JP4574716B2 - Manual stage configuration system - Google Patents

Description

The present invention relates to a manual stage configuration system, in particular, a sliding component precision equipment is mounted by fasteners, and a fixed part connected to the base is connected via a sliding mechanism by a fastener, the handle operation slide the sliding parts by relates manual stages configuration system using a manual stage unit for adjusting the position of the attached precision instruments.

  Precision devices such as electrical devices such as CCD cameras and sensors, optical devices such as lenses and microscopes, and illumination devices such as LEDs must be adjusted for positioning and focusing. Further, there may be a case where the position is further finely adjusted after the attachment.

  These precision instruments are installed and adjusted on a machine element generally called a “stage”. The manual stage refers to a stage in which a part is manually slid by a handle operation. In this manual stage, a sliding part to which equipment is attached and a fixed part connected to a base are coupled via a sliding mechanism, and the sliding part is manually slid with respect to the fixed part by a handle operation. Is common. This manual stage includes, for example, a dovetail stage, a feed screw stage, a linear ball stage, a cross roller stage, a simple ball stage, a dovetail slide rail stage, etc., depending on the sliding mechanism. Each stage has various types according to the purpose of use. For example, in the case of a dovetail stage, an X-axis dovetail stage that slides in one direction, or slides in two directions that are substantially orthogonal. There are an XY-axis dovetail stage that moves, a Z-axis dovetail stage that slides in the vertical direction, a rotary stage that rotates and slides, and the like.

  FIG. 29 shows a conventional general X-axis dovetail stage. In the X-axis dovetail stage 200, a sliding part 204 having a dovetail 202 protruding in a trapezoidal shape is movably fitted to a fixed part 205 having a dovetail groove 203 recessed in a trapezoidal shape. The fixing component 205 is fixed to a base (not shown) by a fastener (not shown) through a base plate 208 having a base fixing fastening hole 206. The sliding component 204 is connected to a precision instrument (not shown) via a fastener (not shown) inserted into the precision instrument mounting hole 207. The sliding component 204 moves in the direction of the arrow in the figure by rotating the handle 209. This is because a drive mechanism such as a rack and pinion gear (not shown) or a feed screw (not shown) is incorporated in the X-axis dovetail stage 200. By these drive mechanisms, the rotation of the handle 209 is converted into the movement of the sliding component 204 in the horizontal direction. The amount of movement is measured by a pair of vernier scales (the back surface of the X-axis dovetail stage 200 in FIG. 29).

  The X-axis dovetail stage 200 is provided with a stopper function for fixing the sliding component 204 to an arbitrary position with respect to the fixing component 205. This stopper function includes a pressing plate 211 fastened to the side surface of the fixing member 205 with a set screw 217 and a sliding fixing screw 210 with a washer 218 screwed into a screw hole (not shown) opened in the sliding component 204. Composed. The sliding fixing screw 210 is inserted into the opening 216 opened in the pressing plate 211. When the sliding fixing screw 210 is tightened, the pressing plate 211 is pressed against the sliding component 204 via the washer 218, and the sliding component 204 is fixed to the fixed component 205 at that position by the frictional force.

  FIG. 30 shows a side surface and an exploded plane of the X-axis dovetail stage 200 of FIG. 30A is a side view of the dovetail stage 200 viewed from the L direction in FIG. 29, and FIG. 30B is a plan view viewed from the MM direction in FIG. 30A. FIG. 30C is a plan view seen from the NN direction in FIG. In the X-axis dovetail stage 200, the dovetail 202 is attached to the sliding component 204, and the rack 213 is fixed to the dovetail 202 by rack attachment pins 215. Further, the pinion gear 214 inserted into the fixed component 205 is connected to the handle 209. That is, by rotating the handle 209, the pinion gear 214 connected to the handle 209 is rotated, and the rack 213 engaged with the pinion gear 214 is translated.

  The sliding fixing screw 210 moves in the opening 216 of the holding plate 211 attached to the fixing component 205 as the sliding component 204 moves. By tightening the screw of the sliding fixing screw 210, the sliding component 204 is fixed at that position. Further, one end of the pinion gear 214 inserted into the fixed component 205 is connected to the handle 209, but the other end contacts the pressurizing adjustment screw 212. The pressurizing adjustment screw 212 presses the pinion gear 214 to finely adjust sliding by the rack 213 and the pinion gear 214 by contact friction. That is, when the pressurization adjustment screw 212 is tightened, the rotation operation by the handle 209 becomes heavy, and when the pressurization adjustment screw 212 is loosened, the rotation operation by the handle 209 becomes light.

  FIG. 31 shows a conventional general feed screw stage. 31A is a side view of the feed screw stage 300, FIG. 31B is a plan view seen from the direction P-P in FIG. 31A, and FIG. It is the top view seen from the QQ direction of 31 (a). The feed screw stage 300 includes a sliding component 304 having an ant 302, a fixed component 305 having an ant groove 303, a male screw rod 307 as a sliding mechanism, a female screw cylinder 306, a handle 309, and a stopper 316. . The scale display board 310b is attached to the sliding part 304 side, and the scale display board 310a is attached to the fixed part 305 side. By engaging the male screw rod 307 with the female screw cylinder 306 and rotating the handle 309, the sliding component 304 slides with respect to the fixed component 305. The stopper 316 fixes the sliding component 304 to the fixed component 305 at an arbitrary position.

  FIG. 32 shows a conventional general dovetail slide rail type stage. FIG. 32A is a plan view of the dovetail slide rail stage 400, and FIG. 32B shows an RR cross section of FIG. The dovetail slide rail stage 400 includes a sliding component 404 having an dovetail 403, a fixed component 405 having an dovetail 402, a handle 409, and a leg 408 attached to the sliding component 404. A scale display plate 410b is attached to the sliding component 404 side, and a scale display plate 410a is attached to the fixed component 405 side. In addition, the fixing component 405 is provided with a base fixing fastening hole 406, and the sliding component 404 is provided with a precision device mounting hole 407. The sliding component 404 and the fixed component 405 are in contact with each other by a plurality of legs 408 attached to the sliding component 404. That is, the leg 408 slides while contacting the rail-shaped ant 402 of the fixed component 405. The handle 409 is threaded at the tip, and when loosened, the sliding component 404 can be slid with respect to the fixed component 405, and when tightened, the sliding component 404 can be fixed with respect to the fixed component 405.

  In the simple ball stage, the groove provided in the sliding part and the groove provided in the fixed part are substantially semi-cylindrical grooves facing each other, and when these are combined, the simple ball type stage becomes substantially cylindrical. A plurality of balls are fitted into the substantially cylindrical groove. The sliding part and the fixed part slide smoothly by the rotation of the ball. In order to slide the sliding component with respect to the fixed component, a wire incorporating a spring is stretched in a ring shape. Then, a part of the wire is wound around the handle, the wire is moved by rotating the handle, and the sliding component to which the wire is connected slides with respect to the fixed component.

