JP2010167272A - Memsによるスプレイ装置用ノズル集積膜の製造方法、及び該ノズル集積膜を含むスプレイ装置 - Google Patents
Memsによるスプレイ装置用ノズル集積膜の製造方法、及び該ノズル集積膜を含むスプレイ装置 Download PDFInfo
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- JP2010167272A JP2010167272A JP2009290875A JP2009290875A JP2010167272A JP 2010167272 A JP2010167272 A JP 2010167272A JP 2009290875 A JP2009290875 A JP 2009290875A JP 2009290875 A JP2009290875 A JP 2009290875A JP 2010167272 A JP2010167272 A JP 2010167272A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M15/00—Inhalators
- A61M15/009—Inhalators using medicine packages with incorporated spraying means, e.g. aerosol cans
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Public Health (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Hematology (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Veterinary Medicine (AREA)
- Anesthesiology (AREA)
- Pulmonology (AREA)
- Heart & Thoracic Surgery (AREA)
- Wood Science & Technology (AREA)
- Nozzles (AREA)
- Micromachines (AREA)
- Drying Of Semiconductors (AREA)
- Special Spraying Apparatus (AREA)
- Artificial Filaments (AREA)
- Weting (AREA)
Abstract
【解決手段】 スプレイ装置のノズル膜を製造する方法は、基板(11)を設けるステップと、前記基板(11)上に膜層(13)を形成するステップと、前記膜層(13)内に複数のノズル(14)を形成するステップと、基板(10)内に複数の供給通路(15)を形成するステップとを含む。各供給通路(15)は、前記複数のノズルに含まれる個々のノズル(14)にほぼ直交して配置し、個々のノズル(14)と直接接触させる。
【選択図】図17
Description
Claims (15)
- スプレイ装置のノズル膜を製造する方法であって、
・第1材料の基板(11)を準備するステップと、
・前記基板(11)上に第2材料の膜層(13)を形成するステップと、
・前記膜層(13)内に複数のノズル(14)を形成するステップと、
・基板(10)内に複数の供給通路(15)を形成するステップとを含み、各前記供給通路を前記複数のノズルに含まれる個々のノズル(14)に関してほぼ垂直に配置し、かつ個々のノズルと直接接触させる、スプレイ装置のノズル膜を製造する方法。 - 前記膜層(13)を形成する前記ステップが、前記基板(11)と区別のできる膜層の形成を含む、請求項1に記載の方法。
- 前記膜層(13)を形成する前記ステップが、前記第2材料を成長させ、または堆積させるステップを含む、請求項1または2に記載の方法。
- 前記第2材料がポリシリコンである、請求項3に記載の方法。
- 前記基板(11)の前記第1材料が前記膜層(13)の前記第2材料と異なり、または前記第1及び前記第2材料が同じで結晶構造が異なる、請求項1〜4のいずれか一項に記載の方法。
- 前記基板(11)と前記膜層(13)の間にある第1犠牲層(12)を形成するステップをさらに含み、前記第1犠牲層を選択的に除去し、個々の前記ノズル(14)に各前記供給通路(15)を直接結合する、請求項1〜5のいずれか一項に記載の方法。
- 前記膜層(13)形成前に前記第1犠牲層(12)を形成するステップを実行し、該方法は前記膜層(13)の形成前に、前記第1犠牲層(12)の選択的部分の除去及び溝(21)の形成ステップをさらに含み、前記膜層(13)を形成する前記ステップは、前記溝(21)を通して前記基板に固定される膜固定(22)を形成するステップを含む、請求項6に記載の方法。
- 前記供給通路(15)の形成前に、前記基板(11)の裏面掘削及び前記複数のノズル(14)の下方にある前記基板(11)の中へのタンク(31)形成をさらに含む、請求項1〜7のいずれか一項に記載の方法。
- 複数の誘導通路(42)の形成ステップをさらに含み、各前記誘導通路を前記複数のノズルに含まれる個々のノズル上に延在させる、請求項1〜8のいずれか一項に記載の方法。
- 複数の前記誘導通路(42)を形成するステップが、
・前記複数のノズルを形成するステップの後、前記膜層(13)上に前記第2犠牲層(40)を堆積させるステップと、
・前記ノズルに関して横方向に交互に並ぶ区域の前記第2犠牲層を選択的に除去するステップと、
・前記第2犠牲層(40)上の誘導通路層(41)を増大させるステップと、
・前記誘導通路層(41)の選択的部分を除去するステップと、
・前記第2犠牲層(40)を除去し、また各前記誘導通路(42)と個々の前記ノズル(14)を直接結合するステップとを含む、請求項9に記載の方法。 - スプレイ装置であって、
・液体物質を含むように構成された内部チャンバ(52)を有するタンク(51)と、
・注入口(54)と、
・液体物質の排出用の排出構造(16、25、35、45)と、
・前記タンク(51)に結合する作動装置(53)で、前記タンクから液体物質を排出するように構成される作動装置とを含み、
前記排出構造がノズル膜(16、25、35、45)を含み、請求項1〜10のいずれか一項に記載された製造方法に従って形成されたものであることを特徴とするスプレイ装置。 - 前記膜が、
・前記第1材料の前記基板(11)と、
・前記基板上の前記第2材料の前記膜層(13)と、
・前記膜層(13)を通過して形成される前記複数のノズル(14)とを含み、
前記膜層は前記基板と区別可能である、請求項11に記載のスプレイ装置。 - 前記基板(11)の前記第1材料が前記膜層(13)の前記第2材料と異なり、または前記第1及び前記第2材料が同じで結晶構造が異なる、請求項11または12に記載のスプレイ装置。
