JP2010540967A5 - - Google Patents
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- JP2010540967A5 JP2010540967A5 JP2010528081A JP2010528081A JP2010540967A5 JP 2010540967 A5 JP2010540967 A5 JP 2010540967A5 JP 2010528081 A JP2010528081 A JP 2010528081A JP 2010528081 A JP2010528081 A JP 2010528081A JP 2010540967 A5 JP2010540967 A5 JP 2010540967A5
- Authority
- JP
- Japan
- Prior art keywords
- analyte
- forming
- covalent network
- amorphous random
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000012491 analyte Substances 0.000 claims 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 4
- 230000002209 hydrophobic effect Effects 0.000 claims 4
- 239000001301 oxygen Substances 0.000 claims 4
- 229910052760 oxygen Inorganic materials 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 239000011148 porous material Substances 0.000 claims 3
- 239000000126 substance Substances 0.000 claims 3
- 239000004215 Carbon black (E152) Substances 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000003989 dielectric material Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 229930195733 hydrocarbon Natural products 0.000 claims 2
- 150000002430 hydrocarbons Chemical class 0.000 claims 2
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 150000001282 organosilanes Chemical class 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US97771507P | 2007-10-05 | 2007-10-05 | |
| US60/977,715 | 2007-10-05 | ||
| PCT/US2008/078281 WO2009046011A2 (en) | 2007-10-05 | 2008-09-30 | Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010540967A JP2010540967A (ja) | 2010-12-24 |
| JP2010540967A5 true JP2010540967A5 (enExample) | 2011-09-22 |
| JP5266326B2 JP5266326B2 (ja) | 2013-08-21 |
Family
ID=40526930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010528081A Expired - Fee Related JP5266326B2 (ja) | 2007-10-05 | 2008-09-30 | プラズマ蒸着されたミクロ孔質層を含む有機化学センサー、並びに作製及び使用方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8378694B2 (enExample) |
| EP (1) | EP2208058B1 (enExample) |
| JP (1) | JP5266326B2 (enExample) |
| KR (1) | KR101476487B1 (enExample) |
| CN (1) | CN101836108B (enExample) |
| AU (1) | AU2008308827B2 (enExample) |
| BR (1) | BRPI0816493A2 (enExample) |
| WO (1) | WO2009046011A2 (enExample) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8578761B2 (en) * | 2008-03-26 | 2013-11-12 | Denso Corporation | Concentration sensor device and concentration detecting method |
| WO2010075333A2 (en) * | 2008-12-23 | 2010-07-01 | 3M Innovative Properties Company | Organic chemical sensor with microporous organosilicate material |
| FR2945124B1 (fr) * | 2009-04-29 | 2011-07-08 | Burkert Werke Gmbh & Co Kg | Procede et dispositif de mesure de la concentration d'un analyte dans un liquide echantillon |
| EP2565616B1 (en) * | 2010-04-28 | 2020-08-05 | Panasonic Intellectual Property Management Co., Ltd. | Chemical sensor |
| CN103069269B (zh) | 2010-06-15 | 2016-08-03 | 3M创新有限公司 | 可变电容传感器及其制造方法 |
| JP2013542422A (ja) * | 2010-09-30 | 2013-11-21 | スリーエム イノベイティブ プロパティズ カンパニー | センサー素子、その製造方法、及びそれを含むセンサー装置 |
| CN103154714A (zh) | 2010-09-30 | 2013-06-12 | 3M创新有限公司 | 传感器元件及其制备方法和包括所述传感器元件的传感器装置 |
| EP2697637B1 (en) * | 2011-04-13 | 2021-01-13 | 3M Innovative Properties Company | Vapor sensor including sensor element with integral heating |
| CN103477215B (zh) | 2011-04-13 | 2015-07-29 | 3M创新有限公司 | 检测挥发性有机化合物的方法 |
