JP2010228087A - Cutting tool formed of surface-coated cubic boron nitride base ultra-high pressure sintered material - Google Patents
Cutting tool formed of surface-coated cubic boron nitride base ultra-high pressure sintered material Download PDFInfo
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この発明は、合金工具鋼や軸受け鋼の焼入れ材などの高硬度材からなる被削材を高速切削加工した場合でも、硬質被覆層が工具基体に対して強固な付着強度を有することから、すぐれた耐欠損性を発揮し、被削材の仕上げ面精度を維持したまま、長期にわたって安定した切削性能を発揮することができる、立方晶窒化ほう素基超高圧焼結材料で構成された切削工具基体の表面に硬質被覆層を形成した表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具（以下、被覆ｃＢＮ基焼結工具という）に関するものである。 This invention is excellent because the hard coating layer has a strong adhesion strength to the tool base even when a work material made of a hard material such as a hardened material of alloy tool steel or bearing steel is cut at high speed. Cutting tool composed of cubic boron nitride-based ultra-high pressure sintered material that exhibits stable fracture performance for a long period of time while maintaining the finished surface accuracy of the work material. The present invention relates to a cutting tool made of a surface-coated cubic boron nitride-based ultrahigh pressure sintered material (hereinafter referred to as a coated cBN-based sintered tool) having a hard coating layer formed on the surface of a substrate.
一般に、被覆ｃＢＮ基焼結工具には、各種の鋼や鋳鉄などの被削材の旋削加工にバイトの先端部に着脱自在に取り付けて用いられるインサートや、前記インサートを着脱自在に取り付けて、面削加工や溝加工、さらに肩加工などに用いられるソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミルなどが知られている。 In general, a coated cBN-based sintered tool has an insert that can be attached to the tip of a cutting tool for turning of a work material such as various types of steel and cast iron, An insert-type end mill that performs cutting processing in the same manner as a solid type end mill used for machining, grooving, and shoulder processing is known.
また、被覆ｃＢＮ基焼結工具としては、各種の立方晶窒化ほう素基超高圧焼結材料で構成された工具本体（以下、ｃＢＮ工具基体という）の表面に、チタン窒化物層、チタンとアルミニウムの複合窒化物層などの硬質被覆層を蒸着形成してなる被覆ｃＢＮ基焼結工具が知られており、これらが例えば各種の鋼や鋳鉄などの切削加工に用いられていることも知られている。
さらに、ｃＢＮ工具基体と硬質被覆層との密着強度を向上させるために、ｃＢＮ工具基体表面にイオン注入を行って拡散層を形成し、その拡散層を非晶質化することも知られている。
The coated cBN-based sintered tool includes a titanium nitride layer, titanium and aluminum on the surface of a tool body (hereinafter referred to as a cBN tool base) made of various cubic boron nitride-based ultrahigh pressure sintered materials. Coated cBN-based sintered tools formed by vapor-depositing a hard coating layer such as a composite nitride layer are known, and it is also known that these are used for cutting various steels and cast irons, for example. Yes.
Further, in order to improve the adhesion strength between the cBN tool base and the hard coating layer, it is also known to form a diffusion layer by ion implantation on the surface of the cBN tool base and to make the diffusion layer amorphous. .
また、上記の被覆ｃＢＮ基焼結工具が、例えば図３に概略説明図で示される物理蒸着装置の１種であるアークイオンプレーティング装置に上記のｃＢＮ工具基体を装入し、ヒータで装置内を、例えば５００℃に加熱した状態で、金属ＴｉあるいはＴｉ−Ａｌ合金からなるカソード電極（蒸発源）と、アノード電極との間に、例えば９０Ａの電流を印加してアーク放電を発生させ、同時に装置内に、例えば、反応ガスとして窒素ガス、メタンガスを導入して、例えば２Ｐａの反応雰囲気とし、一方前記工具基体には、たとえば−１００Ｖのバイアス電圧を印加した条件で、前記工具基体の表面に、チタン窒化物層、チタンとアルミニウムの複合窒化物層など、所望の層を蒸着形成することにより製造されることも知られている。 Further, the above-mentioned coated cBN-based sintered tool is loaded with the above-mentioned cBN tool base in an arc ion plating apparatus which is one type of physical vapor deposition apparatus schematically shown in FIG. Is heated to 500 ° C., for example, a current of 90 A is applied between the cathode electrode (evaporation source) made of metal Ti or Ti—Al alloy and the anode electrode to generate arc discharge. In the apparatus, for example, nitrogen gas and methane gas are introduced as reaction gases to form a reaction atmosphere of, for example, 2 Pa. On the other hand, a bias voltage of, for example, −100 V is applied to the tool substrate on the surface of the tool substrate. It is also known that a desired layer such as a titanium nitride layer or a composite nitride layer of titanium and aluminum is formed by vapor deposition.
近年の切削加工装置のＦＡ化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は、通常の切削条件に加えて、より高速条件下での切削加工が要求される傾向にあるが、上記の従来被覆工具においては、各種の鋼や鋳鉄を通常条件下で切削加工した場合に特段の問題は生じないが、これを、合金工具鋼や軸受け鋼の焼入れ材などの高硬度材からなる被削材の高速切削に用いた場合には、ｃＢＮ基体と硬質被覆層との密着強度が十分でないために、切削時の高負荷により、切刃の刃先の境界部分にチッピング等の異常損傷（以下、境界異常損傷という）による欠損を生じたり、また、被削材の仕上げ面精度が悪化したりすることによって、比較的短時間で使用寿命に至るのが現状である。 In recent years, FA has been remarkable for cutting devices, but on the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting, and accordingly, cutting is performed at higher speed conditions in addition to normal cutting conditions. However, in the above-mentioned conventional coated tools, there is no particular problem when various types of steel and cast iron are machined under normal conditions. When used for high-speed cutting of work materials made of hard materials such as hardened materials of steel and bearing steel, the adhesion strength between the cBN substrate and the hard coating layer is not sufficient. Used in a relatively short period of time due to chipping and other abnormal damage (hereinafter referred to as abnormal boundary damage) at the boundary of the cutting edge of the cutting edge, and deterioration of the finished surface accuracy of the work material To reach the end of its life Is Jo.
そこで、本発明者等は、上述のような観点から、合金工具鋼や軸受け鋼の焼入れ材などの高硬度材からなる被削材の高速切削加工で、硬質被覆層がすぐれた耐欠損性を発揮し、また、長期の使用に亘って、すぐれた仕上げ面精度を維持したまま安定した切削特性を発揮する被覆ｃＢＮ基焼結工具を開発すべく研究を行った結果、ｃＢＮ工具基体と硬質被覆層との間に、非晶質密着層を介在形成すると、ｃＢＮ工具基体と硬質被覆層との密着強度が向上するために、耐欠損性が改善され、また、被削材の仕上げ面精度も向上することを知見したのである。 In view of the above, the inventors of the present invention have excellent fracture resistance with a hard coating layer in high-speed cutting of a work material made of a hard material such as a hardened material of alloy tool steel or bearing steel. As a result of research to develop a coated cBN-based sintered tool that exhibits stable cutting characteristics while maintaining excellent finished surface accuracy over a long period of use, cBN tool base and hard coating When an amorphous adhesion layer is interposed between the layers, the adhesion strength between the cBN tool base and the hard coating layer is improved, so that the fracture resistance is improved, and the finished surface accuracy of the work material is also improved. They found that it improved.
