JP2010237156A - Temperature sensor for measurement - Google Patents

Temperature sensor for measurement Download PDF

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JP2010237156A
JP2010237156A JP2009087725A JP2009087725A JP2010237156A JP 2010237156 A JP2010237156 A JP 2010237156A JP 2009087725 A JP2009087725 A JP 2009087725A JP 2009087725 A JP2009087725 A JP 2009087725A JP 2010237156 A JP2010237156 A JP 2010237156A
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glass
thermistor
temperature sensor
sealed
fusion
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JP4963311B2 (en
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Noriyuki Nakayama
法行 中山
Hideo Ebisawa
英男 海老沢
Moritomi Hamada
守富 濱田
Shinya Tonokawa
伸也 殿川
Yoshio Akasaka
芳生 赤坂
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Shibaura Electronics Co Ltd
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Shibaura Electronics Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To improve workability in manufacturing of a temperature sensor by overcoming the problem based on the shape of a thermistor. <P>SOLUTION: The temperature sensor for measurement disclosed is obtained by fusion-bonding and integrating a glass-sealed thermistor element, which is composed of a thermistor element assembly with a thermistor chip 1 fusion-sealed by a fusion-sealed glass 5 and a thermistor lead 2, to a sheet glass 6 with a melting point higher than that of the fusion-sealed glass 5. One side of the sheet glass 6 has a plane wider than the glass-sealed thermistor element. The temperature sensor for measurement is charged into a high-temperature furnace as being sealed in glass, so that the thermistor element is welded into the sheet glass while being protected from an oxidizing atmosphere by the fusion-sealed glass. Accordingly, the temperature sensor for measurement with the plane on one side is manufactured which holds strength while maintaining electrical insulation. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

この発明は、サーミスタを用いた計測用温度センサに関する。   The present invention relates to a temperature sensor for measurement using a thermistor.

サーミスタの形態としては、ビード形,ペレット形,ダイオード形,チップ抵抗形等が一般的に知られている。これらの各種サーミスタの構造や製造方法については、特許文献1や特許文献2や特許文献3等に記載されたものがある。   As the form of the thermistor, a bead type, a pellet type, a diode type, a chip resistor type and the like are generally known. The structures and manufacturing methods of these various thermistors are described in Patent Document 1, Patent Document 2, Patent Document 3, and the like.

サーミスタは、サーミスタ素子やエレメント等と呼ばれる形で、これになんらの追加加工を施すことなく、単独で、あるいはプリント回路基板等に実装する等の形態で使用されることもある。
しかしながら、温度検出の対象が物体の表面温度であったり、サーミスタ素子単体では強度不足のため使用できなかったりする場合、あるいは実装しやすくする場合等、種々の理由で、サーミスタ素子に追加の加工を施して特定の温度センサの形にして使用する場合も多い。以下においては、このような追加加工を施したサーミスタを温度センサと呼んで、単なるサーミスタ素子の場合と区別することとする。
The thermistor may be used as a thermistor element or element, and may be used alone or mounted on a printed circuit board or the like without any additional processing.
However, thermistor element is subject to additional processing for various reasons, such as when the object of temperature detection is the surface temperature of the object, the thermistor element alone cannot be used due to insufficient strength, or when it is easy to mount. In many cases, it is used in the form of a specific temperature sensor. In the following, the thermistor subjected to such additional processing is called a temperature sensor and is distinguished from a simple thermistor element.

以下、追加加工の例についての従来技術を説明する。チップサーミスタを使用した場合は、もともとプリント基板実装を目的とした形状であるため、サーミスタからリード線がでているわけではないので、サーミスタからリード線を引き出す追加の加工が必要となる。この例は、後述する特許文献4に記載されている。   Hereinafter, the prior art about the example of an additional process is demonstrated. When a chip thermistor is used, the shape is originally intended for mounting on a printed circuit board, so that the lead wire does not come out of the thermistor, and additional processing for drawing out the lead wire from the thermistor is required. This example is described in Patent Document 4 described later.

また、追加加工の別の例としては、例えば金属保護管の温度センサで被検出雰囲気(例えば空気温と水温・油温)等の検出に用いるものとして、特許文献5に記載されたものがある。また、炊飯器で使用する炊飯釜の表面温度を測定するサーミスタ素子の追加加工による温度センサが特許文献6に記載されている。
また、コピー機やプリンタで使用する定着器の表面温度コントロール用温度センサとして、特許文献7,特許文献8,特許文献9に記載されたものがある。
さらに、ガスコンロで調理鍋底の温度検出に使用するサーミスタ素子の追加加工の例として、特許文献10,特許文献11に記載されたものがある。
Further, as another example of the additional processing, there is one described in Patent Document 5 as one that is used for detecting an atmosphere to be detected (for example, air temperature, water temperature, oil temperature) by a temperature sensor of a metal protective tube, for example . Further, Patent Document 6 describes a temperature sensor by additional processing of a thermistor element that measures the surface temperature of a rice cooker used in a rice cooker.
Further, as temperature sensors for controlling the surface temperature of a fixing device used in a copying machine or a printer, there are those described in Patent Document 7, Patent Document 8, and Patent Document 9.
Furthermore, there exist some which were described in patent document 10 and patent document 11 as an example of the additional process of the thermistor element used for the temperature detection of a cooking pan bottom with a gas stove.

