KR101476487B1 - 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 - Google Patents
플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 Download PDFInfo
- Publication number
- KR101476487B1 KR101476487B1 KR1020107009860A KR20107009860A KR101476487B1 KR 101476487 B1 KR101476487 B1 KR 101476487B1 KR 1020107009860 A KR1020107009860 A KR 1020107009860A KR 20107009860 A KR20107009860 A KR 20107009860A KR 101476487 B1 KR101476487 B1 KR 101476487B1
- Authority
- KR
- South Korea
- Prior art keywords
- analyte
- electrode
- layer
- delete delete
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
- Y10T442/60—Nonwoven fabric [i.e., nonwoven strand or fiber material]
- Y10T442/608—Including strand or fiber material which is of specific structural definition
- Y10T442/614—Strand or fiber material specified as having microdimensions [i.e., microfiber]
- Y10T442/624—Microfiber is carbon or carbonaceous
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US97771507P | 2007-10-05 | 2007-10-05 | |
| US60/977,715 | 2007-10-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20100087315A KR20100087315A (ko) | 2010-08-04 |
| KR101476487B1 true KR101476487B1 (ko) | 2014-12-24 |
Family
ID=40526930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020107009860A Expired - Fee Related KR101476487B1 (ko) | 2007-10-05 | 2008-09-30 | 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8378694B2 (enExample) |
| EP (1) | EP2208058B1 (enExample) |
| JP (1) | JP5266326B2 (enExample) |
| KR (1) | KR101476487B1 (enExample) |
| CN (1) | CN101836108B (enExample) |
| AU (1) | AU2008308827B2 (enExample) |
| BR (1) | BRPI0816493A2 (enExample) |
| WO (1) | WO2009046011A2 (enExample) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BRPI0907020A2 (pt) * | 2008-03-26 | 2015-07-07 | Denso Corp | Dispositivo sensor de concentração, dispositivo de cálculo da relação de mistura, métodos para calcular uma ralação de mistura do líquido de mistura e para detectar concentrações do fluido e, dispositivo de detecção de concentração |
| CN102405409B (zh) * | 2008-12-23 | 2014-11-05 | 3M创新有限公司 | 具有微孔有机硅材料的有机化学传感器 |
| FR2945124B1 (fr) * | 2009-04-29 | 2011-07-08 | Burkert Werke Gmbh & Co Kg | Procede et dispositif de mesure de la concentration d'un analyte dans un liquide echantillon |
| EP2565616B1 (en) * | 2010-04-28 | 2020-08-05 | Panasonic Intellectual Property Management Co., Ltd. | Chemical sensor |
| CN103069269B (zh) | 2010-06-15 | 2016-08-03 | 3M创新有限公司 | 可变电容传感器及其制造方法 |
| CN103154712B (zh) * | 2010-09-30 | 2015-11-25 | 3M创新有限公司 | 传感器元件及其制备方法和包括所述传感器元件的传感器装置 |
| WO2012044419A1 (en) | 2010-09-30 | 2012-04-05 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| CN103477217B (zh) | 2011-04-13 | 2015-12-23 | 3M创新有限公司 | 包含校准信息的电子器件及其使用方法 |
| JP2014510933A (ja) * | 2011-04-13 | 2014-05-01 | スリーエム イノベイティブ プロパティズ カンパニー | センサ素子を含み一体型加熱機構を備えた蒸気センサ |
| WO2012141925A1 (en) * | 2011-04-13 | 2012-10-18 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
| US9279792B2 (en) | 2011-04-13 | 2016-03-08 | 3M Innovative Properties Company | Method of using an absorptive sensor element |
| WO2012170248A1 (en) | 2011-06-08 | 2012-12-13 | 3M Innovative Properties Company | Humidity sensor and sensor element therefor |
| US8928336B2 (en) | 2011-06-09 | 2015-01-06 | Ford Global Technologies, Llc | Proximity switch having sensitivity control and method therefor |
