JP2010524241A5 - - Google Patents

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Publication number
JP2010524241A5
JP2010524241A5 JP2010502254A JP2010502254A JP2010524241A5 JP 2010524241 A5 JP2010524241 A5 JP 2010524241A5 JP 2010502254 A JP2010502254 A JP 2010502254A JP 2010502254 A JP2010502254 A JP 2010502254A JP 2010524241 A5 JP2010524241 A5 JP 2010524241A5
Authority
JP
Japan
Prior art keywords
end effector
fiber
frp
substrate transfer
transfer robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010502254A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010524241A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2008/059102 external-priority patent/WO2008124421A1/en
Publication of JP2010524241A publication Critical patent/JP2010524241A/ja
Publication of JP2010524241A5 publication Critical patent/JP2010524241A5/ja
Pending legal-status Critical Current

Links

JP2010502254A 2007-04-05 2008-04-02 基板を搬送するためのエンドエフェクタおよびロボット Pending JP2010524241A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US92194607P 2007-04-05 2007-04-05
PCT/US2008/059102 WO2008124421A1 (en) 2007-04-05 2008-04-02 An end effector of a robot for transporting substrates

Publications (2)

Publication Number Publication Date
JP2010524241A JP2010524241A (ja) 2010-07-15
JP2010524241A5 true JP2010524241A5 (enExample) 2011-05-12

Family

ID=39575867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010502254A Pending JP2010524241A (ja) 2007-04-05 2008-04-02 基板を搬送するためのエンドエフェクタおよびロボット

Country Status (6)

Country Link
US (1) US20080247857A1 (enExample)
EP (1) EP2137762A1 (enExample)
JP (1) JP2010524241A (enExample)
KR (1) KR20100015756A (enExample)
CN (1) CN101652852B (enExample)
WO (1) WO2008124421A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8827339B2 (en) * 2010-03-04 2014-09-09 Jx Nippon Oil & Energy Corporation Robot hand
CN102050330B (zh) * 2010-11-05 2013-02-06 深圳市华星光电技术有限公司 机械手臂及具有该机械手臂的搬运装置
US9004846B2 (en) 2011-02-11 2015-04-14 The Procter & Gamble Company Gripper assembly for moving device
US20120205928A1 (en) * 2011-02-11 2012-08-16 Stefano La Rovere Gripper Assembly for Mechanical Device
JP5447470B2 (ja) * 2011-09-22 2014-03-19 株式会社安川電機 ハンドおよびロボット
US20130156530A1 (en) * 2011-12-14 2013-06-20 Intermolecular, Inc. Method and apparatus for reducing contamination of substrate
US20140265394A1 (en) * 2013-03-13 2014-09-18 Varian Semiconductor Equipment Associates, Inc. Composite end effectors
US9884426B2 (en) 2013-06-27 2018-02-06 De-Sta-Co Europe Gmbh Boom utilized in a geometric end effector system
KR102177156B1 (ko) * 2014-03-10 2020-11-10 삼성전자주식회사 로봇 및 그를 구비한 기판 처리 장치
DE102015111859B4 (de) * 2015-07-22 2022-02-24 Fibro Läpple Technology GmbH Höchstgeschwindigkeitsportalsystem mit Linearantrieb
US10192761B2 (en) * 2016-02-15 2019-01-29 Asm Technology Singapore Pte Ltd Pick arm comprising a winged part for a bonding apparatus
NL2018244B1 (en) * 2017-01-27 2018-08-07 Suss Microtec Lithography Gmbh Endeffektor
KR101859153B1 (ko) * 2017-10-11 2018-05-16 주식회사 넥스컴스 외팔보 형태로 된 카세트용 서포트바의 진동감쇠장치
CN111511957A (zh) * 2017-12-25 2020-08-07 堺显示器制品株式会社 蒸镀掩模、蒸镀方法以及有机el显示装置的制造方法
CN111492090A (zh) * 2017-12-25 2020-08-04 堺显示器制品株式会社 蒸镀掩模、蒸镀方法以及有机el显示设备的制造方法
CN108517113A (zh) * 2018-05-07 2018-09-11 安徽悦尔伟塑料机械有限公司 高硬度塑料机械手及其制备方法
US12053876B2 (en) * 2018-06-15 2024-08-06 Nippon Steel Texeng. Co., Ltd. Workpiece transportation member, workpiece transportation device, and heat treatment device
JP6768758B2 (ja) * 2018-09-25 2020-10-14 堺ディスプレイプロダクト株式会社 蒸着マスク、蒸着方法及び有機ｅｌ表示装置の製造方法
JP6591022B2 (ja) * 2018-09-25 2019-10-16 堺ディスプレイプロダクト株式会社 蒸着マスク、蒸着方法及び有機ｅｌ表示装置の製造方法
US20210031373A1 (en) * 2019-08-02 2021-02-04 Dextrous Robotics, Inc. Robotic manipulators
JP2023105858A (ja) * 2022-01-20 2023-08-01 東京エレクトロン株式会社 基板支持部材、基板搬送装置及び基板支持部材の製造方法
WO2023205176A1 (en) 2022-04-18 2023-10-26 Dextrous Robotics, Inc. System and/or method for grasping objects

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000343476A (ja) * 1999-06-09 2000-12-12 Nippon Mitsubishi Oil Corp 搬送用部材
US20020180104A1 (en) * 2001-03-29 2002-12-05 Takashi Kobayashi Robot hand member and method of producing the same
US6815037B2 (en) * 2001-09-19 2004-11-09 Nippon Mitsubishi Oil Corporation Carrier member made of a UV resistant fiber-reinforced composite material and process for producing thereof
JP2005054541A (ja) * 2003-08-07 2005-03-03 Nippon Oil Corp 炭素繊維強化プラスチック製梁部材および炭素繊維により補強した梁部材
WO2005102618A1 (ja) * 2004-04-20 2005-11-03 Nippon Oil Corporation ロボットハンド部材、その製造方法及びロボットハンド
JP2005340480A (ja) * 2004-05-26 2005-12-08 Nippon Oil Corp 基板カセット用サポートバー
US7073834B2 (en) * 2004-06-25 2006-07-11 Applied Materials, Inc. Multiple section end effector assembly
CH697200A5 (de) * 2004-10-01 2008-06-25 Oerlikon Assembly Equipment Ag Klemmvorrichtung und Transportvorrichtung zum Transportieren von Substraten.

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