具体的な非晶質密着層およびその形成法としては、
（ａ）ｃＢＮ工具基体表面に硬質被覆層を形成する前に、ｃＢＮ工具基体表面にＡｒボンバード処理を行うことにより、ｃＢＮ工具基体表面に存在するバインダー成分のみを非晶質層に改質すると、この層が非晶質密着層として作用し、ｃＢＮ工具基体と硬質被覆層との密着接合強度を高めることができる。
（ｂ）ｃＢＮ工具基体表面に硬質被覆層を形成する前に、硬質の非晶質ほう化チタン（ＴｉＢ２）層、非晶質窒化珪素（Ｓｉ３Ｎ４）層を形成すると、この非晶質層が、ｃＢＮ工具基体と硬質被覆層との密着接合強度を高める。
（ｃ）ｃＢＮ工具基体表面に硬質被覆層を形成する前に、結晶質のほう化チタン（ＴｉＢ２）層、窒化珪素（Ｓｉ３Ｎ４）層を被覆し、その後、このほう化チタン（ＴｉＢ２）層、窒化珪素（Ｓｉ３Ｎ４）層にボンバード処理を行って非晶質化すると、この非晶質層がｃＢＮ工具基体と硬質被覆層との密着接合強度を高める。
As a specific amorphous adhesion layer and its formation method,
(A) Before forming the hard coating layer on the surface of the cBN tool base, by performing Ar bombarding on the surface of the cBN tool base, only the binder component present on the surface of the cBN tool base is modified to an amorphous layer. This layer acts as an amorphous adhesion layer, and can increase the adhesion bonding strength between the cBN tool substrate and the hard coating layer.
(B) If a hard amorphous titanium boride (TiB 2 ) layer or an amorphous silicon nitride (Si 3 N 4 ) layer is formed before the hard coating layer is formed on the surface of the cBN tool base, this amorphous The quality layer enhances the tight bonding strength between the cBN tool base and the hard coating layer.
(C) Before forming a hard coating layer on the surface of the cBN tool base, a crystalline titanium boride (TiB 2 ) layer and a silicon nitride (Si 3 N 4 ) layer are coated, and then this titanium boride (TiB 2 ) When the layer and the silicon nitride (Si 3 N 4 ) layer are made amorphous by bombarding, the amorphous layer enhances the tight bonding strength between the cBN tool base and the hard coating layer.
上記（ａ）〜（ｃ）のような非晶質密着層を、ｃＢＮ工具基体と硬質被覆層との間に介在形成することによって、密着接合強度が向上し、さらに、硬質被覆層として、高温硬さ、靭性にすぐれたチタンとアルミニウムの複合窒化物（以下、（Ｔｉ，Ａｌ）Ｎで示す）層を形成してあるので、この発明の被覆ｃＢＮ基焼結工具は、大きな発熱を伴う合金工具鋼や軸受け鋼の焼入れ材などの高硬度材からなる被削材の高速切削加工において、すぐれた耐欠損性を示すとともに、高硬度被削材の仕上げ面精度の低下を招くこともなく、長期の使用に亘って安定した切削性能を発揮することを見出したのである。 By forming the amorphous adhesion layer as in the above (a) to (c) between the cBN tool base and the hard coating layer, the adhesion bonding strength is improved, and further, as the hard coating layer, Since the composite nitride (hereinafter, referred to as (Ti, Al) N) layer of titanium and aluminum having excellent hardness and toughness is formed, the coated cBN-based sintered tool of the present invention is an alloy with large heat generation. In high-speed cutting of work materials made of hard materials such as tool steel and hardened material of bearing steel, while exhibiting excellent fracture resistance, it does not cause deterioration of the finished surface accuracy of high-hardness work materials, It has been found that stable cutting performance is exhibited over a long period of use.
この発明は、上記知見に基づいてなされたものであって、
「（１） 立方晶窒化ほう素基超高圧焼結材料からなる工具基体の表面に、硬質被覆層を蒸着形成した表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具において、
上記立方晶窒化ほう素基超高圧焼結材料は、平均粒径０．５〜８μｍの立方晶窒化ほう素粉末を４０〜８０体積％含有し、残部はバインダーからなり、
また、上記硬質被覆層は、
組成式：（Ｔｉ１−ＸＡｌＸ）Ｎ
で表した場合、Ｘが０．１５〜０．６５（但し、原子比）を満足する０．５〜１０μｍの層厚を有するチタンとアルミニウムの複合窒化物層からなり、
さらに、上記工具基体と上記硬質被覆層の間には、非晶質密着層が形成されており、該非晶質密着層は、立方晶窒化ほう素基超高圧焼結材料の構成成分であるバインダーの非晶質層であることを特徴とする表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具。
（２） 上記非晶質密着層は、工具基体の表面に被覆された非晶質ほう化チタン層あるいは非晶質窒化珪素層である前記（１）記載の表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具。
（３） 上記非晶質密着層は、工具基体の表面に被覆したほう化チタン結晶質層あるいは窒化珪素結晶質層をボンバード処理によって非晶質化したものである前記（２）記載の表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具。」
に特徴を有するものである。
This invention has been made based on the above findings,
“(1) In a cutting tool made of a surface-coated cubic boron nitride-based ultrahigh-pressure sintered material having a hard coating layer deposited on the surface of a tool base made of a cubic boron nitride-based ultrahigh-pressure sintered material,
The cubic boron nitride-based ultra-high pressure sintered material contains 40 to 80% by volume of cubic boron nitride powder having an average particle size of 0.5 to 8 μm, and the balance is made of a binder.
The hard coating layer is
Composition formula: (Ti 1-X Al X ) N
X is composed of a composite nitride layer of titanium and aluminum having a layer thickness of 0.5 to 10 μm that satisfies 0.1 to 0.65 (however, atomic ratio),
Furthermore, an amorphous adhesion layer is formed between the tool base and the hard coating layer, and the amorphous adhesion layer is a binder that is a constituent of the cubic boron nitride-based ultrahigh pressure sintered material. A surface-coated cubic boron nitride-based ultra-high pressure sintered material cutting tool characterized by being an amorphous layer.
(2) The surface-coated cubic boron nitride-based superstructure described in (1) above, wherein the amorphous adhesion layer is an amorphous titanium boride layer or an amorphous silicon nitride layer coated on the surface of the tool base. Cutting tool made of high pressure sintered material.
(3) The surface coating according to (2) above, wherein the amorphous adhesion layer is a titanium boride crystalline layer or silicon nitride crystalline layer coated on the surface of the tool base and made amorphous by bombarding. Cutting tool made of cubic boron nitride based ultra high pressure sintered material. "
It has the characteristics.
