JP2010217121A - Manual stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manual stage superior in easiness-to-use, and having high versatility. <P>SOLUTION: In this manual stage 1, a sliding part 4 and a fixed part 5 are a transparent resin, and can also be colored. A vernier graduation 10a arranged in the sliding part 4 and a vernier graduation 10b arranged in the fixed part 5 are directly printed on a side of respective resin parts of the sliding part 4 and the fixed part 5, and a figure of the vernier graduations 10a and 10b printed on the side of the sliding part 4 and the fixed part 5 is printed inside out so as to be readable from a backside, and an operator reads the figure of the vernier graduations 10a and 10b via the transparent sliding part 4 and fixed part 5. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a manual stage, and in particular, a sliding part to which a precision instrument is attached and a fixed part connected to a base are coupled via a sliding mechanism, and the sliding part is slid by a handle operation. Manual adjustment that adjusts the position of the mounted precision device by visually reading the relative movement amount of the sliding component with respect to the fixed component indicated by the scale printed on the display board attached to the fixed component and the sliding component. Regarding the stage.

  Precision devices such as electrical devices such as CCD cameras and sensors, optical devices such as lenses and microscopes, and illumination devices such as LEDs must be adjusted for positioning and focusing. Further, there may be a case where the position is further finely adjusted after the attachment.

  These precision instruments are installed and adjusted on a machine element generally called a “stage”. The manual stage refers to a stage in which a part is manually slid by a handle operation. In this manual stage, a sliding part to which equipment is attached and a fixed part connected to a base are coupled via a sliding mechanism, and the sliding part is manually slid with respect to the fixed part by a handle operation. Is common. This manual stage includes, for example, a dovetail stage, a feed screw stage, a linear ball stage, a cross roller stage, a simple ball stage, a dovetail slide rail stage, etc., depending on the sliding mechanism. Each stage has various types according to the purpose of use. For example, in the case of a dovetail stage, an X-axis dovetail stage that slides in one direction, or slides in two directions that are substantially orthogonal. There are an XY-axis dovetail stage that moves, a Z-axis dovetail stage that slides in the vertical direction, a rotary stage that rotates and slides, and the like.

  FIG. 20 shows a conventional general X-axis dovetail stage. In the X-axis dovetail stage 100, a sliding component 104 having a dovetail 101 protruding in a trapezoidal shape is movably fitted to a fixed component 105 having a dovetail groove 102 recessed in a trapezoidal shape. The fixing component 105 is fixed to a base (not shown) through a base 108 having a base fixing fastening hole 106 into which a fastener (not shown) is inserted. The sliding component 104 is connected to a precision device (not shown) via a fastener (not shown) inserted into the precision device mounting hole 107. The sliding component 104 moves in the direction of the arrow in the figure by rotating the handle 109. The amount of movement is measured by a pair of vernier scales 110a and 110b. This is because a drive mechanism such as a rack and pinion gear (not shown) or a feed screw (not shown) is incorporated in the X-axis dovetail stage 100. By these driving mechanisms, the rotation of the handle 109 is converted into the movement of the sliding component 104 in the horizontal direction.

  FIG. 21 shows a conventional general XY axis dovetail stage. The XY-axis dovetail stage 200 includes an upper unit 202 that slides in the direction of the arrow, which is the left-right direction in the drawing, and a lower unit 203 that slides in a direction substantially orthogonal to the upper unit 202. And the bonding surface 206 with an adhesive. FIG. 21 shows a state in which the sliding unit 204 of the upper unit 202 is slid to the left side in the drawing. The fixing unit 205 of the upper unit 202 is provided with a connection hole 207a for the fastener 201, and the sliding unit 204 of the lower unit 203 is provided with a connection hole 207b for the fastener 201. Then, the two handles 209a and 209b that are substantially orthogonal to each other are slid in the XY directions.

  FIG. 22 shows a conventional general feed screw stage. 22A is a side view of the feed screw stage 300, FIG. 22B is a plan view seen from the DD direction of FIG. 22A, and FIG. It is the top view seen from the EE direction of 22 (a). The feed screw type stage 300 includes a sliding component 304 having an ant 301, a fixing component 305 having an ant groove 302, a male screw rod 307 and a female screw cylinder 306 as a sliding mechanism, a handle 309, and a stopper 316. . The scale 310b is attached to the sliding component 304 side, and the scale 310a is attached to the fixed component 305 side. By engaging the male screw rod 307 with the female screw cylinder 306 and rotating the handle 309, the sliding component 304 slides with respect to the fixed component 305. The stopper 316 fixes the sliding component 304 to the fixed component 305 at an arbitrary position.

