AU2008308827B2 - Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using - Google Patents

Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using Download PDF

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Publication number
AU2008308827B2
AU2008308827B2 AU2008308827A AU2008308827A AU2008308827B2 AU 2008308827 B2 AU2008308827 B2 AU 2008308827B2 AU 2008308827 A AU2008308827 A AU 2008308827A AU 2008308827 A AU2008308827 A AU 2008308827A AU 2008308827 B2 AU2008308827 B2 AU 2008308827B2
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AU
Australia
Prior art keywords
analyte
electrode
sensing element
electrodes
layer
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Ceased
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AU2008308827A
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AU2008308827A1 (en
Inventor
Moses M. David
Stefan H. Gryska
Nelson B. O'bryan Jr.
Neal A. Rakow
Michael S. Wendland
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125Composition of the body, e.g. the composition of its sensitive layer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/60Nonwoven fabric [i.e., nonwoven strand or fiber material]
    • Y10T442/608Including strand or fiber material which is of specific structural definition
    • Y10T442/614Strand or fiber material specified as having microdimensions [i.e., microfiber]
    • Y10T442/624Microfiber is carbon or carbonaceous

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AU2008308827A 2007-10-05 2008-09-30 Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using Ceased AU2008308827B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US97771507P 2007-10-05 2007-10-05
US60/977,715 2007-10-05
PCT/US2008/078281 WO2009046011A2 (en) 2007-10-05 2008-09-30 Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using

Publications (2)

Publication Number Publication Date
AU2008308827A1 AU2008308827A1 (en) 2009-04-09
AU2008308827B2 true AU2008308827B2 (en) 2011-02-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
AU2008308827A Ceased AU2008308827B2 (en) 2007-10-05 2008-09-30 Organic chemical sensor comprising plasma-deposited microporous layer, and method of making and using

Country Status (8)

