JP2010508448A - 電子サイクロトロン共鳴による勾配付きバンドギャップを有する非晶質膜の蒸着 - Google Patents
電子サイクロトロン共鳴による勾配付きバンドギャップを有する非晶質膜の蒸着 Download PDFInfo
- Publication number
- JP2010508448A JP2010508448A JP2009535600A JP2009535600A JP2010508448A JP 2010508448 A JP2010508448 A JP 2010508448A JP 2009535600 A JP2009535600 A JP 2009535600A JP 2009535600 A JP2009535600 A JP 2009535600A JP 2010508448 A JP2010508448 A JP 2010508448A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- band gap
- plasma
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008021 deposition Effects 0.000 title claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 76
- 239000000463 material Substances 0.000 claims abstract description 59
- 239000007789 gas Substances 0.000 claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 41
- 239000002243 precursor Substances 0.000 claims abstract description 16
- 230000008859 change Effects 0.000 claims abstract description 11
- 238000007740 vapor deposition Methods 0.000 claims abstract description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 26
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229910052990 silicon hydride Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 61
- 210000002381 plasma Anatomy 0.000 description 47
- 238000000151 deposition Methods 0.000 description 44
- 239000010408 film Substances 0.000 description 39
- 210000004027 cell Anatomy 0.000 description 28
- 230000005284 excitation Effects 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 10
- 229910052739 hydrogen Inorganic materials 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 230000031700 light absorption Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000000875 corresponding effect Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008450 motivation Effects 0.000 description 2
- 230000005405 multipole Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- -1 SiH 4 Chemical class 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000002900 effect on cell Effects 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 230000005279 excitation period Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 210000003976 gap junction Anatomy 0.000 description 1
- 229910000078 germane Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WXRGABKACDFXMG-UHFFFAOYSA-N trimethylborane Chemical compound CB(C)C WXRGABKACDFXMG-UHFFFAOYSA-N 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- MECHNRXZTMCUDQ-RKHKHRCZSA-N vitamin D2 Chemical compound C1(/[C@@H]2CC[C@@H]([C@]2(CCC1)C)[C@H](C)/C=C/[C@H](C)C(C)C)=C\C=C1\C[C@@H](O)CCC1=C MECHNRXZTMCUDQ-RKHKHRCZSA-N 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32678—Electron cyclotron resonance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【選択図】図1
Description
B=2πmf/e (1)
ここでmとeはそれぞれ質量と電子の電荷である。
、p.1133-1136参照)。真性層の軸に沿ってギャップが最小となる領域の位置をずらすとわかるように、バンドギャップの断面形はセルの性能に大きな影響を及ぼしている。勾配の断面形は曲線因子と開路電圧の両方に非常に大きな影響を及ぼす。図13に示すように、非対称v型のp-iインターフェース近くに最小バンドギャップを有するものが最適性能を示すことがわかった。
(ii)これらはセル内でフィールド分布を移動させ、中央での電界を減らし、PIN a-Si:Hセルのpおよびnインターフェースで電界をわずかに増やす。
この文献における2つ目の事項は勾配付きバンドギャップ構造を用いて解決している。p層と大バンドギャップa-SiC:Hバッファの後にa-Si:H真性層が3つの段階を経て蒸着される。
(ii)蒸着温度を100°C下げ、希釈率(つまり、H2/SiH4)を増やすことにより120〜150nmの間でバンドギャップが約1.8eVに変えられた勾配付きバンドギャップ領域が得られる。
(iii)その後から続くn層と、100〜150nmの一定のバンドギャップ真性層領域がいずれも275°Cで蒸着される。
この表の第3列より、条件2,4および5は点注入、つまり図3のように、を使用したことがわかる。条件1および3は、下から反応装置内へ延びて上を向いた管を通して膜用前駆ガスが導入される容量注入(volume injection)として知られている別の配置を使用した。