特許文献1においては、粉末原料を板状に焼結させた本体の両面に耐熱導電性塗料を焼付けて形成した電極を設けると共にガラスに封着することのできる金属リード線の基部を耐熱導電性塗料で上記電極に接続して前記本体と電極およびリード線の基部をガラス中に埋設するかまたはガラスで被覆したことを特徴とする測定用サーミスタが開示されている。
また、原料の粉末を成型して焼結したのち平板状に加工して本体を形成し、その本体の両面に耐熱導電性塗料を塗布して電極を被覆すると共にガラスに封着することのできる金属リード線を耐熱導電性塗料で上記電極に接着して、この本体をガラス中に挿入してそのガラスを加熱溶融することにより該本体をガラス中に埋設すると同時にリード線を接着した導電性塗料の焼付を行うことを特徴とする測定用サーミスタの製造法が開示されている。
In Patent Document 1, an electrode formed by baking a heat-resistant conductive paint is provided on both surfaces of a main body obtained by sintering a powder raw material into a plate shape, and a base portion of a metal lead wire that can be sealed to glass is provided with a heat-resistant conductive material. A thermistor for measurement is disclosed in which the main body and the base of the electrode and the lead wire are embedded in glass or coated with glass by connecting to the electrode with paint.
In addition, after molding and sintering the raw material powder, it can be processed into a flat plate shape to form a main body, and a heat-resistant conductive paint can be applied to both sides of the main body to cover the electrodes and be sealed to glass A conductive paint in which a metal lead wire is bonded to the electrode with a heat-resistant conductive paint, the main body is inserted into the glass, and the glass is heated and melted to embed the main body in the glass and at the same time the lead wire is bonded. A method for manufacturing a thermistor for measurement, which is characterized in that the baking is performed, is disclosed.

また、特許文献2においては、サーミスタ素子と該サーミスタ素子を封止するガラス封止体と、該サーミスタ素子を接続したリード線との熱膨張係数がほぼ等しいセラミックパイプに前記リード線を挿通し、前記セラミックパイプの端部に前記サーミスタ素子を前記ガラス封止体によって固着したことを特徴とするサーミスタが開示されている。   In Patent Document 2, the lead wire is inserted through a ceramic pipe having a thermal expansion coefficient substantially equal to that of a thermistor element, a glass sealing body for sealing the thermistor element, and a lead wire connected to the thermistor element. A thermistor is disclosed in which the thermistor element is fixed to the end of the ceramic pipe by the glass sealing body.

また、特許文献3においては、セラミックス基板と、このセラミックス基板の一主表面に設けた絶縁皮膜と、この絶縁皮膜の上に設けた第1の感熱膜と、この第1の感熱膜の上に一部を対向させ、前記セラミックス基板の一主表面に接続パッド部を設けた一対の電極膜と、この一対の電極膜の一部を挟み込むように前記第1の電極膜の上に設けた少なくとも前記第1の感熱膜よりも厚い第2の感熱膜と、からなる薄膜サーミスタが開示されている。   In Patent Document 3, a ceramic substrate, an insulating film provided on one main surface of the ceramic substrate, a first heat sensitive film provided on the insulating film, and the first heat sensitive film are provided. A pair of electrode films provided with connection pads on one main surface of the ceramic substrate, and at least provided on the first electrode film so as to sandwich a part of the pair of electrode films. A thin film thermistor comprising a second heat sensitive film thicker than the first heat sensitive film is disclosed.

また、特許文献4においては、絶縁基板の一表面上に形成された感熱膜と一対の電極膜とからなる薄膜センサチップと、この薄膜センサチップの電極膜に電気的に接続された引出線とで構成された温度センサにおいて、絶縁基板の電極膜に隣接する部分に挿入溝を設けて、この挿入溝に引出線を各々挿入し、接合材によって電極膜と引出線を電気的に接続固定したのち、絶縁基板の感熱膜側の全面を保護膜によって被覆することによって、電極面と引出線を確実に接続する方法を提供し、接続強度に優れた温度センサを提供することを目的とする、サーミスタ温度センサが開示されている。   Moreover, in patent document 4, the thin film sensor chip which consists of a heat sensitive film | membrane and a pair of electrode film which were formed on one surface of an insulated substrate, and the leader line electrically connected to the electrode film of this thin film sensor chip, In the temperature sensor constituted by the above, an insertion groove is provided in a portion adjacent to the electrode film of the insulating substrate, a lead wire is inserted into the insertion groove, and the electrode film and the lead wire are electrically connected and fixed by a bonding material. Later, by covering the entire surface of the insulating substrate on the heat-sensitive film side with a protective film, a method for reliably connecting the electrode surface and the lead wire is provided, and an object is to provide a temperature sensor with excellent connection strength. A thermistor temperature sensor is disclosed.

また、特許文献5においては、ガラス体にサーミスタを埋め込み、ガラス体およびセラミック体を貫いて2本のリードを引き出し、セラミック体のリードの引き出し部の周囲に2つの穴部を設けたサーミスタ素子に対して、リードにそれぞれ絶縁保護チューブを被せて、この絶縁チューブを先端が穴部の奥に達するまで挿入し、各絶縁保護チューブにそれぞれ耐熱保護チューブを被せ、セラミック体と嵌合する円筒体の開口側に端部にビス穴を有するフランジを設けた金属保護管の円筒体の内部に、予め耐熱性無機接着剤からなる充填剤を充填してサーミスタ素子を挿入し、充填剤を硬化させてガラス体とセラミック体および耐熱保護チューブの基部を金属保護管内に固定して、金属保護管組み込み形のサーミスタ温度センサとすることによって、構造を簡潔にして使用材料と組立作業の工数を低減するとともに、取り付け作業を容易にした、サーミスタ温度センサが開示されている。   In Patent Document 5, a thermistor is provided in which a thermistor is embedded in a glass body, two leads are drawn through the glass body and the ceramic body, and two holes are provided around the lead portion of the ceramic body lead. On the other hand, cover each lead with an insulation protection tube, insert this insulation tube until the tip reaches the inside of the hole, cover each insulation protection tube with a heat-resistant protection tube, and insert a cylindrical body that fits with the ceramic body. Filled with a filler made of a heat-resistant inorganic adhesive in advance into a cylindrical body of a metal protective tube provided with a flange having a screw hole at the end on the opening side, inserted a thermistor element, and cured the filler. By fixing the base of the glass body, ceramic body and heat-resistant protective tube in the metal protective tube, a thermistor temperature sensor with a built-in metal protective tube is obtained. Te, while reducing the number of steps of and use materials and assembly operations simplicity structure, facilitated the mounting operation, a thermistor temperature sensor is disclosed.

