JP2010507829A - プラスチック基板を有する電子装置 - Google Patents
プラスチック基板を有する電子装置 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 199
- 229920003023 plastic Polymers 0.000 title claims abstract description 142
- 239000004033 plastic Substances 0.000 title claims abstract description 136
- 239000000463 material Substances 0.000 claims abstract description 48
- 238000004519 manufacturing process Methods 0.000 claims abstract description 33
- 239000010409 thin film Substances 0.000 claims abstract description 29
- 238000010438 heat treatment Methods 0.000 claims abstract description 14
- 239000006223 plastic coating Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 124
- 239000011521 glass Substances 0.000 claims description 55
- 239000004642 Polyimide Substances 0.000 claims description 14
- 229920001721 polyimide Polymers 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 10
- 238000000465 moulding Methods 0.000 claims description 7
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 71
- 238000012545 processing Methods 0.000 description 19
- 229920000642 polymer Polymers 0.000 description 13
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 238000004528 spin coating Methods 0.000 description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920001690 polydopamine Polymers 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002775 capsule Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000002211 ultraviolet spectrum Methods 0.000 description 2
- 125000001140 1,4-phenylene group Chemical group [H]C1=C([H])C([*:2])=C([H])C([H])=C1[*:1] 0.000 description 1
- RICKKZXCGCSLIU-UHFFFAOYSA-N 2-[2-[carboxymethyl-[[3-hydroxy-5-(hydroxymethyl)-2-methylpyridin-4-yl]methyl]amino]ethyl-[[3-hydroxy-5-(hydroxymethyl)-2-methylpyridin-4-yl]methyl]amino]acetic acid Chemical compound CC1=NC=C(CO)C(CN(CCN(CC(O)=O)CC=2C(=C(C)N=CC=2CO)O)CC(O)=O)=C1O RICKKZXCGCSLIU-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012769 display material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
Description
湿式成形処理を用いて、剛性担持基板に、プラスチックコーティングを設置するステップであって、前記プラスチックコーティングは、プラスチック基板を形成し、基板面に対して垂直な第1の方向では、前記基板面に平行な第2の方向に比べて、少なくとも3倍大きな熱膨張係数を有する透明プラスチック材料を有するステップと、
前記プラスチック基板上に、薄膜電子素子を形成するステップと、
加熱処理により、前記プラスチック基板は、前記基板面に対して垂直な方向に優先的に延び、これにより、前記プラスチック基板から、前記剛性担持基板を取り外すステップと、
を有する方法が提供される。
前記プラスチック基板上に、薄膜電子素子を形成するステップは、前記プラスチック基板上に、画素回路の配列を形成するステップを有し、
当該方法は、さらに、前記プラスチック基板から前記剛性担持基板を取り外す前に、前記画素回路の配列の上に、表示層を形成するステップを有することを特徴とする。
前記画素回路の配列の上に、表示層を形成するステップは、前記第1および第2の基板配置を、両者の間に設置された光電子材料で取り付けるステップを有し、
これにより、前記アクティブマトリクス表示装置は、前記光電気材料が間に挟まれた第1および第2の基板を有しても良い。
透明プラスチック材料を有するプラスチック基板であって、基板面に対して垂直な方向では、前記基板面に平行な方向に比べて、少なくとも3倍大きな熱膨張係数を有するプラスチック基板と、
前記プラスチック基板上の薄膜電子素子と、
を有する薄膜電子装置が提供される。
図4には、ガラス担体板12と、プラスチック基板として機能するプラスチック層22とを示す。この形態の基板は、アクティブ板およびパッシブ板のベース部を形成する。
Claims (21)
- 薄膜電子装置を製造する方法であって、
湿式成形処理を用いて、剛性担持基板に、プラスチックコーティングを設置するステップであって、前記プラスチックコーティングは、プラスチック基板を形成し、基板面に対して垂直な第1の方向では、前記基板面に平行な第2の方向に比べて、少なくとも3倍大きな熱膨張係数を有する透明プラスチック材料を有するステップと、
前記プラスチック基板上に、薄膜電子素子を形成するステップと、
加熱処理により、前記プラスチック基板は、前記基板面に対して垂直な方向に優先的に延び、これにより、前記プラスチック基板から、前記剛性担持基板を取り外すステップと、
を有する方法。 - 前記プラスチック材料は、前記剛性担持基板に対して実質的に垂直な方向に、最大の熱膨張係数を有することを特徴とする請求項1に記載の方法。
- 前記プラスチック材料は、前記剛性担持基板と実質的に平行な方向に、最も小さな熱膨張係数を有することを特徴とする請求項1または2に記載の方法。
- 前記プラスチック材料の、前記剛性担持基板に対して垂直な熱膨張係数は、前記剛性担持基板に平行な熱膨張係数の少なくとも5倍であることを特徴とする請求項1乃至3のいずれか一つに記載の方法。
- 前記プラスチック材料の、前記剛性担持基板に対して垂直な熱膨張係数は、前記剛性担持基板に平行な熱膨張係数の少なくとも10倍であることを特徴とする請求項4に記載の方法。