  In the linear ball stage, a fixed part and a sliding part form a Gothic arc groove that is a sliding surface of a pseudo-cylindrical, and the ball is arranged so as to be sandwiched between the Gothic arc groove. This is a mechanism for sliding sliding parts.

  The cross-roller stage is fixed by forming a roller race that is a V-shaped groove between the fixed part and the sliding part, and the cylindrical rollers are alternately arranged in the space between the two roller races. This is a mechanism for sliding the sliding component relative to the component.

  These manual stages include a manual stage body composed of sliding parts and fixed parts, and, for example, a scale display plate, a sliding fixing screw, a sliding adjustment screw, a handle, a base plate, a pressure adjusting screw, and a movement limiting plate. Can be disassembled into parts. However, it is common that each standard part is attached to the manual stage body to form a manual stage. When a special part is required, a manual stage to which the part is attached may be manufactured as a custom order each time.

  On the other hand, Patent Document 1 discloses a general-purpose dovetail sliding unit that is an XY-axis dovetail stage. Here, by combining a plurality of dovetail sliding units with connecting parts that are detachable by fasteners, the position of the precision instrument can be adjusted in the planar biaxial direction, and a plurality of dovetail sliding units For example, a dovetail sliding unit that can easily change the direction of the handle and the like is described.

  Patent Document 2 discloses a compound dovetail sliding unit that is an XY-axis dovetail stage. Here, a technique for connecting a plurality of dovetail sliding units without using connecting parts is described. In addition, there is described a dovetail sliding unit that can share the rotation axis of each handle of a plurality of dovetail sliding units and perform two handle operations at one place.

Japanese Patent No. 3923997 JP 2008-8446 A

  In the conventional manual stage, each standard part is generally attached to the manual stage main body, and the manual stage is generally sold as a finished product of the manual stage. However, as the manual stage becomes widespread, demands for improvement in user-friendliness are increasing. In addition, the use of the manual stage by the user is diversified and sophisticated, and the demand for additional functions from the user to the manual stage is increasing, making it difficult to cope with the standard manual stage. On the other hand, even if the number of manual stage models is increased, a huge number of models must be lined up as products in order to combine the components. Also, it is not easy for the user to select a desired model from a huge product lineup.

As an example of the user's request for improvement of the manual stage, since the scale display plate is attached only to one side of the manual stage, the handle operation and the slide fixing screw are operated from the opposite side of the scale. There is a problem that operability is poor. Moreover, about the display method of a scale, there exists a request | requirement of using the scale of the different format according to the intended use instead of the conventional vernier scale. Furthermore, the conventional manual stage has a problem that the stopper function can be operated only from one side of the fixed part, and the operability is poor.

  In addition, as an example of a request for adding a function of the manual stage from the user, the manual stage has a base plate that is connected to a fixed part fixed to the base by fastening a fastener. Alternatively, there is a problem that the clamped fasteners are loosened due to repeated mechanical vibrations of the surrounding driving devices and the manual stage is displaced. Then, there is a demand for a manual stage for reducing the looseness of the fastener from the user, and a demand for a manual stage for reducing vibration even when subjected to mechanical vibration.

The purpose of the present application is to solve the above problems, the parts attached to the manual stage body, to provide ease of use, required functions, and high-performance manual stage configuration system that can be selected to suit the application to be used is there.

To achieve the above object, the manual stage configuration system according to the present invention is connected sliding portion product precision equipment is attached has the ants, and the base plate which is fixed on the base with a dovetail groove Ri or fixed part article Rana, all respectively provided on both sides of the sliding parts and the fixed parts in accordance with the mounting position of the screw, freely scale mounting all the scale display panel part exchange of a plurality of scale display plate parts A plurality of screw holes are provided on both sides of the fixed part, and a plurality of positions are fixed to the fixed part by pressing the sliding part against the protruding part and inclining the protruding part to inward. Sliding and fixing screw holes with interchangeable sliding fixing parts and multiple parts on both sides of the fixing parts. Pushing the sliding parts with the protruding parts tilted inward against the protruding parts And sliding parts Sliding adjustment screw parts for fine adjustment of the degree of adjustment are provided on the side of the sliding adjustment screw hole, the handle connecting means for exchanging a plurality of handle parts, and the fixed part on the opposite side of the handle. The pressure adjusting screw part has a pressure adjusting screw hole that can be replaced, and a base plate mounting hole that allows a plurality of base plate parts to be replaced. On both sides of the manual stage body, there are walls on both sides of the fixed part. Either a manual stage main body provided with a groove in the vertical direction so as to form an inverted triangular protrusion on the part, a plurality of scale display plate parts groups attached to sliding parts or fixed parts, and a manual stage main body Adjust the degree of sliding of sliding parts from either side of manual stage body or from both sides, with multiple groups of sliding fixing screw parts that can be used to fix sliding parts from both sides or from both sides that can be used to And sliding adjusting screw component group number, and a plurality of handle component groups, and a plurality of pressurized adjusting screw component groups, a plurality of base plate component group is constituted by a component group consisting of, incorporated into the manual stage body by the user parts group is selected, further components are selected from the selected component group, a those parts a set of manual stages and ing manual stages configuration system was completed built into a manual stage body, a plurality of information and each of the terminals of the user, and a manual stage station server are connected via a communication network, the manual stage station server includes a manual stage main information storage unit that stores information about manual stages body, for each component A component information storage unit that stores information, a component group selected by the user, and information about the component selected from the component group The component information receiving unit that receives the information from the component information storage unit, the component compatibility verification unit that verifies the compatibility when the completed manual stage is built into the manual stage body, and the compatibility verification unit If it is determined that there is no problem in compatibility, the image generation unit that generates an image in which the selected part is incorporated in the manual stage body, and the compatibility verification unit determines that there is a problem in compatibility, a warning message is displayed on the user terminal. When the compatibility verification unit determines that there is no problem with the compatibility, the component information transmission unit that transmits the image generated by the image generation unit to the user terminal ,
The provided, compliance verification unit manually stage body information storage unit stored in the information from the stored information in the component information storage unit for the selected component by the user, each component manually stage body that is selected It is characterized by verifying the problem on the system when it is merged into the system.

With the above configuration, the manual stage configuration system allows the sliding fixing screw to pass through the sliding fixing screw holes provided in the wall portion and to strike the protruding portion on both sides of the fixed component, and to incline the protruding portion inward. Thus, the sliding mechanism is pressed down to provide a stopper mechanism that fixes the position of the sliding component relative to the fixed component. This stopper mechanism eliminates the need for a stopper mechanism that has conventionally fixed the position of the sliding component relative to the fixed component by means of a sliding fixing screw screwed into the sliding component and a holding plate attached to the fixed component. The degree of freedom of arrangement of screw holes on both side surfaces of the sliding component increases.