また、特許文献6においては、金属キャップの上面内側にサーミスタ素子を密接して取り付けたハーメチック構造のサーミスタ測温部と、サーミスタ測温部を一定範囲上下方向に移動可能に支持し、スプリングによってサーミスタ測温部を常時上方に押し出すように保持する外ケースと、サーミスタ測温部と外ケースとにそれぞれ固定されたリードスイッチとマグネットとを有し、内鍋がセットされたとき、リードスイッチがこの状態を検出する動作を行うとともに、サーミスタ測温部が内鍋底部に接触して内鍋の温度を計測するように構成された電気炊飯器等の自動調理器用のサーミスタ温度センサであって、測温部の応答が速く、過酷な使用環境下でも特性の劣化がなく、炊飯器本体の組み立て工数を削減可能な調理器用サーミスタ温度センサを提供する、調理器用サーミスタ温度センサが開示されている。   Further, in Patent Document 6, a thermistor temperature measuring unit having a hermetic structure in which a thermistor element is closely attached to the inner surface of a metal cap, and the thermistor temperature measuring unit are supported so as to be movable in a certain range up and down, and a thermistor is supported by a spring. It has an outer case that always keeps the temperature measuring part pushed upward, and a reed switch and a magnet fixed to the thermistor temperature measuring part and the outer case, respectively. A thermistor temperature sensor for an automatic cooker, such as an electric rice cooker, configured to perform an operation for detecting the state and to measure the temperature of the inner pan by the thermistor temperature measuring unit contacting the bottom of the inner pan. Thermistor temperature for cookers that has a quick response of the hot section, no deterioration of characteristics even in harsh usage environments, and can reduce the number of man-hours for assembling the rice cooker body Providing capacitors, cooker thermistor temperature sensor is disclosed.

また、特許文献7においては、絶縁物形成体からなる保持体に基部を支持された細長金属板の一方の面の先端にサーミスタを固定し、サーミスタの2本のリード線を細長金属板の面に沿って保持体側に導いて、保持体の細長金属板と反対側に設けられた2本の外部出力線に接続するとともに、細長金属板のサーミスタ固定面と反対側の面を平滑化して感熱部を形成するように構成することによって、熱応答性と耐久力を向上するとともに、被測温体を傷つけないようにした、温度センサが開示されている。   Further, in Patent Document 7, a thermistor is fixed to the tip of one surface of an elongated metal plate whose base is supported by a holder made of an insulator-forming body, and the two lead wires of the thermistor are connected to the surface of the elongated metal plate. Is connected to two external output lines provided on the opposite side of the elongated metal plate of the holder, and the surface opposite to the thermistor fixing surface of the elongated metal plate is smoothed and heat-sensitive. A temperature sensor is disclosed in which the thermal response and durability are improved by forming the portion so as not to damage the temperature-measured body.

また、特許文献8においては、支持台上面にクッション材片を取り付け、熱伝導体薄膜を介してサーミスタ素子を固定したセンサ部に対し、2枚の耐熱性シートのうちの短い方を内側に重ねて接着した端部を支持台下面に固定して、クッション材片とサーミスタ素子を覆って巻き付け、巻き終わり端部を支持台下面に固定して、耐熱性シートの巻き始めの二つのミシン目が、支持台下面の一方の隅角部に一致し、巻き終わりのミシン目が、支持台下面の他方の隅角部に一致し、内側の耐熱性シートが、サーミスタ素子及び熱伝導体を覆い、巻き終わりが、ミシン目に達しない保護フィルム部を設け、その巻回方向が、回転体の回転軸と垂直に回転体に対して保持されているように温度センサを構成することによって、サーミスタ素子を用いた表面接触形温度センサにおいて、熱応答性を向上させた、温度センサが開示されている。   Moreover, in patent document 8, the shorter one of two heat resistant sheets is piled up inside the sensor part which attached the cushion material piece to the upper surface of the support stand, and fixed the thermistor element through the heat conductive thin film. Fix the end part that is bonded to the lower surface of the support base, cover the cushion material piece and the thermistor element, wrap it, fix the end of the winding to the lower surface of the support base, and the two perforations at the beginning of the heat-resistant sheet The perforation at the end of winding coincides with the other corner of the lower surface of the support base, and the inner heat-resistant sheet covers the thermistor element and the heat conductor, A thermistor element is provided by providing a temperature sensor so that the winding end is provided with a protective film portion that does not reach the perforation, and the winding direction is held with respect to the rotating body perpendicular to the rotating shaft of the rotating body. Used In the surface-contact type temperature sensor, with improved thermal response, the temperature sensor is disclosed.