| US8975903B2 (en) | 2011-06-09 | 2015-03-10 | Ford Global Technologies, Llc | Proximity switch having learned sensitivity and method therefor |
| US9244008B2 (en) | 2011-06-16 | 2016-01-26 | 3M Innovative Properties Company | Surface plasmon resonance sensor element and sensor including the same |
| JP2013003088A (ja) * | 2011-06-21 | 2013-01-07 | Aisan Ind Co Ltd | 液体センサ |
| US10004286B2 (en) | 2011-08-08 | 2018-06-26 | Ford Global Technologies, Llc | Glove having conductive ink and method of interacting with proximity sensor |
| US9143126B2 (en) | 2011-09-22 | 2015-09-22 | Ford Global Technologies, Llc | Proximity switch having lockout control for controlling movable panel |
| US8994228B2 (en) | 2011-11-03 | 2015-03-31 | Ford Global Technologies, Llc | Proximity switch having wrong touch feedback |
| US10112556B2 (en) | 2011-11-03 | 2018-10-30 | Ford Global Technologies, Llc | Proximity switch having wrong touch adaptive learning and method |
| US8878438B2 (en) | 2011-11-04 | 2014-11-04 | Ford Global Technologies, Llc | Lamp and proximity switch assembly and method |
| JP6038950B2 (ja) | 2011-12-13 | 2016-12-07 | スリーエム イノベイティブ プロパティズ カンパニー | 気体媒質内の未知の有機化合物の同定及び定量測定方法 |
| JP5985654B2 (ja) | 2011-12-28 | 2016-09-06 | インテル コーポレイション | 選択的表面固定化部位を有するナノギャップ・トランスデューサ |
| US9520875B2 (en) | 2012-04-11 | 2016-12-13 | Ford Global Technologies, Llc | Pliable proximity switch assembly and activation method |
| US9531379B2 (en) | 2012-04-11 | 2016-12-27 | Ford Global Technologies, Llc | Proximity switch assembly having groove between adjacent proximity sensors |
| US9065447B2 (en) | 2012-04-11 | 2015-06-23 | Ford Global Technologies, Llc | Proximity switch assembly and method having adaptive time delay |
| US9559688B2 (en) | 2012-04-11 | 2017-01-31 | Ford Global Technologies, Llc | Proximity switch assembly having pliable surface and depression |
| US9944237B2 (en) | 2012-04-11 | 2018-04-17 | Ford Global Technologies, Llc | Proximity switch assembly with signal drift rejection and method |
| US9287864B2 (en) | 2012-04-11 | 2016-03-15 | Ford Global Technologies, Llc | Proximity switch assembly and calibration method therefor |
| US9219472B2 (en) | 2012-04-11 | 2015-12-22 | Ford Global Technologies, Llc | Proximity switch assembly and activation method using rate monitoring |
| US9831870B2 (en) | 2012-04-11 | 2017-11-28 | Ford Global Technologies, Llc | Proximity switch assembly and method of tuning same |
| US9184745B2 (en) | 2012-04-11 | 2015-11-10 | Ford Global Technologies, Llc | Proximity switch assembly and method of sensing user input based on signal rate of change |
| US8933708B2 (en) | 2012-04-11 | 2015-01-13 | Ford Global Technologies, Llc | Proximity switch assembly and activation method with exploration mode |
| US9568527B2 (en) | 2012-04-11 | 2017-02-14 | Ford Global Technologies, Llc | Proximity switch assembly and activation method having virtual button mode |
| US9660644B2 (en) | 2012-04-11 | 2017-05-23 | Ford Global Technologies, Llc | Proximity switch assembly and activation method |
| US9197206B2 (en) | 2012-04-11 | 2015-11-24 | Ford Global Technologies, Llc | Proximity switch having differential contact surface |
| US9136840B2 (en) | 2012-05-17 | 2015-09-15 | Ford Global Technologies, Llc | Proximity switch assembly having dynamic tuned threshold |