  As a result, the scale display plate part, the sliding fixing screw part, the handle part, etc. attached to the side surface of the sliding part or the fixing part can be attached without interfering with each other. Therefore, on the side of the manual stage body composed of sliding parts and fixing parts, the scale mounting screw holes, sliding fixing screw holes, handle connecting means, and base plate mounting holes are set functionally. A plurality of scale display plate parts, a plurality of sliding fixing screw parts, a plurality of handle parts, and a plurality of base plate parts can be exchanged. As a result, the usability of the manual stage can be improved, and unitization for selecting parts in accordance with required functions can be realized.

Also, the manual stage configuration system, the desired component groups from the component groups are selected by the user, the desired components are selected from within the selected component group, those parts are incorporated in the manual stage main completed Preferably, this is a set of manual stages. Thereby, the usability of the manual stage can be improved and parts can be selected in accordance with the function requested by the user.

In the manual stage configuration system, it is preferable that the scale mounting screw holes are respectively provided on both side surfaces of the manual stage main body in accordance with the mounting positions of all the screws of the plurality of scale display plate parts. The scale display board component preferably includes a form in which the scale is centered, a form in which both ends of the scale are the base points, and a form in which the main scale and the sub scale are reversed. Thereby, about a manual stage, the scale display board by several types of scale display methods can be selected previously, and the request from a user can be coped with. Further, depending on the selection of the scale display component, a vacant scale mounting screw hole is generated, and this hole can be used as a display board for other purposes.

In the manual stage configuration system , it is preferable that a plurality of sliding fixing screw parts are provided on both side surfaces of the fixing part. The sliding fixing screw component preferably includes a lever-type sliding fixing screw component in which a lever is attached to the screw and the screw is tightened by rotating the lever. Thus, the operator can perform the operation of fixing the sliding of the manual stage with the sliding fixing screw parts on either the left or right side of the manual stage, or can be fixed from both sides of the manual stage. Also, by using lever-type sliding fixing screw parts, it can be tightened firmly without using a screwdriver or other tools, and it can be manually operated under conditions of use that do not like manual stage displacement during impact. The fixing degree of the stage can be increased.

In addition, the manual stage configuration system further includes a pressure adjusting screw component on the side of the fixed component opposite to the handle, and the manual stage main body has a pressurizing pressure in which a plurality of pressure adjusting screw components can be exchanged. It is preferable to have an adjustment screw hole. The pressure adjusting screw component preferably includes a thumb screw type pressure adjusting screw component that tightens the screw by rotating the knob. Thereby, also about the pressurization adjustment screw component attached to the side opposite to a handle, a desired part can be selected from a plurality of pressurization adjustment screw components according to the function required for the pressurization adjustment screw component. . For example, in the past, the thumbscrew was adjusted by rotating it with a screwdriver, etc., but by using a thumbscrew type pressure adjustment screw component, it was quick and lightly moist without using a screwdriver or other tool. Fine adjustment is possible up to smooth movement.

In addition, the manual stage configuration system further includes a sliding adjustment screw part that is attached to the fixed part, and the manual stage main body is provided on the fixed part and abuts the protruding part to incline the protruding part inward. It is preferable to have a sliding adjustment screw hole to which a sliding adjustment screw part for finely adjusting the degree of sliding between the fixed part and the sliding part is attached. Are preferably provided at a plurality of locations on both side surfaces of the fixed component. This makes use of a stopper mechanism that fixes the position of the sliding component relative to the fixed component, and finely adjusts the degree of sliding between the fixed component and the sliding component by using a plurality of sliding adjustment screw components attached to the fixed component. be able to. In addition, by enabling the sliding adjustment screw parts to be attached to both sides of the fixed part, the operator can adjust the sliding of the manual stage with the sliding adjustment screw parts on either the left or right side of the manual stage. Alternatively, the adjustment can be made by using the left and right sliding adjustment screw parts simultaneously.

Further, in the manual stage configuration system , the component group further includes a plurality of movement restriction plate parts attached to the fixed parts, and the movement restriction plate parts have a movement range of the sliding fixing screw parts attached to the sliding parts. The manual stage main body is preferably limited by the width of the opening provided in the movement limiting plate component, and the screw hole to which the movement limiting plate component is attached is also used as the scale mounting screw hole provided in the fixed component. As a result, the manual stage unit newly arranges the screw holes by combining the screw holes used for the scale mounting screw holes with respect to the combination of the slide fixing screw parts and the movement restricting plate parts that have been conventionally used. Without being included in the manual stage unit.

Further, in the manual stage configuration system , the handle part has a female thread portion that has one end coupled to the handle coupling means and the other end engaged with the male thread at the distal end portion of the extension rod. Preferably, a joint handle part is included to stop the rotation of the. Thus, even when the handle is operated from a position away from the manual stage, it can be easily operated by using the joint handle part. Further, the handle part preferably includes a handle part connected to the electric motor by a coupler that further wraps the handle part connected to the handle connecting means. As a result, the conventional method of manually rotating the handle can be electrically operated by an electric motor or the like.

In the manual stage configuration system , the base plate component preferably includes a base plate component provided with a recess into which a magnet is fitted on the back surface of the base plate. As a result, the manual stage is firmly connected to the base by the magnetism of the magnet fitted on the back surface of the base plate component, and a fine shift of the base plate with respect to the base due to the occurrence of mechanical vibration or the like can be avoided. Thus, a desired component can be selected from a plurality of base plate components in accordance with the function required for the base plate component.

Further, in the manual stage configuration system , the base plate component has a concave storage portion that holds the plate-like elastic body and compresses and stores the elastic body by tightening a fastener that fixes the base plate component to the base. It is preferable that a base plate component provided on the back surface is included. Thereby, in the manual stage, tension is introduced into the fastener by the restoring force against the compression of the elastic body housed on the back surface of the base plate component, and loosening of the fastener due to occurrence of mechanical vibration or the like can be avoided. Thus, a desired component can be selected from a plurality of base plate components in accordance with the function required for the base plate component.

Further, in the manual stage configuration system , when the base plate component holds a plate-like viscoelastic body and a fastener for fixing the base plate component to the base is tightened, the base plate component and the base are connected via the viscoelastic body. Preferably, a base plate component having a concave storage portion configured to be connected on the back surface is included. As a result, the manual stage absorbs energy by the restoring force against the shearing of the viscoelastic body housed on the back surface of the base plate component, and can avoid minute vibration caused by occurrence of mechanical vibration or the like. Thus, a desired component can be selected from a plurality of base plate components in accordance with the function required for the base plate component.