  FIG. 23 shows a conventional general simple ball stage. FIG. 23A is a perspective view of the sliding component 404 of the simple ball stage 400 as viewed from the fixed component 405 side, and FIG. 23B shows the fixing component 405 of the simple ball stage 400 as the sliding component 404. It is the perspective view seen from the side. The simple ball stage 400 includes a sliding part 404 having a groove 401, a fixed part 405 having a groove 402, a handle 409, a wire 406, a spring 407, and the like. A scale 410b is attached to the sliding component 404 side, and a scale 410a is attached to the fixed part 405 side. The groove portion 401 of the sliding component 404 and the groove portion 402 on the fixed component 405 side are substantially semi-cylindrical grooves that face each other, and when combined, become a substantially cylindrical shape. A plurality of balls 403 are fitted into the substantially cylindrical groove. By the rotation of the ball 403, the sliding component 404 and the fixed component 405 slide smoothly. In order to slide the sliding component 404 relative to the fixed component 405, a wire 406 incorporating a spring 407 is stretched in a ring shape. A part of the wire 406 is wound around the handle 409, and the handle 409 is rotated to move the wire 406, and the sliding component 404 to which the wire 406 is connected slides relative to the fixed component 405.

  FIG. 24 shows a conventional general dovetail slide rail stage. FIG. 24A is a plan view of the dovetail slide rail stage 500, and FIG. 24B shows a cross section taken along line FF in FIG. The dovetail slide rail type stage 500 includes a sliding component 504 having a dovetail groove 502, a fixing component 505 having an dovetail 501, a handle 509, and a leg portion 508 attached to the sliding component 504. The scale 510b is attached to the sliding component 504 side, and the scale 510a is attached to the fixed component 505 side. The fixing component 505 is provided with a base fixing fastening hole 506, and the sliding component 504 is provided with a precision device mounting hole 507. The sliding component 504 and the fixed component 505 are contacted by a plurality of legs 508 attached to the sliding component 504. That is, the leg portion 508 slides while contacting the rail-shaped ant 501 of the fixed component 505. The handle 509 is threaded at the tip. When the screw is loosened, the sliding component 504 can be slid with respect to the fixed component 505, and when the screw is tightened, the sliding component 504 can be fixed with respect to the fixed component 505.

  In the linear ball stage, a fixed part and a sliding part form a Gothic arc groove that is a sliding surface of a pseudo-cylindrical, and the ball is arranged so as to be sandwiched between the Gothic arc groove. This is a mechanism for sliding sliding parts.

  The cross-roller stage is fixed by forming a roller race that is a V-shaped groove between the fixed part and the sliding part, and the cylindrical rollers are alternately arranged in the space between the two roller races. This is a mechanism for sliding the sliding component relative to the component.

  Of the conventional manual stages, in the dovetail stage, the sliding parts and the fixed parts are made of aluminum, and are subjected to black alumite treatment for forming an oxide film on the surface of the aluminum. Further, the handle attached to the manual stage is made of brass and plated. Of the sliding mechanisms, the rack is made of brass plated with anti-rust treatment, and the pinion gear is made of free-cutting steel (SUM) plated with anti-rust treatment. .

  Among conventional manual stages, even linear ball stage and cross roller stage, sliding parts and fixed parts are, for example, aluminum anodized, brass coated with black fluororesin, stainless steel electroless nickel Plated ones are used. Thus, materials such as aluminum, brass, steel, and stainless steel are selected and used for the conventional manual stage.

  On the other hand, Patent Document 1 discloses a general-purpose dovetail sliding unit that is an XY-axis dovetail stage. Here, by combining a plurality of dovetail sliding units with connecting parts that are detachable by fasteners, the position of the precision device can be adjusted in the planar biaxial direction, and the plurality of dovetail sliding units For example, a dovetail sliding unit that can easily change the direction of the handle and the like is described.

  Patent Document 2 discloses a compound dovetail sliding unit that is an XY-axis dovetail stage. Here, a technique for connecting a plurality of dovetail sliding units without using connecting parts is described. In addition, there is described a dovetail sliding unit that can share the rotation axis of each handle of a plurality of dovetail sliding units and perform two handle operations at one place.