- 前記プラスチック材料の、前記剛性担持基板に平行な熱膨張係数は、30×10-6/℃であることを特徴とする請求項1乃至5のいずれか一つに記載の方法。
- 前記プラスチック材料は、ポリイミドを有することを特徴とする請求項1乃至6のいずれか一つに記載の方法。
- 前記プラスチック材料は、ポリ(p−フェニレンビフェニルテトラカルボキシイミド)を有することを特徴とする請求項7に記載の方法。
- 前記取り外すステップは、前記プラスチック基板を、前記剛性担持基板から熱的に剥離することにより行われることを特徴とする請求項1乃至8のいずれか一つに記載の方法。
- 前記熱的に剥離することは、紫外レーザ光に暴露することにより実施されることを特徴とする請求項9に記載の方法。
- 前記紫外レーザ光は、200nmよりも大きな波長を有することを特徴とする請求項10に記載の方法。
- 前記剛性担持基板は、ガラス基板を有することを特徴とする請求項1乃至11のいずれか一つに記載の方法。
- 前記湿式成形処理は、スピンオン処理を有することを特徴とする請求項1乃至12のいずれか一つに記載の方法。
- アクティブマトリクス表示装置を製造するための、請求項1乃至13のいずれか一つに記載の方法であって、
前記プラスチック基板上に、薄膜電子素子を形成するステップは、前記プラスチック基板上に、画素回路の配列を形成するステップを有し、
当該方法は、さらに、前記プラスチック基板から前記剛性担持基板を取り外す前に、前記画素回路の配列の上に、表示層を形成するステップを有することを特徴とする方法。 - さらに、第2の基板配置を製造するステップを有し、
前記画素回路の配列の上に、表示層を形成するステップは、前記第1および第2の基板配置を、両者の間に設置された光電子材料で取り付けるステップを有し、
これにより、前記アクティブマトリクス表示装置は、前記光電気材料が間に挟まれた第1および第2の基板を有することを特徴とする請求項14に記載の方法。 - 透明プラスチック材料を有するプラスチック基板であって、基板面に対して垂直な方向では、前記基板面に平行な方向に比べて、少なくとも3倍大きな熱膨張係数を有するプラスチック基板と、
前記プラスチック基板上の薄膜電子素子と、
を有する薄膜電子装置。 - 前記プラスチック基板は、前記基板面に対して実質的に垂直な方向に、最大の熱膨張係数を有することを特徴とする請求項16に記載の薄膜電子装置。
- 前記プラスチック基板の、前記基板面に対して垂直な熱膨張係数は、前記基板面に平行な熱膨張係数の少なくとも5倍であることを特徴とする請求項16または17に記載の薄膜電子装置。
- 前記プラスチック材料の、前記基板面に対して垂直な熱膨張係数は、前記基板面に平行な熱膨張係数の少なくとも10倍であることを特徴とする請求項18に記載の薄膜電子装置。
- 前記プラスチック材料は、ポリイミドを有することを特徴とする請求項16乃至19のいずれか一つに記載の薄膜電子装置。
- 前記プラスチック材料は、ポリ(p−フェニレンビフェニルテトラカルボキシイミド)を有することを特徴とする請求項20に記載の薄膜電子装置。
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PCT/IB2007/054322 WO2008050300A1 (en) | 2006-10-27 | 2007-10-24 | Electronic device having a plastic substrate |
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EP (1) | EP2078226B1 (ja) |
JP (1) | JP5033880B2 (ja) |
CN (1) | CN101529316B (ja) |
AT (1) | ATE469372T1 (ja) |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010202729A (ja) * | 2009-03-02 | 2010-09-16 | Hitachi Chemical Dupont Microsystems Ltd | フレキシブルデバイス基板用ポリイミド前駆体樹脂組成物及びそれを用いたフレキシブルデバイスの製造方法、フレキシブルデバイス |
JP2012511173A (ja) * | 2008-12-05 | 2012-05-17 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | プラスチック基板を有する電子デバイス |
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Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008018026A2 (en) * | 2006-08-10 | 2008-02-14 | Koninklijke Philips Electronics N.V. | Active matrix displays and other electronic devices having plastic substrates |
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US20130011651A1 (en) * | 2010-03-31 | 2013-01-10 | Ube Industries, Ltd. | Polyimide film, and process for producing polyimide film |
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TW201808628A (zh) | 2016-08-09 | 2018-03-16 | Semiconductor Energy Lab | 半導體裝置的製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02221922A (ja) * | 1989-02-22 | 1990-09-04 | Ricoh Co Ltd | 液晶表示装置 |
JP2007512568A (ja) * | 2003-11-21 | 2007-05-17 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | プラスチック基板を有するアクティブマトリクスディスプレイ及び他の電子装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5212478A (en) * | 1989-03-31 | 1993-05-18 | Lutron Electronics Co., Inc. | Dynamic power recovery system |
JPH0393024A (ja) | 1989-09-04 | 1991-04-18 | Hitachi Maxell Ltd | 金属薄膜型磁気記録媒体 |
CA2153650A1 (en) * | 1994-07-12 | 1996-01-13 | Vinay Mehta | Remote control system for ceiling fan and light |
KR980010506A (ko) * | 1996-07-30 | 1998-04-30 | 손욱 | 플라스틱 액정 표시 패널 및 그 제조방법 |
GB2351857A (en) * | 1999-07-01 | 2001-01-10 | Kjd Electronics | Lamp dimmer |