| JP5968421B2 (ja) | 2011-04-13 | 2016-08-10 | スリーエム イノベイティブ プロパティズ カンパニー | 吸収性センサ素子の使用方法 |
| US20140025326A1 (en) | 2011-04-13 | 2014-01-23 | 3M Innovative Properties Company | Electronic device including calibration information and method of using the same |
| CN103547915B (zh) | 2011-06-08 | 2015-11-25 | 3M创新有限公司 | 湿度传感器及其传感器元件 |
| US8975903B2 (en) | 2011-06-09 | 2015-03-10 | Ford Global Technologies, Llc | Proximity switch having learned sensitivity and method therefor |
| US8928336B2 (en) | 2011-06-09 | 2015-01-06 | Ford Global Technologies, Llc | Proximity switch having sensitivity control and method therefor |
| US9244008B2 (en) | 2011-06-16 | 2016-01-26 | 3M Innovative Properties Company | Surface plasmon resonance sensor element and sensor including the same |
| JP2013003088A (ja) * | 2011-06-21 | 2013-01-07 | Aisan Ind Co Ltd | 液体センサ |
| US10004286B2 (en) | 2011-08-08 | 2018-06-26 | Ford Global Technologies, Llc | Glove having conductive ink and method of interacting with proximity sensor |
| US9143126B2 (en) | 2011-09-22 | 2015-09-22 | Ford Global Technologies, Llc | Proximity switch having lockout control for controlling movable panel |
| US8994228B2 (en) | 2011-11-03 | 2015-03-31 | Ford Global Technologies, Llc | Proximity switch having wrong touch feedback |
| US10112556B2 (en) | 2011-11-03 | 2018-10-30 | Ford Global Technologies, Llc | Proximity switch having wrong touch adaptive learning and method |
| US8878438B2 (en) | 2011-11-04 | 2014-11-04 | Ford Global Technologies, Llc | Lamp and proximity switch assembly and method |
| US9658198B2 (en) | 2011-12-13 | 2017-05-23 | 3M Innovative Properties Company | Method for identification and quantitative determination of an unknown organic compound in a gaseous medium |
| CN103998931B (zh) * | 2011-12-28 | 2016-06-01 | 英特尔公司 | 具有选择性表面固定化部位的纳米间隙换能器 |
| US9520875B2 (en) | 2012-04-11 | 2016-12-13 | Ford Global Technologies, Llc | Pliable proximity switch assembly and activation method |
| US8933708B2 (en) | 2012-04-11 | 2015-01-13 | Ford Global Technologies, Llc | Proximity switch assembly and activation method with exploration mode |
| US9568527B2 (en) | 2012-04-11 | 2017-02-14 | Ford Global Technologies, Llc | Proximity switch assembly and activation method having virtual button mode |
| US9831870B2 (en) | 2012-04-11 | 2017-11-28 | Ford Global Technologies, Llc | Proximity switch assembly and method of tuning same |
| US9197206B2 (en) | 2012-04-11 | 2015-11-24 | Ford Global Technologies, Llc | Proximity switch having differential contact surface |
| US9219472B2 (en) | 2012-04-11 | 2015-12-22 | Ford Global Technologies, Llc | Proximity switch assembly and activation method using rate monitoring |
| US9287864B2 (en) | 2012-04-11 | 2016-03-15 | Ford Global Technologies, Llc | Proximity switch assembly and calibration method therefor |
| US9559688B2 (en) | 2012-04-11 | 2017-01-31 | Ford Global Technologies, Llc | Proximity switch assembly having pliable surface and depression |
| US9944237B2 (en) | 2012-04-11 | 2018-04-17 | Ford Global Technologies, Llc | Proximity switch assembly with signal drift rejection and method |
| US9065447B2 (en) | 2012-04-11 | 2015-06-23 | Ford Global Technologies, Llc | Proximity switch assembly and method having adaptive time delay |
