JP2010226610A - 屈曲振動片およびそれを用いた発振器 - Google Patents
屈曲振動片およびそれを用いた発振器 Download PDFInfo
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- JP2010226610A JP2010226610A JP2009073742A JP2009073742A JP2010226610A JP 2010226610 A JP2010226610 A JP 2010226610A JP 2009073742 A JP2009073742 A JP 2009073742A JP 2009073742 A JP2009073742 A JP 2009073742A JP 2010226610 A JP2010226610 A JP 2010226610A
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- Prior art keywords
- heat conduction
- region
- vibrating
- vibration
- piece
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- 238000005452 bending Methods 0.000 title claims description 66
- 239000000463 material Substances 0.000 claims description 40
- 239000010931 gold Substances 0.000 claims description 15
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 9
- 230000010355 oscillation Effects 0.000 claims description 5
- 239000013078 crystal Substances 0.000 abstract description 59
- 239000010453 quartz Substances 0.000 abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 23
- 230000007423 decrease Effects 0.000 abstract description 13
- 230000000694 effects Effects 0.000 description 17
- 230000005284 excitation Effects 0.000 description 12
- 238000012986 modification Methods 0.000 description 12
- 230000004048 modification Effects 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- 238000005530 etching Methods 0.000 description 7
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009073742A JP2010226610A (ja) | 2009-03-25 | 2009-03-25 | 屈曲振動片およびそれを用いた発振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009073742A JP2010226610A (ja) | 2009-03-25 | 2009-03-25 | 屈曲振動片およびそれを用いた発振器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010226610A true JP2010226610A (ja) | 2010-10-07 |
| JP2010226610A5 JP2010226610A5 (https=) | 2012-03-29 |
Family
ID=43043282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009073742A Withdrawn JP2010226610A (ja) | 2009-03-25 | 2009-03-25 | 屈曲振動片およびそれを用いた発振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010226610A (https=) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8482358B2 (en) | 2010-07-09 | 2013-07-09 | Seiko Epson Corporation | Flexural resonator element, resonator, oscillator, and electronic device |
| US8760235B2 (en) | 2010-07-09 | 2014-06-24 | Seiko Epson Corporation | Resonator element, resonator, and oscillator |
| US8816572B2 (en) | 2010-04-08 | 2014-08-26 | Seiko Epson Corporation | Resonator element and resonator having a tapered arm next to the base |
| US9354128B2 (en) | 2013-12-27 | 2016-05-31 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, sensor, and mobile object |
| US9705472B2 (en) | 2013-06-24 | 2017-07-11 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and moving object |
| WO2019059187A1 (ja) * | 2017-09-21 | 2019-03-28 | 住友精密工業株式会社 | 角速度センサ |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5967713A (ja) * | 1982-10-01 | 1984-04-17 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
| JPS6098710A (ja) * | 1983-11-04 | 1985-06-01 | Matsushita Electric Ind Co Ltd | 圧電磁器濾波器 |
| JPS61176821U (https=) * | 1984-12-10 | 1986-11-05 | ||
| JP2004088706A (ja) * | 2002-07-02 | 2004-03-18 | Daishinku Corp | エッチング方法及びその方法によって成形されたエッチング成形品 |
| JP2006054221A (ja) * | 2004-08-09 | 2006-02-23 | Nitto Denko Corp | 熱伝導シート |
| JP2006086996A (ja) * | 2004-09-17 | 2006-03-30 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法 |
| JP2007081749A (ja) * | 2005-09-13 | 2007-03-29 | Nippon Dempa Kogyo Co Ltd | 音叉型水晶振動子 |
| JP2008113098A (ja) * | 2006-10-28 | 2008-05-15 | Nippon Dempa Kogyo Co Ltd | 音叉型圧電振動片 |
-
2009
- 2009-03-25 JP JP2009073742A patent/JP2010226610A/ja not_active Withdrawn
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5967713A (ja) * | 1982-10-01 | 1984-04-17 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
| JPS6098710A (ja) * | 1983-11-04 | 1985-06-01 | Matsushita Electric Ind Co Ltd | 圧電磁器濾波器 |
| JPS61176821U (https=) * | 1984-12-10 | 1986-11-05 | ||
| JP2004088706A (ja) * | 2002-07-02 | 2004-03-18 | Daishinku Corp | エッチング方法及びその方法によって成形されたエッチング成形品 |
| JP2006054221A (ja) * | 2004-08-09 | 2006-02-23 | Nitto Denko Corp | 熱伝導シート |
| JP2006086996A (ja) * | 2004-09-17 | 2006-03-30 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法 |
| JP2007081749A (ja) * | 2005-09-13 | 2007-03-29 | Nippon Dempa Kogyo Co Ltd | 音叉型水晶振動子 |
| JP2008113098A (ja) * | 2006-10-28 | 2008-05-15 | Nippon Dempa Kogyo Co Ltd | 音叉型圧電振動片 |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9252741B2 (en) | 2010-04-08 | 2016-02-02 | Seiko Epson Corporation | Resonator element and resonator having a tapered arm next to the base |
| US9257961B2 (en) | 2010-04-08 | 2016-02-09 | Seiko Epson Corporation | Resonator element and resonator having a tapered arm next to the base |
| US8816572B2 (en) | 2010-04-08 | 2014-08-26 | Seiko Epson Corporation | Resonator element and resonator having a tapered arm next to the base |
| US9325278B2 (en) | 2010-07-09 | 2016-04-26 | Seiko Epson Corporation | Resonator element, resonator, and oscillator |
| US9166554B2 (en) | 2010-07-09 | 2015-10-20 | Seiko Epson Corporation | Flexural resonator element, resonator, oscillator, and electronic device |
| US8760235B2 (en) | 2010-07-09 | 2014-06-24 | Seiko Epson Corporation | Resonator element, resonator, and oscillator |
| US8482358B2 (en) | 2010-07-09 | 2013-07-09 | Seiko Epson Corporation | Flexural resonator element, resonator, oscillator, and electronic device |
| US9705472B2 (en) | 2013-06-24 | 2017-07-11 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and moving object |
| US10659006B2 (en) | 2013-06-24 | 2020-05-19 | Seiko Epson Corporation | Resonator element, resonator, electronic device, electronic apparatus, and moving object |
| US9354128B2 (en) | 2013-12-27 | 2016-05-31 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, sensor, and mobile object |
| WO2019059187A1 (ja) * | 2017-09-21 | 2019-03-28 | 住友精密工業株式会社 | 角速度センサ |
| JPWO2019059187A1 (ja) * | 2017-09-21 | 2020-11-19 | 住友精密工業株式会社 | 角速度センサ |
| JP7258760B2 (ja) | 2017-09-21 | 2023-04-17 | 住友精密工業株式会社 | 角速度センサ |
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