また、特許文献9においては、外部引出線を接続する一対の端子部から延在している一対の細長金属板部の端子部側に保持体が形成され、一対の細長金属板部の先端部に、それらの板厚を薄くした凹部が形成され、感熱素子の平面状の感熱部が被検知体側に向くように、凹部に架け渡して、感熱素子のリード部を一対の細長金属板部に電気的に接続し、感熱素子の感熱部分が絶縁シートで被覆されている温度センサであって、温度検知が安定し、また熱応答性に優れ、さらに感熱素子取付部の機械的強度に優れた耐久性のある温度センサを提供する、温度センサが開示されている。   Moreover, in patent document 9, a holding body is formed in the terminal part side of a pair of elongate metal plate part extended from a pair of terminal part which connects an external leader line, and the front-end | tip part of a pair of elongate metal plate part In addition, a recess having a thin plate thickness is formed, and the planar heat-sensitive part of the heat-sensitive element is stretched over the recess so that it faces the body to be detected, and the lead part of the heat-sensitive element is formed into a pair of elongated metal plate parts. It is a temperature sensor that is electrically connected and the thermal element of the thermal element is covered with an insulating sheet, stable temperature detection, excellent thermal response, and excellent mechanical strength of the thermal element mounting part A temperature sensor is disclosed that provides a durable temperature sensor.

また、特許文献10においては、炊事具の底に弾力的に当接する集熱金属部材の内面側に固定金具を溶着する。固定金具は集熱金属部材の内面に当接される当接板部と、当接板部より一体的でありU状に膨出する収納部と、収納部よりスリットを置いてU状に膨出する潰すことが可能なリード線固定部とから形成する。収納部には収納部内に熱応答性を調節する充填材を充填したのち、リード線の先端に固定したサーミスタを差し込む。リード線固定部は潰してリード線を固定することによって、鍋等の炊事具の温度測定用のサーミスタの取付耐久性を向上した、炊事具用サーミスタ取付装置が開示されている。   Moreover, in patent document 10, a fixing metal fitting is welded to the inner surface side of the heat collection metal member which contact | abuts elastically with the bottom of a cooking utensil. The fixing bracket is in contact with the inner surface of the heat collecting metal member, a storage part that is integral with the contact plate part and bulges out in a U shape, and swells in a U shape with a slit from the storage part. It forms from the lead wire fixing | fixed part which can be crushed. The storage portion is filled with a filler for adjusting the thermal response in the storage portion, and then a thermistor fixed to the tip of the lead wire is inserted. A thermistor mounting device for cooking appliances is disclosed in which the lead wire fixing portion is crushed and the lead wires are fixed to improve the mounting durability of a thermistor for measuring the temperature of a cooking appliance such as a pan.

また、特許文献11においては、パイプの下端にワッシャーを、パイプの上端に鍔をそれぞれ固定し、鍔の外周に円筒を上下動自在に設けたものにおいて、円筒は金属薄板で形成し、下部は細く絞られて小径筒とし、上端は全体に亙って外側に水平に折り曲げて折曲部を形成し、折曲部に帽体を被せ、帽体の外周の周縁部を折曲部に対して隙間なく折り曲げて固定して炊事具の温度検出具を構成することによって、取付容易、受熱感度良好なサーミスタを得るようにした、炊事具の温度検出具が開示されている。   Further, in Patent Document 11, a washer is fixed to the lower end of the pipe, a ridge is fixed to the upper end of the pipe, and a cylinder is provided on the outer periphery of the ridge so as to be movable up and down. It is narrowed down into a small-diameter cylinder, and the upper end is folded horizontally outward to form a bent part, and the bent part is covered with a cap body, and the outer peripheral edge of the cap body with respect to the bent part In addition, there is disclosed a temperature detection tool for cooking utensils that can be bent and fixed without gaps to constitute a temperature detection tool for cooking utensils so as to obtain a thermistor that is easy to mount and has good heat receiving sensitivity.

特開昭49−004149号公報JP-A-49-004149 特開昭57−187630号公報JP-A-57-187630 特開平06−061012号公報Japanese Patent Laid-Open No. 06-061012 特開2003−247897号公報JP 2003-247897 A 実登3035834号公報(実願平08−010034号公報)No. 3035834 (No. 08-010034) 実開平05−094735号公報Japanese Utility Model Publication No. 05-094735 特開2000−019026号公報JP 2000-019026 A 特開2002−156292号公報JP 2002-156292 A 特開2000−074752号公報JP 2000-074752 A 特開平05−123248号公報Japanese Patent Laid-Open No. 05-123248 特開2002−243558号公報JP 2002-243558 A

サーミスタ素子を製造する際は、その形状が共通化されていて大量生産が可能である。しかしながら、追加加工を施して温度センサを製造する場合には、その形状が多種類であるため、加工に手間と時間を必要とするのが普通である。
例えば、ガラス熔封形のサーミスタ素子を用いた温度センサの場合は、サーミスタ素子は、ガラスで熔封することによって、サーミスタチップとリード線との固着強度を高くするとともに、酸化物であるサーミスタチップを外界から遮断して、外気による酸化・還元反応から保護するようにしている。
When the thermistor element is manufactured, its shape is made common and mass production is possible. However, when a temperature sensor is manufactured by performing additional processing, since the shape is various, it usually requires labor and time for processing.
For example, in the case of a temperature sensor using a glass-sealed thermistor element, the thermistor element is sealed with glass to increase the fixing strength between the thermistor chip and the lead wire, and thermistor chip that is an oxide. Is shielded from the outside world to protect it from oxidation / reduction reactions caused by outside air.

この場合、ガラス熔封の工程で、溶融したガラスの表面張力によって、サーミスタ素子の外形は必ず丸みを帯びるようになる。そこで、追加加工する際に、丸みのために厄介な作業が必要になる。
この作業の困難性を克服するために、前述の各特許文献に記載されたような工夫が必要になる。特に、平面上で温度検知を行う温度センサの場合、このような問題が顕著になる。
In this case, in the glass sealing process, the outer shape of the thermistor element is always rounded due to the surface tension of the molten glass. Therefore, troublesome work is required for rounding when performing additional processing.
In order to overcome the difficulty of this work, a device as described in each of the aforementioned patent documents is required. In particular, in the case of a temperature sensor that detects temperature on a flat surface, such a problem becomes significant.