つぎに、この発明の被覆ｃＢＮ基焼結工具について詳細に説明する。
ｃＢＮ工具基体：
ｃＢＮ工具基体は、立方晶窒化ほう素基超高圧焼結材料から構成されるが、立方晶窒化ほう素基超高圧焼結材料におけるｃＢＮ含有量が４０体積％より少なくなると、ｃＢＮ焼結材料の硬さが低下し、超高圧焼結材料製インサートを用いて高硬度鋼の高速切削加工を行うに際し、最小限必要とされる硬さを備えることができなくなり、耐摩耗性が低下し、一方、ｃＢＮ含有量が８０体積％より多くなると、非晶質密着層を介在形成したとしても、ｃＢＮ工具基体と硬質被覆層の密着強度を確保しにくくなり、その結果硬質被覆層の剥離が生じやすくなるため、この発明では、ｃＢＮ工具基体を構成する立方晶窒化ほう素基超高圧焼結材料におけるｃＢＮ含有量を４０〜８０体積％と定めた。
なお、ｃＢＮ粒子の平均粒径については、これが０．５μｍより小さくなると所望の耐摩耗性が得られず、一方、平均粒径が８μｍを超えると十分な付着強度が得られないため、ｃＢＮ粒子の平均粒径は０．５〜８μｍと定めた。
一方、立方晶窒化ほう素基超高圧焼結材料を構成するバインダーについては、既によく知られている成分、例えば、Ｔｉ、Ａｌ、Ｍｇ、Ｓｉの窒化物、ほう化物およびこれらの相互固溶体等、を用いればよく、特に制限されるものではない。
Next, the coated cBN-based sintered tool of the present invention will be described in detail.
cBN tool substrate:
The cBN tool base is composed of a cubic boron nitride-based ultra-high pressure sintered material. When the cBN content in the cubic boron nitride-based ultra-high pressure sintered material is less than 40% by volume, Hardness decreases, and when performing high-speed cutting of high-hardness steel using an insert made of ultra-high pressure sintered material, it becomes impossible to provide the minimum required hardness, and wear resistance decreases. When the cBN content exceeds 80% by volume, even if an amorphous adhesion layer is formed, it becomes difficult to ensure the adhesion strength between the cBN tool base and the hard coating layer, and as a result, the hard coating layer is easily peeled off. Therefore, in the present invention, the cBN content in the cubic boron nitride-based ultrahigh pressure sintered material constituting the cBN tool base is determined to be 40 to 80% by volume.
As for the average particle size of the cBN particles, if this is smaller than 0.5 μm, the desired wear resistance cannot be obtained. On the other hand, if the average particle size exceeds 8 μm, sufficient adhesion strength cannot be obtained. The average particle size was determined to be 0.5 to 8 μm.
On the other hand, for the binder constituting the cubic boron nitride-based ultra-high pressure sintered material, well-known components such as Ti, Al, Mg, Si nitrides, borides and mutual solid solutions thereof, There is no particular limitation.
非晶質密着層：
非晶質密着層およびその形成法を具体的に述べると、次の（ａ）〜（ｃ）のとおりである。
（ａ）ｃＢＮ工具基体表面のバインダー成分のみをボンバード処理で改質した非晶質密着層：
ｃＢＮ工具基体表面に硬質被覆層を形成する前に、例えば、
雰囲気ガス：Ａｒガス、
雰囲気圧力：１〜１０Ｐａ、
ｃＢＮ工具基体温度：３００〜５００℃、
バイアス電圧：−２００〜−３００Ｖ、
の条件で、ｃＢＮ工具基体表面にＡｒボンバード処理を行い、その後に、
雰囲気ガス：Ａｒガス、
雰囲気圧力：１〜１０Ｐａ、
ｃＢＮ工具基体温度：５００℃、
アーク電流値：１００〜２００Ａ、
バイアス電圧：−８００〜−１０００Ｖ、
の条件で、ｃＢＮ工具基体表面にＴｉボンバード処理を行い、さらにその後、
雰囲気ガス：Ａｒガス、
雰囲気圧力：１〜１０Ｐａ、
ｃＢＮ工具基体温度：３００〜５００℃、
バイアス電圧：−８００〜−１０００Ｖ、
の条件で、ｃＢＮ工具基体表面にＡｒボンバード処理を行うと、
ｃＢＮ粒子に変化はないが、ｃＢＮ工具基体表面に露出し、かつ、ｃＢＮ粒子間隙に存在するバインダー成分のみがボンバード処理によって非晶質化し、非晶質密着層に改質される。
そして、この上に硬質被覆層を蒸着形成した場合に、バインダー成分のみからなる非晶質層が、ｃＢＮ工具基体と硬質被覆層の密着接合強度を高める。
Amorphous adhesion layer:
The amorphous adhesion layer and the formation method thereof will be specifically described as follows (a) to (c).
(A) Amorphous adhesion layer in which only the binder component on the surface of the cBN tool base is modified by bombarding:
Before forming the hard coating layer on the cBN tool substrate surface, for example,
Atmospheric gas: Ar gas,
Atmospheric pressure: 1-10 Pa,
cBN tool substrate temperature: 300-500 ° C.
Bias voltage: -200 to -300V,
Under the conditions, Ar bombard treatment is performed on the cBN tool base surface,
Atmospheric gas: Ar gas,
Atmospheric pressure: 1-10 Pa,
cBN tool substrate temperature: 500 ° C.
Arc current value: 100-200A,
Bias voltage: -800 to -1000V,
Under the conditions, Ti bombarding is performed on the cBN tool base surface,
Atmospheric gas: Ar gas,
Atmospheric pressure: 1-10 Pa,
cBN tool substrate temperature: 300-500 ° C.
Bias voltage: -800 to -1000V,
When the Ar bombard process is performed on the cBN tool base surface under the conditions:
Although there is no change in the cBN particles, only the binder component that is exposed on the surface of the cBN tool base and is present in the gaps between the cBN particles is made amorphous by the bombarding process and is modified into an amorphous adhesion layer.
And when a hard coating layer is vapor-deposited and formed on this, the amorphous layer which consists only of a binder component raises the adhesive joint strength of a cBN tool base | substrate and a hard coating layer.
（ｂ）ｃＢＮ工具基体表面に直接形成した硬質非晶質膜からなる非晶質密着層：
ｃＢＮ工具基体表面に硬質被覆層を形成する前に、例えば、
雰囲気ガス：Ａｒガス、
雰囲気圧力：０．２〜０．６Ｐａ、
ｃＢＮ工具基体温度：３００〜５００℃、
スパッタ電力：１２００〜１５００Ｗ、
バイアス電圧：−１０００〜−１２００Ｖ、
の条件でスパッタリングを行い、ｃＢＮ工具基体表面に非晶質ほう化チタン（ＴｉＢ２）層、あるいは、非晶質窒化珪素（Ｓｉ３Ｎ４）層を蒸着形成すると、上記非晶質ほう化チタン（ＴｉＢ２）層、非晶質窒化珪素（Ｓｉ３Ｎ４）層は、ｃＢＮ工具基体と硬質被覆層との密着接合強度を高めるばかりか、ｃＢＮ工具基体と硬質被覆層との界面でのクラックの進展を抑制する効果がある。
(B) Amorphous adhesion layer comprising a hard amorphous film directly formed on the surface of the cBN tool substrate:
Before forming the hard coating layer on the cBN tool substrate surface, for example,
Atmospheric gas: Ar gas,
Atmospheric pressure: 0.2 to 0.6 Pa,
cBN tool substrate temperature: 300-500 ° C.