Country Link
US (1) US8378694B2 (enExample)
EP (1) EP2208058B1 (enExample)
JP (1) JP5266326B2 (enExample)
KR (1) KR101476487B1 (enExample)
CN (1) CN101836108B (enExample)
AU (1) AU2008308827B2 (enExample)
BR (1) BRPI0816493A2 (enExample)
WO (1) WO2009046011A2 (enExample)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BRPI0907020A2 (pt) * 2008-03-26 2015-07-07 Denso Corp Dispositivo sensor de concentração, dispositivo de cálculo da relação de mistura, métodos para calcular uma ralação de mistura do líquido de mistura e para detectar concentrações do fluido e, dispositivo de detecção de concentração
CN102405409B (zh) * 2008-12-23 2014-11-05 3M创新有限公司 具有微孔有机硅材料的有机化学传感器
FR2945124B1 (fr) * 2009-04-29 2011-07-08 Burkert Werke Gmbh & Co Kg Procede et dispositif de mesure de la concentration d'un analyte dans un liquide echantillon
EP2565616B1 (en) * 2010-04-28 2020-08-05 Panasonic Intellectual Property Management Co., Ltd. Chemical sensor
CN103069269B (zh) 2010-06-15 2016-08-03 3M创新有限公司 可变电容传感器及其制造方法
CN103154712B (zh) * 2010-09-30 2015-11-25 3M创新有限公司 传感器元件及其制备方法和包括所述传感器元件的传感器装置
WO2012044419A1 (en) 2010-09-30 2012-04-05 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
CN103477217B (zh) 2011-04-13 2015-12-23 3M创新有限公司 包含校准信息的电子器件及其使用方法
JP2014510933A (ja) * 2011-04-13 2014-05-01 スリーエム イノベイティブ プロパティズ カンパニー センサ素子を含み一体型加熱機構を備えた蒸気センサ
WO2012141925A1 (en) * 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
US9279792B2 (en) 2011-04-13 2016-03-08 3M Innovative Properties Company Method of using an absorptive sensor element
WO2012170248A1 (en) 2011-06-08 2012-12-13 3M Innovative Properties Company Humidity sensor and sensor element therefor
US8928336B2 (en) 2011-06-09 2015-01-06 Ford Global Technologies, Llc Proximity switch having sensitivity control and method therefor
US8975903B2 (en) 2011-06-09 2015-03-10 Ford Global Technologies, Llc Proximity switch having learned sensitivity and method therefor
US9244008B2 (en) 2011-06-16 2016-01-26 3M Innovative Properties Company Surface plasmon resonance sensor element and sensor including the same
JP2013003088A (ja) * 2011-06-21 2013-01-07 Aisan Ind Co Ltd 液体センサ
US10004286B2 (en) 2011-08-08 2018-06-26 Ford Global Technologies, Llc Glove having conductive ink and method of interacting with proximity sensor
US9143126B2 (en) 2011-09-22 2015-09-22 Ford Global Technologies, Llc Proximity switch having lockout control for controlling movable panel
US8994228B2 (en) 2011-11-03 2015-03-31 Ford Global Technologies, Llc Proximity switch having wrong touch feedback
US10112556B2 (en) 2011-11-03 2018-10-30 Ford Global Technologies, Llc Proximity switch having wrong touch adaptive learning and method
US8878438B2 (en) 2011-11-04 2014-11-04 Ford Global Technologies, Llc Lamp and proximity switch assembly and method
JP6038950B2 (ja) 2011-12-13 2016-12-07 スリーエム イノベイティブ プロパティズ カンパニー 気体媒質内の未知の有機化合物の同定及び定量測定方法
JP5985654B2 (ja) 2011-12-28 2016-09-06 インテル コーポレイション 選択的表面固定化部位を有するナノギャップ・トランスデューサ
US9520875B2 (en) 2012-04-11 2016-12-13 Ford Global Technologies, Llc Pliable proximity switch assembly and activation method
US9531379B2 (en) 2012-04-11 2016-12-27 Ford Global Technologies, Llc Proximity switch assembly having groove between adjacent proximity sensors
US9065447B2 (en) 2012-04-11 2015-06-23 Ford Global Technologies, Llc Proximity switch assembly and method having adaptive time delay
US9559688B2 (en) 2012-04-11 2017-01-31 Ford Global Technologies, Llc Proximity switch assembly having pliable surface and depression
US9944237B2 (en) 2012-04-11 2018-04-17 Ford Global Technologies, Llc Proximity switch assembly with signal drift rejection and method
US9287864B2 (en) 2012-04-11 2016-03-15 Ford Global Technologies, Llc Proximity switch assembly and calibration method therefor
US9219472B2 (en) 2012-04-11 2015-12-22 Ford Global Technologies, Llc Proximity switch assembly and activation method using rate monitoring
US9831870B2 (en) 2012-04-11 2017-11-28 Ford Global Technologies, Llc Proximity switch assembly and method of tuning same
US9184745B2 (en) 2012-04-11 2015-11-10 Ford Global Technologies, Llc Proximity switch assembly and method of sensing user input based on signal rate of change
US8933708B2 (en) 2012-04-11 2015-01-13 Ford Global Technologies, Llc Proximity switch assembly and activation method with exploration mode
US9568527B2 (en) 2012-04-11 2017-02-14 Ford Global Technologies, Llc Proximity switch assembly and activation method having virtual button mode
US9660644B2 (en) 2012-04-11 2017-05-23 Ford Global Technologies, Llc Proximity switch assembly and activation method
US9197206B2 (en) 2012-04-11 2015-11-24 Ford Global Technologies, Llc Proximity switch having differential contact surface
US9136840B2 (en) 2012-05-17 2015-09-15 Ford Global Technologies, Llc Proximity switch assembly having dynamic tuned threshold
US8981602B2 (en) 2012-05-29 2015-03-17 Ford Global Technologies, Llc Proximity switch assembly having non-switch contact and method
WO2013180936A1 (en) 2012-05-29 2013-12-05 3M Innovative Properties Company Humidity sensor and sensor element
US9337832B2 (en) 2012-06-06 2016-05-10 Ford Global Technologies, Llc Proximity switch and method of adjusting sensitivity therefor
US10267758B2 (en) 2012-06-25 2019-04-23 3M Innovative Properties, Company Sensor element, method of making, and method of using the same
US9641172B2 (en) 2012-06-27 2017-05-02 Ford Global Technologies, Llc Proximity switch assembly having varying size electrode fingers
TWI447384B (zh) * 2012-07-11 2014-08-01 Univ Nat Taiwan 天線型感測器
WO2014022155A1 (en) 2012-08-02 2014-02-06 3M Innovative Properties Company Portable electronic device and vapor sensor card
US8922340B2 (en) 2012-09-11 2014-12-30 Ford Global Technologies, Llc Proximity switch based door latch release
US8796575B2 (en) 2012-10-31 2014-08-05 Ford Global Technologies, Llc Proximity switch assembly having ground layer
US9311204B2 (en) 2013-03-13 2016-04-12 Ford Global Technologies, Llc Proximity interface development system having replicator and method
US10041920B2 (en) * 2013-09-26 2018-08-07 3M Innovative Properties Company Vapor sensor suitable for detecting alcoholic residue at a skin site
US9895514B2 (en) * 2014-01-27 2018-02-20 Maddoc Medical Products, Inc. Medical device securement system and method
US10209213B2 (en) 2014-02-27 2019-02-19 3M Innovative Properties Company Flexible sensor patch and method of using the same
US9958444B2 (en) * 2014-05-30 2018-05-01 Sober stearing Sensors Canada, Inc. Apparatus, systems and methods for sensing an analyte such as ethanol
US20160104060A1 (en) * 2014-10-10 2016-04-14 Graphix Solutions Photo imaging system and method
US10038443B2 (en) 2014-10-20 2018-07-31 Ford Global Technologies, Llc Directional proximity switch assembly
US9654103B2 (en) 2015-03-18 2017-05-16 Ford Global Technologies, Llc Proximity switch assembly having haptic feedback and method
US9548733B2 (en) 2015-05-20 2017-01-17 Ford Global Technologies, Llc Proximity sensor assembly having interleaved electrode configuration
CN105301061B (zh) * 2015-09-23 2018-05-22 西南交通大学 一种自组装式网格状α-MoO3纳米带气敏传感器
CN108426921B (zh) * 2017-02-13 2021-04-06 华邦电子股份有限公司 气体传感器
EP3762391A4 (en) 2018-03-08 2022-08-03 ExxonMobil Technology and Engineering Company SPIROCENTRIC COMPOUNDS AND POLYMERS THEREOF
CN111504169B (zh) * 2020-04-20 2024-12-10 威海华菱光电股份有限公司 膜厚的检测装置
US20220252535A1 (en) * 2021-02-05 2022-08-11 Massachusetts Institute Of Technology Humidity initiated gas (hig) sensors for volatile organic compounds sensing
CN120629729B (zh) * 2025-08-11 2025-10-14 广立微(上海)技术有限公司 用于后段金属工艺监控的测试结构、测试电路和测试芯片