すなわち、金属や樹脂,ゴム等からなる平面で受けた熱を、丸い形状のサーミスタ素子に伝熱しようとする場合は、平面状の樹脂やゴム等と丸いサーミスタ素子の表面との隙間を埋めるための処理が必要になると同時に、熱容量の増加によって熱応答性が低下する。
さらに、隙間を埋めるための材料の量の管理が難しいため、これに基づく熱応答性のばらつきが発生して、温度センサの性能に均一性が失われる等、特性面での悪影響が生じることになる。
That is, when transferring heat received on a flat surface made of metal, resin, rubber, etc. to a round thermistor element, fill the gap between the flat resin, rubber, etc. and the surface of the round thermistor element. At the same time, the heat responsiveness decreases due to the increase in heat capacity.
Furthermore, since it is difficult to manage the amount of material for filling the gap, there is a variation in the thermal response based on this, and there is an adverse effect on the characteristics such as loss of uniformity in the performance of the temperature sensor. Become.

また、チップサーミスタを使用する場合は、チップサーミスタはもともとプリント基板実装を目的としたものであるため、サーミスタ素子からリード線が引き出されているわけではないので、追加加工によってサーミスタからリード線を引き出す工程が必要となり、手間とコストが増大する。   In addition, when using a chip thermistor, the chip thermistor is originally intended for mounting on a printed circuit board, so the lead wire is not drawn from the thermistor element, so the lead wire is drawn from the thermistor by additional processing. A process is required, and labor and cost increase.

この発明はこのような事情に鑑みてなされたものであって、従来技術による温度センサの問題点を解決して、温度センサにおける加工性の向上を図ることを目的としている。   The present invention has been made in view of such circumstances, and an object of the present invention is to solve the problems of the conventional temperature sensor and to improve the workability of the temperature sensor.

上記課題を解決するため、この発明は計測用温度センサに係り、サーミスタ素体とリード線とをガラス材で熔封したサーミスタと、前記ガラス材より融点が高い薄板状ガラスとを融着接合してなり、前記薄板状ガラスの面積が、前記サーミスタを熔封するガラス材と前記薄板状ガラスとの融着面積と等しいか、又はそれ以上に大きく、かつ前記薄板状ガラスの、前記ガラス材との融着面と反対側の面が平面を持つことを特徴としている。   In order to solve the above problems, the present invention relates to a temperature sensor for measurement, in which a thermistor in which a thermistor body and a lead wire are sealed with a glass material and a sheet glass having a melting point higher than that of the glass material are fusion-bonded. The area of the sheet glass is equal to or larger than the fusion area of the sheet glass and the glass material that seals the thermistor, and the sheet material of the sheet glass, The surface opposite to the fused surface is flat.

また、この発明は計測用温度センサに係り、サーミスタ素体とリード線とをガラス材で熔封したサーミスタと、前記ガラス材より融点が高い薄板状セラミックとを融着接合してなり、前記薄板状セラミックの面積が、前記サーミスタを熔封するガラス材と前記薄板状セラミックとの融着面積と等しいか、又はそれ以上に大きく、かつ前記薄板状セラミックの、前記ガラス材との融着面と反対側の面が平面を持つことを特徴としている。   The present invention also relates to a temperature sensor for measurement, wherein a thermistor in which a thermistor body and a lead wire are sealed with a glass material and a thin plate-like ceramic having a melting point higher than that of the glass material are fused and joined. The area of the ceramic sheet is equal to or larger than the fusion area of the glass material for sealing the thermistor and the thin plate ceramic, and the fusion surface of the thin sheet ceramic to the glass material; The opposite surface has a flat surface.

この発明によれば、サーミスタ素子の形状に基づく問題点を解決して、温度センサの製作時における加工性の向上を図ることができる。   According to the present invention, it is possible to solve the problems based on the shape of the thermistor element and to improve the workability at the time of manufacturing the temperature sensor.

チップ形ガラス封止サーミスタ素子の熔封工程を示す図である。It is a figure which shows the sealing process of a chip | tip glass sealing thermistor element. チップ形ガラス封止サーミスタ素子を用いた計測用温度センサの組み立て工程を示す図である。It is a figure which shows the assembly process of the temperature sensor for a measurement using a chip | tip glass sealing thermistor element. ダイオード形ガラス封止サーミスタ素子の熔封工程を示す図である。It is a figure which shows the sealing process of a diode type glass sealing thermistor element. ダイオード形ガラス封止サーミスタ素子を用いた計測用温度センサの組み立て工程を示す図である。It is a figure which shows the assembly process of the temperature sensor for a measurement using a diode type glass sealing thermistor element. 従来例(特許文献7)に記載された温度センサの詳細な構造を示す図である。It is a figure which shows the detailed structure of the temperature sensor described in the prior art example (patent document 7). 従来例のサーミスタ素子を本発明のサーミスタ素子に置き換えた温度センサの構成を示す図である。It is a figure which shows the structure of the temperature sensor which replaced the thermistor element of the prior art example with the thermistor element of this invention. 図5に示す温度センサと図6に示す温度センサの熱応答性を比較して示す図である。It is a figure which compares and shows the thermal responsiveness of the temperature sensor shown in FIG. 5, and the temperature sensor shown in FIG.

図1,図2は、本発明の第1の実施形態を示したものであって、チップ形サーミスタを用いた代表的なガラス封止サーミスタ素子の場合を例示している。以下、この場合の計測用温度センサの製作方法について詳細に説明する。   1 and 2 show a first embodiment of the present invention, and exemplify a case of a typical glass-sealed thermistor element using a chip-type thermistor. Hereinafter, a manufacturing method of the temperature sensor for measurement in this case will be described in detail.