As described above, according to the manual stage arrangement system according to the present invention, the component to be attached to the manual stage body, ease of use, required functions, and high-performance manual stage configuration can be selected to suit the application to be used A system can be provided.

It is explanatory drawing which shows the whole structure of the dovetail type manual stage unit which concerns on this invention. It is a perspective view which shows one assembly example of the dovetail type stage which assembly was completed. FIG. 4 is a side view of the dovetail stage and a plan view of the disassembled dovetail stage. It is sectional drawing which shows the sliding fixing mechanism and sliding adjustment mechanism of the fixing unit of a dovetail stage. It is a side view which shows arrangement | positioning of the handle | steering-wheel, sliding fixing screw, the screw hole for sliding adjustment, the screw hole for sliding fixing, a pressurization adjusting screw, etc. in the side surface of a sliding unit and a fixing unit. It is a perspective view of a manual stage main body, and a side view of a manual stage main body. It is explanatory drawing which shows the example of the components which comprise a scale display board component group. It is explanatory drawing which shows the example of the components which comprise a sliding fixation screw component group. It is explanatory drawing which shows the example of the components which comprise a handle | steering-wheel component group. It is explanatory drawing which shows the example of the components which comprise a pressurization adjustment screw component group. It is explanatory drawing which shows the example of the components which comprise a base board component group. It is explanatory drawing which shows the example of the components which comprise a movement restriction | limiting plate group. It is explanatory drawing which shows the manual stage structure system which concerns on this invention. It is the top view and side view of the X-axis stage used as the object of the present invention. It is the top view and side view of the X-axis stage (handle extension type) used as the object of the present invention. It is the top view and side view of an XY axis stage which are the objects of the present invention. It is the top view and side view of a Z-axis stage used as the object of the present invention. It is the top view of the X-axis stage used as the object of this invention, a bottom view, and a side view. It is the top view, bottom view, and side view of a Z-axis stage which are the objects of the present invention. It is the top view of the X-axis stage used as the object of this invention, a bottom view, and a side view. It is a top view, a bottom view, and a side view of an X stage (a dovetail groove feed screw type) that is an object of the present invention. It is the top view, bottom view, and side view of the X-axis stage (the dovetail groove slim feed screw type) used as the object of the present invention. It is the top view, bottom view, and side view of the X-axis stage (the dovetail groove slim feed screw type) used as the object of the present invention. It is the top view, bottom view, and side view of the rotation stage which are the objects of the present invention. It is the top view of the X-axis stage used as the object of this invention, a bottom view, and a side view. FIG. 3 is a plan view, a bottom view, and a side view of an X-axis coarse / fine movement stage that is an object of the present invention. It is the top view and side view of the Z-axis support | pillar attachment stage used as the object of this invention. It is the top view and side view of the Z-axis support | pillar attachment stage used as the object of this invention. It is a perspective view which shows the conventional common X-axis dovetail-type stage. It is the side view of the conventional general X-axis dovetail type stage, and the exploded top view. It is the side view which shows the conventional general feed screw type | mold stage, and the disassembled top view. It is the top view and sectional drawing which show the conventional common dovetail slide rail type | mold stage.

  Hereinafter, one embodiment of a manual stage unit according to the present invention will be described in detail with reference to the drawings. In the present embodiment, an X-axis dovetail type stage will be described as an example of the manual stage unit, but the present invention is not limited to this, but can be applied to an XY-axis dovetail type stage, a Z-axis dovetail type stage, a rotary stage, and the like. . Further, the present invention is also applied to the feed screw type stage shown in FIG. 31 other than the dovetail stage and the dovetail slide rail type shown in FIG. Furthermore, the present invention can be applied to other manual stages such as a linear ball stage, a cross roller stage, a simple ball stage, and the like.

(Configuration of dovetail type manual stage unit)
FIG. 1 is an explanatory diagram showing the overall configuration of a dovetail type manual stage unit. A block surrounded by a broken line in FIG. 1A shows the manual stage main body 2 of the manual stage unit 1. Moreover, the block enclosed with the broken line of FIG.1 (b) shows the components group 20 of the manual stage unit 1. FIG. The component group 20 includes, for example, a scale display plate component group 3, a sliding fixing screw component group 4, a handle component group 5, a pressure adjusting screw component group 6, a sliding adjusting screw component group 7, and a base plate component group 8 , Movement restriction plate parts group 9 and the like are included. The dovetail type manual stage unit 1 is composed of a manual stage body 2 composed of a sliding part 104 having an ant 102 and a fixed part 105 having an ant groove 103, and the above-described parts group 20, and is selected. The dovetail stage is completed by attaching each part further selected from each part group 20 to the manual stage body 2. In addition, in the component group 20 of FIG.1 (b), the standard component of each component is shown in figure. Further, in the manual stage main body 2 of the dovetail type manual stage unit 1, the sliding component 104 and the fixed component 105 are a rectangular plane or a rectangular parallelepiped, but not limited to this, a square plane or a cube It may be a manual stage body 2 having

(Configuration of dovetail stage)
As a premise for explaining the dovetail type manual stage unit 1, the configuration of the dovetail type stage 100 completed by assembling the parts on the manual stage main body 2 will be explained. FIG. 2 is a perspective view showing an assembly example of the dovetail stage 100 assembled and completed. FIG. 2 shows an assembly example in which general parts are selected and assembled in the manual stage main body 2. In the dovetail stage 100, a sliding component 104 including an ant 102 protruding in a trapezoidal shape is slidably fitted to a fixed component 105 including a dovetail groove 103 recessed in a trapezoidal shape. The fixing component 105 is fixed to a base (not shown) through a base plate 108 having a base fixing fastening hole 106. The sliding component 104 is connected to a precision device (not shown) via a fastener (not shown) inserted into the precision device mounting hole 107. The sliding component 104 moves relative to the fixed component 105 in the direction of the arrow in the figure by rotating the handle 109.

  FIG. 3 shows a side view of the dovetail groove stage 100 and a plan view of the disassembled dovetail groove stage 100. 3A is a side view of the dovetail stage 100 viewed from the A direction in FIG. 1, and FIG. 3B is a plan view viewed from the BB direction in FIG. 3A. 3 (c) is a plan view seen from the CC direction of FIG. 3 (a). The sliding mechanism of the dovetail stage 100 includes a rack 13 attached to the sliding component 104 and a pinion gear 14 inserted into the fixed component 105. That is, by rotating the handle 109, the pinion gear 14 connected to the handle 109 is rotated, and the rack 13 engaged with the pinion gear 14 is translated.

