは第1の屈折率n1を有する第1の材料を含み、第2の屈折率n2を有する第2の材料を含む媒質によって包囲されていることを特徴とする、放射放出半導体チップ。 - 前記パターンエレメントの各幅bはb≦4μmであり、該パターンエレメントの相互間の間隔aはa≦4μmである、請求項1記載の放射放出半導体チップ。
- 前記パターンエレメントの各幅bはb≦λであり、該パターンエレメントの相互間の間隔aはa≦λである、請求項1記載の放射放出半導体チップ。
- 前記パターンエレメントと前記媒質を有する中間層の厚さは、該パターンエレメントの最大高さに相応し、
前記中間層の有効屈折率neffには、n2<neff<n1が適用される、請求項1または3記載の放射放出半導体チップ。 - 前記有効屈折率neffは、前記中間層中の第2の材料の濃度に対する第1の材料の相対的な濃度によって調整される、請求項4記載の放射放出半導体チップ。
- 前記パターンエレメントの各基面の基面幅gは、各パターンエレメントの高さh未満である、請求項4または5記載の放射放出半導体チップ。
- 当該放射放出半導体チップ(1)は、ウェブ(10)を有するストライプレーザであり、
前記パターニング領域(3)は前記ウェブ(10)のエッジ面に配置されている、請求項1から6までのいずれか1項記載の放射放出半導体チップ。 - 前記パターンエレメントは当該放射放出半導体チップ(1)の半導体層から形成され、
前記媒質は、前記パターンエレメントをカバーするパッシベーション層(4)または吸収層(11)である、請求項7記載の放射放出半導体チップ。 - 当該放射放出半導体チップ(1)は誘電体ミラー(17)を有し、
前記パターンエレメントは前記誘電体ミラー(17)の第1の層から形成され、該誘電体ミラー(17)の第2の層によって包囲されている、請求項1または請求項3から6までのいずれか1項記載の放射放出半導体チップ。 - 前記活性ゾーン(2)は前記パターニング領域(2)を有し、該パターニング領域(2)は量子井戸構造を形成する、請求項1から3までのいずれか1項記載の放射放出半導体チップ。
- 前記パターンエレメントの各基面の基面幅gは、各パターンエレメントの高さhを上回る、請求項1または2記載の放射放出半導体チップ。
- 当該放射放出半導体チップは発光ダイオードであり、
前記パターニング領域(3)は前記発光ダイオードの出力結合層である、請求項11記載の放射放出半導体チップ。 - 当該放射放出半導体チップ(1)は、ウェブ(10)を有するストライプレーザであり、
前記パターニング領域(3)は散乱光を出力結合するために前記ウェブ(10)に隣接して配置されている、請求項11記載の放射放出半導体チップ。 - 請求項1から13までのいずれか1項記載の放射放出半導体チップ(1)の製造方法において、
中断部を有するマスク層を、パターニングすべき領域(30)上に設け、
前記中断部内で前記パターニングすべき領域(30)をエッチングすることにより、前記マスク層が剥離されて、前記パターンエレメントを有するパターニング領域(3)が形成されることを特徴とする、製造方法。 - 請求項1から13までのいずれか1項記載の放射放出半導体チップ(1)の製造方法において、
マスク材料(19)を、パターニングすべき領域(30)から離隔して配置し、エッチングプロセス中に該マスク材料の少なくとも一部を除去して該パターニングすべき領域(30)に堆積させると同時に、前記パターニングすべき領域(30)をエッチングすることにより、前記パターンエレメントが形成されることを特徴とする、製造方法。
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DE102007046497 | 2007-09-28 | ||
DE102007060204.0A DE102007060204B4 (de) | 2007-09-28 | 2007-12-14 | Strahlung emittierender Halbleiterchip |
PCT/DE2008/001423 WO2009039811A2 (de) | 2007-09-28 | 2008-08-27 | Strahlung emittierender halbleiterchip |
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JP2013269316A Division JP2014057113A (ja) | 2007-09-28 | 2013-12-26 | 放射放出半導体チップ |
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US (1) | US8340146B2 (ja) |
EP (2) | EP2193556B1 (ja) |
JP (2) | JP2010541215A (ja) |
KR (2) | KR101718271B1 (ja) |
CN (1) | CN101809772B (ja) |
DE (2) | DE102007063957B3 (ja) |
PL (1) | PL2193556T3 (ja) |
TW (1) | TWI385827B (ja) |
WO (1) | WO2009039811A2 (ja) |
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DE102011100175B4 (de) | 2011-05-02 | 2021-12-23 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Laserlichtquelle mit einer Stegwellenleiterstruktur und einer Modenfilterstruktur |
DE102012103549B4 (de) | 2012-04-23 | 2020-06-18 | Osram Opto Semiconductors Gmbh | Halbleiterlaserlichtquelle mit einem kantenemittierenden Halbleiterkörper und Licht streuenden Teilbereich |
DE102013216527A1 (de) * | 2013-08-21 | 2015-02-26 | Osram Opto Semiconductors Gmbh | Laserbauelement und Verfahren zum Herstellen eines Laserbauelements |
KR20160034534A (ko) | 2014-09-19 | 2016-03-30 | 삼성전자주식회사 | 반도체 발광 소자 |
KR101689468B1 (ko) * | 2015-05-19 | 2016-12-26 | 주식회사 솔탑 | 라이다식 운고계 장치 및 라이다식 운고계 장치 구현 방법 |
DE102016106495A1 (de) * | 2016-04-08 | 2017-10-12 | Osram Opto Semiconductors Gmbh | Halbleiterlaser |
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JP2004119768A (ja) * | 2002-09-27 | 2004-04-15 | Nippon Telegr & Teleph Corp <Ntt> | 半導体光素子 |
JP2005311308A (ja) * | 2004-03-05 | 2005-11-04 | Nichia Chem Ind Ltd | 半導体レーザ素子 |
JP2007220971A (ja) * | 2006-02-17 | 2007-08-30 | Showa Denko Kk | 発光素子及びその製造方法、並びにランプ |
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EP3206239A1 (de) | 2017-08-16 |
KR101567613B1 (ko) | 2015-11-09 |
WO2009039811A2 (de) | 2009-04-02 |
DE102007060204B4 (de) | 2019-02-28 |
TWI385827B (zh) | 2013-02-11 |
DE102007063957B3 (de) | 2022-10-27 |
EP3206239B1 (de) | 2021-06-30 |
CN101809772A (zh) | 2010-08-18 |
DE102007060204A1 (de) | 2009-04-16 |
EP2193556B1 (de) | 2017-07-26 |
KR20100089833A (ko) | 2010-08-12 |
CN101809772B (zh) | 2012-09-05 |
WO2009039811A3 (de) | 2009-09-03 |
US8340146B2 (en) | 2012-12-25 |
US20100278203A1 (en) | 2010-11-04 |
TW200917534A (en) | 2009-04-16 |
KR101718271B1 (ko) | 2017-03-20 |
KR20150104637A (ko) | 2015-09-15 |
PL2193556T3 (pl) | 2017-12-29 |
EP2193556A2 (de) | 2010-06-09 |
JP2014057113A (ja) | 2014-03-27 |
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