JP2003048129A - Stage fixing device and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To firmly fix a high-precision stage with high accuracy. SOLUTION: This fixing device is provided with an adjusting knob 4 for moving a movable stage 3 for fixing a work to a designated position. A cylindrical fixing shaft 6 extending in the same direction as the moving direction of the movable stage 3 is mounted on the movable stage 3. The fixing shaft 6 is passed through a hole part 7a of a clamp 7 mounted on a base 1. The hole part 7a is formed in the same shape as the outside diameter shape of the fixing shaft 6, and a gap part 7b is communicated with the hole part 7a. A fixing screw 8 for opening and closing the gap part 7b is provided on the gap part 7b, and the fixing screw 8 is fastened in to reduce the inside diameter of the hole part 7a by closing the gap part 7b. Thus, the fixing shaft 8 and the clamp 7 are fixed by face contact from the direction intersecting perpendicularly to the moving direction of the movable stage 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stage fixing device and method for a stage for setting a work on a processing machine for cutting, grinding and polishing.

[0002]

2. Description of the Related Art Conventionally, a stage for adjusting the position of a workpiece is installed on a rotary shaft of a machine for performing high-precision machining in a machine for cutting, grinding or polishing metal, ceramics and the like. As a stage for adjusting the position of the work piece, for example, there is a stage described in JP-A-8-15466. The following two methods have been conventionally used as a fixing method when the stage is processed.

First, an example will be described with reference to FIG. FIG. 7 is a perspective view showing the stage.

In FIG. 7, the base 102 is fixed to the rotary shaft, and the whole stage 100 rotates when processing a workpiece. A movable stage 101 is installed on the base 102. Base 102 and movable stage 101
Is attached by a linear guide (not shown), and the movable stage 101 is movable in one direction with respect to the base 102.

A micrometer 103 for moving the movable stage 101 in the above direction is attached to the base 102. The movable shaft 103a of the micrometer 103 is
The movable stage 101 is connected to a member 101a attached to the movable stage 101, and operates the micrometer 103 to move the movable stage 101 according to the amount of rotation thereof.

A fixed plate 104, which can be pressed against the side surface of the movable stage 101, is fixed to the side surface of the base 102. An elongated hole 104 a is provided in the fixed plate 104 at a portion in contact with the movable stage 101 in parallel with the moving direction of the movable stage 101. The fixing screw 1 attached to the side surface of the movable stage 101 is provided in the elongated hole 104a.
The shaft of 05 is inserted. This shaft has a long hole 104.
An abutting portion (for example, a head) larger than the short width of a is provided, and the abutting portion causes the fixed plate 104 to move.
It can be pressed to the side surface of 1.

Next, a method of adjusting the movable stage 101 with respect to the base 102 in the stage 100 will be described. The adjustment method is to rotate the micrometer 103 to move the movable shaft 101a back and forth to move the movable stage 1
Move 01 to adjust its position. Movable stage 10
1 is fixed by tightening the fixing screw 105 attached to the movable stage 101. That is, base 1
The movable base 101 is fixed to the base 102 by sandwiching the fixed plate 104 fixed to No. 02 between the contact portion of the fixing screw 105 and the movable stage 101.

Another fixing method will be described with reference to FIGS. 8 and 9. 8 is a perspective view of the stage, and FIG. 9 is a view of FIG. 8 viewed from the right side.

8 and 9, the stage 109
Is the same as that of the stage 100 above the processing machine base 111.
Is fixed. A movable stage 110 is mounted on the base 111.
Is installed. Base 111 and movable stage 110
The dovetail groove 115 is processed, and the movable stage 110 moves in one direction along the dovetail groove 115. Dovetail 115
One side of the fixing plate 11 is integrally formed with the base 111.
It is formed by 4.

Inside the movable stage 110 and the base 111, a rack and pinion gear (not shown) is arranged. A movable knob 112 for rotating the rack and pinion gear is provided on a side surface of the movable stage 110 and the base 111.
Is provided. Further, a fixing screw 113 for pressing the fixing plate 114 with its tip abutting on the side surface of the fixing plate 114 is screwed into the side surface of the base 111.

Next, the base 111 of the movable stage 110.
The driving method and fixing method will be described. The movable stage 110 is driven by rotating the movable knob 112 and moving the movable stage 110 with respect to the base 111 by a rack and pinion gear arranged inside the movable stage 110 and the base 111. To fix the movable stage 110, the fixing screw 113 is tightened and the fixing plate 114 forming the side surface of the dovetail groove 115 is pushed. Pressed fixed plate 11
4, the movable stage 110 is fixed to the base 111 by moving in the direction of the dovetail groove 115 and tightening the clearance of the dovetail groove 115.