Sputtering power: 1200-1500W
Bias voltage: -1000 to -1200V
Sputtering is carried out under the following conditions, and an amorphous titanium boride (TiB 2 ) layer or an amorphous silicon nitride (Si 3 N 4 ) layer is deposited on the surface of the cBN tool base. The (TiB 2 ) layer and the amorphous silicon nitride (Si 3 N 4 ) layer not only increase the adhesive bond strength between the cBN tool base and the hard coating layer, but also cracks at the interface between the cBN tool base and the hard coating layer. Has the effect of suppressing the progress of
（ｃ）ｃＢＮ工具基体表面に形成した硬質結晶質膜をボンバード処理で改質した非晶質密着層：
ｃＢＮ工具基体表面に硬質被覆層を形成する前に、例えば、
雰囲気ガス：Ａｒガス、
雰囲気圧力：０．２〜０．６Ｐａ、
ｃＢＮ工具基体温度：３００〜５００℃、
スパッタ電力：８００〜１０００Ｗ、
バイアス電圧：−１００〜−２００Ｖ、
の条件でスパッタリングを行い、ｃＢＮ工具基体表面に結晶質のほう化チタン（ＴｉＢ２）層、窒化珪素（Ｓｉ３Ｎ４）層を被覆し、その後、上記ほう化チタン（ＴｉＢ２）層、窒化珪素（Ｓｉ３Ｎ４）層に、
雰囲気ガス：Ａｒガス ，
雰囲気圧力：１〜１０Ｐａ、
ｃＢＮ工具基体温度：５００℃、
カソード電極：金属Ｔｉ
アーク電流値：１００〜２００Ａ、
バイアス電圧：−１０００〜−１２００Ｖ、
の条件で、Ｔｉボンバード処理を行うと、ｃＢＮ工具基体表面の結晶質ほう化チタン（ＴｉＢ２）層、結晶質窒化珪素（Ｓｉ３Ｎ４）層が非晶質化し、この非晶質層がｃＢＮ工具基体と硬質被覆層との密着接合強度を高めるばかりか、ｃＢＮ工具基体と硬質被覆層との界面でのクラックの進展を抑制する効果がある。
(C) Amorphous adhesion layer obtained by modifying the hard crystalline film formed on the surface of the cBN tool base by bombardment:
Before forming the hard coating layer on the cBN tool substrate surface, for example,
Atmospheric gas: Ar gas,
Atmospheric pressure: 0.2 to 0.6 Pa,
cBN tool substrate temperature: 300-500 ° C.
Sputtering power: 800-1000W
Bias voltage: -100 to -200V
Sputtering is performed on the surface of the cBN tool base to cover a crystalline titanium boride (TiB 2 ) layer and a silicon nitride (Si 3 N 4 ) layer, and then the titanium boride (TiB 2 ) layer, nitrided In the silicon (Si 3 N 4 ) layer,
Atmospheric gas: Ar gas
Atmospheric pressure: 1-10 Pa,
cBN tool substrate temperature: 500 ° C.
Cathode electrode: Metal Ti
Arc current value: 100-200A,
Bias voltage: -1000 to -1200V
When the Ti bombardment process is performed under the above conditions, the crystalline titanium boride (TiB 2 ) layer and the crystalline silicon nitride (Si 3 N 4 ) layer on the surface of the cBN tool substrate become amorphous, and this amorphous layer This has the effect of suppressing the progress of cracks at the interface between the cBN tool base and the hard coating layer, as well as improving the tight bonding strength between the cBN tool base and the hard coating layer.
非晶質密着層の層厚については、上記（ａ）の非晶質密着層の場合には、ｃＢＮ工具基体の表面に露出し、かつ、ｃＢＮ粒子間隙に存在するバインダー成分のみがボンバード処理によって非晶質密着層に改質されるのであるから、ｃＢＮ工具基体表面に沿って均一層厚の非晶質密着層は形成されないが、ｃＢＮ工具基体内部に向かって深さ１０〜５０ｎｍの領域が改質されて非晶質密着層を形成することが必要である。
非晶質密着層の層厚が１０ｎｍ未満では、密着強度向上効果を期待できず、一方、ｃＢＮ工具基体表面に対する硬質被覆層の密着性向上効果は、表面からの深さが５０ｎｍで十分であるから、非晶質密着層の層厚は１０〜５０ｎｍと定めた。
また、上記（ｂ）の非晶質密着層の場合には、ｃＢＮ工具基体の表面に被覆する硬質非晶質膜の膜厚を１０〜５０ｎｍとすることにより、また、上記（ｃ）の非晶質密着層の場合には、ボンバード処理によって改質する硬質結晶質膜の膜厚を１０〜５０ｎｍとすることにより、非晶質密着層の層厚を１０〜５０ｎｍとすることが必要であり、これは、前記（ａ）の場合と同様、層厚が１０ｎｍ未満では、非晶質密着層を設けたことによる密着強度向上効果を期待できず、一方、ＢＮ工具基体表面に対する硬質被覆層の密着性向上効果は、層厚が５０ｎｍで十分であるという理由による。
Regarding the thickness of the amorphous adhesion layer, in the case of the amorphous adhesion layer of (a) above, only the binder component exposed on the surface of the cBN tool base and existing in the cBN particle gap is removed by the bombarding process. Since the amorphous adhesion layer is modified, an amorphous adhesion layer having a uniform layer thickness is not formed along the surface of the cBN tool base, but a region having a depth of 10 to 50 nm toward the inside of the cBN tool base. It is necessary to modify and form an amorphous adhesion layer.
If the thickness of the amorphous adhesion layer is less than 10 nm, the effect of improving the adhesion strength cannot be expected, while the effect of improving the adhesion of the hard coating layer to the cBN tool substrate surface is sufficient if the depth from the surface is 50 nm. Therefore, the layer thickness of the amorphous adhesion layer was determined to be 10 to 50 nm.
In the case of the amorphous adhesion layer (b) above, the thickness of the hard amorphous film covering the surface of the cBN tool base is set to 10 to 50 nm, In the case of a crystalline adhesion layer, it is necessary to set the thickness of the amorphous adhesion layer to 10 to 50 nm by setting the thickness of the hard crystalline film to be modified by bombarding to 10 to 50 nm. As in the case of (a), if the layer thickness is less than 10 nm, the effect of improving the adhesion strength due to the provision of the amorphous adhesion layer cannot be expected. The effect of improving the adhesion is because the layer thickness of 50 nm is sufficient.
被覆ｃＢＮ基焼結工具の表面に、前記（ａ）〜（ｃ）のいずれの非晶質密着層を形成した場合であっても、非晶質層は活性が高いため、ｃＢＮ工具基体との密着性にすぐれるばかりか、この上に蒸着形成される（Ｔｉ，Ａｌ）Ｎ層との強固な密着接合強度を有し、その結果、大きな発熱を伴う高硬度被削材の高速切削加工において、すぐれた耐欠損性を示すと同時に被削材のすぐれた仕上げ面精度が維持される。 Even when any of the above-mentioned amorphous adhesion layers (a) to (c) is formed on the surface of the coated cBN-based sintered tool, since the amorphous layer has high activity, In addition to being excellent in adhesion, it has strong adhesion bonding strength with the (Ti, Al) N layer formed by vapor deposition on this, and as a result, in high-speed cutting of high-hardness work materials with large heat generation In addition, it exhibits excellent fracture resistance, and at the same time maintains excellent finished surface accuracy of the work material.
硬質被覆層：
この発明では、ｃＢＮ工具基体表面に、前記非晶質密着層を介して硬質被覆層を蒸着形成するが、この発明では、硬質被覆層として、
組成式：（Ｔｉ１−ＸＡｌＸ）Ｎ
で表した場合、Ｘが０．１５〜０．６５（但し、原子比）を満足する０．５〜１０μｍの層厚を有する（Ｔｉ，Ａｌ）Ｎ層を蒸着形成する。
上記（Ｔｉ，Ａｌ）Ｎ層において、Ｔｉ成分は高温強度の維持、Ａｌ成分は高温硬さと耐酸化性の向上に寄与するが、Ｔｉとの合量に占めるＡｌの含有割合Ｘが０．６５を超えると、結晶構造の変化により、高温強度が低下し欠損が生じやすくなり、一方、Ａｌの含有割合Ｘが０．１５未満になると、高温硬さと耐熱性が低下し、その結果、耐摩耗性の低下がみられるようになることから、Ｔｉとの合量に占めるＡｌの含有割合Ｘの値を０．１５〜０．６５（但し、原子比）と定めた。
Hard coating layer:
In this invention, a hard coating layer is formed by vapor deposition on the surface of the cBN tool base via the amorphous adhesion layer. In this invention, as the hard coating layer,
Composition formula: (Ti 1-X Al X ) N
In this case, a (Ti, Al) N layer having a layer thickness of 0.5 to 10 μm satisfying X of 0.15 to 0.65 (however, atomic ratio) is formed by vapor deposition.