Japanese Patent No. 3923997 JP 2008-8446 A

  When adjusting the position of the manual stage with the equipment fixed to the mounting base for positioning and focusing of the precision equipment, the operator operates from the side on which the handle of the manual stage is attached. That is, while rotating the handle, positioning and focusing are performed while reading the scales printed on the display plates attached to the fixed component and the sliding component on the handle side. However, depending on how the manual stage is installed, the operator may have to operate from the side opposite the side on which the handle of the manual stage is attached, and cannot perform positioning or focusing while reading the scale. There was a problem that the usability was poor and the versatility was low.

  Further, in the conventional manual stage, for example, the internal sliding mechanism such as a rack and pinion gear or a male screw rod and a female screw cylinder cannot be visually confirmed from the outside of the manual stage. For this reason, even if dust or the like enters the sliding mechanism during the work, even if so-called “galling” occurs that adheres to the surface of the part, the cause is not known unless it is disassembled, and the usability is poor.

  In addition, since the surface color of the conventional manual stage is unified with a single color such as black, for example, when using a plurality of manual stages, it is difficult to identify individual manual stages and the usability is poor. It was.

  An object of the present application is to solve such problems and provide a manual stage that is easy to use and highly versatile.

  In order to achieve the above object, the manual stage according to the present invention is configured such that a sliding part to which a precision instrument is attached and a fixed part fixed to a base are connected via a sliding mechanism, and the sliding part is operated by a handle operation. Slide and slide the moving amount of the sliding part relative to the fixed part indicated by the scale printed on the display board attached to the sliding part and the fixed part, respectively, and adjust the position of the installed precision instrument. The manual stage is characterized in that the sliding component and the fixed component are made of a transparent resin, and the scale is directly printed on each side surface of the sliding component and the fixed component.

  With the above configuration, the manual stage can be visually observed from the back side opposite to the side on which the handle is attached because the sliding part and the fixed part are made of transparent resin. As a result, depending on how the manual stage is installed, even if the operator has to operate from the side opposite to the side where the handle of the manual stage is attached, the scale can be read easily while operating the handle. , You can adjust the position for equipment positioning and focusing. Thereby, usability can be improved and it can be set as a highly versatile manual stage. Also, the manual stage is made of transparent resin for sliding parts and fixed parts, so that the internal sliding mechanism can be seen from the outside of the manual stage, rack and pinion gear, male threaded rod and female threaded cylinder, etc. The sliding operation state can be visually confirmed. Further, in the conventional manual stage, the display plate is fixed to the sliding component and the fixed component with the pin and the scale is displayed. However, the display plate and the pin can be reduced. Furthermore, the weight can be reduced by making the fixed part and the sliding part made of resin.

  The manual stage is preferably printed upside down so that the scale numbers printed on the side surfaces of the sliding part and the fixed part can be read from the back side. As a result, even if the operator has to operate from the side opposite to the side on which the handle of the manual stage is attached, the scale numbers can be easily read while operating the handle to position and focus the device. The position can be adjusted for alignment.

  In the manual stage, it is preferable that the transparent resin used for the sliding component and the fixed component is a resin colored in a color including black. In this way, depending on the usage, importance, or purpose of use of the manual stage, it is identified by the color such as red, yellow, green added to the transparent resin, or the black color of the conventional manual stage. Can improve usability.

  Moreover, it is preferable that the manual stage is made of a resin colored in a color including black, and the slide mechanism is visible from the outside of the manual stage. Thereby, the colored sliding mechanism can be seen through the transparent sliding part and the fixed part, and the operating state of the sliding mechanism can be visually confirmed. Further, the weight of the manual stage can be further reduced by being made of a transparent resin.

  The manual stage is preferably made of a resin whose sliding mechanism is transparent. Thus, the sliding mechanism is made of a transparent resin in addition to the sliding component and the fixed component, and the scales printed on the sliding component and the fixed component are further easily seen. Further, the weight of the manual stage can be further reduced by being made of a transparent resin.

  In addition, the manual stage has a dovetail-type sliding mechanism in which the sliding mechanism includes a rack provided on an ant of the sliding part and a pinion gear provided on one end of the fixed part and connected to a handle. It is preferable that the handles are provided at two positions on both sides of the fixed component, and both handles are connected to the pinion gear. Thereby, when the manual stage employs a dovetail type sliding mechanism, the handle can be operated from both sides of the manual stage, and usability can be improved.