  One end of the pinion gear 14 inserted into the fixed component 105 is connected to the handle 109, and the other end contacts the pressurizing adjustment screw 12. The pressure adjusting screw 12 presses the pinion gear 14 to finely adjust sliding by the rack 13 and the pinion gear 14 by contact friction. That is, when the pressurization adjusting screw 12 is tightened, the rotation operation by the handle 109 becomes heavy, and when the pressurization adjustment screw 12 is loosened, the rotation operation by the handle 109 becomes light.

  FIG. 4A shows a stopper mechanism for a dovetail-type manual stage in a DD section of FIG. 5 shows the arrangement of the handle 109, the sliding fixing screw 10, the sliding adjusting screw hole 15, the sliding fixing screw hole 16, the pressurizing adjusting screw 12 and the like on the side surfaces of the sliding component 104 and the fixing component 105. Indicates. A sliding fixing screw 10 is attached to the side surface of the fixing component 105. A groove 32 is provided on the side of the dovetail 103 of the fixed component 105 so as to form an inverted triangular protrusion 31, and the sliding fixing screw tip 33, which is the tip of the sliding fixing screw 10, is inserted into the groove 32. The projecting portion 31 is inclined to the inside as shown by the arrow in FIG. Then, the dovetail 102 of the sliding part 104 fitted into the dovetail groove 103 of the fixed part 105 is pressed. In this way, the position of the sliding component 104 with respect to the fixed component 105 is fixed.

  Since the protruding portion 31 has a small thickness at a portion connected to the fixing component 105, the protruding portion 31 is easily elastically deformed by the sliding fixing screw tip 33 of the sliding fixing screw 10. And the compression force which pushes the sliding fixing screw 10 outward generate | occur | produces with the restoring force of the protrusion part 31 which contact | abutted against the sliding fixing screw 10 and inclined inside.

  The projecting portion 31 and the groove portion 32 are provided on the wall portions on both sides of the fixed component 105, and the sliding fixing screw 10 can be used by being mounted from either the left or right side. Alternatively, the sliding fixing screws 10 can be mounted on both the left and right sides and used simultaneously. That is, the stopper function in the dovetail stage 100 can fix the position of the sliding component 104 relative to the fixed component 105 from either side of the dovetail stage 100, and can be firmly fixed from both sides. Further, as shown in FIG. 5, the sliding fixing screw holes 16 are arranged at two locations on one side in this embodiment, and a stopper function can be exhibited at any position. Further, the sliding fixing screws 10 may be attached to all four locations for use.

  FIG. 4B shows an adjustment mechanism of the dovetail stage 100 in the section EE in FIG. Using the protrusion 31 and the groove 32 used by the stopper function described above, the slide adjustment screw 11 is inserted into the slide adjustment screw hole 15 and the protrusion 31 is inclined inward in the direction indicated by the arrow in the figure. Then, the sliding component 104 is pushed to finely adjust the degree of sliding between the fixed component 105 and the sliding component 104. As shown in FIG. 3, the sliding adjustment screw holes 15 are provided on both sides of the fixed component 105, and in this embodiment, three holes are provided on one side. In other words, the adjustment function in the manual stage 1 can be adjusted from either side of the manual stage 1 and can also be adjusted from both sides with a left-right balance. Further, as shown in FIG. 5, in the present embodiment, three screw adjustment screw holes 15 are arranged on one side, and an adjustment function can be exhibited at any position. Alternatively, the adjustment may be made by selecting two places or selecting all three places and inserting the slide adjusting screw 11.

  In this way, the dovetail stage 100 has the sliding fixing screw 10 penetrating the sliding fixing screw hole 16 provided in the wall portion on both sides of the fixing component 105 and abutting against the protruding portion 31. The stopper mechanism is configured to incline the sliding component 104 by inclining 31 to the inside and fix the position of the sliding component 104 with respect to the fixed component 105. With this stopper mechanism, as shown in FIG. 29, the position of the sliding component 204 with respect to the fixed component 205 is conventionally adjusted by a sliding fixing screw 210 screwed into the sliding component 204 and a holding plate 211 attached to the fixing component 205. The stopper mechanism which has been fixed becomes unnecessary, and the degree of freedom of arrangement of screw holes on both side surfaces of the fixed component 105 and the sliding component 104 is greatly increased.

  As a result, the scale display plate part 3, the sliding fixing screw part 4, the handle part 5 and the like attached to both sides of the sliding part 104 or the fixing part 105 are attached without interfering with each other. Therefore, the arrangement of the scale display plate mounting screw hole 18, the sliding fixing screw hole 16, and the handle connecting means 23 on both sides of the manual stage main body 2 composed of the sliding component 104 and the fixing component 105 is functional. The multiple scale display board parts group 3, the multiple sliding fixing screw parts group 4, the multiple handle parts group 5 and the like can be exchanged, improving the usability of the manual stage. The unit can be selected to select parts according to the function to be performed.

(Manual stage body of manual stage unit)
FIG. 6 shows a perspective view of the manual stage body 2 and a side view of the manual stage body 2. FIG. 6A is a perspective view of the manual stage main body 2. 6 (b) is the F side surface (pressure adjusting screw 12 side) of FIG. 6 (a), and FIG. 6 (c) is the G side surface (handle component 5 side) of FIG. 6 (a). FIG. 6C is the H bottom surface of FIG. The manual stage main body 2 is in a state in which a part selected from the part group 20 described above is not attached, and the sliding part 104 and the fixing part 105 are provided with holes for mounting each part, for example, a sliding part. An adjustment screw hole 15, a sliding fixing screw hole 16, a scale display plate mounting hole 18, a base plate mounting hole described later, a pressure adjusting screw hole 34, and the like are provided. For the handle component group 5, a handle connecting means 23 is provided. Each component of the component group 20 includes a plurality of component types, and the operator can select a desired type of component from a plurality of component types for each selected component.

(Manual stage unit group)
In FIG. 7, the example of the components which comprise the scale display board component group 3 is shown. FIG. 7A shows a general vernier scale display plate component 3a. The vernier type scale display board component 3a includes a scale 21a on the fixed component 105 side and a scale 21b on the sliding component 104 side. In order to read the amount of movement by the vernier scale 21, first, the position of the scale 21b is read in units of 1 mm at the position “0” of the scale 21b, and is set to a numerical value A in the order of 1 mm. Next, looking at the scale 21b, the value of the scale 21b at the same position as the vernier scale 21a is read, and is set as a numerical value B of about 0.1 mm. A numerical value obtained by adding B to A is a reading numerical value.