[0012]

The above prior art has the following problems. First, the stage 10 shown in FIG.
The problem in 0 will be described with reference to FIG. Figure 10
FIG. 8 is an enlarged view showing a fixed part of the stage of FIG. 7.

When fixing the movable stage 101 and the base 102, when the fixing screw 105 is rotated and tightened in the direction of the arrow, the fixing plate 10 comes into contact with the contact portion of the fixing screw 105.
As shown by the arrow, force acts on 4 at the upper part in the right direction and at the lower part in the left direction. Therefore, a force that moves right acts on the movable stage 101 into which the fixing screw 105 is tightened, and there is a problem that the stage moves when fixing. Therefore,
When processing with high accuracy, it is difficult to fix it at a desired position.

The fixing surface is only the area where the fixing screw 105 contacts the fixing plate 104, and the fixing force is small.
The fixing force can be increased by increasing the contact area of the fixing screw 105. However, since the force acting on the fixing plate 4 by the fixing screw 105 rotated during fixing is further increased, the fixing accuracy is improved. There is also the problem of a further decrease.

Further, the stage 10 shown in FIGS.
The problem 9 will be described with reference to FIG. FIG. 11 shows FIG.
Are enlarged and shown.

As shown in FIG. 11 (a), when the fixing screw 113 is loosened, the dovetail groove 115 has a gap so that it can be moved. Movable stage 1 on base 111
For fixing the fixing plate 10, as shown in FIG. 11B, the fixing plate 114 is fixed by tightening the fixing screw 113.
Is pressed and deformed, and comes into contact with the dovetail groove 115 and is fixed.
Unlike the fixing method shown in FIG. 10, this fixing method does not cause an action on the stage that reduces the accuracy when fixing, but the contact area between the fixing plate 114 and the dovetail groove 115 is small, and the fixing force is small. Further, the fixing plate 114 is a dovetail groove 1.
It is difficult to improve the accuracy of the stage because it is shared with the No. 15.

The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to provide a stage fixing device and method for fixing a high precision stage firmly with high precision.

[0018]

In order to solve the above problems, the stage fixing device according to the first invention installs a stage for fixing a work on a processing shaft of a processing machine and adjusts the position of the stage. In a stage fixing device for fixing at a predetermined position, a rod-like member provided on the stage and extending in the same direction as the moving direction of the stage and the rod-like member are fixed by surface contact from a direction orthogonal to the moving direction of the stage. And a fixing member.

A stage fixing device according to a second aspect of the present invention is the stage fixing device according to the first aspect of the present invention, wherein the rod-shaped member has a columnar shape and the fixing member corresponds to an arc-shaped portion of the columnar shape. It is a clamp for sandwiching the rod-shaped member having the inner surface described above.

Further, a stage fixing method according to a third aspect of the present invention is the stage fixing method in which a stage for fixing a work is installed on a processing shaft of a processing machine, and the position of the stage is adjusted to fix the stage at a predetermined position. Is provided in
A step of moving the rod-shaped member extending in the same direction as the moving direction to a predetermined position, and a step of fixing the rod-shaped member moved to the predetermined position by surface contact from a direction orthogonal to the moving direction of the stage. It is characterized by having.

That is, according to the stage fixing device of the first invention, the rod-shaped member provided on the stage is fixed by the fixing member. At this time, the fixing member fixes the rod-shaped member in surface contact from a direction orthogonal to the moving direction of the stage, and fixes the stage with high accuracy and firmly.

According to the stage fixing device of the second aspect of the invention, the inner surface of the clamp is brought into contact with the arcuate portion of the cylindrical rod member. By forming the inner surface of the clamp into a shape corresponding to the arcuate portion, the clamp is brought into surface contact with the rod-shaped member, and the stage is fixed with high accuracy and firmness by reliable surface contact.