  The manual stage preferably has a handle made of a transparent resin. Thereby, when the manual stage employs a dovetail slide mechanism, the manual stage can be further reduced in weight and operability can be improved.

  The manual stage is a feed screw type sliding mechanism in which the sliding mechanism is composed of a male screw rod provided on a fixed part and connected to a handle, and a female screw cylinder provided on the sliding part. The handle is preferably made of a transparent resin. Thereby, when the manual stage employs a feed screw type sliding mechanism, the manual stage can be further reduced in weight and operability can be improved.

  In addition, the manual stage is a fixed component in which a sliding mechanism is rotated by rotating a handle and a plurality of balls that are sandwiched between a groove provided in the fixed component and a groove provided in the sliding component. On the other hand, it is a simple ball-type sliding mechanism comprising a feeding means for sliding the sliding component with a wire, and the handle is preferably made of a transparent resin. Thereby, when the manual stage employs a simple ball-type sliding mechanism, the manual stage can be further reduced in weight and operability can be improved.

  In addition, the manual stage is a dovetail slide rail type slide mechanism in which a slide mechanism is provided in a dovetail groove of a slide part and is composed of a plurality of legs that slide with the dovetail surface of a fixed part as a rail. The handle for sliding the sliding part relative to the fixed part and fixing it at an arbitrary position is preferably made of a transparent resin. Thereby, when the manual stage employs a dovetail slide rail type sliding mechanism, the manual stage can be further reduced in weight and operability can be improved.

  As described above, according to the manual stage of the present invention, it is possible to provide a manual stage that is easy to use and highly versatile.

It is a perspective view showing a schematic structure of one embodiment of a manual stage concerning the present invention. FIG. 4 is a side view of a dovetail-type manual stage and a plan view of an exploded manual stage. It is a side view which shows the vernier scale directly printed on the side by the side of the handle | steering-wheel of a sliding component and a fixed component. It is a top view which shows the Example which provided the handle | steering-wheel on both sides of a fixing component. It is the top view and side view of the X-axis stage used as the object of the present invention. It is the top view and side view of the X-axis stage (handle extension type) used as the object of the present invention. It is the top view and side view of an XY axis stage which are the objects of the present invention. It is the top view and side view of a Z-axis stage used as the object of the present invention. It is the top view of the X-axis stage used as the object of this invention, a bottom view, and a side view. It is the top view, bottom view, and side view of a Z-axis stage which are the objects of the present invention. It is the top view of the X-axis stage used as the object of this invention, a bottom view, and a side view. It is a top view, a bottom view, and a side view of an X stage (a dovetail groove feed screw type) that is an object of the present invention. It is the top view, bottom view, and side view of the X-axis stage (the dovetail groove slim feed screw type) used as the object of the present invention. It is the top view, bottom view, and side view of the X-axis stage (the dovetail groove slim feed screw type) used as the object of the present invention. It is the top view, bottom view, and side view of the rotation stage which are the objects of the present invention. It is the top view of the X-axis stage used as the object of this invention, a bottom view, and a side view. FIG. 3 is a plan view, a bottom view, and a side view of an X-axis coarse / fine movement stage that is an object of the present invention. It is the top view and side view of the Z-axis support | pillar attachment stage used as the object of this invention. It is the top view and side view of the Z-axis support | pillar attachment stage used as the object of this invention. It is a perspective view which shows the conventional common X-axis dovetail-type stage. It is a perspective view which shows the conventional general XY-axis dovetail stage. It is the top view and side view which show the conventional common feed screw type stage. It is a perspective view which shows the conventional common simple ball-type stage. It is the top view and sectional drawing which show the conventional common dovetail slide rail type | mold stage.

  Hereinafter, an embodiment of a manual stage according to the present invention will be described in detail with reference to the drawings. In this embodiment, an X-axis dovetail-type stage will be described as an example of a manual stage. Further, the present invention is also applied to the feed screw stage shown in FIG. 22, the simple ball stage shown in FIG. 23, or the dovetail slide rail stage shown in FIG. Furthermore, the present invention can be applied to other manual stages such as a linear ball stage and a cross roller stage.