- 前記第2材料がポリシリコンである、請求項13に記載のスプレイ装置。
- 請求項11〜14に記載の前記スプレイ装置(50)を含む吸入器(100)。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT000980A ITTO20080980A1 (it) | 2008-12-23 | 2008-12-23 | Processo di fabbricazione di una membrana di ugelli integrata in tecnologia mems per un dispositivo di nebulizzazione e dispositivo di nebulizzazione che utilizza tale membrana |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2010167272A true JP2010167272A (ja) | 2010-08-05 |
Family
ID=41338484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009290875A Pending JP2010167272A (ja) | 2008-12-23 | 2009-12-22 | Memsによるスプレイ装置用ノズル集積膜の製造方法、及び該ノズル集積膜を含むスプレイ装置 |
Country Status (4)
Country | Link |
---|---|
US (3) | US20100154790A1 (ja) |
EP (1) | EP2204238B1 (ja) |
JP (1) | JP2010167272A (ja) |
IT (1) | ITTO20080980A1 (ja) |
Cited By (2)
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JP2016525407A (ja) * | 2013-07-22 | 2016-08-25 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | ネブライザにおいて使用するメッシュ、及びこのメッシュを製造する方法 |
JP2017520279A (ja) * | 2014-03-18 | 2017-07-27 | ザ プロクター アンド ギャンブル カンパニー | 改善された流体混合物を含むインクジェット送達システム |
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ITTO20080980A1 (it) * | 2008-12-23 | 2010-06-24 | St Microelectronics Srl | Processo di fabbricazione di una membrana di ugelli integrata in tecnologia mems per un dispositivo di nebulizzazione e dispositivo di nebulizzazione che utilizza tale membrana |
US9719184B2 (en) | 2010-12-28 | 2017-08-01 | Stamford Devices Ltd. | Photodefined aperture plate and method for producing the same |
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US10066114B2 (en) | 2012-09-14 | 2018-09-04 | The Procter & Gamble Company | Ink jet delivery system comprising an improved perfume mixture |
WO2015177311A1 (en) | 2014-05-23 | 2015-11-26 | Stamford Devices Limited | A method for producing an aperture plate |
WO2015180079A1 (zh) * | 2014-05-28 | 2015-12-03 | 王长津 | 一种微孔雾化片及微孔雾化装置 |
US9278150B2 (en) | 2014-06-20 | 2016-03-08 | The Procter & Gamble Company | Method of delivering a dose of a fluid composition from a microfluidic delivery cartridge |
US9433696B2 (en) | 2014-06-20 | 2016-09-06 | The Procter & Gamble Company | Microfluidic delivery system for releasing fluid compositions |
US9211980B1 (en) | 2014-06-20 | 2015-12-15 | The Procter & Gamble Company | Microfluidic delivery system for releasing fluid compositions |
US10076585B2 (en) | 2014-06-20 | 2018-09-18 | The Procter & Gamble Company | Method of delivering a dose of a fluid composition from a microfluidic delivery cartridge |
US9808812B2 (en) * | 2014-06-20 | 2017-11-07 | The Procter & Gamble Company | Microfluidic delivery system |
JP6878314B2 (ja) | 2015-06-11 | 2021-05-26 | ザ プロクター アンド ギャンブル カンパニーThe Procter & Gamble Company | 表面に組成物を塗布するための装置及び方法 |
US20170072085A1 (en) | 2015-09-16 | 2017-03-16 | The Procter & Gamble Company | Microfluidic delivery system and cartridge |
US9636430B2 (en) | 2015-09-16 | 2017-05-02 | The Procter & Gamble Company | Microfluidic delivery system and cartridge having an outer cover |