Further, according to the stage fixing method of the third aspect of the present invention, the rod-shaped member provided on the stage is moved to a predetermined position and then the rod-shaped member is fixed. At this time, the stage is fixed by surface contact from a direction orthogonal to the moving direction of the stage that moves together with the rod-shaped member, and the stage is fixed to the predetermined position with high accuracy and firmly.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (Embodiment 1) Embodiment 1 of the present invention will be described with reference to FIGS. 1, 2 and 3. Figure 1
1 is a schematic configuration diagram showing a fixing portion of the stage fixing device.
1A is a front view, FIG. 1B is a right side view of FIG.
2 is an enlarged view showing only the clamp portion, and FIG. 3 is a perspective view showing the stage fixing device. ,

In FIGS. 1 and 3, the lower surface of the base 1 is fixed to a spindle shaft (machining shaft) of an ultra-precision cutting machine (not shown). A movable stage 3 is movably installed on the upper surface of the base 1 via a linear guide 2.

A work to be processed is placed and fixed on the upper surface 3a of the movable stage 3. Further, on the side of the movable stage 3, an adjustment knob 4 as a rotatable adjustment member for moving the movable stage 3 to a predetermined position is provided.

The adjustment knob 4 is fixed to a column 5 standing on the base 1, and when the adjustment knob 4 is rotated, the tip of the drive shaft 4a moves in the moving direction of the movable stage 3, that is, the arrow X. It moves horizontally in the direction (hereinafter, simply referred to as the X direction).

The tip of the drive shaft 4a is connected to a protruding portion 4b formed so as to protrude from the side surface 3b of the movable stage 3 in the arrow Y direction (hereinafter, simply referred to as the Y direction).

In this way, by rotating the adjusting knob 4, the drive shaft 4a moves in the X direction, and the movable stage 3
Has the same structure as a so-called micrometer, which moves in the X direction.

The side surface 3c of the movable stage 3 is provided with a cylindrical fixed shaft 6 as a rod-shaped member extending in the same direction (parallel direction) as the X direction. In the present embodiment, the fixed shaft 6 is made of hardened steel that is processed with high precision and is hard to deform.

The fixed shaft 6 is inserted into a hole 7a of a clamp 7 as a fixing member which is erected on the base 3. The hole 7a of the clamp 7 is fixed to the fixed shaft 6
Has an inner diameter substantially the same as the outer diameter, that is, an inner surface corresponding to the arcuate portion of the fixed shaft 6.

A space, that is, a gap 7b is provided from the upper surface of the clamp 7 toward the upper portion of the hole 7a. As described above, the clamp 7 is openable because the upper part of the clamp 7 is split, and the inner diameter of the hole 7a changes with opening and closing.

To cross the gap 7b of the clamp 7,
A fixing screw 8 as an opening / closing member is provided in the Y direction. By rotating the fixing screw 8 in one direction and tightening it, as shown in FIG. 2, the clamp 7 is in the Y direction orthogonal to the X direction (in the present embodiment, a direction substantially perpendicular to the X direction). From this, the clearance 7b is closed, and the inner diameter of the hole 7a through which the fixed shaft 6 is inserted becomes smaller. This allows
The clamp 7 clamps substantially the entire circumference of the fixed shaft 6 in surface contact, and is fixed so that the fixed shaft 6 is not displaced.

On the other hand, by rotating the fixing screw 8 in the opposite direction to loosen it, the clamp 7 is opened and the fixed shaft 6 can be freely moved in the X direction.

(Operation) Next, a fixing method using the stage fixing device having the above-described structure will be described. First, the stage fixing device shown in FIG. 3 is fixed to the spindle shaft of the ultra-precision cutting machine. Then, a chuck or the like for fixing the work is installed on the upper surface 3a of the movable stage 3.

Next, with the fixing screw 8 loosened, the adjustment knob 4 is rotated to move the movable stage 3 in the X direction. As a result, the work is moved to the predetermined position. Then, by tightening the fixing screw 8, the fixed shaft 6 provided on the movable stage 3 is fixed by surface contact with the clamp 7.

In the present embodiment, the uniaxial movable stage 3 movable in the X direction is used, but a movable stage movable in the Y direction is installed on the movable stage 3 and X-
A biaxial movable stage that can move in the Y direction may be used.

The fixing device and method of this embodiment can also be used for such a biaxial movable stage.

According to the present embodiment, the movable stage 3 is moved in the direction perpendicular to the moving direction (X direction in FIG. 3) (Y in FIG. 3).
Direction), the clamp 7 acts on the fixed shaft 6 provided on the movable stage 3 by surface contact, so that the stage displacement due to the action of the fixing screw, which is a problem of the conventional technique, does not occur, and the accuracy is high. Firmly fixed becomes possible.