最初、図1(a) に示すように、両面に電極を有するサーミスタチップ1にサーミスタリード線2を耐熱性接着剤3で仮接着し、これらをガラス管4の内部を貫通するように配置した状態でガラス管4を加熱熔解して、図1(b) に示すような形態の熔封ガラス5を形成する。   First, as shown in FIG. 1 (a), a thermistor lead wire 2 is temporarily bonded to a thermistor chip 1 having electrodes on both sides with a heat-resistant adhesive 3, and these are disposed so as to penetrate the inside of the glass tube 4. In the state, the glass tube 4 is heated and melted to form a sealed glass 5 having a form as shown in FIG.

次に、図2(a) に示すように、熔封ガラス5を形成したガラス封止サーミスタ素子を薄板状ガラス6上に載置する。
薄板状ガラス6は融点が750℃程度であって、サーミスタチップ1を熔封している熔封ガラス5より融点が100℃程度高い。薄板状ガラス6は平板状であって、広さは1mm×1mm、厚みは0.1mm程度である。また、サーミスタチップ1の直径は0.1mm程度である。
Next, as shown in FIG. 2A, the glass-sealed thermistor element on which the fused glass 5 is formed is placed on the thin plate glass 6.
The thin glass 6 has a melting point of about 750 ° C. and a melting point of about 100 ° C. higher than that of the sealed glass 5 in which the thermistor chip 1 is sealed. The thin glass 6 is flat and has a width of 1 mm × 1 mm and a thickness of about 0.1 mm. The thermistor chip 1 has a diameter of about 0.1 mm.

図2(a) に示す状態で、高温炉(不図示)に装入して、ガラス管4を溶融する温度(700℃程度)で加熱すると、薄板状ガラス6は溶けずに板状を保ち、熔封ガラス5のみが溶融して流動し、図2(b) に示すように、薄板状ガラス6を濡らす形状の流動ガラス体7となって、薄板状ガラス6に付着した状態で高温炉から出てくる。   In the state shown in FIG. 2 (a), when the glass tube 4 is charged at a temperature (about 700 ° C.) and charged in a high temperature furnace (not shown), the glass sheet 6 is not melted and remains in a plate shape. Only the fused glass 5 melts and flows, and as shown in FIG. 2 (b), a high-temperature furnace is formed in a state where the glass sheet 7 has a shape that wets the glass sheet 6 and adheres to the glass sheet 6. Come out from.

このように、サーミスタチップ1はガラス封止された状態で高温炉に装入されるので、酸化性雰囲気から熔封ガラス5によって保護されたまま薄板状ガラス6に溶着されて、電気的絶縁が維持されたまま強度が保持された、片面に平面を持ったリード線つき温度センサとなる。
従ってこの製造方法によれば、計測用温度センサの形状や大きさ(体積)が定量化され、薄板状ガラス6の分だけ体積は増えるが、総体積が一定の計測用温度センサを量産することが可能になる。
Thus, since the thermistor chip 1 is inserted into the high temperature furnace in a glass-sealed state, the thermistor chip 1 is welded to the thin glass 6 while being protected by the sealed glass 5 from the oxidizing atmosphere, so that electrical insulation is achieved. A temperature sensor with a lead wire having a flat surface on one side and maintaining the strength while being maintained is obtained.
Therefore, according to this manufacturing method, the shape and size (volume) of the measurement temperature sensor are quantified, and the volume is increased by the amount of the thin glass sheet 6 but the measurement temperature sensor having a constant total volume is mass-produced. Is possible.

なお、本発明の温度センサは、サーミスタリード線2の引き出し方向は、図2の例に限定されるものではなく、薄板状ガラス6に対して上方に垂直でもよく、あるいは薄板状ガラス6に対して両側に引き出してもよい。
薄板状ガラス6の大きさは、無制限に広くしたり狭くしたりすることは適切でなく、温度検出対象に応じて、適当な大きさに選ぶことが必要である。
In the temperature sensor of the present invention, the direction in which the thermistor lead wire 2 is pulled out is not limited to the example of FIG. 2, and may be perpendicular to the thin glass plate 6 or with respect to the thin glass plate 6. Can be pulled out on both sides.
The size of the thin glass 6 is not appropriate to be widened or narrowed indefinitely, and it is necessary to select an appropriate size according to the temperature detection target.

図3,図4は、本発明の第2の実施形態を示したものであってダイオード形サーミスタを用いる場合を例示している。以下、この場合の計測用温度センサの製作方法について説明する。   3 and 4 show a second embodiment of the present invention and exemplify a case where a diode type thermistor is used. Hereinafter, a manufacturing method of the temperature sensor for measurement in this case will be described.

最初、図3(a) に示すように、ガラス円筒11に対して、サーミスタチップ12を中央にして、両端からスラグリード13を装入する組み立て作業を行う。なお、スラグリード13は、ガラス封止ダイオードの場合と同じ構造のリード線であって、図示のように、ガラス円筒11内に入る太いジュメット線13Aと外部に引き出すリード線部分とを突き当てて溶接して形成したものである。
その後、図3(b) に示すように、組み立てられた状態で高温炉(不図示)に装入し、加熱してガラス円筒11を溶融することによって熔封ガラス14を形成する。
First, as shown in FIG. 3 (a), an assembling operation is performed on the glass cylinder 11 with the thermistor chip 12 at the center and the slug lead 13 being inserted from both ends. Note that the slag lead 13 is a lead wire having the same structure as that of the glass-encapsulated diode, and as shown in the drawing, a thick jumet wire 13A entering the glass cylinder 11 and a lead wire portion drawn to the outside are brought into contact with each other. It is formed by welding.
Thereafter, as shown in FIG. 3 (b), the glass glass 11 is melted by being charged into a high temperature furnace (not shown) in an assembled state, thereby forming a sealed glass.

