JP2010508445A - プラズマからの蒸着のための成膜装置 - Google Patents
プラズマからの蒸着のための成膜装置 Download PDFInfo
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- JP2010508445A JP2010508445A JP2009535597A JP2009535597A JP2010508445A JP 2010508445 A JP2010508445 A JP 2010508445A JP 2009535597 A JP2009535597 A JP 2009535597A JP 2009535597 A JP2009535597 A JP 2009535597A JP 2010508445 A JP2010508445 A JP 2010508445A
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- Prior art keywords
- gas
- plasma
- tube
- magnet
- substrate
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32366—Localised processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32678—Electron cyclotron resonance
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H13/00—Magnetic resonance accelerators; Cyclotrons
Abstract
【選択図】図4
Description
ここでmとeはそれぞれ質量と電子の電荷である。
Claims (10)
- 分散型電子サイクロトロン共鳴で形成されたプラズマから基板上に膜を蒸着するために使用するプラズマ励起装置であって、前記要素が
マイクロ波を放出する一端を有するマイクロ波アンテナと、
前記アンテナ端の領域内に配置されて、その中でプラズマを生成できる電子サイクロトロン共鳴領域を画定している磁石と、
膜用前駆ガスまたはプラズマガス用の排気口を有するガス進入要素とを備え
前記排気口が前記磁石を通り過ぎて、前記マイクロ波アンテナから見て、前記磁石の先に位置する膜蒸着区域に向けてガスを方向付けるように配置されている
装置。 - 前記排気口が、本明細書内に記載のように、高温電子閉じ込めエンベロープの中に配置されている請求項1に記載の装置。
- 前記排気口が前記マイクロ波を放出する前記マイクロ波アンテナの一端にまたは隣接して配置されている請求項1に記載の装置。
- 前記マイクロ波アンテナが管を備え、前記ガス進入要素は、そのソースから前記管内へガスを導入するように構成されているガス供給管路と共同して前記管に備えられている請求項3に記載の装置。
- 前記ガス進入管路が前記管の内部へ前記ガスを導入するように構成されている請求項4に記載の装置。
- 前記ガス進入管路が前記ガスを前記管の壁の内側に画定されている領域内へ導入するように構成されており、前記排気口は前記領域と連通している請求項4に記載の装置。
- 前記管がその中をマイクロ波が移動する内管部材と、前記内管部材と共にその中に前記ガス供給管でガスが導入される管状領域を画定する外管部材を備える同軸管である請求項4に記載の装置。
- 前記磁石がその磁気軸が前記アンテナからのマイクロ波伝搬方向と概ね揃うように配置されている請求項1から7のいずれかに記載の装置。
- 容器と、前記容器内に配置された請求項1から8のいずれかに記載の複数のプラズマ励起装置と、前記基板を支持する前記容器内にある手段とを備えるプラズマから基板上に膜を蒸着する装置。
- 単一のガスシールドが各前記アンテナ端と各前記関連磁石を包む請求項9に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06301116A EP1919264A1 (en) | 2006-11-02 | 2006-11-02 | Device for forming a film by deposition from a plasma |
EP06301116.7 | 2006-11-02 | ||
PCT/EP2007/009304 WO2008052704A1 (en) | 2006-11-02 | 2007-10-26 | Device for forming a film by deposition from a plasma |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010508445A true JP2010508445A (ja) | 2010-03-18 |
JP5350260B2 JP5350260B2 (ja) | 2013-11-27 |
Family
ID=37873251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009535597A Expired - Fee Related JP5350260B2 (ja) | 2006-11-02 | 2007-10-26 | プラズマからの蒸着のための成膜装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8635972B2 (ja) |
EP (2) | EP1919264A1 (ja) |
JP (1) | JP5350260B2 (ja) |
KR (1) | KR101493502B1 (ja) |
CN (1) | CN101584256B (ja) |
WO (1) | WO2008052704A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1918965A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method and apparatus for forming a film by deposition from a plasma |
EP1918966A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
EP1923483A1 (en) | 2006-11-02 | 2008-05-21 | Dow Corning Corporation | Deposition of amorphous silicon films by electron cyclotron resonance |
EP1918967B1 (en) | 2006-11-02 | 2013-12-25 | Dow Corning Corporation | Method of forming a film by deposition from a plasma |
EP1918414A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
WO2021069620A1 (en) * | 2019-10-11 | 2021-04-15 | Neocoat Sa | Cvd reactor for manufacturing synthetic films and methods of fabrication |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001102200A (ja) * | 1999-08-04 | 2001-04-13 | Metal Process Sarl | 加工面に均一なプラズマを形成するための個別のプラズマを発生させる方法、及びそのようなプラズマを発生させる装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8104140A (nl) | 1980-09-09 | 1982-04-01 | Energy Conversion Devices Inc | Werkwijze voor het vervaardigen van amorfe halfgeleiderinrichtingen met verbeterde fotogevoelige eigenschappen alsmede als zodanig verkregen inrichtingen. |
FR2590808B1 (fr) * | 1985-12-04 | 1989-09-15 | Canon Kk | Dispositif de soufflage de particules fines |