Further, since the member used in the present embodiment is the clamp 7 having the cylindrical fixed shaft 6 and the hole portion 7a, it is possible to easily and highly accurately perform the general machining by the lathe or the hole machining. Can be

Since the clamp 7 used in this embodiment fixes the fixed shaft 6 by surface contact, it has a large fixing force.
Further, the fixing force can be further increased by increasing the contact area between the clamp 7 and the fixing shaft 6.

(Second Embodiment) The second embodiment of the present invention will be described with reference to FIG. FIG. 2 is an enlarged view showing the slump portion. Note that FIG. 3 is also referred to in the following description.

The stage fixing device of this embodiment is shown in FIG.
The third embodiment is characterized in that the clamp 7 of the first embodiment shown in FIG. The three-jaw chuck 17 as the fixing member is provided on a mounting member 17b which is erected on the base 1.

The three-jaw chuck 17 is provided with three chuck members 17a for fixing the cylindrical fixed shaft 6 as a rod-like member provided on the movable stage 3 as in the first embodiment. Three chuck members 17a
Are arranged radially evenly with respect to the outer circumference of the fixed shaft 6, and like the one used in a lathe or the like, the fixed shaft 6 is rotated by rotating the ring 17c on the outer circumference.
Of the chuck member 17a can be moved in the radial direction simultaneously with respect to the outer circumference of the fixed shaft 6, and the tip (inner surface) of the chuck member 17a can come into contact with and separate from the outer circumferential surface of the fixed shaft 6. The tip of the chuck member 17a is processed into the same shape as the outer diameter of the fixed shaft 6, and can come into contact with the outer peripheral surface of the fixed shaft 6 with a surface contact. As a result, the outer circumference of the fixed shaft 6 is sandwiched by the three-jaw chuck 17 at three points by surface contact, and the fixed shaft 6 is fixed so as not to be displaced.

The ring 17c is connected to a motor 19 provided on the side of the attachment member 17b of the three-jaw chuck 17 on the base 1 via a belt 20.
The ring 17c is rotated by the rotation of 9 (forward rotation, reverse rotation) to simultaneously move the chuck members 17a of the three-jaw chuck 17 to radially open and close them, and the clamp shaft 17 is clamped to the fixed shaft 6 and released. The motor 19 is driven by a computer or the like of a processing machine to which the stage fixing device is attached.

(Operation) Next, a method of fixing the stage equipped with the three-jaw chuck 17 having the above-described structure will be described. In the following description, the clamp 7 of the stage fixing device in FIG. 3 will be described as being installed by replacing it with the three-jaw chuck 17 of the present embodiment.

First, the stage fixing device is fixed to the spindle shaft of the ultra-precision cutting machine. And the movable stage 3
A chuck or the like for fixing the work is installed on the upper surface 3a of the above, and the work to be processed is fixed.

Next, the adjustment knob 4 is rotated with the tip end interval of the chuck member 17a of the three-jaw chuck 17 widened to a space through which the fixed shaft 6 can pass, and the movable stage 3 is moved.
In the X direction. As a result, the work on the movable stage 3 is moved to a predetermined position. Then, the motor 19 is driven by the computer of the processing machine to drive the ring 17
By rotating c, the three chuck members 17a are simultaneously moved in the radial closing direction. Then, the outer periphery of the fixed shaft 6 is clamped by the tips of the three chuck members 17a,
The fixed shaft 6 provided on the movable stage 3 is fixed in surface contact by the three-jaw chuck 17.

In the present embodiment, the uniaxial movable stage 3 movable in the X direction is used, but a movable stage movable in the Y direction is installed on the movable stage 3 and X-
A biaxial movable stage that can move in the Y direction may be used.

The fixing device and method according to the present embodiment can be used for such a biaxial movable stage and can be used in a fully automatic processing machine.

According to the present embodiment, a force is exerted in the direction perpendicular to the moving direction of the movable stage 3 (X direction in FIG. 3), and the fixed shaft 6 provided on the movable stage 3 moves the three-jaw chuck 17 to the stationary shaft 6. Since the chuck member 17a acts on the surface, that is, by the surface contact, the stage shift due to the action of the fixing screw, which is a problem of the conventional technique, does not occur, and high-precision and firm fixing can be performed.

In addition, the motor 1 is used by the computer of the processing machine.
By driving 9, the stage fixing device capable of high-accuracy fixing by the three-jaw chuck 17 can be arranged in the fully automatic processing machine, and high-accuracy processing can be performed fully automatically.