次に、図4(a) に示すように、熔封ガラス14を形成したガラス封止サーミスタ素子を薄板状ガラス15上に載置する。
薄板状ガラス15は融点が750℃程度であって、サーミスタチップ12を熔封している熔封ガラス14より融点が100℃程度高い。
Next, as shown in FIG. 4A, the glass sealed thermistor element on which the fused glass 14 is formed is placed on the thin glass plate 15.
The thin glass plate 15 has a melting point of about 750 ° C. and a melting point of about 100 ° C. higher than that of the sealed glass 14 in which the thermistor chip 12 is sealed.

次に図4(a) に示す状態で、高温炉(不図示)に装入して、ガラス円筒11を溶融する温度(700℃程度)で加熱すると、薄板状ガラス15は溶けずに板状を保ち、熔封ガラス14のみが溶融して流動し、図4(b) に示すように、薄板状ガラス15を濡らす形状の流動ガラス体16となって、薄板状ガラス15に付着して高温炉から出てくる。   Next, in the state shown in FIG. 4 (a), when the glass cylinder 11 is charged at a temperature (about 700 ° C.) and charged into a high temperature furnace (not shown), the thin glass 15 is not melted and is plate-shaped. 4, only the fused glass 14 melts and flows, and as shown in FIG. 4 (b), it becomes a flowable glass body 16 that wets the thin glass 15, and adheres to the thin glass 15. Come out of the furnace.

このように、熔封ガラス14を形成してサーミスタチップ12とスラグリード13とを固着させるとともに、ガラス封止されたまま高温炉に装入されるので、酸化性雰囲気から熔封ガラス14によって保護された状態で薄板状ガラス15に溶着されて、電気的絶縁が維持されたまま強度が保持された、片面に平面を持ったリード線つき温度センサとなる。
従ってこの製造方法によれば、計測用温度センサの形状や大きさ(体積)が定量化され、薄板状ガラス15の分だけ体積は増えるが、総体積が一定の計測用温度センサを量産することが可能になる。
In this way, the sealed glass 14 is formed to fix the thermistor chip 12 and the slag lead 13 and is inserted into the high temperature furnace while being sealed with glass, so that it is protected from the oxidizing atmosphere by the sealed glass 14. In this state, it is welded to the thin glass plate 15 to provide a temperature sensor with a lead wire having a flat surface on one side and maintaining strength while maintaining electrical insulation.
Therefore, according to this manufacturing method, the shape and size (volume) of the temperature sensor for measurement are quantified, and the volume increases by the amount of the thin glass plate 15, but the temperature sensor for measurement having a constant total volume is mass-produced. Is possible.

なお、上記本発明の第1の実施形態および第2の実施形態において、薄板状ガラス15を薄板状セラミックに代えてもよい。   In the first embodiment and the second embodiment of the present invention, the thin glass 15 may be replaced with a thin ceramic.

以下、本発明の計測用温度センサの性能(効果)について、第1の実施形態の場合を例として、従来例と対比して説明する。
図5は、特許文献7記載の温度センサの構造を説明するものであって、コピー機やプリンタ等の画像形成装置に適用した場合を例示している。図中、(a) は画像形成装置の定着ローラ(不図示)に対する温度センサの取付態様を示す上面図、(b) は同じく側面図であって、21は温度センサを示し、画像形成装置に固定された支持体部22によって基部24を固定されたバネ部23の先端に配置されている。
(c) は温度センサ1の詳細な構造を示したものであって、Aの部分を拡大して示し、31はサーミスタ、32は接着剤、33はバネ部23を構成する板バネ、34はサーミスタ31のリード線の保護チューブである。
Hereinafter, the performance (effect) of the temperature sensor for measurement according to the present invention will be described by taking the case of the first embodiment as an example in comparison with the conventional example.
FIG. 5 illustrates the structure of the temperature sensor described in Patent Document 7, and illustrates the case where it is applied to an image forming apparatus such as a copier or a printer. In the figure, (a) is a top view showing a manner of attaching a temperature sensor to a fixing roller (not shown) of the image forming apparatus, (b) is a side view of the same, and 21 shows a temperature sensor. The base portion 24 is fixed to the tip of the spring portion 23 fixed by the fixed support portion 22.
(c) shows the detailed structure of the temperature sensor 1 and shows an enlarged portion A, 31 is a thermistor, 32 is an adhesive, 33 is a leaf spring constituting the spring portion 23, and 34 is It is a protective tube for the lead wire of the thermistor 31.

図6は、図5に示された従来例のサーミスタ素子を本発明のサーミスタ素子に置き換えた温度センサの構成を示したものであって、(a) に示す上面図と、(b) に示す側面図はほぼ同様であるが、(c) に示す温度センサの詳細な構造が異なっている。
図6(c) において、41はサーミスタ、42は接着剤、43は板バネ、44は保護チューブ、45は薄板状ガラスである。
FIG. 6 shows a configuration of a temperature sensor in which the thermistor element of the conventional example shown in FIG. 5 is replaced with the thermistor element of the present invention, and is a top view shown in (a) and shown in (b). The side view is almost the same, but the detailed structure of the temperature sensor shown in (c) is different.
In FIG. 6C, 41 is a thermistor, 42 is an adhesive, 43 is a leaf spring, 44 is a protective tube, and 45 is a thin glass sheet.

このように、図6の場合は、サーミスタ41が、板バネ43上に接着された薄板状ガラス45上に保持されている点において、図5に示された従来技術の場合とは異なっている。   Thus, the case of FIG. 6 is different from that of the prior art shown in FIG. 5 in that the thermistor 41 is held on the thin glass plate 45 bonded on the leaf spring 43. .

