JP2010203814A5 - - Google Patents
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- Publication number
- JP2010203814A5 JP2010203814A5 JP2009047361A JP2009047361A JP2010203814A5 JP 2010203814 A5 JP2010203814 A5 JP 2010203814A5 JP 2009047361 A JP2009047361 A JP 2009047361A JP 2009047361 A JP2009047361 A JP 2009047361A JP 2010203814 A5 JP2010203814 A5 JP 2010203814A5
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- JP
- Japan
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009047361A JP4796161B2 (ja) | 2009-02-27 | 2009-02-27 | 薄膜検査装置及びその方法 |
| PCT/JP2009/062125 WO2010097972A1 (ja) | 2009-02-27 | 2009-07-02 | 薄膜検査装置及びその方法 |
| EP09840819A EP2402711A1 (en) | 2009-02-27 | 2009-07-02 | Apparatus and method for inspecting thin film |
| US13/120,295 US8482744B2 (en) | 2009-02-27 | 2009-07-02 | Thin-film inspection apparatus and method therefor |
| CN200980138578.0A CN102165281B (zh) | 2009-02-27 | 2009-07-02 | 薄膜检查装置及其方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009047361A JP4796161B2 (ja) | 2009-02-27 | 2009-02-27 | 薄膜検査装置及びその方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010203814A JP2010203814A (ja) | 2010-09-16 |
| JP2010203814A5 true JP2010203814A5 (ja) | 2011-05-19 |
| JP4796161B2 JP4796161B2 (ja) | 2011-10-19 |
Family
ID=42665194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009047361A Expired - Fee Related JP4796161B2 (ja) | 2009-02-27 | 2009-02-27 | 薄膜検査装置及びその方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8482744B2 (ja) |
| EP (1) | EP2402711A1 (ja) |
| JP (1) | JP4796161B2 (ja) |
| CN (1) | CN102165281B (ja) |
| WO (1) | WO2010097972A1 (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5756733B2 (ja) * | 2011-10-20 | 2015-07-29 | 倉敷紡績株式会社 | 干渉式膜厚計 |
| JP6869648B2 (ja) * | 2016-06-07 | 2021-05-12 | 日東電工株式会社 | 多層膜の成膜方法 |
| JP6956673B2 (ja) * | 2018-04-09 | 2021-11-02 | 三菱電機株式会社 | 膜厚測定装置 |
| JP7220625B2 (ja) * | 2019-06-05 | 2023-02-10 | 東京エレクトロン株式会社 | 基板検査方法、基板検査システム及び制御装置 |
| TWI790591B (zh) * | 2021-04-12 | 2023-01-21 | 環球晶圓股份有限公司 | 晶圓加工系統及其重工方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US555472A (en) * | 1896-02-25 | Luggage-carrier for vehicles | ||
| JPS58154602A (ja) * | 1982-03-10 | 1983-09-14 | Nippon Kokan Kk <Nkk> | テイン・フリ−・スチ−ルの表面被膜厚測定方法及び装置 |
| JP2883192B2 (ja) * | 1990-11-05 | 1999-04-19 | オリンパス光学工業株式会社 | 光学式膜厚測定装置 |
| US5555472A (en) | 1993-12-22 | 1996-09-10 | Integrated Process Equipment Corp. | Method and apparatus for measuring film thickness in multilayer thin film stack by comparison to a reference library of theoretical signatures |
| JP3764794B2 (ja) * | 1997-03-06 | 2006-04-12 | 松下電器産業株式会社 | 多層薄膜の膜厚測定方法と光学情報記録媒体の製造方法及び製造装置 |
| JP3732894B2 (ja) * | 1996-06-26 | 2006-01-11 | 松下電器産業株式会社 | 多層薄膜の膜厚測定方法と、その方法を用いた光学情報記録媒体の製造方法及び光学情報記録媒体の製造装置 |
| US5883720A (en) | 1996-06-26 | 1999-03-16 | Matsushita Electric Industrial Co., Ltd. | Method of measuring a film thickness of multilayer thin film |
| JPH11160028A (ja) * | 1997-11-27 | 1999-06-18 | Dainippon Screen Mfg Co Ltd | 膜厚測定装置および膜厚測定方法 |
| CA2341629A1 (en) | 1998-08-26 | 2000-03-09 | Hodaka Norimatsu | Photovoltaic device |
| CN1556914A (zh) * | 2001-09-21 | 2004-12-22 | Kmac株式会社 | 利用二维反射计测量多层薄膜的厚度轮廓和折射率分布的装置及其测量方法 |
| TWI460418B (zh) * | 2005-11-29 | 2014-11-11 | Horiba Ltd | 有機電致發光元件之製造方法及製造裝置 |
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2009
- 2009-02-27 JP JP2009047361A patent/JP4796161B2/ja not_active Expired - Fee Related
- 2009-07-02 WO PCT/JP2009/062125 patent/WO2010097972A1/ja active Application Filing
- 2009-07-02 EP EP09840819A patent/EP2402711A1/en not_active Withdrawn
- 2009-07-02 CN CN200980138578.0A patent/CN102165281B/zh not_active Expired - Fee Related
- 2009-07-02 US US13/120,295 patent/US8482744B2/en not_active Expired - Fee Related