(Third Embodiment) A third embodiment of the present invention will be described with reference to FIG. FIG. 5 is a perspective view showing the stage fixing device of the present embodiment.

In FIG. 5, the lower surface of the base 21 is fixed to a spindle shaft (processing shaft) of a processing machine (not shown), as in the above embodiment. A movable stage 23 is movably arranged above the base 21. On the upper surface 23a of the movable stage 23, a workpiece to be processed is placed and fixed via a chuck or the like. On the upper surface of the base 21, the standing member 25 and a fixed clamp 27 serving as a fixed member are arranged so that the movable stage 23 is disposed so as to face the moving direction of the movable stage 23.
Is provided.

An adjustment knob 24, which is a rotatable adjustment member for moving the movable stage 23 to a predetermined position, is fixed to the standing member 25 on the side surface opposite to the movable stage 23. The drive shaft 24a rotated by the adjustment knob 24 penetrates the upright member 25, and its tip is connected to the side surface 23b of the movable stage 23. By rotating the adjustment knob 24, the tip of the drive shaft 24a is rotated. Is horizontally moved in the moving direction of the movable stage 23, that is, in the arrow X direction (hereinafter, simply referred to as the X direction).

In this way, by rotating the adjusting knob 24, the drive shaft 24a moves in the X direction, and the movable stage 23 moves in the X direction, which is the same as a so-called micrometer.

The standing member 25 and the fixed clamp 27.
On both side surfaces 23b of the movable stage 23 facing each other, a cylindrical fixed shaft 26a and a slide shaft 26b as rod-shaped members extending in the same direction (parallel direction) as the X direction.
Is fixed. One of the fixed shaft 26a and the slide shaft 26b is supported by the standing member 25. A bearing such as a linear bush is provided between the fixed shaft 26a and the slide shaft 26b and the standing member 25, and holds the fixed shaft 26a and the slide shaft 26b so as to be movable in the arrow X direction.
Note that the fixed shaft 26a and the slide shaft 26b may be movably held by sliding the high-precision standing member 25. In this embodiment, the fixed shaft 26a and the slide shaft 26b are made of hardened steel that is processed with high precision and is hard to deform.

The other of the fixed shaft 26a and the slide shaft 26b is supported by a fixed clamp 27 provided upright on the base 23 so as to be movable in the arrow X direction. The fixed shaft 26a is a hole portion 27 of the fixed clamp 27.
The hole 27a of the fixed clamp 27 is inserted through
Has an inner diameter substantially the same as the outer diameter of the fixed shaft 26a, that is, an inner surface corresponding to the arcuate portion of the fixed shaft 26a.

Further, from the upper surface of the fixed clamp 27 to the hole 2
A space 27b is provided toward the upper part of 7a. In this way, the fixed clamp 27 can be opened and closed because the upper part of the fixed clamp 27 is split.
The inner diameter of the hole 27a changes with this opening and closing. The slide shaft 26b is inserted into the fixed clamp 27 so as to be movable.

A fixing knob 28 as an opening / closing member is provided so as to cross the clearance 27b of the fixing clamp 27 in the Y direction (in this embodiment, a direction substantially perpendicular to the X direction) orthogonal to the X direction. ing. By rotating this fixing knob 28 in one direction and tightening it, the fixing clamp 2
The gap 27b of No. 7 is closed from the Y direction orthogonal to the X direction, and the inner diameter of the hole 27a through which the fixed shaft 26a is inserted becomes smaller. As a result, the fixed clamp 27 clamps the fixed shaft 26a over substantially the entire circumference by surface contact, and the fixed shaft 26a is fixed without displacement.

On the other hand, by rotating the fixing knob 28 in the opposite direction to loosen it, the fixing clamp 27 is opened and the fixing shaft 26a can freely move in the X direction.

(Operation) Next, a fixing method by the stage fixing device having the above structure will be described. First, similarly to the above-described embodiment, the movable stage 23 is fixed to the spindle shaft of the processing machine, and the workpiece to be processed is set on the upper surface 23a of the movable stage 23.

Next, with the fixed knob 28 loosened, the adjustment knob 24 is rotated to move the movable stage 23 in the X direction. As a result, the work is moved to the predetermined position. Then, by tightening the fixed knob 28, the fixed shaft 26 a provided on the movable stage 23 is fixed by surface contact with the fixed clamp 27.