| US8981602B2 (en) | 2012-05-29 | 2015-03-17 | Ford Global Technologies, Llc | Proximity switch assembly having non-switch contact and method |
| WO2013180936A1 (en) | 2012-05-29 | 2013-12-05 | 3M Innovative Properties Company | Humidity sensor and sensor element |
| US9337832B2 (en) | 2012-06-06 | 2016-05-10 | Ford Global Technologies, Llc | Proximity switch and method of adjusting sensitivity therefor |
| US10267758B2 (en) | 2012-06-25 | 2019-04-23 | 3M Innovative Properties, Company | Sensor element, method of making, and method of using the same |
| US9641172B2 (en) | 2012-06-27 | 2017-05-02 | Ford Global Technologies, Llc | Proximity switch assembly having varying size electrode fingers |
| TWI447384B (zh) * | 2012-07-11 | 2014-08-01 | Univ Nat Taiwan | 天線型感測器 |
| WO2014022155A1 (en) | 2012-08-02 | 2014-02-06 | 3M Innovative Properties Company | Portable electronic device and vapor sensor card |
| US8922340B2 (en) | 2012-09-11 | 2014-12-30 | Ford Global Technologies, Llc | Proximity switch based door latch release |
| US8796575B2 (en) | 2012-10-31 | 2014-08-05 | Ford Global Technologies, Llc | Proximity switch assembly having ground layer |
| US9311204B2 (en) | 2013-03-13 | 2016-04-12 | Ford Global Technologies, Llc | Proximity interface development system having replicator and method |
| US10041920B2 (en) * | 2013-09-26 | 2018-08-07 | 3M Innovative Properties Company | Vapor sensor suitable for detecting alcoholic residue at a skin site |
| US9895514B2 (en) * | 2014-01-27 | 2018-02-20 | Maddoc Medical Products, Inc. | Medical device securement system and method |
| US10209213B2 (en) | 2014-02-27 | 2019-02-19 | 3M Innovative Properties Company | Flexible sensor patch and method of using the same |
| US9958444B2 (en) * | 2014-05-30 | 2018-05-01 | Sober stearing Sensors Canada, Inc. | Apparatus, systems and methods for sensing an analyte such as ethanol |
| US20160104060A1 (en) * | 2014-10-10 | 2016-04-14 | Graphix Solutions | Photo imaging system and method |
| US10038443B2 (en) | 2014-10-20 | 2018-07-31 | Ford Global Technologies, Llc | Directional proximity switch assembly |
| US9654103B2 (en) | 2015-03-18 | 2017-05-16 | Ford Global Technologies, Llc | Proximity switch assembly having haptic feedback and method |
| US9548733B2 (en) | 2015-05-20 | 2017-01-17 | Ford Global Technologies, Llc | Proximity sensor assembly having interleaved electrode configuration |
| CN105301061B (zh) * | 2015-09-23 | 2018-05-22 | 西南交通大学 | 一种自组装式网格状α-MoO3纳米带气敏传感器 |
| CN108426921B (zh) * | 2017-02-13 | 2021-04-06 | 华邦电子股份有限公司 | 气体传感器 |
| EP3762391A4 (en) | 2018-03-08 | 2022-08-03 | ExxonMobil Technology and Engineering Company | SPIROCENTRIC COMPOUNDS AND POLYMERS THEREOF |
| CN111504169B (zh) * | 2020-04-20 | 2024-12-10 | 威海华菱光电股份有限公司 | 膜厚的检测装置 |
| US20220252535A1 (en) * | 2021-02-05 | 2022-08-11 | Massachusetts Institute Of Technology | Humidity initiated gas (hig) sensors for volatile organic compounds sensing |
| CN120629729B (zh) * | 2025-08-11 | 2025-10-14 | 广立微(上海)技术有限公司 | 用于后段金属工艺监控的测试结构、测试电路和测试芯片 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281610A (ja) * | 1993-01-29 | 1994-10-07 | Nok Corp | 湿度センサ、アルコ−ルセンサまたはケトンセンサ |
| US6312793B1 (en) * | 1999-05-26 | 2001-11-06 | International Business Machines Corporation | Multiphase low dielectric constant material |