  FIG. 7B shows a scale display board component 3b in which the scale 21 is displayed from the center. In this case, the scale 21a on the fixed component 105 side is longer than the scale 21a of the vernier scale display board component 3a. FIG. 7C shows a scale display board component 3c based on the left and right ends of the scale 21b on the sliding component 104 side and the scale 21a on the fixed component 105 side. FIG. 7D shows a scale display board component 3d in which the scale 21b on the sliding component 104 side and the scale 21a on the fixed component 105 side are turned upside down. FIG. 7 (e) shows a scale display board component 3e in which the scale 21 is printed with a special fluorescent color to make the scale 21 shine even in the dark part. In FIG. 7 (e), the scale display board 3e displays the type of the scale display board 3c, but the scale 21 is special for the types of the other scale display board parts 3a, scale display board parts 3b, and scale display board parts 3d. The one printed in fluorescent color is also included. Furthermore, not only the format of the scale 21 shown in FIG. 7, but also other types of scale display board components 3 are included.

  In order to make all the scale display board components 3 displayed in FIG. 7 replaceable, as shown in FIG. 6, six scale display board mounting holes 18 may be provided in each of the upper and lower two stages. . The scale display plate mounting hole 18 is provided on either the pressure adjusting screw 12 side in FIG. 6A or the handle part 5 side in FIG. 6B. Accordingly, the scale display plate part 3 can be attached to either the left or right side surface of the manual stage main body 2 and can be attached to both side surfaces of the manual stage main body 2. Moreover, you may attach the scale display board component 3 of the form of a different scale 21 to the left and right side surfaces of the manual stage main body 2. Furthermore, although the scale display board attachment hole 18 which is not used depending on the scale display board component 3 is generated, it may be used for other display boards using this.

  In FIG. 8, the example of the components which comprise the sliding fixation screw components group 4 is shown. FIG. 8A shows a general thumbscrew type sliding fixing screw component 4a. The thumbscrew type sliding fixing screw part 4a is pinched with a fingertip and tightened, but can be firmly tightened by using a tool such as a screwdriver (not shown). FIG. 8B shows a lever-type sliding fixing screw component 4b. The lever-type sliding fixing screw component 4b can be firmly tightened without using a tool such as a screwdriver. FIG. 8C shows a sliding fixing screw component 4c with a hexagonal hole. The sliding fixing screw part 4c with a hexagonal hole is screwed into the sliding fixing screw hole 16 provided in the manual stage main body 2, so that there is no interference with other parts. FIG. 8D shows a sliding fixing screw part 4d for clamping the handle part 5 by sandwiching the handle part 5 with the split plate 43 on the handle part 5 side. According to this method, the rotation of the handle part 5 itself can be fixed.

  FIG. 8 shows the sliding fixing screw hole 16 provided on the pressurizing adjustment screw 12 side, and this sliding fixing screw hole 16 is also provided on the handle part 5 side in the same manner. In the present embodiment, two sliding fixing screw holes 16 are provided on one side. As described above, the slide fixing screw holes 16 are provided at a plurality of positions on both sides of the manual stage main body 2. Accordingly, the sliding fixing screw part 4 can be attached by selecting from these sliding fixing screw holes 16. Alternatively, different sliding fixing screw parts 4 may be selected and attached to the sliding fixing screw holes 16 at different positions.

  FIG. 9 shows an example of parts constituting the handle part group 5. FIG. 9A shows a general handle part 5a. FIG. 9B shows a handle part 5b having a large handle diameter. FIG. 9C shows a handle part 5c whose handle itself is elongated. In FIG. 9 (d), one end is connected to the handle connecting means, and the other end has a female screw portion 35 that engages with the male screw at the tip of the extension rod. The joint handle part 5d to be stopped is shown. In FIG. 9 (e), an electric handle part 5 e for controlling the rotation of the handle by the electric motor 38 is connected to the electric motor 38 and the control device 39 by a coupler 36 that further encloses the handle part 5 connected to the handle connecting means. Show. The present invention is intended for a manual stage, but can be expanded to an electric stage by selecting the electric handle part 5e from the handle part group 5. All of these handle parts 5 are configured to be engaged with the tip thread portion of the handle connecting means 23 of the manual stage main body 2.

  In FIG. 10, the example of the components which comprise the pressurization adjustment screw components group 6 is shown. FIG. 10 (a) shows a general driver tightening type pressure adjusting screw component 6a. The pressurizing adjustment screw component 6a is of a type in which a push metal is screwed with a tool such as a screwdriver. FIG. 10B shows a thumbscrew type pressurizing adjustment screw component 6b. The pressurizing adjustment screw component 6b is a type in which a push metal is simply screwed by rotating a knob with a fingertip without using a tool such as a screwdriver.

  FIG. 10 shows the sliding adjustment screw component group 7. Generally, a hexagon socket set screw is used as the sliding adjustment screw component 7. As shown in FIG. 4B, the sliding adjustment screw component 7 is provided on the fixed component 105, abuts against the protruding portion 31, inclines the protruding portion 31 inward, and presses the sliding component 104, thereby fixing the fixed component. The degree of sliding between 105 and the sliding component 104 is finely adjusted. The fixed part 105 has a sliding adjustment screw hole 15 to which the sliding adjustment screw part 7 is attached. In the present embodiment, the sliding adjustment screw holes 15 are provided at three locations on both side surfaces of the fixed component 105. The operator can adjust the sliding of the sliding component 104 by the sliding adjustment screw component 7 on either the left or right side of the manual stage, or use the left and right sliding adjustment screw components 7 at the same time. Can be adjusted.

  In FIG. 11, the example of the components which comprise the base board component group 8 is shown. FIG. 11A shows a general base plate component 8a. The base plate component 8a is not made of conventional aluminum but may be made of resin such as acrylic resin or Teflon (registered trademark) resin. FIG. 11B shows a base plate component 8 b in which a recess 37 is provided on the back surface of the base plate component 8. By fitting a magnet (not shown) in the recess 37, the magnet is strongly connected to the base by the magnetism of the magnet, and the fine displacement of the base plate component 8b with respect to the base due to the occurrence of mechanical vibration or the like can be avoided. Further, a plate-like elastic body (not shown) is held in the recess 37, and the elastic body is compressed by fastening a fastener that fixes the base plate component 8b to the base. Thereby, tension is introduced into the fastener by the restoring force against compression of the elastic body housed on the back surface of the base plate component 8b, and loosening of the fastener due to occurrence of mechanical vibration or the like can be avoided. Furthermore, when a plate-like viscoelastic body (not shown) is held in the recess 37 and a fastener for fixing the base plate component 8b to the base is tightened, the base plate component 8b and the base are connected via the viscoelastic body. Can be configured to connect. The viscoelastic body housed on the back surface of the base plate component 8b absorbs energy by the restoring force against the shearing, and minute vibrations caused by the occurrence of mechanical vibrations can be avoided. Further, FIG. 11C shows an H-type base plate component 8c in which the base plate has depressions on both the handle component 5 side and the pressure adjusting screw component 6 side. FIG. 11D shows a C-type base plate component 8c having a depression only on the handle component 5 side.