In the present embodiment, the movable stage 2
Although the clamp portion for fixing 3 is provided at one place, the clamp portion may be provided at two or more places to further increase the fixing force. For example, the standing member 25 that supports the fixed shaft 26a can be configured and implemented in the same manner as the fixed clamp 27, and the portion that supports the slide shaft 26b can be configured and configured in the fixed clamp 27 that is similar to the fixed shaft 26a. it can. Further, the upright member 25 and the fixing means for the slide shaft 26b may be used together.

According to the present embodiment, the movable stage 23
Is held by the fixed shaft 26a and the slide shaft 26b, and the fixed shaft 26a that moves together with the movable stage 23 is directly fixed by the fixed clamp 27. Therefore, the structure is simplified, and small size and high-precision fixing is possible. Other effects are similar to those of the first embodiment.

(Embodiment 4) Embodiment 4 of the present invention will be described with reference to FIG. FIG. 6 is a perspective view showing the stage fixing device of the present embodiment.

In FIG. 6, the lower surface of the base 31 is fixed to the spindle shaft (processing shaft) of a processing machine (not shown), as in the above embodiment. A movable stage 33 is movably arranged above the base 31. A work to be processed is placed and fixed on the upper surface 33a of the movable stage 33 via a chuck or the like. A pair of standing members 35 are provided on the upper surface of the base 31 so as to face the moving direction of the movable stage 33 and to place the movable stage 33 therebetween.

The movable stage 3 is attached to one of the standing members 35.
An adjustment knob 34, which is a rotatable adjustment member for moving the movable stage 33 to a predetermined position, is fixed to a side surface on the opposite side opposite to 3. The drive shaft 34 a rotated by the adjustment knob 34 penetrates the standing member 35 and has its tip end coupled to the side surface of the movable stage 33. By rotating the adjustment knob 34, the tip end of the drive shaft 34 a is rotated. The movable stage 33 is horizontally moved in the moving direction, that is, the arrow X direction (hereinafter, simply referred to as the X direction).

As described above, by rotating the adjusting knob 34, the drive shaft 34a moves in the X direction, and the movable stage 33 moves in the X direction, which is the same as a so-called micrometer.

The movable stage 33 is slidably attached to a fixed shaft 36a and a slide shaft 36b, which are cylindrical and extend in the same direction as the X direction (parallel direction) as a rod-shaped member. The fixed shaft 36 a and the slide shaft 36 b are provided on both side surfaces 3 of the movable stage 33.
3b, and both ends thereof are fixed to the pair of standing members 35. In this embodiment, the fixed shaft 36a and the slide shaft 36b are made of hardened steel that is processed with high precision and is hard to deform.

One side surface 33b of the movable stage 33 that faces the standing member 35 (the right side surface 33 in FIG. 6).
A fixed clamp 37 as a fixing member is fixed to b). The fixed shaft 36 a is inserted into the hole 37 a of the fixed clamp 37, and the hole 3 of the fixed clamp 37 is inserted.
7a has an inner diameter substantially the same as the outer diameter of the fixed shaft 36a, that is, an inner surface corresponding to the arcuate portion of the fixed shaft 36a.

Further, from the upper surface of the fixed clamp 37 to the hole 3
A space, that is, a gap 37b is provided toward the upper portion of 7a. In this way, the fixed clamp 37 can be opened and closed because its upper part is split and processed,
The inner diameter of the hole 37a changes with the opening and closing.

A fixing knob 38 as an opening / closing member is provided so as to cross the gap portion 37b of the fixing clamp 37 from the Y direction (in this embodiment, a direction substantially perpendicular to the X direction) orthogonal to the X direction. ing. By rotating the fixing knob 38 in one direction and tightening it, the fixing clamp 3
The gap portion 37b of No. 7 is closed from the Y direction orthogonal to the X direction, and the inner diameter of the hole portion 37a through which the fixed shaft 36a is inserted becomes smaller. As a result, the fixed clamp 37 clamps substantially the entire circumference of the fixed shaft 36a in surface contact, and the base 3
The movable stage 33 is fixed so as not to be displaced relative to the position 1.

On the other hand, by rotating the fixing knob 38 in the opposite direction to loosen it, the fixing clamp 37 is opened, and the movable stage 33 and the fixed shaft 36a can freely move in the X direction.

(Operation) Next, a fixing method by the stage fixing device having the above-mentioned structure will be described. First, similarly to the above-described embodiment, the stage fixing device is fixed to the spindle shaft of the processing machine, and the work to be processed is set on the upper surface 33a of the movable stage 33.

