JP2010519687A5 - - Google Patents

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Publication number
JP2010519687A5
JP2010519687A5 JP2009549804A JP2009549804A JP2010519687A5 JP 2010519687 A5 JP2010519687 A5 JP 2010519687A5 JP 2009549804 A JP2009549804 A JP 2009549804A JP 2009549804 A JP2009549804 A JP 2009549804A JP 2010519687 A5 JP2010519687 A5 JP 2010519687A5
Authority
JP
Japan
Prior art keywords
ions
semiconductor die
wiring
gas
mass spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009549804A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010519687A (ja
Filing date
Publication date
Priority claimed from EP07003392A external-priority patent/EP1959476A1/de
Application filed filed Critical
Publication of JP2010519687A publication Critical patent/JP2010519687A/ja
Publication of JP2010519687A5 publication Critical patent/JP2010519687A5/ja
Pending legal-status Critical Current

Links

JP2009549804A 2007-02-19 2008-02-19 質量分析計 Pending JP2010519687A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07003392A EP1959476A1 (de) 2007-02-19 2007-02-19 Massenspektrometer
PCT/EP2008/001287 WO2008101669A1 (de) 2007-02-19 2008-02-19 Massenspektrometer

Publications (2)

Publication Number Publication Date
JP2010519687A JP2010519687A (ja) 2010-06-03
JP2010519687A5 true JP2010519687A5 (OSRAM) 2011-02-24

Family

ID=38235375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009549804A Pending JP2010519687A (ja) 2007-02-19 2008-02-19 質量分析計

Country Status (6)

Country Link
US (1) US8134120B2 (OSRAM)
EP (1) EP1959476A1 (OSRAM)
JP (1) JP2010519687A (OSRAM)
CN (1) CN101636814B (OSRAM)
CA (1) CA2678460A1 (OSRAM)
WO (1) WO2008101669A1 (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010018830A1 (de) 2010-04-29 2011-11-03 Bayer Technology Services Gmbh Flüssigkeitsverdampfer
CN101963596B (zh) * 2010-09-01 2012-09-05 中国科学院广州地球化学研究所 基于四极杆质谱的稀有气体测定系统
DE102011015595B8 (de) * 2011-03-30 2015-01-29 Krohne Messtechnik Gmbh Verfahren zur Ansteuerung eines synchronous ion shield Massenseparators
JP5813536B2 (ja) * 2012-03-02 2015-11-17 株式会社東芝 イオン源
US9418827B2 (en) * 2013-07-23 2016-08-16 Hamilton Sundstrand Corporation Methods of ion source fabrication
DE102014003356A1 (de) 2014-03-06 2015-09-10 Gregor Quiring Vorrichtung zur Ionentrennung durch selektive Beschleunigung
JP6624482B2 (ja) * 2014-07-29 2019-12-25 俊 保坂 超小型加速器および超小型質量分析装置
JP7018090B2 (ja) * 2020-04-08 2022-02-09 俊 保坂 超小型加速器および超小型質量分析装置およびイオン注入装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2765890B2 (ja) * 1988-12-09 1998-06-18 株式会社日立製作所 プラズマイオン源微量元素質量分析装置
US5087815A (en) 1989-11-08 1992-02-11 Schultz J Albert High resolution mass spectrometry of recoiled ions for isotopic and trace elemental analysis
JP2774878B2 (ja) * 1991-04-25 1998-07-09 株式会社日立製作所 多層膜絶縁物試料の二次イオン質量分析方法
US5492867A (en) 1993-09-22 1996-02-20 Westinghouse Elect. Corp. Method for manufacturing a miniaturized solid state mass spectrograph
US5466932A (en) 1993-09-22 1995-11-14 Westinghouse Electric Corp. Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
US5481110A (en) 1993-09-22 1996-01-02 Westinghouse Electric Corp Thin film preconcentrator array
US5536939A (en) * 1993-09-22 1996-07-16 Northrop Grumman Corporation Miniaturized mass filter
US5386115A (en) 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5486697A (en) * 1994-11-14 1996-01-23 California Institute Of Technology Array of micro-machined mass energy micro-filters for charged particles
JPH09511614A (ja) * 1994-11-22 1997-11-18 ノースロップ グルマン コーポレーション ソリッドステート型の質量分析器汎用ガス検出センサ
DE19720278B4 (de) 1997-05-13 2007-08-02 Sls Micro Technology Gmbh Miniaturisiertes Massenspektrometer
JPH11250854A (ja) * 1998-03-02 1999-09-17 Ulvac Corp エッチングプラズマにおける基板入射イオンの分析法及び装置
US6815668B2 (en) * 1999-07-21 2004-11-09 The Charles Stark Draper Laboratory, Inc. Method and apparatus for chromatography-high field asymmetric waveform ion mobility spectrometry
US6396057B1 (en) * 2000-04-18 2002-05-28 Waters Investments Limited Electrospray and other LC/MS interfaces
GB2391694B (en) 2002-08-01 2006-03-01 Microsaic Systems Ltd Monolithic micro-engineered mass spectrometer
US7358593B2 (en) * 2004-05-07 2008-04-15 University Of Maine Microfabricated miniature grids
JP5221954B2 (ja) * 2004-08-02 2013-06-26 オウルストーン リミテッド イオン移動度分光計
CA2552086C (en) * 2005-07-20 2014-09-09 Microsaic Systems Limited Microengineered nanospray electrode system

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