JP2010187195A5 - - Google Patents

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Publication number
JP2010187195A5
JP2010187195A5 JP2009029879A JP2009029879A JP2010187195A5 JP 2010187195 A5 JP2010187195 A5 JP 2010187195A5 JP 2009029879 A JP2009029879 A JP 2009029879A JP 2009029879 A JP2009029879 A JP 2009029879A JP 2010187195 A5 JP2010187195 A5 JP 2010187195A5
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JP
Japan
Prior art keywords
resonator element
vibrating arm
lower electrode
piezoelectric film
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009029879A
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English (en)
Japanese (ja)
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JP2010187195A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009029879A priority Critical patent/JP2010187195A/ja
Priority claimed from JP2009029879A external-priority patent/JP2010187195A/ja
Publication of JP2010187195A publication Critical patent/JP2010187195A/ja
Publication of JP2010187195A5 publication Critical patent/JP2010187195A5/ja
Withdrawn legal-status Critical Current

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JP2009029879A 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子 Withdrawn JP2010187195A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009029879A JP2010187195A (ja) 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009029879A JP2010187195A (ja) 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子

Publications (2)

Publication Number Publication Date
JP2010187195A JP2010187195A (ja) 2010-08-26
JP2010187195A5 true JP2010187195A5 (enrdf_load_stackoverflow) 2012-03-01

Family

ID=42767577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009029879A Withdrawn JP2010187195A (ja) 2009-02-12 2009-02-12 振動片、振動片の製造方法および振動子

Country Status (1)

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JP (1) JP2010187195A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5369741B2 (ja) * 2009-02-12 2013-12-18 セイコーエプソン株式会社 振動片および振動子
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08178672A (ja) * 1994-12-27 1996-07-12 Canon Inc 振動ジャイロ
JPH09189553A (ja) * 1996-01-08 1997-07-22 Matsushita Electric Ind Co Ltd 角速度センサ
JPH10213440A (ja) * 1997-01-29 1998-08-11 Japan Aviation Electron Ind Ltd 振動ジャイロの製造方法及びその方法により製造された振動ジャイロ
JP2000055668A (ja) * 1998-08-06 2000-02-25 Hitachi Ltd 角速度検出センサ
JP4967663B2 (ja) * 2007-01-09 2012-07-04 ソニー株式会社 振動型ジャイロセンサ、制御回路及び電子機器
JP5023734B2 (ja) * 2007-02-21 2012-09-12 セイコーエプソン株式会社 圧電振動片の製造方法及び圧電振動素子
JP5067035B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器

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