JP2010175543A5 - - Google Patents

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Publication number
JP2010175543A5
JP2010175543A5 JP2010018594A JP2010018594A JP2010175543A5 JP 2010175543 A5 JP2010175543 A5 JP 2010175543A5 JP 2010018594 A JP2010018594 A JP 2010018594A JP 2010018594 A JP2010018594 A JP 2010018594A JP 2010175543 A5 JP2010175543 A5 JP 2010175543A5
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JP
Japan
Prior art keywords
voltage
compensation
quadrature
orthogonal
square
Prior art date
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Granted
Application number
JP2010018594A
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English (en)
Japanese (ja)
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JP5665325B2 (ja
JP2010175543A (ja
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Publication date
Priority claimed from DE102009000475.0A external-priority patent/DE102009000475B4/de
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Publication of JP2010175543A publication Critical patent/JP2010175543A/ja
Publication of JP2010175543A5 publication Critical patent/JP2010175543A5/ja
Application granted granted Critical
Publication of JP5665325B2 publication Critical patent/JP5665325B2/ja
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JP2010018594A 2009-01-29 2010-01-29 直交補償方法 Active JP5665325B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009000475.0A DE102009000475B4 (de) 2009-01-29 2009-01-29 Verfahren zur Quadraturkompensation
DE102009000475.0 2009-01-29

Publications (3)

Publication Number Publication Date
JP2010175543A JP2010175543A (ja) 2010-08-12
JP2010175543A5 true JP2010175543A5 (enExample) 2012-11-08
JP5665325B2 JP5665325B2 (ja) 2015-02-04

Family

ID=42308724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010018594A Active JP5665325B2 (ja) 2009-01-29 2010-01-29 直交補償方法

Country Status (4)

Country Link
US (1) US8479555B2 (enExample)
JP (1) JP5665325B2 (enExample)
DE (1) DE102009000475B4 (enExample)
IT (1) IT1397895B1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009019318A1 (de) * 2009-04-30 2011-03-24 Continental Teves Ag & Co. Ohg Verfahren zum präzisen Messbetrieb eines mikromechanischen Drehratensensors
DE102012200132A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
DE102012224081A1 (de) * 2012-12-20 2014-06-26 Continental Teves Ag & Co. Ohg Sensor zum Erfassen einer Drehrate eines Objektes
DE102017213815A1 (de) * 2017-08-08 2019-02-14 Robert Bosch Gmbh Drehratensensor mit einem Substrat, Herstellungsverfahren für einen Drehratensensor
DE102021202134A1 (de) * 2020-03-25 2021-09-30 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Bestimmung, Messung und/oder Überwachung von Eigenschaften eines Sensorsystems
US20230332890A1 (en) * 2022-04-18 2023-10-19 Analog Devices, Inc. Quadrature trim vertical electrodes for yaw axis coriolis vibratory gyroscope

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
DE19939998A1 (de) * 1999-08-24 2001-03-01 Bosch Gmbh Robert Vorrichtung zur Vorspannungserzeugung für einen schwingenden Drehratensensor
JP3525862B2 (ja) * 2000-05-22 2004-05-10 トヨタ自動車株式会社 センサ素子及びセンサ装置
US7316161B2 (en) * 2002-01-12 2008-01-08 Robert Bosch Gmbh Rotation rate sensor
US7313958B2 (en) * 2002-01-12 2008-01-01 Robert Bosch Gmbh Rotational rate sensor
DE10350037A1 (de) * 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
DE102004061804B4 (de) 2004-12-22 2015-05-21 Robert Bosch Gmbh Mikromechanischer Drehratensensor mit Fehlerunterdrückung
US7444869B2 (en) 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing and parametric amplification of MEMS inertial sensors
DE102006049887A1 (de) * 2006-10-23 2008-04-24 Robert Bosch Gmbh Drehratensensor mit Quadraturkompensationsstruktur

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