JP2010272739A5 - - Google Patents

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Publication number
JP2010272739A5
JP2010272739A5 JP2009124281A JP2009124281A JP2010272739A5 JP 2010272739 A5 JP2010272739 A5 JP 2010272739A5 JP 2009124281 A JP2009124281 A JP 2009124281A JP 2009124281 A JP2009124281 A JP 2009124281A JP 2010272739 A5 JP2010272739 A5 JP 2010272739A5
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JP
Japan
Prior art keywords
actuator
intersecting
stage
intersects
action
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JP2009124281A
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English (en)
Japanese (ja)
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JP2010272739A (ja
JP5471031B2 (ja
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Priority to JP2009124281A priority Critical patent/JP5471031B2/ja
Priority claimed from JP2009124281A external-priority patent/JP5471031B2/ja
Publication of JP2010272739A publication Critical patent/JP2010272739A/ja
Publication of JP2010272739A5 publication Critical patent/JP2010272739A5/ja
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JP2009124281A 2009-05-22 2009-05-22 ステージ装置、位置合わせ装置および基板貼り合わせ装置 Active JP5471031B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009124281A JP5471031B2 (ja) 2009-05-22 2009-05-22 ステージ装置、位置合わせ装置および基板貼り合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009124281A JP5471031B2 (ja) 2009-05-22 2009-05-22 ステージ装置、位置合わせ装置および基板貼り合わせ装置

Publications (3)

Publication Number Publication Date
JP2010272739A JP2010272739A (ja) 2010-12-02
JP2010272739A5 true JP2010272739A5 (es) 2012-12-13
JP5471031B2 JP5471031B2 (ja) 2014-04-16

Family

ID=43420521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009124281A Active JP5471031B2 (ja) 2009-05-22 2009-05-22 ステージ装置、位置合わせ装置および基板貼り合わせ装置

Country Status (1)

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JP (1) JP5471031B2 (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108766925A (zh) * 2018-08-29 2018-11-06 深圳市金海来自动化机械有限公司 一种对位装置及对位平台
JP7267877B2 (ja) * 2019-09-05 2023-05-02 キオクシア株式会社 基板貼合装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04205113A (ja) * 1990-11-30 1992-07-27 Hitachi Ltd 試料台駆動装置
JP4626160B2 (ja) * 2004-03-04 2011-02-02 株式会社ニコン ウェハ重ね合わせ方法及びウェハ重ね合わせ装置
JP2008258368A (ja) * 2007-04-04 2008-10-23 Nikon Corp 基板接合装置および基板接合方法

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