JP2010278440A - 熱伝導部材、及び該熱伝導部材の製造方法 - Google Patents
熱伝導部材、及び該熱伝導部材の製造方法 Download PDFInfo
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- JP2010278440A JP2010278440A JP2010120592A JP2010120592A JP2010278440A JP 2010278440 A JP2010278440 A JP 2010278440A JP 2010120592 A JP2010120592 A JP 2010120592A JP 2010120592 A JP2010120592 A JP 2010120592A JP 2010278440 A JP2010278440 A JP 2010278440A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 146
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 140
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 140
- 238000002844 melting Methods 0.000 claims abstract description 31
- 230000008018 melting Effects 0.000 claims abstract description 31
- 239000007769 metal material Substances 0.000 claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 61
- 239000002923 metal particle Substances 0.000 claims description 31
- 239000002131 composite material Substances 0.000 claims description 19
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 7
- 238000003491 array Methods 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- 239000003054 catalyst Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 230000017525 heat dissipation Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910001152 Bi alloy Inorganic materials 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000002048 multi walled nanotube Substances 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 3
- 239000002079 double walled nanotube Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 239000002109 single walled nanotube Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- PEEDYJQEMCKDDX-UHFFFAOYSA-N antimony bismuth Chemical compound [Sb].[Bi] PEEDYJQEMCKDDX-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- JWVAUCBYEDDGAD-UHFFFAOYSA-N bismuth tin Chemical compound [Sn].[Bi] JWVAUCBYEDDGAD-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000011246 composite particle Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K5/00—Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
- C09K5/08—Materials not undergoing a change of physical state when used
- C09K5/10—Liquid materials
- C09K5/12—Molten materials, i.e. materials solid at room temperature, e.g. metals or salts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/02—Constructions of heat-exchange apparatus characterised by the selection of particular materials of carbon, e.g. graphite
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
【解決手段】本発明の熱伝導部材は、低融点の金属材料基体と、該低融点の金属材料基体の中に配置されたパターン化されたカーボンナノチューブアレイとを含む。前記パターン化されたカーボンナノチューブアレイが、複数のカーボンナノチューブサブアレイを含み、隣接するカーボンナノチューブサブアレイの間に前記低融点の金属材料基体の材料が充填されている。また、本発明は、前記熱伝導部材の製造方法を提供する。
【選択図】図1
Description
14 パターン化されたカーボンナノチューブアレイ
20 金型
21 第一側板
22 第二側板
23 第三側板
24 第四側板
25 下基板
30 金属材料基体
80 複合材料
100 熱伝導部材
122 触媒層区域
142 カーボンナノチューブサブアレイ
144 第一隙間
146 第二隙間
208 収容空間
300 金属粒子
Claims (2)
- 低融点の金属材料基体と、該低融点の金属材料基体の中に配置されたパターン化されたカーボンナノチューブアレイとを含む熱伝導部材において、
前記パターン化されたカーボンナノチューブアレイが、複数のカーボンナノチューブサブアレイを含み、隣接する前記カーボンナノチューブサブアレイの間に前記低融点の金属材料基体の材料が充填されていることを特徴とする熱伝導部材。 - パターン化されたカーボンナノチューブアレイが形成された基板を提供するステップであって、該パターン化されたカーボンナノチューブアレイが複数のカーボンナノチューブサブアレイを含み、隣接する前記カーボンナノチューブサブアレイの間に第一隙間を有するようにするステップと、
金型を提供し、前記パターン化されたカーボンナノチューブアレイが形成された基板を前記金型に配置するステップと、
ナノメートルスケールの低融点の金属粒子を提供し、該金属粒子を前記金型の中に添加し、該金属粒子を前記パターン化されたカーボンナノチューブアレイの第一隙間の中に充填させるステップと、
前記金属粒子が充填された前記パターン化されたカーボンナノチューブアレイを加熱し、前記金属粒子を溶融させて液体状態の金属にし、該液体状態の金属と前記パターン化されたカーボンナノチューブアレイとを結合させ、前記基板の表面に複合材料を形成するステップと、
前記複合材料を前記基板から分離し、熱伝導部材を形成するステップと、
を含むことを特徴とする熱伝導部材の製造方法。
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CN200910107740.4 | 2009-05-27 | ||
CN200910107740.4A CN101899288B (zh) | 2009-05-27 | 2009-05-27 | 热界面材料及其制备方法 |
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JP2010278440A true JP2010278440A (ja) | 2010-12-09 |
JP5102328B2 JP5102328B2 (ja) | 2012-12-19 |
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US (2) | US8642121B2 (ja) |
JP (1) | JP5102328B2 (ja) |
CN (1) | CN101899288B (ja) |
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WO2014203547A1 (ja) * | 2013-06-21 | 2014-12-24 | 独立行政法人産業技術総合研究所 | 接合シート及びその製造方法、並びに放熱機構及びその製造方法 |
JP2015023256A (ja) * | 2013-07-23 | 2015-02-02 | 独立行政法人産業技術総合研究所 | 電子デバイス及びその製造方法 |
JP2015515119A (ja) * | 2012-02-17 | 2015-05-21 | インヴェンサス・コーポレイション | 相互接続埋込み熱拡散基板 |
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JP2015005654A (ja) * | 2013-06-21 | 2015-01-08 | 独立行政法人産業技術総合研究所 | 接合シート及びその製造方法、並びに放熱機構及びその製造方法 |
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US20140102687A1 (en) | 2014-04-17 |
US8642121B2 (en) | 2014-02-04 |
JP5102328B2 (ja) | 2012-12-19 |
CN101899288A (zh) | 2010-12-01 |
CN101899288B (zh) | 2012-11-21 |
US20100301260A1 (en) | 2010-12-02 |
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