JP2010511875A5 - - Google Patents
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- Publication number
- JP2010511875A5 JP2010511875A5 JP2009539582A JP2009539582A JP2010511875A5 JP 2010511875 A5 JP2010511875 A5 JP 2010511875A5 JP 2009539582 A JP2009539582 A JP 2009539582A JP 2009539582 A JP2009539582 A JP 2009539582A JP 2010511875 A5 JP2010511875 A5 JP 2010511875A5
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- vacuum
- pressure measuring
- vacuum pressure
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002120 nanofilm Substances 0.000 claims 16
- 238000009530 blood pressure measurement Methods 0.000 claims 3
- 239000000919 ceramic Substances 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910000831 Steel Inorganic materials 0.000 claims 2
- 239000002041 carbon nanotube Substances 0.000 claims 2
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 2
- 239000010959 steel Substances 0.000 claims 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 claims 1
- 230000001133 acceleration Effects 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 239000011224 oxide ceramic Substances 0.000 claims 1
- 229910052574 oxide ceramic Inorganic materials 0.000 claims 1
- 230000035699 permeability Effects 0.000 claims 1
- 230000000284 resting effect Effects 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 239000011343 solid material Substances 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1983/06 | 2006-12-06 | ||
| CH19832006 | 2006-12-06 | ||
| PCT/CH2007/000588 WO2008067681A1 (de) | 2006-12-06 | 2007-11-23 | Elektronenquelle für vakuumdruckmessgerät |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010511875A JP2010511875A (ja) | 2010-04-15 |
| JP2010511875A5 true JP2010511875A5 (cg-RX-API-DMAC7.html) | 2010-12-16 |
| JP5252739B2 JP5252739B2 (ja) | 2013-07-31 |
Family
ID=37840464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009539582A Expired - Fee Related JP5252739B2 (ja) | 2006-12-06 | 2007-11-23 | 真空圧力測定装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8018234B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5252739B2 (cg-RX-API-DMAC7.html) |
| DE (1) | DE112007002399B4 (cg-RX-API-DMAC7.html) |
| GB (1) | GB2457831B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2008067681A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7845235B2 (en) | 2007-11-06 | 2010-12-07 | Costin Sandu | Non-invasive system and method for measuring vacuum pressure in a fluid |
| DE102008003676B4 (de) * | 2008-01-09 | 2011-07-21 | Bruker Daltonik GmbH, 28359 | Ionenmobilitätsspektrometer mit einer nicht radioaktiven Elektronenquelle |
| DE102008032333A1 (de) * | 2008-07-09 | 2010-06-10 | Drägerwerk AG & Co. KGaA | Miniaturisierter nicht-radioaktiver Elektronenemitter |
| WO2012091715A1 (en) | 2010-12-30 | 2012-07-05 | Utc Fire & Security Corporation | Ionization window |
| DE102011055089B4 (de) * | 2011-11-07 | 2014-10-09 | Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh | Messvorrichtung |
| US11406415B2 (en) | 2012-06-11 | 2022-08-09 | Tenex Health, Inc. | Systems and methods for tissue treatment |
| WO2014014742A1 (en) * | 2012-07-17 | 2014-01-23 | Fergenson David Phillip | System for and techniques of manufacturing a monolithic analytical instrument |
| US9962181B2 (en) | 2014-09-02 | 2018-05-08 | Tenex Health, Inc. | Subcutaneous wound debridement |
| US10692692B2 (en) * | 2015-05-27 | 2020-06-23 | Kla-Tencor Corporation | System and method for providing a clean environment in an electron-optical system |
| US10545258B2 (en) * | 2016-03-24 | 2020-01-28 | Schlumberger Technology Corporation | Charged particle emitter assembly for radiation generator |
| JP6721806B1 (ja) * | 2019-09-13 | 2020-07-15 | キヤノンアネルバ株式会社 | 電離真空計およびカートリッジ |
| JP7462033B2 (ja) * | 2019-09-20 | 2024-04-04 | インフィコン・アーゲー | 真空気密電気フィードスルー |
| CN110702301B (zh) * | 2019-11-19 | 2024-11-01 | 川北真空科技(北京)有限公司 | 一种薄膜真空计 |
| CH719946A2 (de) * | 2022-08-08 | 2024-02-15 | Inficon ag | Kammer für Ionisationsvakuummeter. |
| CN117213707A (zh) * | 2023-08-21 | 2023-12-12 | 兰州空间技术物理研究所 | 一种便携式极高真空量子测量装置及应用方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60139241U (ja) * | 1984-02-27 | 1985-09-14 | 日本原子力研究所 | 荷電粒子分析器の電離真空計 |
| JP3324395B2 (ja) * | 1995-10-31 | 2002-09-17 | 富士電機株式会社 | 電界型真空管とそれを用いた圧力センサ、加速度センサおよびそれらの製造方法 |
| JP2003149069A (ja) * | 2001-11-13 | 2003-05-21 | Ishikawajima Harima Heavy Ind Co Ltd | 真空スイッチ及びこれを用いた真空排気装置並びにイオン式真空計 |
| ITTO20030626A1 (it) * | 2003-08-08 | 2005-02-09 | Varian Spa | Vacuometro a ionizzazione. |
| ITTO20030627A1 (it) * | 2003-08-08 | 2005-02-09 | Varian Spa | Vacuometro a ionizzazione. |
| US7030619B2 (en) * | 2004-02-19 | 2006-04-18 | Brooks Automation, Inc. | Ionization gauge |
| CA2606440A1 (en) * | 2005-04-29 | 2006-11-09 | University Of Rochester | Ultrathin porous nanoscale membranes, methods of making, and uses thereof |
-
2007
- 2007-11-23 US US12/516,375 patent/US8018234B2/en not_active Expired - Fee Related
- 2007-11-23 GB GB0907151A patent/GB2457831B/en not_active Expired - Fee Related
- 2007-11-23 DE DE112007002399.6T patent/DE112007002399B4/de not_active Expired - Fee Related
- 2007-11-23 JP JP2009539582A patent/JP5252739B2/ja not_active Expired - Fee Related
- 2007-11-23 WO PCT/CH2007/000588 patent/WO2008067681A1/de not_active Ceased
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