JP3817445B2 (ja) * | 2001-06-04 | 2006-09-06 | 成田国際空港株式会社 | 航空手荷物管理方法 |
EP1363319B1 (en) * | 2002-05-17 | 2009-01-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of transferring an object and method of manufacturing a semiconductor device |
US6987449B2 (en) * | 2003-04-18 | 2006-01-17 | Cooper Wiring Devices, Inc. | Dimmer control system with tandem power supplies |
US7211968B2 (en) * | 2003-07-30 | 2007-05-01 | Colorado Vnet, Llc | Lighting control systems and methods |
US7030565B2 (en) * | 2004-07-27 | 2006-04-18 | Jerrell Penn Hollaway | Lamp control circuit with selectable color signals |
-
2007
- 2007-10-22 US US12/446,477 patent/US20100196683A1/en not_active Abandoned
- 2007-10-24 JP JP2009534026A patent/JP5033880B2/ja active Active
- 2007-10-24 DE DE602007006834T patent/DE602007006834D1/de active Active
- 2007-10-24 EP EP07826847A patent/EP2078226B1/en active Active
- 2007-10-24 WO PCT/IB2007/054322 patent/WO2008050300A1/en active Application Filing
- 2007-10-24 US US12/446,476 patent/US9268162B2/en active Active
- 2007-10-24 CN CN200780039933XA patent/CN101529316B/zh active Active
- 2007-10-24 AT AT07826847T patent/ATE469372T1/de not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02221922A (ja) * | 1989-02-22 | 1990-09-04 | Ricoh Co Ltd | 液晶表示装置 |
JP2007512568A (ja) * | 2003-11-21 | 2007-05-17 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | プラスチック基板を有するアクティブマトリクスディスプレイ及び他の電子装置 |
Cited By (20)
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JP2012511173A (ja) * | 2008-12-05 | 2012-05-17 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | プラスチック基板を有する電子デバイス |
JP2010202729A (ja) * | 2009-03-02 | 2010-09-16 | Hitachi Chemical Dupont Microsystems Ltd | フレキシブルデバイス基板用ポリイミド前駆体樹脂組成物及びそれを用いたフレキシブルデバイスの製造方法、フレキシブルデバイス |
JP2013250551A (ja) * | 2012-05-01 | 2013-12-12 | Sumitomo Bakelite Co Ltd | 表示素子作製方法 |
US10675851B2 (en) | 2013-01-08 | 2020-06-09 | Japan Display Inc. | Method of manufacturing display device |
JP2014149517A (ja) * | 2013-01-08 | 2014-08-21 | Japan Display Inc | 表示装置の製造方法 |
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JP2020166274A (ja) * | 2013-12-02 | 2020-10-08 | 株式会社半導体エネルギー研究所 | 線状ビーム照射装置 |
US10879331B2 (en) | 2013-12-02 | 2020-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
US11672148B2 (en) | 2013-12-02 | 2023-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
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TWI772786B (zh) * | 2013-12-02 | 2022-08-01 | 日商半導體能源研究所股份有限公司 | 顯示裝置及其製造方法 |
US11004925B2 (en) | 2013-12-02 | 2021-05-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
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JP2015178628A (ja) * | 2015-05-26 | 2015-10-08 | 日立化成デュポンマイクロシステムズ株式会社 | フレキシブルデバイス基板形成用ポリイミド前駆体樹脂組成物及びそれを用いたフレキシブルデバイスの製造方法、フレキシブルデバイス |
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Publication number | Publication date |
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EP2078226A1 (en) | 2009-07-15 |
US20100196683A1 (en) | 2010-08-05 |
ATE469372T1 (de) | 2010-06-15 |
DE602007006834D1 (de) | 2010-07-08 |
WO2008050300A1 (en) | 2008-05-02 |
CN101529316B (zh) | 2012-07-11 |
EP2078226B1 (en) | 2010-05-26 |
JP5033880B2 (ja) | 2012-09-26 |
US20100323170A1 (en) | 2010-12-23 |
CN101529316A (zh) | 2009-09-09 |
US9268162B2 (en) | 2016-02-23 |
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