  FIG. 1 is a perspective view showing a configuration of one embodiment of a dovetail type manual stage. In the dovetail-type manual stage 1, a sliding part 4 including an ant 2 protruding in a trapezoidal shape is slidably fitted to a fixed part 5 including a dovetail groove 3 recessed in a trapezoidal shape. The fixing component 5 is fixed to a base (not shown) through a base 8 having a base fixing fastening hole 6. The sliding component 4 is connected to a precision device (not shown) via a bolt (not shown) inserted into the precision device mounting hole 7. The sliding component 4 moves relative to the fixed component 5 in the direction of the arrow in the figure by rotating the handle 9.

  FIG. 2 shows a side view of the dovetail-type manual stage 1 and a plan view of the disassembled manual stage 1. 2A is a side view of the dovetail-type manual stage 1 viewed from the direction A in FIG. 1, and FIG. 2B is a plan view viewed from the BB direction in FIG. 2A. FIG. 2 (c) is a plan view seen from the CC direction of FIG. 2 (a). The sliding mechanism of the dovetail stage includes a rack 13 fixed to the dovetail 3 of the sliding component 4 by a rack mounting pin 15 and a pinion gear 14 inserted into the fixed component 5. That is, by rotating the handle 9, the pinion gear 14 connected to the handle 9 is rotated, and the rack 13 engaged with the pinion gear 14 is translated.

  A stopper 16 is attached to the side surface of the sliding component 4. The stopper 16 moves along with the movement of the sliding component 4 in the opening of the stopper pressing plate 17 attached to the fixed component 5. By tightening the screw of the stopper 16, the sliding component 4 is fixed at that position. One end of the pinion gear 14 inserted into the fixed component 5 is connected to the handle 9, but the other end contacts the pressurizing adjustment screw 12. The pressure adjusting screw 12 presses the pinion gear 14 to finely adjust sliding by the rack 13 and the pinion gear 14 by contact friction. That is, when the pressure adjusting screw 12 is tightened, the rotation operation by the handle 9 becomes heavy, and when the pressure adjusting screw 12 is loosened, the rotation operation by the handle 9 becomes light.

  As shown in FIGS. 1 and 2, a vernier scale 10 is attached to the sliding part 4 and the fixed part 5 on the handle 9 side. A vernier scale 10 a is attached to the sliding part 4, and a vernier scale 10 b is attached to the fixed part 5. Here, in the conventional manual stage, since there are the stopper 16 and the stopper pressing plate 17, the vernier scales 10 a and 10 b cannot be attached to both side surfaces of the sliding component 4 and the fixed component 5. Further, in the conventional manual stage, since the pressure adjusting screw 12 is provided, the handle 9 cannot be attached to both side surfaces.

  According to the conventional general X-axis dovetail stage 100 shown in FIG. 20, the fixed component 5 and the sliding component 4 shown in FIG. 2 are made of aluminum whose surface is anodized. Further, the handle 9 shown in FIG. 2 is made of brass and plated. Also, among the sliding mechanisms shown in FIG. 2, the rack 15 is made of brass plated with rust prevention treatment, and the pinion gear 14 is plated with free cutting steel (SUM) as rust prevention treatment. Things are used.

  In the manual stage 1 of this embodiment, the fixed component 5 and the sliding component 4 are made of a transparent resin. Here, the resin is, for example, an acrylic resin, a polycarbonate resin, or the like. The term “transparent” means a degree of transparency that allows the material behind the part to be seen through the part. The material includes not only a transparent material but also a translucent material.

  The above-described resin is transparent and colored as necessary. For example, the manual stage 1 colored red, yellow, and green is prepared, and the manual stage 1 is selectively used depending on the degree of danger or importance of the place where the manual stage 1 is attached. Further, when attention is to be paid to a specific manual stage 1, the manual stage 1 colored in yellow is used. In addition, each coloring can be properly used according to the purpose of use of the manual stage 1 and the classification according to the place of use. Furthermore, you may color the black used for the conventional manual stage.

  In this embodiment, the moving amount of the sliding component 4 with respect to the fixed component 5 is directly on the side surface on the handle 9 side of the sliding component 4 with respect to the vernier scale 10 b printed directly on the side surface on the handle 9 side of the fixed component 5. It is measured by reading the vernier scale 10a to be printed. As shown in FIGS. 20 and 21, in the conventional manual stage 1, the scale is displayed by fixing the display plate to the sliding component 4 and the fixing component 5 with pins, but in the present invention, the sliding component 4 is displayed. And it can print directly on those surfaces by making it from fixed parts 5 resin. Thereby, it is possible to reduce these display boards and pins. Then, the operator of the manual stage 1 visually reads the moving amount of the vernier scale 10b of the sliding component 4 with respect to the vernier scale 10b printed on the fixed component 5 while operating the handle 9.

