JP2010272739A5 - - Google Patents
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- JP2010272739A5 JP2010272739A5 JP2009124281A JP2009124281A JP2010272739A5 JP 2010272739 A5 JP2010272739 A5 JP 2010272739A5 JP 2009124281 A JP2009124281 A JP 2009124281A JP 2009124281 A JP2009124281 A JP 2009124281A JP 2010272739 A5 JP2010272739 A5 JP 2010272739A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009124281A JP5471031B2 (ja) | 2009-05-22 | 2009-05-22 | ステージ装置、位置合わせ装置および基板貼り合わせ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009124281A JP5471031B2 (ja) | 2009-05-22 | 2009-05-22 | ステージ装置、位置合わせ装置および基板貼り合わせ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010272739A JP2010272739A (ja) | 2010-12-02 |
JP2010272739A5 true JP2010272739A5 (es) | 2012-12-13 |
JP5471031B2 JP5471031B2 (ja) | 2014-04-16 |
Family
ID=43420521
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009124281A Active JP5471031B2 (ja) | 2009-05-22 | 2009-05-22 | ステージ装置、位置合わせ装置および基板貼り合わせ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5471031B2 (es) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108766925A (zh) * | 2018-08-29 | 2018-11-06 | 深圳市金海来自动化机械有限公司 | 一种对位装置及对位平台 |
JP7267877B2 (ja) * | 2019-09-05 | 2023-05-02 | キオクシア株式会社 | 基板貼合装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04205113A (ja) * | 1990-11-30 | 1992-07-27 | Hitachi Ltd | 試料台駆動装置 |
JP4626160B2 (ja) * | 2004-03-04 | 2011-02-02 | 株式会社ニコン | ウェハ重ね合わせ方法及びウェハ重ね合わせ装置 |
JP2008258368A (ja) * | 2007-04-04 | 2008-10-23 | Nikon Corp | 基板接合装置および基板接合方法 |
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2009
- 2009-05-22 JP JP2009124281A patent/JP5471031B2/ja active Active
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