特定の周波数で得た蒸着速度を、他の点では同一条件だがCWモードを用いて得た蒸着速度で割ったものである蒸着速度比の各値からわかるように、勾配付きギャップ構造の蒸着にCWモードが含まれている場合であっても、蒸着時間をCWとパルスモードとの間で調節するために補正が必要である。10Hzを下回る場合、OFF時間はプラズマの特性寿命(characteristic lifetime)よりも長くなり、蒸着速度は著しく落ちる。
DECR-PECVDで蒸着した膜のバンドギャップが各アンテナへ供給するMW出力をパルスさせることにより調整できることは上述からわかる。これは単一の膜用前駆ガスで達成でき、よってギャップに勾配を付けるためのガスを使用する必要がない。
Claims (19)
- 容器内に基板を配置することと、
ある流動速度で膜用前駆ガスを前記容器内に連続して導入することと、
前記容器内を低圧にすべく前記容器から未反応および解離ガスを抽出することと、
分散型電子サイクロトロン共鳴(DECR)によりプラズマを前記容器内で生成すべく前記プラズマから材料を前記基板上に蒸着するために所定の周波数と出力レベルでの連続したパルスとして前記容器内のガスにマイクロ波エネルギーを導入すること
を備えるプラズマからの蒸着により基板上に非晶質材料の膜を形成する方法であって、
前記蒸着した材料の厚さにわたってバンドギャップを変化させるべく前記周波数および/または出力レベルを材料の蒸着中に変える
方法。 - 前記蒸着した膜が水素化非晶質シリコンである請求項1に記載の方法。
- 前記膜用前駆ガスが水素化珪素を含む請求項2に記載の方法。
- 前記膜用前駆ガスがSiH4を含む請求項3に記載の方法。
- 前記蒸着した膜がアモルファスシリコン合金である請求項1に記載の方法。
- 前記プラズマが二次元ネットワークを形成するように配置した装置で生成されている請求項1から5のいずれかに記載の方法。
- 前記プラズマがマトリックスDECRで生成されている請求項6に記載の方法。
- 各層が先の層よりもより大なるバンドギャップを有する、複数の層を前記基板上に連続蒸着する請求項1から7のいずれかに記載の方法。
- 各層が先の層よりもより小なるバンドギャップを有する、複数の層を前記基板上に連続蒸着する請求項1から7のいずれかに記載の方法。
- 蒸着する第1および最終層の両方から離間した点で前記バンドギャップが最小値を有するように前記各層を蒸着する請求項1から7のいずれかに記載の方法。
- 前記流動速度を無段式に連続して変化させることにより、その厚さの全体または一部を通して前記膜の前記バンドギャップを連続また無段階に変化させる請求項1から7のいずれかに記載の方法。
- 前記周波数が少なくとも10Hzである請求項1から11のいずれかに記載の方法。
- 前記周波数のみを変える請求項1から12のいずれかに記載の方法。
- 前記出力のみを変える請求項1から12のいずれかに記載の方法。
- 前記周波数および前記出力の両方を変える請求項1から12のいずれかに記載の方法。
- 蒸着中にマイクロ波エネルギーを連続波として供給する段階がある請求項13または15に記載の方法。
- 前記流動速度も前記蒸着中に変える請求項1から16のいずれかに記載の方法。
- 太陽電池の製作方法であって、nドープ材料の基板上に請求項1から17のいずれかに記載の方法で非晶質材料の膜が形成し、pドープ材料層が前記非晶質材料の膜上に形成する。
- 太陽電池の製作方法であって、pドープ材料の基板上に請求項1から18のいずれかに記載の方法で非晶質材料の膜が形成し、nドープ材料層が前記非晶質材料の膜上に形成する。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06301119.1 | 2006-11-02 | ||
EP06301119A EP1918414A1 (en) | 2006-11-02 | 2006-11-02 | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
PCT/EP2007/009307 WO2008052707A1 (en) | 2006-11-02 | 2007-10-26 | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010508448A true JP2010508448A (ja) | 2010-03-18 |
JP5386360B2 JP5386360B2 (ja) | 2014-01-15 |
Family
ID=38068601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009535600A Expired - Fee Related JP5386360B2 (ja) | 2006-11-02 | 2007-10-26 | 電子サイクロトロン共鳴による勾配付きバンドギャップを有する非晶質膜の蒸着 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7998785B2 (ja) |
EP (1) | EP1918414A1 (ja) |
JP (1) | JP5386360B2 (ja) |
KR (1) | KR20090101166A (ja) |
CN (1) | CN101578388B (ja) |
WO (1) | WO2008052707A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015502670A (ja) * | 2011-12-22 | 2015-01-22 | トタル マルケタン セルヴィス | シリコン基板の表面を粗面化する方法、粗面化した基板及び粗面化した基板を備える光電池 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1918965A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method and apparatus for forming a film by deposition from a plasma |
EP1918966A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
EP1918967B1 (en) | 2006-11-02 | 2013-12-25 | Dow Corning Corporation | Method of forming a film by deposition from a plasma |
EP1918414A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
EP1923483A1 (en) | 2006-11-02 | 2008-05-21 | Dow Corning Corporation | Deposition of amorphous silicon films by electron cyclotron resonance |
EP1919264A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Device for forming a film by deposition from a plasma |
US20090238998A1 (en) * | 2008-03-18 | 2009-09-24 | Applied Materials, Inc. | Coaxial microwave assisted deposition and etch systems |
KR101022822B1 (ko) * | 2008-12-31 | 2011-03-17 | 한국철강 주식회사 | 광기전력 장치의 제조 방법 |