US20170072086A1 (en) | 2015-09-16 | 2017-03-16 | The Procter & Gamble Company | Microfluidic delivery system and cartridge having an outer cover |
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US11090404B2 (en) | 2016-05-19 | 2021-08-17 | The Procter & Gamble Company | Systems for dispensing fluid materials |
US20170333589A1 (en) | 2016-05-19 | 2017-11-23 | The Procter & Gamble Company | Methods for Dispensing Fluid Materials |
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US10675373B2 (en) * | 2016-07-27 | 2020-06-09 | Newmarket Concepts, Llc | Fragrance dispenser having a disposable piezoelectric cartridge with a snap-in bottle containing aromatic liquid |
US10149917B2 (en) | 2016-11-22 | 2018-12-11 | The Procter & Gamble Company | Fluid composition and a microfluidic delivery cartridge comprising the same |
US11305301B2 (en) | 2017-04-10 | 2022-04-19 | The Procter & Gamble Company | Microfluidic delivery device for dispensing and redirecting a fluid composition in the air |
US11691162B2 (en) | 2017-04-10 | 2023-07-04 | The Procter & Gamble Company | Microfluidic delivery cartridge for use with a microfluidic delivery device |
US20180290156A1 (en) | 2017-04-10 | 2018-10-11 | The Procter & Gamble Company | Microfluidic delivery device and method for dispensing a fluid composition upward into the air |
US20180290158A1 (en) | 2017-04-10 | 2018-10-11 | The Procter & Gamble Company | Microfluidic delivery device and method of jetting a fluid composition with the same |
US11383251B2 (en) * | 2017-05-31 | 2022-07-12 | Shl Medical Ag | Nozzle device and a method of manufacturing the same |
US10806816B2 (en) | 2018-05-15 | 2020-10-20 | The Procter & Gamble Company | Microfluidic cartridge and microfluidic delivery device comprising the same |
IT201800005372A1 (it) * | 2018-05-15 | 2019-11-15 | Dispositivo microfluidico erogatore di sostanze inalabili | |
WO2024126670A1 (en) * | 2022-12-14 | 2024-06-20 | Philip Morris Products S.A. | Vibrating mesh module with integrated flow chamber |
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2009
- 2009-12-22 JP JP2009290875A patent/JP2010167272A/ja active Pending
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2013
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JP2016525407A (ja) * | 2013-07-22 | 2016-08-25 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | ネブライザにおいて使用するメッシュ、及びこのメッシュを製造する方法 |
JP2017520279A (ja) * | 2014-03-18 | 2017-07-27 | ザ プロクター アンド ギャンブル カンパニー | 改善された流体混合物を含むインクジェット送達システム |
Also Published As
Publication number | Publication date |
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US20140202453A1 (en) | 2014-07-24 |
EP2204238A1 (en) | 2010-07-07 |
EP2204238B1 (en) | 2014-10-29 |
US20100154790A1 (en) | 2010-06-24 |
ITTO20080980A1 (it) | 2010-06-24 |
US20130134131A1 (en) | 2013-05-30 |
US9486593B2 (en) | 2016-11-08 |
US8721910B2 (en) | 2014-05-13 |
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