JP2010272739A5

JP2010272739A5 -

Info

Publication number: JP2010272739A5
Application number: JP2009124281A
Authority: JP
Filing date: 2009-05-22
Publication date: 2012-12-13
Anticipated expiration: 2029-05-22

Claims

A stage on which the substrate is placed;
A first lifting actuator for moving the stage in a first lifting direction including a vertical component;
A first intersecting actuator that includes a horizontal component and moves the stage in a first intersecting direction that intersects the ascending / descending direction;
The first crossing actuator has a line of action that intersects a line of action of the first lifting actuator .

A second elevating actuator that includes a vertical component and moves the stage in a second elevating direction that intersects the first intersecting direction;
2. The stage device according to claim 1 , wherein an action line of the first intersecting actuator also intersects an action line of the second lifting actuator.

A second lift actuator that includes a vertical component and moves the stage in a second lift direction that intersects the first cross direction;
A second intersecting actuator that includes a horizontal component and moves the stage in a second intersecting direction that intersects both the first ascending / descending direction and the second ascending / descending direction;
Further comprising
The stage apparatus according to claim 1 , wherein the second intersecting actuator has an action line that intersects an action line of the second lifting actuator .

A second lift actuator that includes a vertical component and moves the stage in a second lift direction that intersects the first cross direction;
A second intersecting actuator that includes a horizontal component and moves the stage in a second intersecting direction intersecting both the first ascending / descending direction and the second ascending / descending direction;
A third elevating actuator that includes a vertical component and moves the stage in a third elevating direction that intersects the first intersecting direction and the second intersecting direction;
Further comprising
2. The stage apparatus according to claim 1, wherein the second intersecting actuator has an action line that intersects at least one of an action line of the second elevating actuator and an action line of the third elevating actuator.

The stage device according to claim 4, wherein the third elevating actuator has an action point at a position deviating from a straight line connecting the action point of the first elevating actuator and the action point of the second elevating actuator.

A third intersecting actuator that includes a horizontal component and moves the stage in a third intersecting direction that intersects any of the first ascending / descending direction, the second ascending / descending direction, and the third ascending / descending direction;
The stage according to claim 4 or 5, wherein a horizontal component of an action line of the third intersecting actuator intersects a horizontal component of an action line of the first intersecting actuator and a horizontal component of an action line of the second intersecting actuator. apparatus.

The action line of the third crossing actuator intersects at least one of the action line of the first elevating actuator, the action line of the second elevating actuator, and the action line of the third elevating actuator. Stage device.

The stage apparatus according to claim 6 or 7, wherein an action line of the third intersecting actuator intersects with a vertical line passing through the center of gravity of the stage.

An alignment apparatus comprising the stage apparatus according to any one of claims 1 to 8 .

The board | substrate bonding apparatus provided with the stage apparatus as described in any one of Claim 1- Claim 8 .