JP2010187505A - θＺ軸リニアモータ - Google Patents

θＺ軸リニアモータ Download PDF

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Publication number
JP2010187505A
JP2010187505A JP2009031131A JP2009031131A JP2010187505A JP 2010187505 A JP2010187505 A JP 2010187505A JP 2009031131 A JP2009031131 A JP 2009031131A JP 2009031131 A JP2009031131 A JP 2009031131A JP 2010187505 A JP2010187505 A JP 2010187505A
Authority
JP
Japan
Prior art keywords
axis
coil
linear motor
magnet
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009031131A
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English (en)
Japanese (ja)
Other versions
JP2010187505A5 (enExample
Inventor
Toshiyuki Hoshi
俊行 星
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2009031131A priority Critical patent/JP2010187505A/ja
Publication of JP2010187505A publication Critical patent/JP2010187505A/ja
Publication of JP2010187505A5 publication Critical patent/JP2010187505A5/ja
Pending legal-status Critical Current

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JP2009031131A 2009-02-13 2009-02-13 θＺ軸リニアモータ Pending JP2010187505A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009031131A JP2010187505A (ja) 2009-02-13 2009-02-13 θＺ軸リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009031131A JP2010187505A (ja) 2009-02-13 2009-02-13 θＺ軸リニアモータ

Publications (2)

Publication Number Publication Date
JP2010187505A true JP2010187505A (ja) 2010-08-26
JP2010187505A5 JP2010187505A5 (enExample) 2012-03-29

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ID=42767809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009031131A Pending JP2010187505A (ja) 2009-02-13 2009-02-13 θＺ軸リニアモータ

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JP (1) JP2010187505A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012105444A (ja) * 2010-11-10 2012-05-31 Yaskawa Electric Corp モータ
JP2012105445A (ja) * 2010-11-10 2012-05-31 Yaskawa Electric Corp リニアモータ及びステージ装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63181130A (ja) * 1987-01-23 1988-07-26 Canon Inc 光学系駆動装置
JPS63142012U (enExample) * 1987-03-06 1988-09-19
JPH01317234A (ja) * 1988-06-16 1989-12-21 Sankyo Seiki Mfg Co Ltd 対物レンズ駆動装置
JPH11339292A (ja) * 1998-03-23 1999-12-10 Mitsubishi Electric Corp 光スポット走査制御装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63181130A (ja) * 1987-01-23 1988-07-26 Canon Inc 光学系駆動装置
JPS63142012U (enExample) * 1987-03-06 1988-09-19
JPH01317234A (ja) * 1988-06-16 1989-12-21 Sankyo Seiki Mfg Co Ltd 対物レンズ駆動装置
JPH11339292A (ja) * 1998-03-23 1999-12-10 Mitsubishi Electric Corp 光スポット走査制御装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012105444A (ja) * 2010-11-10 2012-05-31 Yaskawa Electric Corp モータ
JP2012105445A (ja) * 2010-11-10 2012-05-31 Yaskawa Electric Corp リニアモータ及びステージ装置

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