| US20060246273A1 (en) * | 2003-07-26 | 2006-11-02 | Mckeown Neil B | Microporous polymer material |
| WO2007075443A1 (en) * | 2005-12-21 | 2007-07-05 | 3M Innovative Properties Company | Plasma deposited microporous analyte detection layer |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4728882A (en) * | 1986-04-01 | 1988-03-01 | The Johns Hopkins University | Capacitive chemical sensor for detecting certain analytes, including hydrocarbons in a liquid medium |
| JPS6488146A (en) * | 1987-09-30 | 1989-04-03 | Toshiba Corp | Humidity sensor |
| GB2220074B (en) * | 1988-06-27 | 1992-01-08 | Seiko Epson Corp | Humidity sensor |
| US5512882A (en) * | 1991-08-07 | 1996-04-30 | Transducer Research, Inc. | Chemical sensing apparatus and methods |
| WO1994028372A1 (en) * | 1993-05-25 | 1994-12-08 | Rosemount Inc. | Organic chemical sensor |
| US5857250A (en) * | 1994-10-25 | 1999-01-12 | Texas Instruments Incorporated | Method of forming a capacitance type gaseous sensing device and apparatus thereof |
| US5677074A (en) * | 1996-06-25 | 1997-10-14 | The Dais Corporation | Gas diffusion electrode |
| US5767687A (en) * | 1996-11-29 | 1998-06-16 | Geist; Jon | Surface-capacitor type condensable-vapor sensor |
| US6173602B1 (en) * | 1998-08-11 | 2001-01-16 | Patrick T. Moseley | Transition metal oxide gas sensor |
| DE10152055A1 (de) * | 2001-10-25 | 2003-05-08 | Nttf Gmbh | Mechanisch und thermodynamisch stabile amorphe Kohlenstoffschichten für temperaturempfindliche Oberflächen |
| KR100696462B1 (ko) * | 2003-09-26 | 2007-03-19 | 삼성에스디아이 주식회사 | 연료전지용 전극 확산층 |
| MXPA06006759A (es) * | 2003-12-18 | 2006-09-04 | Basf Ag | Metodos para la preparacion de lisina por fermentacion de corynebacterium glutamicum. |
| US7049247B2 (en) * | 2004-05-03 | 2006-05-23 | International Business Machines Corporation | Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made |
| US7837844B2 (en) * | 2005-04-26 | 2010-11-23 | Seacoast Science, Inc. | Interdigitated chemical sensors, and methods of making and using the same |
| US7556774B2 (en) * | 2005-12-21 | 2009-07-07 | 3M Innovative Properties Company | Optochemical sensor and method of making the same |
| US7901776B2 (en) | 2006-12-29 | 2011-03-08 | 3M Innovative Properties Company | Plasma deposited microporous carbon material |
-
2008
- 2008-09-30 EP EP08836726.3A patent/EP2208058B1/en not_active Not-in-force
- 2008-09-30 AU AU2008308827A patent/AU2008308827B2/en not_active Ceased
- 2008-09-30 CN CN2008801123711A patent/CN101836108B/zh not_active Expired - Fee Related
- 2008-09-30 JP JP2010528081A patent/JP5266326B2/ja not_active Expired - Fee Related
- 2008-09-30 US US12/681,758 patent/US8378694B2/en not_active Expired - Fee Related
- 2008-09-30 KR KR1020107009860A patent/KR101476487B1/ko not_active Expired - Fee Related
- 2008-09-30 WO PCT/US2008/078281 patent/WO2009046011A2/en not_active Ceased
- 2008-09-30 BR BRPI0816493A patent/BRPI0816493A2/pt active Search and Examination
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281610A (ja) * | 1993-01-29 | 1994-10-07 | Nok Corp | 湿度センサ、アルコ−ルセンサまたはケトンセンサ |
| US6312793B1 (en) * | 1999-05-26 | 2001-11-06 | International Business Machines Corporation | Multiphase low dielectric constant material |
| US20060246273A1 (en) * | 2003-07-26 | 2006-11-02 | Mckeown Neil B | Microporous polymer material |