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4728882A (en) * 1986-04-01 1988-03-01 The Johns Hopkins University Capacitive chemical sensor for detecting certain analytes, including hydrocarbons in a liquid medium
JPS6488146A (en) * 1987-09-30 1989-04-03 Toshiba Corp Humidity sensor
GB2220074B (en) * 1988-06-27 1992-01-08 Seiko Epson Corp Humidity sensor
US5512882A (en) * 1991-08-07 1996-04-30 Transducer Research, Inc. Chemical sensing apparatus and methods
JPH06281610A (ja) * 1993-01-29 1994-10-07 Nok Corp 湿度センサ、アルコ−ルセンサまたはケトンセンサ
WO1994028372A1 (en) * 1993-05-25 1994-12-08 Rosemount Inc. Organic chemical sensor
US5857250A (en) * 1994-10-25 1999-01-12 Texas Instruments Incorporated Method of forming a capacitance type gaseous sensing device and apparatus thereof
US5677074A (en) * 1996-06-25 1997-10-14 The Dais Corporation Gas diffusion electrode
US5767687A (en) * 1996-11-29 1998-06-16 Geist; Jon Surface-capacitor type condensable-vapor sensor
US6173602B1 (en) * 1998-08-11 2001-01-16 Patrick T. Moseley Transition metal oxide gas sensor
US6312793B1 (en) * 1999-05-26 2001-11-06 International Business Machines Corporation Multiphase low dielectric constant material
DE10152055A1 (de) * 2001-10-25 2003-05-08 Nttf Gmbh Mechanisch und thermodynamisch stabile amorphe Kohlenstoffschichten für temperaturempfindliche Oberflächen
GB0317557D0 (en) * 2003-07-26 2003-08-27 Univ Manchester Microporous polymer material
KR100696462B1 (ko) * 2003-09-26 2007-03-19 삼성에스디아이 주식회사 연료전지용 전극 확산층
MXPA06006759A (es) * 2003-12-18 2006-09-04 Basf Ag Metodos para la preparacion de lisina por fermentacion de corynebacterium glutamicum.
US7049247B2 (en) * 2004-05-03 2006-05-23 International Business Machines Corporation Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made
US7837844B2 (en) * 2005-04-26 2010-11-23 Seacoast Science, Inc. Interdigitated chemical sensors, and methods of making and using the same
US8293340B2 (en) * 2005-12-21 2012-10-23 3M Innovative Properties Company Plasma deposited microporous analyte detection layer
US7556774B2 (en) * 2005-12-21 2009-07-07 3M Innovative Properties Company Optochemical sensor and method of making the same
US7901776B2 (en) 2006-12-29 2011-03-08 3M Innovative Properties Company Plasma deposited microporous carbon material

Also Published As

Publication number Publication date
BRPI0816493A2 (pt) 2019-02-26
WO2009046011A3 (en) 2009-06-11
EP2208058A4 (en) 2017-05-24
US8378694B2 (en) 2013-02-19
JP5266326B2 (ja) 2013-08-21
US20110031983A1 (en) 2011-02-10
WO2009046011A2 (en) 2009-04-09
EP2208058B1 (en) 2018-07-11
JP2010540967A (ja) 2010-12-24
KR101476487B1 (ko) 2014-12-24
CN101836108B (zh) 2013-05-29
EP2208058A2 (en) 2010-07-21
KR20100087315A (ko) 2010-08-04
AU2008308827A1 (en) 2009-04-09
CN101836108A (zh) 2010-09-15

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MK14 Patent ceased section 143(a) (annual fees not paid) or expired