| US9531379B2 (en) | 2012-04-11 | 2016-12-27 | Ford Global Technologies, Llc | Proximity switch assembly having groove between adjacent proximity sensors |
| US9660644B2 (en) | 2012-04-11 | 2017-05-23 | Ford Global Technologies, Llc | Proximity switch assembly and activation method |
| US9184745B2 (en) | 2012-04-11 | 2015-11-10 | Ford Global Technologies, Llc | Proximity switch assembly and method of sensing user input based on signal rate of change |
| US9136840B2 (en) | 2012-05-17 | 2015-09-15 | Ford Global Technologies, Llc | Proximity switch assembly having dynamic tuned threshold |
| US8981602B2 (en) | 2012-05-29 | 2015-03-17 | Ford Global Technologies, Llc | Proximity switch assembly having non-switch contact and method |
| EP2856128B1 (en) * | 2012-05-29 | 2016-09-14 | 3M Innovative Properties Company | Humidity sensor and sensor element |
| US9337832B2 (en) | 2012-06-06 | 2016-05-10 | Ford Global Technologies, Llc | Proximity switch and method of adjusting sensitivity therefor |
| EP2864770B1 (en) | 2012-06-25 | 2017-09-27 | 3M Innovative Properties Company | Sensor element, method of making, and method of using the same |
| US9641172B2 (en) | 2012-06-27 | 2017-05-02 | Ford Global Technologies, Llc | Proximity switch assembly having varying size electrode fingers |
| TWI447384B (zh) * | 2012-07-11 | 2014-08-01 | Univ Nat Taiwan | 天線型感測器 |
| JP6263179B2 (ja) | 2012-08-02 | 2018-01-17 | スリーエム イノベイティブ プロパティズ カンパニー | 携帯用電子装置及び蒸気センサカード |
| US8922340B2 (en) | 2012-09-11 | 2014-12-30 | Ford Global Technologies, Llc | Proximity switch based door latch release |
| US8796575B2 (en) | 2012-10-31 | 2014-08-05 | Ford Global Technologies, Llc | Proximity switch assembly having ground layer |
| US9311204B2 (en) | 2013-03-13 | 2016-04-12 | Ford Global Technologies, Llc | Proximity interface development system having replicator and method |
| WO2015047750A1 (en) * | 2013-09-26 | 2015-04-02 | 3M Innovative Properties Company | Vapor sensor suitable for detecting alcoholic residue at a skin site |
| US9895514B2 (en) * | 2014-01-27 | 2018-02-20 | Maddoc Medical Products, Inc. | Medical device securement system and method |
| WO2015130550A1 (en) * | 2014-02-27 | 2015-09-03 | 3M Innovative Properties Company | Flexible sensor patch and method of using the same |
| US9958444B2 (en) * | 2014-05-30 | 2018-05-01 | Sober stearing Sensors Canada, Inc. | Apparatus, systems and methods for sensing an analyte such as ethanol |
| US20160104060A1 (en) * | 2014-10-10 | 2016-04-14 | Graphix Solutions | Photo imaging system and method |
| US10038443B2 (en) | 2014-10-20 | 2018-07-31 | Ford Global Technologies, Llc | Directional proximity switch assembly |
| US9654103B2 (en) | 2015-03-18 | 2017-05-16 | Ford Global Technologies, Llc | Proximity switch assembly having haptic feedback and method |
| US9548733B2 (en) | 2015-05-20 | 2017-01-17 | Ford Global Technologies, Llc | Proximity sensor assembly having interleaved electrode configuration |
| CN105301061B (zh) * | 2015-09-23 | 2018-05-22 | 西南交通大学 | 一种自组装式网格状α-MoO3纳米带气敏传感器 |
| CN108426921B (zh) * | 2017-02-13 | 2021-04-06 | 华邦电子股份有限公司 | 气体传感器 |
| WO2019173648A1 (en) | 2018-03-08 | 2019-09-12 | Exxonmobil Research And Engineering Company | Functionalized membranes and methods of production thereof |
| CN111504169B (zh) * | 2020-04-20 | 2024-12-10 | 威海华菱光电股份有限公司 | 膜厚的检测装置 |