  In order to read the movement amount, first, the value of “0” on the vernier scale 10b is read in units of 1 mm from the value of the vernier scale 10a, and this is set to a numerical value A of about 1 mm. Next, looking at the vernier scale 10b, the value of the vernier scale 10b at the same position as the vernier scale 10a is read, and this is set as a numerical value B of about 0.1 mm. A numerical value obtained by adding B to A is a reading numerical value.

  FIG. 3 shows vernier scales 10a and 10b printed directly on the side surfaces of the sliding component 4 and the fixed component 5 on the handle 9 side. These vernier scales 10a and 10b can be viewed from the back side because the sliding component 4 and the fixed component 5 are made of transparent resin. Accordingly, depending on how the manual stage 1 is installed, even if the operator has to operate from the side opposite to the side on which the handle 9 of the manual stage 1 is attached, the vernier can be easily operated while operating the handle. The scales 10a and 10b can be read to adjust the position of the precision instrument for positioning and focusing.

  Further, the numbers of the vernier scales 10a and 10b printed on the side surfaces of the sliding component 4 and the fixed component 5 are printed upside down so that they can be read from the back surface. Thus, even when the operator has to operate from the side opposite to the side on which the handle 9 of the manual stage 1 is attached, the numbers on the vernier scales 10a and 10b are easily read while operating the handle. The position of the device can be adjusted for positioning and focusing.

  FIG. 4 shows an embodiment in which handles are provided on both sides of the fixed component. FIG. 4 is a plan view corresponding to FIG. 2C as seen from the CC cutting line of FIG. The handles 9 a and 9 b are provided at two locations on both sides of the fixed component 5. That is, instead of the pressurizing adjustment screw 12 provided on the conventional manual stage, the handle 9b is used, and the pinion gear 14 connected to the handle 9a is further connected to the handle 9b. With this configuration, both the handles 9a and 9b are connected to the pinion gear 14 of the sliding mechanism, and the fixed component 5 can be slid with respect to the sliding component 4 from any side of the main driving stage 1 by operating the handle. It becomes possible.

  In another embodiment, the pinion gear 14 and the rack 15 that are sliding mechanisms are made of a resin such as an acrylic resin or a polycarbonate resin, and can be viewed from the outside of the manual stage 1. That is, the main driving stage 1 becomes a so-called skeleton in which an internal mechanism can be visually observed. Thereby, the operation state of the pinion gear 14 and the rack 15 which are a sliding mechanism can be confirmed visually. Further, almost the manual stage 1 is made of a transparent resin, so that weight reduction is achieved.

  In another embodiment, the pinion gear 14 and the rack 15 which are sliding mechanisms are made of a transparent resin such as an acrylic resin or a polycarbonate resin. Thus, the sliding mechanism is made of a transparent resin in addition to the sliding component and the fixed component, and the scales printed on the sliding component and the fixed component are further easily seen. Further, the weight of the manual stage can be further reduced by being made of a transparent resin.

  In another embodiment, the handle 9 for manually sliding the sliding component 4 is made of a transparent resin. By making the brass handle 9 made of lightweight resin, the manual stage 1 can be further reduced in weight and operability can be improved.

  5 to 19 illustrate a part of a dovetail type manual stage that is an object of the present invention. These drawings are described by a plan view, a bottom view, a side view, etc., but the display of each drawing is omitted. These conventional manual stages can be the manual stage 1 according to the present invention by including the features of claims 1 to 7 of the present invention. However, the conventional manual stage is not limited to these examples. The present invention is applied to a groove-type manual stage, for example, an X-axis dovetail stage, an XY-axis dovetail stage, a Z-axis dovetail stage, and a rotary stage.

  Further, the manual stage 1 according to the present invention is not limited to the dovetail type manual stage 1 described above, but can be similarly applied to the feed screw type stage 300 shown in FIG. For example, the sliding mechanism of the feed screw type stage 300 is constituted by a female screw cylinder 306 and a male screw rod 307, but other sliding parts 304, fixing parts 305, handles 309, scales 310a, 310b, etc. This is the same as the X-axis dovetail stage 100 described above.