Next, with the fixed knob 38 loosened, the adjustment knob 34 is rotated to move the movable stage 33 in the X direction. As a result, the work is moved to the predetermined position. After that, by tightening the fixed knob 38, the fixed clamp 37 fixed to the movable stage 33 is fixed to the base 3.
Fixed shaft 36 fixed to the standing member 35 on
The movable stage 33 is fixed to a by surface contact, and the movable stage 33 is a base 31.
Fixed against.

In this embodiment, the movable stage 3
Although the clamp portion for fixing 3 is provided at one place, the clamp portion may be provided at two or more places to further increase the fixing force. For example, fixed clamps 37 can be fixed to both side surfaces 33b of the movable stage 33, and the fixed shaft 36a can be clamped by these fixed clamps 37. Further, the fixed shaft 36a and the slide shaft 36b can be clamped respectively. Fixed clamp 3
7 can be provided and implemented.

According to the present embodiment, the fixed shaft 36
a and the slide shaft 36b, the movable stage 33 slidably supported is provided with the fixed clamp 37, and the movable stage 33 is fixed to the fixed shaft 36a by the fixed clamp 37. Therefore, the configuration is simple, small, and highly accurate. Can be fixed. Other effects are similar to those of the third embodiment.

The technical idea of the following configuration is derived from the above-described specific embodiments. (Additional remarks) (1) A stage fixing device that installs a stage for fixing a work on a processing shaft of a processing machine, adjusts the position of the stage, and fixes the stage at a predetermined position
A cylindrical rod-shaped member extending in the same direction as the moving direction, an adjusting member that moves the stage to a predetermined position, and a fixing that fixes the rod-shaped member in surface contact from a direction orthogonal to the moving direction of the stage. A stage fixing device comprising: a member.

(2) The fixing member has a hole portion in which a hole having an inner diameter substantially the same as the outer diameter of the rod-shaped member is formed, and a gap portion which is a space where the hole portion and a part of the outer surface communicate with each other. The stage fixing device as set forth in appendix (1), characterized in that it has.

(3) The stage fixing device as set forth in appendix (2), wherein the fixing member is provided with an opening / closing member for opening / closing the gap.

(4) In a stage fixing method in which a stage for fixing a work is installed on a processing axis of a processing machine, and the position of this stage is adjusted and fixed at a predetermined position. A step of moving the cylindrical rod-shaped member extending to a predetermined position, and a step of fixing substantially the entire circumference of the rod-shaped member moved to the predetermined position by surface contact from a direction orthogonal to the moving direction of the stage, A method for fixing a stage, comprising:

(5) In a stage fixing method in which a stage for fixing a work is installed on a processing axis of a processing machine, and the position of this stage is adjusted and fixed at a predetermined position. A step of moving the stage to a predetermined position along a cylindrical rod-shaped member that extends to the stage, and a fixing member provided on the stage from the direction orthogonal to the moving direction of the stage, the stage being moved to the predetermined position. Surface contact with substantially the entire circumference of the rod-shaped member,
And a step of fixing it to the rod-shaped member.

According to the stage fixing device of appendix (1),
Move the stage to a predetermined position with high precision by the adjusting member,
Since the fixing member is fixed to the rod-shaped member by surface contact from the direction orthogonal to the moving direction of the stage, it can be fixed at a predetermined position with high accuracy and firmly.

According to the stage fixing device of appendix (2),
While the rod-shaped member is inserted into the hole of the fixing member, the diameter of the hole can be reduced by the gap to firmly fix the rod-shaped member by surface contact, and the diameter of the hole can be increased to smooth the rod-shaped member. Can be inserted.

According to the stage fixing device of appendix (3),
The opening and closing of the gap can be performed by the opening and closing member, and the hole of the fixing member can be easily expanded and contracted.

According to the stage fixing method of appendix (4),
Since the rod-shaped member is moved to a predetermined position and is brought into contact with and fixed to substantially the entire circumference of the rod-shaped member at that position, the rod-shaped member can be firmly fixed. Further, when the above-mentioned surface contact is made, since the contact is made from a direction orthogonal to the moving direction of the stage, a force for moving the rod-shaped member in the moving direction of the stage is not generated, and it can be fixed at a predetermined position with high accuracy. .