In the (Ti, Al) N layer, the Ti component contributes to maintaining high-temperature strength, and the Al component contributes to improving high-temperature hardness and oxidation resistance, but the Al content ratio X in the total amount with Ti is 0.65. If the Al content exceeds X, the high-temperature strength decreases due to the change in the crystal structure and defects tend to occur. On the other hand, when the Al content X is less than 0.15, the high-temperature hardness and heat resistance decrease, resulting in wear resistance. Therefore, the value of the Al content ratio X in the total amount with Ti was determined to be 0.15 to 0.65 (however, the atomic ratio).
上記（Ｔｉ，Ａｌ）Ｎ層からなる硬質被覆層は、その層厚が０．５μｍ未満では、自身のもつ耐熱性、高温硬さおよび高温強度を長期に亘って発揮することができず、工具寿命短命の原因となり、一方その層厚が１０μｍを越えると、欠損、剥離等を生じ易くなることから、その層厚を０．５〜１０μｍと定めた。 The hard coating layer composed of the (Ti, Al) N layer cannot exhibit its own heat resistance, high temperature hardness and high temperature strength over a long period of time if its layer thickness is less than 0.5 μm. On the other hand, if the thickness of the layer exceeds 10 μm, defects, peeling, and the like are likely to occur. Therefore, the layer thickness is set to 0.5 to 10 μm.
この発明の被覆ｃＢＮ基焼結工具は、ｃＢＮ工具基体表面に活性の高い非晶質密着層を形成し、これを介して（Ｔｉ，Ａｌ）Ｎ層からなる硬質被覆層を形成したことによって、ｃＢＮ工具基体と硬質被覆層は強固な密着接合強度を備え、その結果、大きな発熱を伴う高硬度被削材の高速切削加工において、すぐれた耐欠損性を示すと同時に被削材のすぐれた仕上げ面精度が維持され、長期の使用に亘って、安定した切削性能を発揮することができる。 In the coated cBN-based sintered tool of the present invention, a highly active amorphous adhesion layer is formed on the surface of the cBN tool base, and a hard coating layer composed of a (Ti, Al) N layer is formed through this, The cBN tool base and hard coating layer have strong adhesive bond strength. As a result, it has excellent chipping resistance and high finish in high-speed cutting of high-hardness workpieces with large heat generation. Surface accuracy is maintained, and stable cutting performance can be exhibited over a long period of use.
つぎに、この発明の被覆ｃＢＮ基焼結工具を実施例により具体的に説明する。 Next, the coated cBN-based sintered tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも０．５〜８μｍの範囲内の平均粒径を有するｃＢＮ粉末、ＴｉＮ粉末、ＴｉＣＮ粉末、ＴｉＣ粉末、Ａｌ粉末、Ａｌ２Ｏ３粉末、ＷＣ粉末を用意し、これら原料粉末を表１に示される配合組成に配合し、ボールミルで８０時間湿式混合し、乾燥した後、１２０ＭＰａの圧力で直径：５０ｍｍ×厚さ：１．５ｍｍの寸法をもった圧粉体にプレス成形し、ついでこの圧粉体を、圧力：１Ｐａの真空雰囲気中、９００〜１３００℃の範囲内の所定温度に６０分間保持の条件で焼結して切刃片用予備焼結体とし、この予備焼結体を、別途用意した、Ｃｏ：８質量％、ＷＣ：残りの組成、並びに直径：５０ｍｍ×厚さ：２ｍｍの寸法をもったＷＣ基超硬合金製支持片と重ね合わせた状態で、通常の超高圧焼結装置に装入し、通常の条件である圧力：４ＧＰａ、温度：１２００〜１４００℃の範囲内の所定温度に保持時間：０．８時間の条件で超高圧焼結し、焼結後上下面をダイヤモンド砥石を用いて研磨し、ワイヤー放電加工装置にて一辺３ｍｍの正三角形状に分割し、さらにＣｏ：５質量％、ＴａＣ：５質量％、ＷＣ：残りの組成およびＣＩＳ規格ＳＮＧＡ１２０４１２の形状（厚さ：４．７６mm×一辺長さ：１２．７mmの正方形）をもったＷＣ基超硬合金製インサート本体のろう付け部（コーナー部）に、質量％で、Ｃｕ：２６％、Ｔｉ：５％、Ｎｉ：２．５％、Ａｇ：残りからなる組成を有するＡｇ合金のろう材を用いてろう付けし、所定寸法に外周加工した後、切刃部に幅：０．１３ｍｍ、角度：２５°のホーニング加工を施し、さらに仕上げ研摩を施すことによりＩＳＯ規格ＳＮＧＡ１２０４１２のインサート形状をもったｃＢＮ工具基体Ａ〜Ｅをそれぞれ製造した。 As raw material powders, cBN powder, TiN powder, TiCN powder, TiC powder, Al powder, Al 2 O 3 powder, and WC powder each having an average particle size in the range of 0.5 to 8 μm are prepared. Were mixed in the composition shown in Table 1, wet mixed with a ball mill for 80 hours, dried, and then pressed into a green compact having a diameter of 50 mm × thickness: 1.5 mm under a pressure of 120 MPa. Then, the green compact is sintered in a vacuum atmosphere at a pressure of 1 Pa at a predetermined temperature in the range of 900 to 1300 ° C. for 60 minutes to obtain a presintered body for a cutting edge piece. In a state in which the ligated body is superposed on a separately prepared WC-based cemented carbide support piece having a size of Co: 8% by mass, WC: remaining composition, and diameter: 50 mm × thickness: 2 mm. The ultra-high pressure sintering equipment of The pressure is 4 GPa, the temperature is 1200 to 1400 ° C., the holding time is 0.8 hours, and the upper and lower surfaces are polished with a diamond grindstone after sintering. Then, it is divided into a regular triangle shape with a side of 3 mm by a wire electric discharge machine, and further Co: 5 mass%, TaC: 5 mass%, WC: remaining composition and shape of CIS standard SNGA120212 (thickness: 4.76 mm × one side) Cu: 26%, Ti: 5%, Ni: 2.5% in the brazing part (corner part) of the WC-base cemented carbide insert body having a length of 12.7 mm square) , Ag: brazing using a brazing material of an Ag alloy having the remaining composition, and after processing the outer periphery to a predetermined dimension, the honing process is performed on the cutting edge portion with a width of 0.13 mm and an angle of 25 °. To finish polishing Further, cBN tool bases A to E each having an insert shape of ISO standard SNGA120212 were produced.