JP2012033750A (ja) * | 2010-07-30 | 2012-02-16 | Toshiba Corp | 半導体装置及びその製造方法 |
FR2974701B1 (fr) * | 2011-04-27 | 2014-03-21 | Sairem Soc Pour L Applic Ind De La Rech En Electronique Et Micro Ondes | Installation de production d'un plasma micro-onde |
US10319872B2 (en) | 2012-05-10 | 2019-06-11 | International Business Machines Corporation | Cost-efficient high power PECVD deposition for solar cells |
CN103762321B (zh) * | 2013-12-31 | 2017-06-09 | 中山市贝利斯特包装制品有限公司 | 一种有机器件薄膜封装方法及装置 |
FR3089524B1 (fr) * | 2018-12-10 | 2022-07-15 | Inst De Rech Tech Jules Verne | Procédé de carbonisation par plasma d’une fibre précurseur de fibre de carbone et dispositif pour sa mise en œuvre |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01117370A (ja) * | 1987-07-24 | 1989-05-10 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JPH04202669A (ja) * | 1990-11-30 | 1992-07-23 | Canon Inc | 堆積膜形成方法 |
JPH0677512A (ja) * | 1992-06-30 | 1994-03-18 | Canon Inc | 光起電力素子及びその製造方法、並びにそれを用いた発電システム |
JPH0774110A (ja) * | 1993-09-01 | 1995-03-17 | Ulvac Japan Ltd | プラズマcvd成膜方法 |
JP2001319883A (ja) * | 2000-05-10 | 2001-11-16 | Canon Inc | 堆積膜の製造方法 |
JP2001332749A (ja) * | 2000-05-23 | 2001-11-30 | Canon Inc | 半導体薄膜の形成方法およびアモルファスシリコン太陽電池素子 |
JP2001330971A (ja) * | 2000-05-19 | 2001-11-30 | Canon Inc | 光受容部材の製造方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR890000478B1 (ko) | 1980-09-09 | 1989-03-18 | 에너지 컨버션 디바이시즈, 인코포레이리드 | 비정질합금의 제조방법 |
EG18056A (en) | 1986-02-18 | 1991-11-30 | Solarex Corp | Dispositif feedstock materials useful in the fabrication of hydrogenated amorphous silicon alloys for photo-voltaic devices and other semiconductor devices |
US4910153A (en) * | 1986-02-18 | 1990-03-20 | Solarex Corporation | Deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices |
US5104455A (en) * | 1990-01-09 | 1992-04-14 | Sharp Kabushiki Kaisha | Amorphous semiconductor solar cell |
JP2719230B2 (ja) | 1990-11-22 | 1998-02-25 | キヤノン株式会社 | 光起電力素子 |
JPH05314918A (ja) | 1992-05-13 | 1993-11-26 | Nissin Electric Co Ltd | イオン源用マイクロ波アンテナ |
US5429685A (en) * | 1992-11-16 | 1995-07-04 | Canon Kabushiki Kaisha | Photoelectric conversion element and power generation system using the same |
FR2702119B1 (fr) | 1993-02-25 | 1995-07-13 | Metal Process | Dispositif d'excitation d'un plasma à la résonance cyclotronique électronique par l'intermédiaire d'un applicateur filaire d'un champ micro-onde et d'un champ magnétique statique. |
FR2726729B1 (fr) | 1994-11-04 | 1997-01-31 | Metal Process | Dispositif de production d'un plasma permettant une dissociation entre les zones de propagation et d'absorption des micro-ondes |
JPH1081968A (ja) | 1996-09-03 | 1998-03-31 | Nippon Hoso Kyokai <Nhk> | 非晶質シリコン膜の作製法 |
FR2797372B1 (fr) | 1999-08-04 | 2002-10-25 | Metal Process | Procede de production de plasmas elementaires en vue de creer un plasma uniforme pour une surface d'utilisation et dispositif de production d'un tel plasma |
DE10139305A1 (de) | 2001-08-07 | 2003-03-06 | Schott Glas | Verbundmaterial aus einem Substratmaterial und einem Barriereschichtmaterial |
US6845734B2 (en) | 2002-04-11 | 2005-01-25 | Micron Technology, Inc. | Deposition apparatuses configured for utilizing phased microwave radiation |
EP1919264A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Device for forming a film by deposition from a plasma |
EP1918965A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method and apparatus for forming a film by deposition from a plasma |