  The same applies to the simple ball stage 400 shown in FIG. For example, the sliding mechanism of the simple ball stage 400 includes a ball 403 and feeding means 408 such as a wire 406 and a spring 407, but other sliding parts 404, a fixing part 405, a handle 409, a scale 410a, About 410b etc., it is the same as that of the X-axis dovetail stage 100 mentioned above.

  The same applies to the dovetail slide rail stage 500 shown in FIG. For example, the sliding mechanism of the dovetail slide rail stage 500 is composed of the leg portion 508, but the other sliding component 504, fixed component 505, handle 509, scales 510a and 510b, etc. This is the same as the dovetail stage 100.

  Further, for example, a linear ball type stage, a cross roller type stage, etc. provided with other sliding mechanisms are provided with the features of claims 1 to 7 of the present invention, whereby the manual stage 1 according to the present invention is obtained. be able to.

  1 manual stage, 2,101,301,501 ant, 3,102, 302,502 ant groove, 4,104,304,404,504 sliding part, 5,105,205,305,405,505 fixed part, 6, 106, 506 Mounting holes for fixing the base, 7, 107, 507 Holes for attaching precision devices, 8, 108 Base, 9a, 9b, 109, 209a, 209b, 309, 409, 509 Handle, 10a, 10b, 110a, 110b, 310a, 310b, 410a, 410b, 510a, 510b (vernier) scale, 12 pressure adjusting screw, 13 rack, 14 pinion gear, 15 rack mounting pin, 16,316 stopper, 17 stopper pressing plate, 100 X-axis ant Groove-type stage, 200 XY-axis dovetail-type stage, 201 fastener, 02 Upper unit, 203 Lower unit, 204 Sliding unit, 206 Bonding surface, 207a, 207b Connection hole, 300 Feed screw type stage, 306 Female screw cylinder, 307 Male screw rod, 400 Simple ball type stage, 401 Sliding part Side groove part, 402 Fixed part side groove part, 403 Ball, 406 Wire, 407 Spring, 408 Feeding means, 500 Dovetail slide rail type stage, 508 Leg part.

Claims (10)

A sliding part to which a precision instrument is attached and a fixed part connected to the base are coupled via a sliding mechanism, and the sliding part is slid by a handle operation, and is attached to the sliding part and the fixed part, respectively. A manual stage that visually reads the amount of movement of the sliding part relative to the fixed part indicated by the scale printed on the display board, and adjusts the position of the attached precision instrument,
A manual stage characterized in that the sliding part and the fixed part are made of transparent resin, and the scale is directly printed on each side surface of the sliding part and the fixed part.   2. The manual stage according to claim 1, wherein the scale numbers printed on the side surfaces of the sliding component and the fixed component are printed upside down so that they can be read from the back surface.   3. The manual stage according to claim 1, wherein the transparent resin used for the sliding part and the fixed part is a resin colored in a color including black.   The manual stage according to any one of claims 1 to 3, wherein the sliding mechanism is made of a resin colored in a color including black and is visible from the outside of the manual stage. .   The manual stage according to any one of claims 1 to 3, wherein the sliding mechanism is made of a transparent resin.   The manual stage according to any one of claims 1 to 5, wherein the sliding mechanism is provided with a rack provided at an ant of the sliding part and a fixed part, one end of which is connected to the handle. A manual stage characterized in that it is a dovetail type sliding mechanism composed of a gear, and handles are provided at two positions on both sides of the fixed part, and both handles are connected to a pinion gear.   The manual stage according to claim 6, wherein the handle is made of a transparent resin.   The manual stage according to any one of claims 1 to 5, wherein the sliding mechanism includes a male screw rod provided on the fixed part and connected to the handle, and a female screw cylinder provided on the sliding part. A manual stage characterized in that it is a feed screw type sliding mechanism and the handle is made of a transparent resin.   6. The manual stage according to claim 1, wherein the sliding mechanism includes a plurality of sliding mechanisms disposed between a groove provided in the fixed component and a groove provided in the sliding component. This is a simple ball type sliding mechanism composed of a ball and a feeding means for sliding the sliding part with a wire relative to the fixed part by rotating the handle, and the handle is made of a transparent resin. A manual stage characterized by that.   The manual stage according to any one of claims 1 to 5, wherein the sliding mechanism is provided in a dovetail groove of the sliding component, and includes a plurality of legs that slide with the dovetail surface of the fixed component as a rail. A dowel groove slide rail type sliding mechanism, wherein the handle for sliding the sliding part against the fixed part and fixing it at an arbitrary position is made of a transparent resin.

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