ｃＢＮ工具基体表面のバインダー成分のみをボンバード処理で改質した非晶質密着層を備える本発明工具１〜１０の作製：
（ａ）上記のｃＢＮ工具基体Ａ〜Ｅのそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図１に示されるＡＩＰ（アークイオンプレーティング）装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着し、
（ｂ）まず、一方側のカソード電極（蒸発源）として金属Ｔｉを、また、他方側のカソード電極（蒸発源）として、目標組成に対応した成分組成をもった硬質被覆層形成用Ｔｉ−Ａｌ合金を前記回転テーブルを挟んで対向配置し、
（ｃ）装置内を排気して０．１Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、Ａｒガスを導入して、表２に示される条件でＡｒボンバード処理およびＴｉボンバード処理を行い、ｃＢＮ工具基体表面のｃＢＮ粒子間隙に存在するバインダー成分のみを非晶質化して、表３に示される所定層厚の非晶質密着層を形成し、
（ｄ）その後、装置内に反応ガスとして窒素ガスを導入して３Ｐａの反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転するｃＢＮ工具基体に−１００Ｖの直流バイアス電圧を印加し、かつ硬質被覆層形成用Ｔｉ−Ａｌ合金とアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって前記ｃＢＮ工具基体の表面に、表３に示される目標組成および目標層厚の（Ｔｉ，Ａｌ）Ｎ層を硬質被覆層として蒸着形成することにより、
本発明の被覆ｃＢＮ基焼結工具１〜１０（本発明工具１〜１０という）をそれぞれ製造した。
Production of
(A) Each of the above cBN tool bases A to E is ultrasonically cleaned in acetone and dried, from the central axis on the rotary table in the AIP (arc ion plating) apparatus shown in FIG. Attached along the outer periphery at a position that is a predetermined distance in the radial direction,
(B) First, Ti—Al for forming a hard coating layer having a component composition corresponding to a target composition as a cathode electrode (evaporation source) on one side and Ti as a cathode electrode (evaporation source) on the other side An alloy is placed opposite to the rotary table.
(C) The inside of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, and the inside of the apparatus is heated to 500 ° C. with a heater, Ar gas is introduced, and Ar bombardment treatment is performed under the conditions shown in Table 2. Ti bombarding is performed to amorphize only the binder component present in the cBN particle gap on the surface of the cBN tool base to form an amorphous adhesion layer having a predetermined layer thickness shown in Table 3,
(D) Thereafter, nitrogen gas is introduced as a reaction gas into the apparatus to form a reaction atmosphere of 3 Pa, a DC bias voltage of −100 V is applied to the cBN tool base that rotates while rotating on the rotary table, and An arc discharge is generated by passing a current of 100 A between the Ti—Al alloy for forming the hard coating layer and the anode electrode, and the target composition and target layer thickness shown in Table 3 are then applied to the surface of the cBN tool base ( By depositing a Ti, Al) N layer as a hard coating layer,
Coated cBN-based
ｃＢＮ工具基体表面に直接形成した硬質非晶質膜からなる非晶質密着層を備える本発明工具１１〜２０の作製：
（ａ）上記のｃＢＮ工具基体Ａ〜Ｅのそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、一方側のカソード電極（蒸発源）として非晶質ほう化チタン又は非晶質窒化珪素を、また、他方側のカソード電極（蒸発源）として、目標組成に対応した成分組成をもった硬質被覆層形成用Ｔｉ−Ａｌ合金を、さらに、カソード電極（蒸発源）として金属Ｔｉを配置した図２に示されるＡＩＰ（アークイオンプレーティング）装置とＳＰ（スパッタリング）装置を併設した物理蒸着装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着し、
（ｂ）装置内を排気して０．１Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、Ａｒガスを導入して、０．７Ｐａの雰囲気とすると共に、前記テーブル上で自転しながら回転する工具基体に−２００Ｖの直流バイアス電圧を印加し、もって工具基体表面をアルゴンイオンによってボンバード洗浄し、表４に示されるスパッタリング条件でｃＢＮ工具基体表面に非晶質ほう化チタン層又は非晶質窒化珪素層を蒸着して、表５に示される所定層厚の非晶質密着層を形成し、
（ｃ）装置内に反応ガスとして窒素ガスを導入して３Ｐａの反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転するｃＢＮ工具基体に−１００Ｖの直流バイアス電圧を印加し、かつ硬質被覆層形成用Ｔｉ−Ａｌ合金とアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって前記ｃＢＮ工具基体の表面に、表５に示される目標組成および目標層厚の（Ｔｉ，Ａｌ）Ｎ層を硬質被覆層として蒸着形成することにより、
本発明の被覆ｃＢＮ基焼結工具１１〜２０（本発明工具１１〜２０という）をそれぞれ製造した。
Production of inventive tools 11-20 comprising an amorphous adhesion layer comprising a hard amorphous film directly formed on the surface of a cBN tool substrate:
(A) Each of the above cBN tool bases A to E is subjected to ultrasonic cleaning in acetone and dried, and amorphous titanium boride or amorphous silicon nitride is used as a cathode electrode (evaporation source) on one side Further, a Ti—Al alloy for forming a hard coating layer having a component composition corresponding to the target composition was disposed as the cathode electrode (evaporation source) on the other side, and metal Ti was further disposed as the cathode electrode (evaporation source). Mounted along the outer periphery at a predetermined distance in the radial direction from the central axis on the rotary table in the physical vapor deposition apparatus provided with the AIP (arc ion plating) apparatus and SP (sputtering) apparatus shown in FIG. ,
(B) The interior of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, and the interior of the apparatus is heated to 500 ° C. with a heater, and then Ar gas is introduced to create an atmosphere of 0.7 Pa. A DC bias voltage of −200 V is applied to the rotating tool base while rotating above, and the tool base surface is bombarded with argon ions, and amorphous boriding is performed on the cBN tool base surface under the sputtering conditions shown in Table 4. A titanium layer or an amorphous silicon nitride layer is deposited to form an amorphous adhesion layer having a predetermined thickness shown in Table 5,
(C) Introducing nitrogen gas as a reaction gas into the apparatus to make a reaction atmosphere of 3 Pa, applying a DC bias voltage of −100 V to the cBN tool base rotating while rotating on the rotary table, and hard coating An arc discharge is generated by flowing a current of 100 A between the layer-forming Ti—Al alloy and the anode electrode, and the target composition and target layer thickness (Ti, By depositing the Al) N layer as a hard coating layer,
The coated cBN-based sintered tools 11 to 20 (referred to as the present invention tools 11 to 20) of the present invention were produced.