According to the stage fixing method of appendix (5),
Since the stage is moved to a predetermined position along the rod-shaped member and the fixing member fixed to the stage at that position is fixed by making surface contact with substantially the entire circumference of the rod-shaped member, it can be firmly fixed. Further, when the above-mentioned surface contact is made, since the contact is made from a direction orthogonal to the moving direction of the stage, a force for moving in the moving direction of the stage is not generated, and it can be fixed at a predetermined position with high accuracy.

[0089]

As described above, according to the first aspect of the present invention.
According to the stage fixing device of the first aspect, since the fixing member is fixed to the rod-shaped member by surface contact, it can be firmly fixed. Further, when the above-mentioned surface contact is made, since the contact is made from a direction orthogonal to the moving direction of the stage, a force for moving in the moving direction of the stage is not generated between the rod-shaped member and the fixed member, and high accuracy can be obtained at a predetermined position. Can be fixed to. Therefore, it is possible to fix a stage of a processing machine that needs to be adjusted and fixed at a micron level, which is installed on the spindle of the processing machine and does not move even when rotating at high speed.

Further, since it is possible to provide a compact stage fixing device having a high fixing force, it is possible to perform high-precision machining without disturbing the rotational balance of the high-speed spindle to which the stage fixing device is attached.

According to the stage fixing device of the second aspect of the present invention, the rod-shaped member is formed into a columnar shape, and the fixing member having the inner surface corresponding to the hollow portion of the columnar shape is contacted and clamped. It can be surface-contacted and firmly fixed.

According to the stage fixing method of the third aspect of the present invention, since the rod-shaped member is moved to a predetermined position and the rod-shaped member is fixed by surface contact at that position, it can be firmly fixed.
Further, when the above-mentioned surface contact is made, since the contact is made from a direction orthogonal to the moving direction of the stage, a force for moving the rod-shaped member in the moving direction of the stage is not generated, and it can be fixed at a predetermined position with high accuracy. .. Therefore, in the stage of the processing machine that needs the adjustment and fixing at the micron level,
It is possible to fix the stage that is installed on the spindle of the processing machine and does not move even when it rotates at high speed.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing a stage fixing device according to a first embodiment of the present invention, FIG. 1 (a) is a front view, and FIG. 1 (b) is a right side view.

FIG. 2 is an enlarged view showing a clamp portion provided in the stage fixing device according to the first embodiment of the present invention.

FIG. 3 is a perspective view showing the stage fixing device according to the first embodiment of the present invention.

FIG. 4 is an enlarged view showing a clamp part provided in a stage fixing device according to a second embodiment of the present invention.

FIG. 5 is a perspective view showing a stage fixing device according to a third embodiment of the present invention.

FIG. 6 is a perspective view showing a stage fixing device according to a fourth embodiment of the present invention.

FIG. 7 is a perspective view showing a conventional stage fixing device.

FIG. 8 is a perspective view showing a conventional stage fixing device.

FIG. 9 is a diagram of FIG. 8 viewed from the right side.

FIG. 10 is an explanatory diagram for explaining a problem of the stage fixing device shown in FIG.

11 is an explanatory diagram for explaining a problem of the stage fixing device shown in FIG.

[Explanation of symbols]

3,23,33 movable stage 4,24,34 Adjustment knob 6,26a, 36a Fixed shaft 7 clamps 7a, 27a, 37a holes 7b, 27b, 37b Gap 8,28 fixing screw 17 3-jaw chuck 17a chuck member 19 motor 26b, 36b slide shaft 27, 37 fixed clamp 38 Fixed knob

Claims (3)

[Claims] 1. A stage fixing device for mounting a stage for fixing a work on a processing shaft of a processing machine, adjusting the position of the stage, and fixing the stage at a predetermined position. A stage fixing device comprising: an extended rod-shaped member; and a fixing member that fixes the rod-shaped member in surface contact from a direction orthogonal to a moving direction of the stage. 2. The rod-shaped member has a cylindrical shape,
2. The stage fixing device according to claim 1, wherein the fixing member is a clamp that holds the rod-shaped member having an inner surface corresponding to a circular arc-shaped portion. 3. A stage fixing method in which a stage for fixing a work is installed on a processing shaft of a processing machine, and the position of the stage is adjusted and fixed at a predetermined position. A stage having a step of moving the extended rod-shaped member to a predetermined position, and a step of fixing the rod-shaped member moved to the predetermined position by surface contact from a direction orthogonal to the moving direction of the stage. Fixing method.