図7は、従来技術の場合と比較して、本発明の場合の優位性を説明するものであって、本発明の場合、同一の検知温度比率(63.2%)に達するまでの応答時間τが大幅に短くなったことが示されている。   FIG. 7 explains the superiority in the case of the present invention as compared with the case of the prior art. In the case of the present invention, the response time until the same detected temperature ratio (63.2%) is reached. It is shown that τ has become significantly shorter.

この発明の計測用温度センサは、複写機やプリンタの定着装置に使用される加熱ローラ等の、回転体の表面温度を計測するための温度センサとして用いて好適なものである。   The temperature sensor for measurement according to the present invention is suitable for use as a temperature sensor for measuring the surface temperature of a rotating body such as a heating roller used in a fixing device of a copying machine or a printer.

1 サーミスタチップ
2 サーミスタリード線
3 耐熱性接着剤
4 ガラス管
5 熔封ガラス
6 薄板状ガラス
7 流動ガラス体
11 ガラス円筒
12 サーミスタチップ
13 スラグリード
14 熔封ガラス
15 薄板状ガラス
16 流動ガラス体
DESCRIPTION OF SYMBOLS 1 Thermistor chip 2 Thermistor lead wire 3 Heat resistant adhesive 4 Glass tube 5 Sealed glass 6 Thin plate glass 7 Fluid glass body 11 Glass cylinder 12 Thermistor chip 13 Slag lead 14 Sealed glass 15 Sheet glass 16 Fluid glass body

Claims (2)

サーミスタ素体とリード線とをガラス材で熔封したサーミスタと、前記ガラス材より融点が高い薄板状ガラスとを融着接合してなり、前記薄板状ガラスの面積が、前記サーミスタを熔封するガラス材と前記薄板状ガラスとの融着面積と等しいか、又はそれ以上に大きく、かつ前記薄板状ガラスの、前記ガラス材との融着面と反対側の面が平面を持つことを特徴とする計測用温度センサ。   A thermistor in which a thermistor body and a lead wire are sealed with a glass material and a thin glass having a melting point higher than that of the glass material are fusion-bonded, and the area of the thin glass seals the thermistor. It is equal to or larger than the fusion area between the glass material and the thin glass, and the surface of the thin glass opposite to the fusion surface with the glass material has a flat surface. Temperature sensor for measurement. サーミスタ素体とリード線とをガラス材で熔封したサーミスタと、前記ガラス材より融点が高い薄板状セラミックとを融着接合してなり、前記薄板状セラミックの面積が、前記サーミスタを熔封するガラス材と前記薄板状セラミックとの融着面積と等しいか、又はそれ以上に大きく、かつ前記薄板状セラミックの、前記ガラス材との融着面と反対側の面が平面を持つことを特徴とする計測用温度センサ。   A thermistor in which the thermistor body and the lead wire are sealed with a glass material and a thin plate-like ceramic having a melting point higher than that of the glass material are fusion-bonded, and the area of the thin plate-like ceramic seals the thermistor. It is equal to or larger than the fusion area between the glass material and the thin plate ceramic, and the surface of the thin plate ceramic opposite to the fusion surface with the glass material has a flat surface. Temperature sensor for measurement.
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103792019A (en) * 2014-01-28 2014-05-14 南京时恒电子科技有限公司 Method for manufacturing temperature sensor
CN104006897A (en) * 2014-06-12 2014-08-27 肇庆爱晟电子科技有限公司 Fast-response thermosensitive temperature sensor and manufacturing method thereof
EP2899518A1 (en) 2014-01-27 2015-07-29 Technische Universität Chemnitz Temperature measurement device
CN106644141A (en) * 2016-10-27 2017-05-10 孝感华工高理电子有限公司 Button-type temperature-sensitive probe
CN106872061A (en) * 2016-12-27 2017-06-20 中国科学院长春光学精密机械与物理研究所 A kind of quick response surface mount method of glass packaged thermosensitive resistor device
WO2017114085A1 (en) * 2015-12-31 2017-07-06 段兆祥 High-temperature-resistance quick-response thermistor, and temperature sensor made by using same

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Publication number Priority date Publication date Assignee Title
JPH01130503A (en) * 1987-11-17 1989-05-23 Matsushita Electric Ind Co Ltd Thin-film thermistor
JPH06137961A (en) * 1992-10-22 1994-05-20 Matsushita Electric Ind Co Ltd Touch type thermister

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH01130503A (en) * 1987-11-17 1989-05-23 Matsushita Electric Ind Co Ltd Thin-film thermistor
JPH06137961A (en) * 1992-10-22 1994-05-20 Matsushita Electric Ind Co Ltd Touch type thermister

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2899518A1 (en) 2014-01-27 2015-07-29 Technische Universität Chemnitz Temperature measurement device
WO2015110986A1 (en) 2014-01-27 2015-07-30 Technische Universität Chemnitz Temperature measuring device
CN103792019A (en) * 2014-01-28 2014-05-14 南京时恒电子科技有限公司 Method for manufacturing temperature sensor
CN104006897A (en) * 2014-06-12 2014-08-27 肇庆爱晟电子科技有限公司 Fast-response thermosensitive temperature sensor and manufacturing method thereof
WO2017114085A1 (en) * 2015-12-31 2017-07-06 段兆祥 High-temperature-resistance quick-response thermistor, and temperature sensor made by using same
CN106644141A (en) * 2016-10-27 2017-05-10 孝感华工高理电子有限公司 Button-type temperature-sensitive probe
CN106872061A (en) * 2016-12-27 2017-06-20 中国科学院长春光学精密机械与物理研究所 A kind of quick response surface mount method of glass packaged thermosensitive resistor device
CN106872061B (en) * 2016-12-27 2019-04-23 中国科学院长春光学精密机械与物理研究所 A kind of quick response surface mount method of glass packaged thermosensitive resistor device

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