ｃＢＮ工具基体表面に形成した硬質結晶質膜をボンバード処理で改質した非晶質密着層を備える本発明工具２１〜３０の作製：
（ａ）上記のｃＢＮ工具基体Ａ〜Ｅのそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、非晶質密着層形成用の結晶質ほう化チタン又は結晶質窒化珪素からなるカソード電極（蒸発源）、目標組成に対応した成分組成をもった硬質被覆層形成用Ｔｉ−Ａｌ合金からなるカソード電極（蒸発源）およびボンバード処理用の金属Ｔｉからなるカソード電極（蒸発源）をそれぞれ配置した図２に示されるＡＩＰ（アークイオンプレーティング）装置とＳＰ（スパッタリング）装置を併設した物理蒸着装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着し、
（ｂ）装置内を排気して０．１Ｐａ以下の真空に保持しながら、ヒーターで装置内を５００℃に加熱した後、Ａｒガスを導入して、０．７Ｐａの雰囲気とすると共に、前記テーブル上で自転しながら回転する工具基体に−２００Ｖの直流バイアス電圧を印加し、もって工具基体表面をアルゴンイオンによってボンバード洗浄し、表６に示されるスパッタリング条件でｃＢＮ工具基体表面に、表７に示される結晶質ほう化チタン層又は結晶質窒化珪素層を蒸着形成し、
（ｃ）ついで、表６に示されるボンバード条件でＴｉボンバードすることにより、上記結晶質ほう化チタン層又は結晶質窒化珪素層を非晶質化して、表７に示される所定層厚の非晶質密着層を形成し、
（ｄ）ついで、装置内に反応ガスとして窒素ガスを導入して３Ｐａの反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転するｃＢＮ工具基体に−１００Ｖの直流バイアス電圧を印加し、かつ硬質被覆層形成用Ｔｉ−Ａｌ合金とアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって前記ｃＢＮ工具基体の表面に、表７に示される目標組成および目標層厚の（Ｔｉ，Ａｌ）Ｎ層を硬質被覆層として蒸着形成することにより、
本発明の被覆ｃＢＮ基焼結工具２１〜３０（本発明工具２１〜３０という）をそれぞれ製造した。
Production of tools 21 to 30 of the present invention including an amorphous adhesion layer obtained by modifying a hard crystalline film formed on the surface of a cBN tool base by bombarding:
(A) A cathode electrode made of crystalline titanium boride or crystalline silicon nitride for forming an amorphous adhesion layer in a state where each of the above cBN tool bases A to E is ultrasonically cleaned in acetone and dried. (Evaporation source), a cathode electrode (evaporation source) made of Ti-Al alloy for forming a hard coating layer having a component composition corresponding to the target composition, and a cathode electrode (evaporation source) made of metal Ti for bombard treatment Mounted along the outer periphery at a predetermined distance in the radial direction from the central axis on the rotary table in the physical vapor deposition apparatus with the AIP (arc ion plating) apparatus and SP (sputtering) apparatus shown in FIG. And
(B) The interior of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, and the interior of the apparatus is heated to 500 ° C. with a heater, and then Ar gas is introduced to create an atmosphere of 0.7 Pa. A DC bias voltage of −200 V is applied to the rotating tool base while rotating above, and the tool base surface is bombarded with argon ions, and the cBN tool base surface is subjected to the sputtering conditions shown in Table 6 and shown in Table 7. Forming a crystalline titanium boride layer or crystalline silicon nitride layer to be deposited;
(C) Next, Ti bombardment is performed under the bombardment conditions shown in Table 6 to make the crystalline titanium boride layer or the crystalline silicon nitride layer amorphous, and an amorphous film having a predetermined layer thickness shown in Table 7 Forming a quality adhesion layer,
(D) Next, nitrogen gas is introduced as a reaction gas into the apparatus to form a reaction atmosphere of 3 Pa, a DC bias voltage of −100 V is applied to the cBN tool base that rotates while rotating on the rotary table, and An arc discharge is generated by passing a current of 100 A between the Ti—Al alloy for forming the hard coating layer and the anode electrode, and the target composition and target layer thickness shown in Table 7 are then applied to the surface of the cBN tool base ( By depositing a Ti, Al) N layer as a hard coating layer,
The coated cBN-based sintered tools 21 to 30 of the present invention (referred to as the present invention tools 21 to 30) were produced, respectively.
また、比較の目的で、
上記のｃＢＮ工具基体Ａ〜Ｅのそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図３に示されるアークイオンプレーティング装置内に装着し、カソード電極（蒸発源）として目標組成に対応した成分組成をもったＴｉ−Ａｌ合金を配置し、
装置内に反応ガスとして窒素ガス（あるいは更にメタンガス）を導入して３Ｐａの反応雰囲気とすると共に、前記ｃＢＮ工具基体に−１００Ｖの直流バイアス電圧を印加し、Ｔｉ−Ａｌ合金のカソード電極とアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、もって前記ｃＢＮ工具基体の表面に、表８に示される目標組成および目標層厚の（Ｔｉ，Ａｌ）Ｎ層を硬質被覆層として蒸着形成することにより、
従来被覆ｃＢＮ基焼結工具１〜１０（従来工具１〜１０という）をそれぞれ製造した。
For comparison purposes,
Each of the above cBN tool bases A to E is ultrasonically washed in acetone and dried, and then mounted in the arc ion plating apparatus shown in FIG. 3 to obtain a target composition as a cathode electrode (evaporation source). Arrange the Ti-Al alloy with the corresponding component composition,
Nitrogen gas (or more methane gas) is introduced into the apparatus as a reaction gas to make a reaction atmosphere of 3 Pa, and a DC bias voltage of −100 V is applied to the cBN tool base, and a cathode electrode and an anode electrode of Ti—Al alloy An electric current of 100 A is passed between them to generate an arc discharge, so that a (Ti, Al) N layer having the target composition and target layer thickness shown in Table 8 is deposited on the surface of the cBN tool base as a hard coating layer. By forming
Conventionally coated cBN-based
この結果得られた本発明工具１〜３０および従来工具１〜１０の（Ｔｉ，Ａｌ）Ｎ層について、その組成を透過型電子顕微鏡を用いてのエネルギー分散型Ｘ線分析法により測定したところ、それぞれ目標組成と実質的に同じ組成を示した。
また、本発明工具１〜３０および従来工具１〜１０の各層の層厚を透過型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に同じ平均値（５ヶ所の平均値）を示した。
さらに、本発明工具１〜３０の非晶質密着層については、透過型電子顕微鏡を用いて組織観察（倍率：５０万倍）したところ、ｃＢＮ工具基体表面と硬質被覆層間に非晶質密着層の形成が確認され、また、非晶質密着層の層厚についても、透過型電子顕微鏡を用いて測定したところ１０〜５０ｎｍであることが確認された。
これに対して、従来工具１〜１０では、ｃＢＮ工具基体表面と硬質被覆層間には、非晶質層の形成は見られなかった。
なお、本発明工具１〜３０について測定した非晶質密着層の層厚を、表３、５、７にそれぞれ示す。
About the (Ti, Al) N layer of the
Moreover, when the layer thickness of each layer of this invention tools 1-30 and the conventional tools 1-10 was measured using the transmission electron microscope, all were the average value (average value of five places) substantially the same as target layer thickness. )showed that.
Further, the amorphous adhesion layers of the
On the other hand, in the
In addition, the layer thickness of the amorphous contact | adherence layer measured about this invention tool 1-30 is shown to Table 3, 5, and 7, respectively.