  These base plate components 8a to 8d have a base fixing fastening hole 106 and are fastened to a base (not shown). Further, the base plate is attached to the fixed component 105 by screwing the screw into the base plate attachment hole 26.

  FIG. 12 shows an example of parts constituting the movement restriction plate parts group 9. The movement restricting plate component 9 includes a holding plate 111 fixed to the fixing member 105 and a sliding fixing screw component 4 screwed into a screw hole (not shown) opened in the sliding component 104. This sliding fixing screw component 4 is inserted into an opening 116 opened in the holding plate 111. When the sliding fixing screw part 4 is tightened, the holding plate 111 is pressed against the sliding part 104, and the sliding part 104 is fixed to the position with respect to the fixing part 105 by a frictional force. FIG. 12 (a) shows a general movement limiting plate component 9a. This is a case where the sliding fixing screw part 4 makes a full stroke. FIG. 12B shows a movement limiting plate component 9b that limits the stroke of the sliding fixing screw component 4 to a certain range. FIG. 12C shows a movement limiting plate component 9c that limits one stroke of the sliding fixing screw component 4 to a certain range. 12 (b) and 12 (c) are selected in the case of an application in which a predetermined stroke is repeatedly slid, or an application in which the plate is stopped by being applied to the plate at a predetermined position.

(Manual stage configuration system)
FIG. 13 shows a manual stage configuration system according to the present invention. In the manual stage configuration system 50, a plurality of user terminals 56a, 56b, and 56c such as a plurality of users 55a, 55b, and 55c and a manual stage station server 57 are connected via a communication network 58 such as the Internet. . The manual stage station server 57 includes a component information receiving unit 51, a component compatibility verification unit 52, an image generation unit 53, a component information transmission unit 54, a component information storage unit 59, and a manual stage main body information storage unit 60. Is done.

  The user 55 accesses the website of the server 57 of the manual stage station via the communication network 58 by the terminal 56. Then, a desired component group 20 to be incorporated into the manual stage main body 2 displayed on the website is selected. Further, a desired part is selected from the part group 20. Then, information 61 on the parts group and information 62 on the parts are transmitted to the server 57 of the manual stage station.

  In the server 57 of the manual stage station that has received the information 61 on the component group and the information 62 on the component, the component information receiving unit 51 receives the information 61 on the component group and the information 62 on the component. Then, the component compatibility verification unit 52 determines the compatibility when the completed manual stage is obtained by incorporating the component into the manual stage body 2 from the information 61 regarding the selected component group and the information 62 regarding the selected component. Validate. At this time, the component compatibility verification unit 52 selects from information in the manual stage main body information storage unit 60 that stores information on the manual stage main body 2 and the component group information storage unit 59 that stores information on each component group 20. It is verified whether or not each of the manufactured parts interferes in the completed manual stage, and whether or not each part functions.

  When the component compatibility verification unit 52 determines that there is no problem in compatibility, the image generation unit 53 generates an image in which the selected component is incorporated in the manual stage main body 2 and transmits the image to the terminal 56 of the user 55. This image is automatically created by CAD. On the other hand, when the component compatibility verification unit 52 determines that there is a problem with the compatibility, the component information transmission unit 54 creates a warning message and transmits the warning message to the terminal 56 of the user 55. According to this manual stage configuration system, it is possible to accurately determine whether interference occurs between parts, or between a manual stage and a part, or whether a part incorporated in a manual stage functions.

  Further, the manual stage station has a function of estimating the manual stage completed by combining the selected parts and reporting the amount to the user 55.

  14 to 28 illustrate a part of a dovetail-type manual stage that is an object of the present invention. These drawings are described by a plan view, a bottom view, a side view, etc., but the display of each drawing is omitted. These conventional dovetail-type manual stages can be used as the dovetail-type manual stage unit 1 according to the present invention by including the features of claims 1 to 19 of the present invention. The present invention is not limited to this, and is applied to all conventional dovetail-type manual stages, for example, an X-axis dovetail stage, an XY-axis dovetail stage, a Z-axis dovetail stage, a rotary stage, and the like. Further, these dovetail-type manual stages are not limited to the types and sizes shown in FIGS. 14 to 28, and those having different types and sizes are also objects of the present invention.

  Further, the manual stage unit 1 according to the present invention is not limited to the dovetail type manual stage described above, but can be similarly applied to the feed screw type stage 300 shown in FIG. For example, the sliding mechanism of the feed screw type stage 300 is constituted by a female screw cylinder 307 and a male screw rod 306, but other sliding parts 304, fixed parts 305, handles 309, scales 310a, 310b, etc. This is the same as the dovetail type manual stage unit 1 described above.

  The same applies to the dovetail slide rail stage 400 shown in FIG. For example, the sliding mechanism of the dovetail slide rail type stage 400 is constituted by the leg portion 408, but the other dovetail parts 404, the fixed part 405, the handle 409, the scales 410a, 410b, etc. are described above. This is the same as the manual stage unit 1 of the formula.

  Furthermore, the features of claims 1 to 6 of the present invention are not limited to the manual stage described above, and may be applied to, for example, a linear ball type stage, a cross roller type stage, a simple ball type stage, etc. provided with other sliding mechanisms. By providing, it can be set as the manual stage unit 1 which concerns on this invention.

DESCRIPTION OF SYMBOLS 1 Manual stage unit, 2 Manual stage main body, 3a-3e Scale display board components (group), 4a-4d Sliding fixing screw components (group), 5a-5e Handle components (group), 6a, 6b Pressure adjustment screw components (Group), 7 Sliding adjustment screw parts (group), 8a to 8d Base plate parts (group), 9 Movement limiting plate parts (group), 10a, 10b, 10c, 110, 210 Sliding fixing screws, 11 Sliding Adjustment screw, 12, 112, 212 Pressure adjustment screw, 13, 213 Rack, 14, 214 Pinion gear, 15 Sliding adjustment screw hole, 16 Sliding fixing screw hole, 18 Scale display plate mounting hole, 20 parts Group, 21a, 21b (vernier) scale, 22 groove for fastening tool, 23 handle connecting means, 26 mounting hole for base plate, 31 protrusion, 32 groove, 33 tip of sliding fixing screw, 34 pressure adjusting screw Hole, 35 Female thread part, 36 Coupler, 37 Recessed part, 38 Electric motor, 39 Control device, 40 Stopper, 43 Split plate, 50 Manual stage construction system, 51 Part information receiving part, 52 Part compatibility verification part, 53 Image generation part , 54 parts information transmission unit, 55a, 55b, 55c user, 56a, 56b, 56c user terminal, 57 manual stage station server, 58 communication network, 59 parts information storage unit, 60 manual stage main body information storage unit, 61 parts group Information, 62 Parts information 63 Image information, 64 Warning information, 100 Dovetail stage, 102, 202, 302, 402 Ant, 103, 203, 303, 403 Dovetail, 104, 204, 304, 404 Sliding parts, 105 , 205, 305, 405 Fixing parts, 106, 206, 406 Fastening for fixing the base 107, 207, 407 Precision instrument mounting holes, 108, 208 Base plate, 109, 209, 309, 409 Handle, 111, 211 Holding plate, 116, 216 Opening, 200 X-axis dovetail stage, 215 Rack mounting pin 217 set screw, 218 washer, 300 feed screw type stage, 306 male screw rod, 307 female screw cylinder, 310a, 310b, 410a, 410b scale display plate, 316 stopper, 400 dovetail slide rail type stage, 408 leg.

