JP2010187195A - 振動片、振動片の製造方法および振動子 - Google Patents
振動片、振動片の製造方法および振動子 Download PDFInfo
- Publication number
- JP2010187195A JP2010187195A JP2009029879A JP2009029879A JP2010187195A JP 2010187195 A JP2010187195 A JP 2010187195A JP 2009029879 A JP2009029879 A JP 2009029879A JP 2009029879 A JP2009029879 A JP 2009029879A JP 2010187195 A JP2010187195 A JP 2010187195A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- resonator element
- vibrating arm
- piezoelectric
- lower electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims description 15
- 238000005530 etching Methods 0.000 claims description 8
- 238000009751 slip forming Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 112
- 239000000919 ceramic Substances 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009029879A JP2010187195A (ja) | 2009-02-12 | 2009-02-12 | 振動片、振動片の製造方法および振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009029879A JP2010187195A (ja) | 2009-02-12 | 2009-02-12 | 振動片、振動片の製造方法および振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010187195A true JP2010187195A (ja) | 2010-08-26 |
| JP2010187195A5 JP2010187195A5 (enrdf_load_stackoverflow) | 2012-03-01 |
Family
ID=42767577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009029879A Withdrawn JP2010187195A (ja) | 2009-02-12 | 2009-02-12 | 振動片、振動片の製造方法および振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010187195A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100201223A1 (en) * | 2009-02-12 | 2010-08-12 | Epson Toyocom Corporation | Resonator element and resonator |
| US8525606B2 (en) | 2011-02-02 | 2013-09-03 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic device |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| US9461615B2 (en) | 2013-07-19 | 2016-10-04 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, electronic apparatus, and moving object |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08178672A (ja) * | 1994-12-27 | 1996-07-12 | Canon Inc | 振動ジャイロ |
| JPH09189553A (ja) * | 1996-01-08 | 1997-07-22 | Matsushita Electric Ind Co Ltd | 角速度センサ |
| JPH10213440A (ja) * | 1997-01-29 | 1998-08-11 | Japan Aviation Electron Ind Ltd | 振動ジャイロの製造方法及びその方法により製造された振動ジャイロ |
| JP2000055668A (ja) * | 1998-08-06 | 2000-02-25 | Hitachi Ltd | 角速度検出センサ |
| JP2008170165A (ja) * | 2007-01-09 | 2008-07-24 | Sony Corp | 振動型ジャイロセンサ、制御回路及び電子機器 |
| JP2008205888A (ja) * | 2007-02-21 | 2008-09-04 | Seiko Epson Corp | 圧電振動片の製造方法及び圧電振動素子 |
| JP2009005024A (ja) * | 2007-06-20 | 2009-01-08 | Seiko Epson Corp | 音叉型振動子、発振器 |
-
2009
- 2009-02-12 JP JP2009029879A patent/JP2010187195A/ja not_active Withdrawn
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08178672A (ja) * | 1994-12-27 | 1996-07-12 | Canon Inc | 振動ジャイロ |
| JPH09189553A (ja) * | 1996-01-08 | 1997-07-22 | Matsushita Electric Ind Co Ltd | 角速度センサ |
| JPH10213440A (ja) * | 1997-01-29 | 1998-08-11 | Japan Aviation Electron Ind Ltd | 振動ジャイロの製造方法及びその方法により製造された振動ジャイロ |
| JP2000055668A (ja) * | 1998-08-06 | 2000-02-25 | Hitachi Ltd | 角速度検出センサ |
| JP2008170165A (ja) * | 2007-01-09 | 2008-07-24 | Sony Corp | 振動型ジャイロセンサ、制御回路及び電子機器 |
| JP2008205888A (ja) * | 2007-02-21 | 2008-09-04 | Seiko Epson Corp | 圧電振動片の製造方法及び圧電振動素子 |
| JP2009005024A (ja) * | 2007-06-20 | 2009-01-08 | Seiko Epson Corp | 音叉型振動子、発振器 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100201223A1 (en) * | 2009-02-12 | 2010-08-12 | Epson Toyocom Corporation | Resonator element and resonator |
| US8310137B2 (en) * | 2009-02-12 | 2012-11-13 | Seiko Epson Corporation | Resonator element and resonator |
| US8525606B2 (en) | 2011-02-02 | 2013-09-03 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic device |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| US9461615B2 (en) | 2013-07-19 | 2016-10-04 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, electronic apparatus, and moving object |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5369741B2 (ja) | 振動片および振動子 | |
| US8018127B2 (en) | Flexural resonator element and flexural resonator for reducing energy loss due to heat dissipation | |
| KR101295215B1 (ko) | 진동편, 진동자, 발진기 및, 전자 기기 | |
| CN108140723B (zh) | 压电元件、压电传声器、压电谐振子以及压电元件的制造方法 | |
| JP5708079B2 (ja) | 水晶振動子 | |
| JP5347546B2 (ja) | 振動片、振動片の製造方法および振動子 | |
| JP2010187195A (ja) | 振動片、振動片の製造方法および振動子 | |
| KR20000076671A (ko) | 표면 탄성파 장치 및 이의 제조방법 | |
| JP2011082782A (ja) | 屈曲振動片 | |
| JP5531809B2 (ja) | 屈曲振動片、屈曲振動子、発振器および電子機器 | |
| JP5041145B2 (ja) | 圧電デバイス | |
| JP5381149B2 (ja) | 振動片および振動子 | |
| JP2011228922A (ja) | 振動片、振動片の製造方法、振動子および発振器 | |
| JP2012015886A (ja) | 振動片、振動子、発振器および電子機器 | |
| JP2019147122A (ja) | 振動発生装置及び電子機器 | |
| JP5822186B2 (ja) | 振動子、発振器、および電子機器 | |
| JP2012029024A (ja) | 屈曲振動片、振動子、発振器、および電子機器 | |
| JP2011182113A (ja) | 音叉型屈曲水晶振動素子 | |
| JP5299645B2 (ja) | 屈曲振動片および屈曲振動子の製造方法 | |
| JP2010268439A (ja) | 表面実装用の水晶振動子 | |
| CN114868335A (zh) | 压电振动元件、压电振子以及电子装置 | |
| JP7497754B2 (ja) | 圧電振動子及びその製造方法 | |
| JP5321867B2 (ja) | 圧電デバイスおよびその製造方法 | |
| JP2012015696A (ja) | 屈曲振動片、屈曲振動子、発振器、および電子機器 | |
| JP2006186462A (ja) | 水晶振動子 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20100705 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20100705 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120118 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120118 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130218 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130226 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20130402 |