| WO2007075443A1 (en) * | 2005-12-21 | 2007-07-05 | 3M Innovative Properties Company | Plasma deposited microporous analyte detection layer |
Also Published As
| Publication number | Publication date |
|---|---|
| BRPI0816493A2 (pt) | 2019-02-26 |
| WO2009046011A3 (en) | 2009-06-11 |
| EP2208058A4 (en) | 2017-05-24 |
| US8378694B2 (en) | 2013-02-19 |
| JP5266326B2 (ja) | 2013-08-21 |
| US20110031983A1 (en) | 2011-02-10 |
| AU2008308827B2 (en) | 2011-02-17 |
| WO2009046011A2 (en) | 2009-04-09 |
| EP2208058B1 (en) | 2018-07-11 |
| JP2010540967A (ja) | 2010-12-24 |
| CN101836108B (zh) | 2013-05-29 |
| EP2208058A2 (en) | 2010-07-21 |
| KR20100087315A (ko) | 2010-08-04 |
| AU2008308827A1 (en) | 2009-04-09 |
| CN101836108A (zh) | 2010-09-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101476487B1 (ko) | 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 | |
| US8409511B2 (en) | Organic chemical sensor with microporous organisilicate material | |
| CN101815936B (zh) | 包含微孔聚合物的有机化学传感器及使用方法 | |
| EP1151272B1 (en) | Simultaneous determination of equilibrium and kinetic properties | |
| JP5932806B2 (ja) | センサー素子、その製造方法、及びそれを含むセンサー装置 | |
| Capone et al. | Moisture influence and geometry effect of Au and Pt electrodes on CO sensing response of SnO2 microsensors based on sol–gel thin film | |
| JP2016200605A (ja) | センサー素子、その製造方法、及びそれを含むセンサー装置 | |
| US8736000B1 (en) | Capacitive chemical sensor | |
| JP2014515106A (ja) | 校正情報を含む電子素子及びその使用方法 | |
| Heule et al. | Gas sensors fabricated from ceramic suspensions by micromolding in capillaries | |
| US10585062B2 (en) | Electrochemical detector | |
| Jalkanen et al. | Research Article Fabrication of Porous Silicon Based Humidity Sensing Elements on Paper |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| A201 | Request for examination | ||
| E13-X000 | Pre-grant limitation requested |
St.27 status event code: A-2-3-E10-E13-lim-X000 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| PA0201 | Request for examination |
St.27 status event code: A-1-2-D10-D11-exm-PA0201 |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
St.27 status event code: A-1-2-D10-D21-exm-PE0902 |
|
| P11-X000 | Amendment of application requested |
St.27 status event code: A-2-2-P10-P11-nap-X000 |
|
| P13-X000 | Application amended |
St.27 status event code: A-2-2-P10-P13-nap-X000 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
St.27 status event code: A-1-2-D10-D22-exm-PE0701 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
St.27 status event code: A-2-4-F10-F11-exm-PR0701 |
|
| PR1002 | Payment of registration fee |
St.27 status event code: A-2-2-U10-U12-oth-PR1002 Fee payment year number: 1 |
|
| PG1601 | Publication of registration |
St.27 status event code: A-4-4-Q10-Q13-nap-PG1601 |
|
| FPAY | Annual fee payment |
Payment date: 20171117 Year of fee payment: 4 |
|
| PR1001 | Payment of annual fee |
St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4 |
|
| LAPS | Lapse due to unpaid annual fee | ||
| PC1903 | Unpaid annual fee |
St.27 status event code: A-4-4-U10-U13-oth-PC1903 Not in force date: 20181219 Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE |
|
| PC1903 | Unpaid annual fee |
St.27 status event code: N-4-6-H10-H13-oth-PC1903 Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE Not in force date: 20181219 |