EG18056A (en) | 1986-02-18 | 1991-11-30 | Solarex Corp | Dispositif feedstock materials useful in the fabrication of hydrogenated amorphous silicon alloys for photo-voltaic devices and other semiconductor devices |
US5125358A (en) * | 1988-07-26 | 1992-06-30 | Matsushita Electric Industrial Co., Ltd. | Microwave plasma film deposition system |
US5032202A (en) * | 1989-10-03 | 1991-07-16 | Martin Marietta Energy Systems, Inc. | Plasma generating apparatus for large area plasma processing |
JP2719230B2 (ja) | 1990-11-22 | 1998-02-25 | キヤノン株式会社 | 光起電力素子 |
JPH05314918A (ja) * | 1992-05-13 | 1993-11-26 | Nissin Electric Co Ltd | イオン源用マイクロ波アンテナ |
US5429685A (en) * | 1992-11-16 | 1995-07-04 | Canon Kabushiki Kaisha | Photoelectric conversion element and power generation system using the same |
JP3115134B2 (ja) * | 1992-11-27 | 2000-12-04 | 松下電器産業株式会社 | 薄膜処理装置および薄膜処理方法 |
FR2702119B1 (fr) * | 1993-02-25 | 1995-07-13 | Metal Process | Dispositif d'excitation d'un plasma à la résonance cyclotronique électronique par l'intermédiaire d'un applicateur filaire d'un champ micro-onde et d'un champ magnétique statique. |
FR2726729B1 (fr) * | 1994-11-04 | 1997-01-31 | Metal Process | Dispositif de production d'un plasma permettant une dissociation entre les zones de propagation et d'absorption des micro-ondes |
JPH1081968A (ja) | 1996-09-03 | 1998-03-31 | Nippon Hoso Kyokai <Nhk> | 非晶質シリコン膜の作製法 |
JP2001332749A (ja) * | 2000-05-23 | 2001-11-30 | Canon Inc | 半導体薄膜の形成方法およびアモルファスシリコン太陽電池素子 |
DE10139305A1 (de) * | 2001-08-07 | 2003-03-06 | Schott Glas | Verbundmaterial aus einem Substratmaterial und einem Barriereschichtmaterial |
US6845734B2 (en) * | 2002-04-11 | 2005-01-25 | Micron Technology, Inc. | Deposition apparatuses configured for utilizing phased microwave radiation |
EP1923483A1 (en) | 2006-11-02 | 2008-05-21 | Dow Corning Corporation | Deposition of amorphous silicon films by electron cyclotron resonance |
EP1918967B1 (en) | 2006-11-02 | 2013-12-25 | Dow Corning Corporation | Method of forming a film by deposition from a plasma |
EP1921178A1 (en) | 2006-11-02 | 2008-05-14 | Dow Corning Corporation | Film deposition of amorphous films by electron cyclotron resonance |
EP1918966A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method for forming a film with a graded bandgap by deposition of an amorphous material from a plasma |
EP1918965A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Method and apparatus for forming a film by deposition from a plasma |
EP1918414A1 (en) | 2006-11-02 | 2008-05-07 | Dow Corning Corporation | Film deposition of amorphous films with a graded bandgap by electron cyclotron resonance |
-
2006
- 2006-11-02 EP EP06301116A patent/EP1919264A1/en not_active Withdrawn
-
2007
- 2007-10-26 WO PCT/EP2007/009304 patent/WO2008052704A1/en active Application Filing
- 2007-10-26 CN CN2007800407069A patent/CN101584256B/zh not_active Expired - Fee Related
- 2007-10-26 EP EP20070819351 patent/EP2080425B1/en not_active Not-in-force
- 2007-10-26 KR KR20097011239A patent/KR101493502B1/ko not_active IP Right Cessation
- 2007-10-26 JP JP2009535597A patent/JP5350260B2/ja not_active Expired - Fee Related
- 2007-10-26 US US12/447,854 patent/US8635972B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001102200A (ja) * | 1999-08-04 | 2001-04-13 | Metal Process Sarl | 加工面に均一なプラズマを形成するための個別のプラズマを発生させる方法、及びそのようなプラズマを発生させる装置 |
Non-Patent Citations (1)
Title |
---|
JPN5009015421; D.DAINEKA: THE EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS V26 N1, 200404, P3-9 * |
Also Published As
Publication number | Publication date |
---|---|
EP2080425B1 (en) | 2015-05-20 |
KR101493502B1 (ko) | 2015-02-13 |
US8635972B2 (en) | 2014-01-28 |
JP5350260B2 (ja) | 2013-11-27 |
CN101584256A (zh) | 2009-11-18 |
WO2008052704A1 (en) | 2008-05-08 |
US20100071621A1 (en) | 2010-03-25 |
KR20090098964A (ko) | 2009-09-18 |
EP1919264A1 (en) | 2008-05-07 |
CN101584256B (zh) | 2012-08-01 |
EP2080425A1 (en) | 2009-07-22 |
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