JP2010172976A5 - - Google Patents

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Publication number
JP2010172976A5
JP2010172976A5 JP2009015384A JP2009015384A JP2010172976A5 JP 2010172976 A5 JP2010172976 A5 JP 2010172976A5 JP 2009015384 A JP2009015384 A JP 2009015384A JP 2009015384 A JP2009015384 A JP 2009015384A JP 2010172976 A5 JP2010172976 A5 JP 2010172976A5
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JP
Japan
Prior art keywords
polishing
polishing tool
pressing
polished
polishing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009015384A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010172976A (ja
JP5434094B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009015384A priority Critical patent/JP5434094B2/ja
Priority claimed from JP2009015384A external-priority patent/JP5434094B2/ja
Publication of JP2010172976A publication Critical patent/JP2010172976A/ja
Publication of JP2010172976A5 publication Critical patent/JP2010172976A5/ja
Application granted granted Critical
Publication of JP5434094B2 publication Critical patent/JP5434094B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009015384A 2009-01-27 2009-01-27 研磨装置 Active JP5434094B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009015384A JP5434094B2 (ja) 2009-01-27 2009-01-27 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009015384A JP5434094B2 (ja) 2009-01-27 2009-01-27 研磨装置

Publications (3)

Publication Number Publication Date
JP2010172976A JP2010172976A (ja) 2010-08-12
JP2010172976A5 true JP2010172976A5 (enExample) 2012-10-25
JP5434094B2 JP5434094B2 (ja) 2014-03-05

Family

ID=42704421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009015384A Active JP5434094B2 (ja) 2009-01-27 2009-01-27 研磨装置

Country Status (1)

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JP (1) JP5434094B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5930871B2 (ja) * 2012-06-27 2016-06-08 コマツＮｔｃ株式会社 研削加工装置およびその制御方法
JP6921527B2 (ja) * 2016-02-05 2021-08-18 芝浦機械株式会社 研磨装置
CN109571263B (zh) * 2018-12-11 2021-02-19 湖北开明高新科技有限公司 一种压力可调的回转窑轮带磨削装置
CN110434716B (zh) * 2019-08-16 2024-04-26 天津大学 一种力/位可控面型自适应磨抛装置及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645771A (en) * 1987-06-30 1989-01-10 Toshiba Corp Retaining unit for processing tool
JPH02131851A (ja) * 1988-11-11 1990-05-21 Mitsubishi Electric Corp 曲面研摩装置
JPH03234469A (ja) * 1990-02-07 1991-10-18 Toshiba Corp 研磨装置
JPH04135155A (ja) * 1990-09-21 1992-05-08 Topcon Corp 研磨装置
JPH08141899A (ja) * 1994-11-17 1996-06-04 Nikon Corp 研磨装置
JPH09323251A (ja) * 1996-06-07 1997-12-16 Nikon Corp 研磨ヘッド

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