つぎに、上記の各種の被覆ｃＢＮ基焼結工具を、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明工具１〜３０および従来工具１〜１０ついて、以下に示す切削条件Ａ〜Ｃで高速連続切削試験を実施した。
[切削条件Ａ]
被削材：ＪＩＳ・ＳＣＭ４２０（硬さ：ＨＲＣ６０）の丸棒、
切削速度： ２５０ ｍ／ｍｉｎ．、
切り込み： ０．２０ ｍｍ、
送り： ０．１５ ｍｍ／ｒｅｖ．、
切削時間： １０ 分、
の条件での浸炭焼入れ合金鋼の湿式連続高速切削加工試験（通常の切削速度は１８０ｍ／ｍｉｎ．）、
[切削条件Ｂ]
被削材：ＪＩＳ・ＳＣｒ４２０（硬さ：ＨＲＣ６１）の丸棒、
切削速度： ２２５ ｍ／ｍｉｎ．、
切り込み： ０．２５ ｍｍ、
送り： ０．１５ ｍｍ／ｒｅｖ．、
切削時間： １０ 分、
の条件での浸炭焼入れクロム鋼の湿式連続高速切削加工試験（通常の切削速度は１８０ｍ／ｍｉｎ．）、
[切削条件Ｃ]
被削材：ＪＩＳ・ＳＵＪ２（硬さ：ＨＲＣ６１）の丸棒、
切削速度： ２７５ ｍ／ｍｉｎ．、
切り込み： ０．１５ ｍｍ、
送り： ０．１５ ｍｍ／ｒｅｖ．、
切削時間： １０ 分、
の条件での焼入れ軸受鋼の湿式連続高速切削加工試験（通常の切削速度は１７０ｍ／ｍｉｎ．）、
そして、上記の各切削加工試験における被削材の仕上げ面精度について、ＪＩＳ・Ｂ０６０１−１９９４に従い、Ｒｚ（μｍ）を測定した。
この測定結果を表９、１０に示す。
なお、従来工具１〜１０については、切削時間終了後、すべて被削材の仕上げ面精度（Ｒｚ（μｍ））が３．０μｍから外れてしまっていたため、上記所定の基準値を超えたときの切削時間を寿命（分）と判断し、表１０には、従来工具１〜１０の寿命（分を記載した。
Next, with the above various coated cBN-based sintered tools, the
[Cutting conditions A]
Work material: JIS / SCM420 (Hardness: HRC60) round bar,
Cutting speed: 250 m / min. ,
Cutting depth: 0.20 mm,
Feed: 0.15 mm / rev. ,
Cutting time: 10 minutes,
Wet continuous high-speed cutting test of carburized and hardened alloy steel under the conditions of (normal cutting speed is 180 m / min.),
[Cutting conditions B]
Work material: JIS · SCr420 (hardness: HRC61) round bar,
Cutting speed: 225 m / min. ,
Cutting depth: 0.25 mm,
Feed: 0.15 mm / rev. ,
Cutting time: 10 minutes,
Wet continuous high-speed cutting test of carburized and hardened chromium steel under the conditions of (normal cutting speed is 180 m / min.),
[Cutting conditions C]
Work material: JIS / SUJ2 (Hardness: HRC61) round bar,
Cutting speed: 275 m / min. ,
Cutting depth: 0.15 mm,
Feed: 0.15 mm / rev. ,
Cutting time: 10 minutes,
Wet continuous high speed cutting test of hardened bearing steel under the conditions of (normal cutting speed is 170 m / min.),
And Rz (micrometer) was measured according to JIS * B0601-1994 about the finishing surface precision of the work material in each said cutting test.
The measurement results are shown in Tables 9 and 10.
In addition, about the conventional tools 1-10, since the finishing surface precision (Rz (micrometer)) of all the work materials has deviated from 3.0 micrometers after the end of cutting time, when the above-mentioned predetermined standard value was exceeded. The cutting time was determined as the life (minutes), and Table 10 shows the life (minutes) of the
表３、５、７〜１０に示される結果から、この発明の被覆ｃＢＮ基焼結工具は、ｃＢＮ工具基体表面に活性の高い非晶質密着層を形成し、これを介して（Ｔｉ，Ａｌ）Ｎ層からなる硬質被覆層を形成したことによって、ｃＢＮ工具基体と硬質被覆層は強固な密着接合強度を備え、その結果、大きな発熱を伴う高硬度被削材の高速切削加工において、すぐれた耐欠損性を示すと同時に被削材のすぐれた仕上げ面精度が維持され、長期の使用に亘って、安定した切削性能を発揮するのに対して、ｃＢＮ工具基体と硬質被覆層との間に非晶質密着層が形成されていない従来被覆ｃＢＮ基焼結工具は、特にｃＢＮ工具基体と硬質被覆層間の密着接合強度の不足が原因で、刃先に境界異常損傷や欠損が発生しやすく、また、使用に伴い被削材の仕上げ面精度が低下（被削材の表面粗さが増大）し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 3, 5, and 7 to 10, the coated cBN-based sintered tool of the present invention forms a highly active amorphous adhesion layer on the surface of the cBN tool substrate, through which (Ti, Al ) By forming a hard coating layer consisting of N layers, the cBN tool base and the hard coating layer have a strong adhesive bond strength, and as a result, excellent in high-speed cutting of high-hardness work materials with large heat generation While exhibiting chipping resistance, excellent finished surface accuracy of the work material is maintained, and stable cutting performance is demonstrated over a long period of use, while between the cBN tool base and the hard coating layer. Conventional coated cBN-based sintered tools without an amorphous adhesion layer are prone to boundary abnormal damage and chipping at the cutting edge, especially due to insufficient adhesion bonding strength between the cBN tool base and the hard coating layer. Finished surface of the work material with use Degree is lowered (the surface roughness of the workpiece is increased), it is clear that lead to a relatively short time service life.
上述のように、この発明の被覆ｃＢＮ基焼結工具は、各種の鋼や鋳鉄などの通常の切削条件での切削加工は勿論のこと、特に合金工具鋼や軸受け鋼の焼入れ材などの高硬度材からなる被削材の高速切削であっても、前記硬質被覆層がすぐれた耐境界異常損傷性、耐欠損性を発揮し、また、被削材の仕上げ面精度の低下を招くことなく、長期に亘って安定した切削性能を発揮するものであるから、切削加工装置の高性能化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cBN-based sintered tool of the present invention has high hardness such as hardened material of alloy tool steel and bearing steel, as well as cutting under normal cutting conditions such as various steels and cast iron. Even in high-speed cutting of a work material made of a material, the hard coating layer exhibits excellent boundary abnormal damage resistance and fracture resistance, and without incurring a decrease in the finished surface accuracy of the work material, Since it exhibits stable cutting performance over a long period of time, it can sufficiently satisfy the high performance of the cutting device, the labor saving and energy saving of the cutting work, and the cost reduction.
Claims (3)
上記立方晶窒化ほう素基超高圧焼結材料は、平均粒径０．５〜８μｍの立方晶窒化ほう素粉末を４０〜８０体積％含有し、残部はバインダーからなり、
また、上記硬質被覆層は、
組成式：（Ｔｉ１−ＸＡｌＸ）Ｎ
で表した場合、Ｘが０．１５〜０．６５（但し、原子比）を満足する０．５〜１０μｍの層厚を有するチタンとアルミニウムの複合窒化物層からなり、
さらに、上記工具基体と上記硬質被覆層の間には、非晶質密着層が形成されており、該非晶質密着層は、立方晶窒化ほう素基超高圧焼結材料の構成成分であるバインダーの非晶質層であることを特徴とする表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具。 In the surface-coated cubic boron nitride-based ultra-high pressure sintered material cutting tool in which a hard coating layer is vapor-deposited on the surface of a tool base made of cubic boron nitride-based ultra-high pressure sintered material,
The cubic boron nitride-based ultra-high pressure sintered material contains 40 to 80% by volume of cubic boron nitride powder having an average particle size of 0.5 to 8 μm, and the balance is made of a binder.
The hard coating layer is
Composition formula: (Ti 1-X Al X ) N
X is composed of a composite nitride layer of titanium and aluminum having a layer thickness of 0.5 to 10 μm that satisfies 0.1 to 0.65 (however, atomic ratio),
Furthermore, an amorphous adhesion layer is formed between the tool base and the hard coating layer, and the amorphous adhesion layer is a binder that is a constituent of the cubic boron nitride-based ultrahigh pressure sintered material. A surface-coated cubic boron nitride-based ultra-high pressure sintered material cutting tool characterized by being an amorphous layer.
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| JP2015110258A (en) * | 2013-10-31 | 2015-06-18 | 三菱マテリアル株式会社 | Surface coating cutting tool having excellent anti-chipping property |
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