Claims (12)

Sliding portions article precision equipment is attached has the ants, and Ri is the one fixed part article Rana connected to the base plate which is fixed on the base with a dovetail groove,
A scale mounting screw hole that is provided on both sides of the sliding part and the fixed part in accordance with the mounting positions of all the screws of the plurality of scale display board parts, and in which all the scale display board parts can be exchanged,
Plural sliding fixing screw parts that are provided at multiple locations on both sides of the fixed part, and that abut the protruding part and tilt the protruding part inward to hold down the sliding part to fix the position of the sliding part relative to the fixed part Is a replaceable slide fixing screw hole,
Sliding adjustment is provided at multiple locations on both sides of the fixed part. The sliding part is pressed against the protruding part and tilted inward to push the sliding part and finely adjust the degree of sliding between the fixed part and the sliding part. Screw adjustment screw holes with interchangeable screw parts,
A handle connecting means for exchanging a plurality of handle parts;
A pressure adjusting screw hole provided on a side surface of the fixing component opposite to the handle, wherein a plurality of pressure adjusting screw components are replaceable;
A base plate mounting hole in which a plurality of base plate parts can be exchanged, and
A manual stage body provided with grooves in the longitudinal direction on both sides of the manual stage body so as to form protrusions of inverted triangles on the walls on both sides of the fixed part, and
Multiple scale display board parts group attached to sliding parts or fixed parts, and multiple sliding fixing screw parts that can be used to fix the sliding parts from either side or both sides of the manual stage body A group, a plurality of sliding adjustment screw parts groups that can be used to adjust the degree of sliding of the sliding parts from either side or both sides of the manual stage body , a plurality of handle parts groups, and a plurality of It is composed of a component group consisting of a pressure adjusting screw component group and a plurality of base plate component groups,
Group of components incorporated in the manual stage body is selected by the user, further components are selected from the selected component groups, a pair of manual stages and ing manual stage arrangement which those parts are finished incorporated into manual stage body A system,
And each of the terminals of the plurality of users, and a manual stage station server are connected via a communication network,
Manual stage station server
A manual stage body information storage unit for storing information about the manual stage body;
A component information storage unit for storing information on each component;
A component group selected by the user, and a component information receiving unit that receives information about the component selected from the component group from the component information storage unit;
A component compatibility verification unit that verifies the compatibility when the manual stage is completed by incorporating the component into the manual stage body;
When the compatibility verification unit determines that there is no problem with the compatibility, an image generation unit that generates an image in which the selected part is incorporated into the manual stage body; and
When the compatibility verification unit determines that there is a problem with the compatibility, a warning message is transmitted to the user terminal, and when the compatibility verification unit determines that there is no problem with the compatibility, the image generated by the image generation unit is and the component information transmission unit for transmitting to the terminal,
With
The suitability verification unit combines each selected component with the manual stage main body from the information stored in the manual stage main body information storage unit and the information stored in the component information storage unit for the part selected by the user. A manual stage configuration system characterized by verifying system problems during operation . It is a manual stage structure system of Claim 1, Comprising: A scale display board component WHEREIN: The format which makes a scale center distribution, the format which makes the both ends of a scale the origin, and the main scale and vernier of a scale are reversed The manual stage composition system characterized by including the form to do. 3. The manual stage configuration system according to claim 1 or 2, wherein the sliding fixing screw component has a lever attached to the screw, and a lever type sliding fixing screw component that tightens the screw by rotating the lever. manual stages configuration system, characterized in that it contains. 3. The manual stage configuration system according to claim 1 or 2, wherein the screw part for sliding fixing is a claw-tightening type slide that clamps the handle part by sandwiching the handle part with a split plate on the handle part side. A manual stage configuration system characterized by including a fixed screw component. 5. The manual stage configuration system according to claim 1, wherein the pressure adjusting screw component includes a thumb screw type pressure adjusting screw component that tightens the screw by rotating the knob. 6. A manual stage configuration system characterized by that. 6. The manual stage configuration system according to claim 1, wherein the component group further includes a plurality of movement limiting plate components attached to the fixed component, and the movement limiting plate component is a sliding component. The range of movement of the sliding fixing screw part attached to the movement limit plate part is limited by the width of the opening provided in the movement restriction plate part, and the manual stage body is provided with a screw hole to which the movement restriction plate part is attached. A manual stage configuration system that is also used as a screw hole for mounting scales. The manual stage configuration system according to any one of claims 1 to 6, wherein one end of the handle part is connected to the handle connecting means, and the other end is connected to a male screw at a distal end portion of the extension rod. A manual stage construction system comprising: a joint handle part having a female thread part to be coupled and stopping the rotation of the male thread by a stopper. The manual stage configuration system according to any one of claims 1 to 6, wherein the handle part includes a handle part connected to the electric motor by a coupler that further wraps the handle part connected to the handle connecting means. Feature manual stage configuration system . The manual stage configuration system according to any one of claims 1 to 8, wherein the base plate component includes a base plate component provided with a recess into which a magnet is fitted on the back surface of the base plate. Manual stage configuration system . The manual stage configuration system according to any one of claims 1 to 8, wherein the base plate component includes a plate-like elastic body and a fastener that fixes the base plate component to the base is tightened. A manual stage configuration system comprising a base plate component having a concave storage section for storing an elastic body by compressing the elastic body on the back surface. The manual stage configuration system according to any one of claims 1 to 8, wherein the base plate component includes a plate-like viscoelastic body and a fastener that fixes the base plate component to the base is tightened. A manual stage configuration system including a base plate component having a concave storage portion on the back surface configured to connect a base plate component and a base via a viscoelastic body. The manual stage configuration system according to any one of claims 1 to 11, wherein the sliding component slides in the vertical direction, and the base portion is L-shaped and fixed to the base. Manual stage configuration system .

Images