| US20220252535A1 (en) * | 2021-02-05 | 2022-08-11 | Massachusetts Institute Of Technology | Humidity initiated gas (hig) sensors for volatile organic compounds sensing |
| CN120629729B (zh) * | 2025-08-11 | 2025-10-14 | 广立微(上海)技术有限公司 | 用于后段金属工艺监控的测试结构、测试电路和测试芯片 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4728882A (en) * | 1986-04-01 | 1988-03-01 | The Johns Hopkins University | Capacitive chemical sensor for detecting certain analytes, including hydrocarbons in a liquid medium |
| JPS6488146A (en) * | 1987-09-30 | 1989-04-03 | Toshiba Corp | Humidity sensor |
| GB2220074B (en) * | 1988-06-27 | 1992-01-08 | Seiko Epson Corp | Humidity sensor |
| US5512882A (en) * | 1991-08-07 | 1996-04-30 | Transducer Research, Inc. | Chemical sensing apparatus and methods |
| JPH06281610A (ja) * | 1993-01-29 | 1994-10-07 | Nok Corp | 湿度センサ、アルコ−ルセンサまたはケトンセンサ |
| AU6770394A (en) * | 1993-05-25 | 1994-12-20 | Rosemount Inc. | Organic chemical sensor |
| US5857250A (en) * | 1994-10-25 | 1999-01-12 | Texas Instruments Incorporated | Method of forming a capacitance type gaseous sensing device and apparatus thereof |
| US5677074A (en) * | 1996-06-25 | 1997-10-14 | The Dais Corporation | Gas diffusion electrode |
| US5767687A (en) * | 1996-11-29 | 1998-06-16 | Geist; Jon | Surface-capacitor type condensable-vapor sensor |
| US6173602B1 (en) * | 1998-08-11 | 2001-01-16 | Patrick T. Moseley | Transition metal oxide gas sensor |
| US6312793B1 (en) * | 1999-05-26 | 2001-11-06 | International Business Machines Corporation | Multiphase low dielectric constant material |
| DE10152055A1 (de) * | 2001-10-25 | 2003-05-08 | Nttf Gmbh | Mechanisch und thermodynamisch stabile amorphe Kohlenstoffschichten für temperaturempfindliche Oberflächen |
| GB0317557D0 (en) * | 2003-07-26 | 2003-08-27 | Univ Manchester | Microporous polymer material |
| KR100696462B1 (ko) * | 2003-09-26 | 2007-03-19 | 삼성에스디아이 주식회사 | 연료전지용 전극 확산층 |
| CN1890372A (zh) * | 2003-12-18 | 2007-01-03 | 巴斯福股份公司 | 通过发酵制备精细化学品的方法 |
| US7049247B2 (en) * | 2004-05-03 | 2006-05-23 | International Business Machines Corporation | Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made |
| US7837844B2 (en) * | 2005-04-26 | 2010-11-23 | Seacoast Science, Inc. | Interdigitated chemical sensors, and methods of making and using the same |
| US8293340B2 (en) * | 2005-12-21 | 2012-10-23 | 3M Innovative Properties Company | Plasma deposited microporous analyte detection layer |
| US7556774B2 (en) * | 2005-12-21 | 2009-07-07 | 3M Innovative Properties Company | Optochemical sensor and method of making the same |
| US7901776B2 (en) | 2006-12-29 | 2011-03-08 | 3M Innovative Properties Company | Plasma deposited microporous carbon material |
-
2008
- 2008-09-30 KR KR1020107009860A patent/KR101476487B1/ko not_active Expired - Fee Related
- 2008-09-30 EP EP08836726.3A patent/EP2208058B1/en not_active Not-in-force
- 2008-09-30 CN CN2008801123711A patent/CN101836108B/zh not_active Expired - Fee Related
- 2008-09-30 US US12/681,758 patent/US8378694B2/en not_active Expired - Fee Related
- 2008-09-30 WO PCT/US2008/078281 patent/WO2009046011A2/en not_active Ceased
- 2008-09-30 BR BRPI0816493A patent/BRPI0816493A2/pt active Search and Examination
- 2008-09-30 JP JP2010528081A patent/JP5266326B2/ja not_active Expired - Fee Related
- 2008-09-30 AU AU2008308827A patent/AU2008308827B2/en not_active Ceased
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