EP1918414A1 (en) * | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
EP1923483A1 (en) | 2006-11-02 | 2008-05-21 | Dow Corning Corporation | Deposition of amorphous silicon films by electron cyclotron resonance |
EP1918966A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
EP1921178A1 (en) | 2006-11-02 | 2008-05-14 | Dow Corning Corporation | Film deposition of amorphous films by electron cyclotron resonance |
EP1918967B1 (en) | 2006-11-02 | 2013-12-25 | Dow Corning Corporation | Method of forming a film by deposition from a plasma |
-
2006
- 2006-11-02 EP EP06301119A patent/EP1918414A1/en not_active Withdrawn
-
2007
- 2007-10-26 WO PCT/EP2007/009307 patent/WO2008052707A1/en active Application Filing
- 2007-10-26 KR KR1020097011243A patent/KR20090101166A/ko active IP Right Grant
- 2007-10-26 CN CN2007800407374A patent/CN101578388B/zh not_active Expired - Fee Related
- 2007-10-26 US US12/447,830 patent/US7998785B2/en not_active Expired - Fee Related
- 2007-10-26 JP JP2009535600A patent/JP5386360B2/ja not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01117370A (ja) * | 1987-07-24 | 1989-05-10 | Sanyo Electric Co Ltd | 半導体装置の製造方法 |
JPH04202669A (ja) * | 1990-11-30 | 1992-07-23 | Canon Inc | 堆積膜形成方法 |
JPH0677512A (ja) * | 1992-06-30 | 1994-03-18 | Canon Inc | 光起電力素子及びその製造方法、並びにそれを用いた発電システム |
JPH0774110A (ja) * | 1993-09-01 | 1995-03-17 | Ulvac Japan Ltd | プラズマcvd成膜方法 |
JP2001319883A (ja) * | 2000-05-10 | 2001-11-16 | Canon Inc | 堆積膜の製造方法 |
JP2001330971A (ja) * | 2000-05-19 | 2001-11-30 | Canon Inc | 光受容部材の製造方法 |
JP2001332749A (ja) * | 2000-05-23 | 2001-11-30 | Canon Inc | 半導体薄膜の形成方法およびアモルファスシリコン太陽電池素子 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015502670A (ja) * | 2011-12-22 | 2015-01-22 | トタル マルケタン セルヴィス | シリコン基板の表面を粗面化する方法、粗面化した基板及び粗面化した基板を備える光電池 |
Also Published As
Publication number | Publication date |
---|---|
KR20090101166A (ko) | 2009-09-24 |
WO2008052707A1 (en) | 2008-05-08 |
US20100075458A1 (en) | 2010-03-25 |
CN101578388B (zh) | 2013-01-02 |
CN101578388A (zh) | 2009-11-11 |
EP1918414A1 (en) | 2008-05-07 |
US7998785B2 (en) | 2011-08-16 |
JP5386360B2 (ja) | 2014-01-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5386360B2 (ja) | 電子サイクロトロン共鳴による勾配付きバンドギャップを有する非晶質膜の蒸着 | |
JP5350261B2 (ja) | プラズマからの非晶質材料の蒸着による勾配付きバンドギャップを有する膜の形成方法 | |
JP5031844B2 (ja) | 電子サイクロトロン共鳴によるアモルファスシリコン膜の蒸着 | |
KR101488005B1 (ko) | 플라즈마로부터 증착에 의하여 막을 형성하는 방법 및 장치 | |
US10531553B2 (en) | Scalable multi-role surface-wave plasma generator | |
US20110220026A1 (en) | Plasma processing device | |
WO1999039385A1 (en) | Method for hydrogen passivation and multichamber hollow cathode apparatus | |
JP2010508674A (ja) | 電子サイクロトロン共鳴による非晶質膜の蒸着 | |
JP5350260B2 (ja) | プラズマからの蒸着のための成膜装置 | |
Van den Donker et al. | Hidden parameters in the plasma deposition of microcrystalline silicon solar cells | |
JP2608456B2 (ja) | 薄膜形成装置 | |
TWI412624B (zh) | 薄膜沉積裝置及其用以製備薄膜之方法 | |
JP2846534B2 (ja) | プラズマcvd装置とこれによる機能性堆積膜の形成方法 | |
KR20090107017A (ko) | 전자 사이클로트론 공진에 의한 비정질 실리콘 막들의 증착 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100528 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120925 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121221 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130917 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131007 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |