JP2010152078A - Method and device for correcting color filter substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a correction method of a color filter substrate, which is capable of sufficiently reducing the height of a defect occurring in a color layer of the color filter substrate without giving polishing scratches to the color layer and is capable of correcting a deposited foreign matter detected on a surface of the color filter substrate after formation of a transparent electrode, a photo spacer, projections for orientation control or the like, and the color layer. <P>SOLUTION: In the correction method of a color filter substrate, a micromanipulator including a microprobe is moved to a prescribed position on the color filter substrate, and a foreign matter deposited on the color filter substrate is removed by manipulation operation of the microprobe. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a correction method for a color filter substrate, and more particularly, to a correction method and a correction device for removing surface adhering foreign matter attached on a color filter substrate by a manipulation operation of a microprobe.

  In a color liquid crystal display, a color filter substrate is used in which a number of layers colored, for example, R (red), G (green), and B (blue) are arranged in a predetermined pattern on a transparent substrate. As a manufacturing method for forming this color filter substrate, a method in which a photosensitive colored layer is applied on a transparent substrate and a patterning process is repeated for each color using a regular photolithography method, or a large number of cells are formed on the substrate. There is an ink jet method in which the colored material is formed and injected directly into the cell.

  In addition, a transparent electrode is formed on the color filter layer following the formation of the colored layer. Further, a protrusion for controlling the alignment of liquid crystal and a photo spacer for holding the cell gap are formed using a resist material. It is increasingly manufactured by lithography (see Figure 1).

In the color filter substrate manufactured through such a complicated patterning process, dust, adhered foreign matter such as metal pieces, solvent gelation, resist residue, etc. are in the color filter, in the transparent electrode, in the photospacer, for alignment control. It is unavoidable to be held in the protrusions or to remain attached to these surfaces. If such a foreign substance exists, a short circuit between the electrodes on the upper and lower substrates, liquid crystal alignment failure, color loss, and the like occur, and the display quality as a liquid crystal display deteriorates.
JP-A-8-141902 Japanese Patent Publication No. 6-100653 Japanese Patent Laid-Open No. 11-271752

  In the manufacturing process of the color filter substrate, when it is detected that foreign matter has adhered to the surface of the substrate or included in the formed layer, correction with a tape (for example, refer to Patent Document 1), laser repair correction (For example, refer to Patent Document 2) Ink repair correction (for example, refer to Patent Document 3), or a correction method combining these is applied to the defective part.

The foreign object defect that is subject to tape correction is a protruding part where the surface height of the defective part deviates from the standard, and the polishing tape with the abrasive grains fixed is in close contact with the tip of the protrusion and rocked. The part is scraped off gradually to reduce the height of the protruding portion.
However, due to hardware limitations, it is impossible to completely correct foreign matter adhering to the colored layer, and if it is forcibly polished, there is a problem that scratches called polishing marks occur on the film surface of the colored layer. .

  Laser repair is a technique that removes resist residues and the like generated when forming R, G, and B colored pixels or a black matrix that partitions the colored pixels by a laser ablation action. Laser repair has a problem that it cannot be applied to foreign matter defects formed in the process after the formation of the R, G, and B colored layers, because the transparent electrode film may be damaged.

  Increment technology is a technique for injecting and correcting the same or similar material as the original material into the part (laser cut part) after removing the defective part by laser ablation technology. It is technology to recover. In this case, until the formation of the colored layers of R, G, and B, the defective portion is removed by laser ablation, and the coloring material can be applied to the portion, so that no particular problem occurs. However, once the formation of the transparent electrode and the patterning of the photospacer and the alignment control protrusion are made, it becomes impossible to correct the laser cut site by the laser, which is a conventional technique. There is a problem of damaging the filter. Therefore, it is necessary to develop a correction technique for patterning the alignment control protrusion.

  Therefore, the present invention can sufficiently reduce the height of defects generated in the colored layer without giving polishing marks to the colored layer, and further includes a transparent electrode, a photospacer, and an alignment control protrusion. An object of the present invention is to provide a correction method and a correction device for a color filter substrate that can correct adhered foreign matter detected on the surface of the color filter substrate after forming a colored layer.

  The invention according to claim 1 for achieving the above object is to move a micromanipulator including a microprobe to a predetermined position on a color filter substrate and attach the micromanipulator to the color filter substrate by a manipulation operation of the microprobe. The color filter substrate correction method is characterized by removing foreign matter.

  According to such a method, the microprobe can be peeled by contacting only the adhered foreign substance as a defect site.

  The invention according to claim 2 is the color filter substrate correction method according to claim 1, wherein the manipulation operation is an operation of blowing off adhered foreign matter by air blow from the microprobe. .

  According to such a method, air can be locally blown from the microprobe to only the adhered foreign matter as a defect site.

  The invention according to claim 3 is the color filter substrate correcting method according to claim 1, wherein the manipulation operation is an operation of adsorbing adhering foreign matter by adsorption from the microprobe. .

  According to this method, only the adhered foreign matter can be adsorbed to the microprobe.

  The invention according to claim 4 is that the manipulation operation is a combination of an operation of blowing off the adhered foreign matter by air blow from the microprobe and an operation of attracting the adhered foreign matter by adsorption from the microprobe. The color filter substrate correcting method according to claim 1, wherein the color filter substrate is corrected.

  The invention according to claim 5 is a mechanism for moving at least a micromanipulator having a microprobe to a predetermined position on the color filter substrate, and a mechanism for removing foreign matter adhering to the color filter substrate by a manipulation operation of the microprobe. And a color filter substrate correcting device.

  The invention according to claim 6 is the color filter substrate correcting device according to claim 5, wherein an air blow mechanism is provided in the microprobe.

  The invention according to claim 7 is the color filter substrate correcting device according to claim 5, wherein an adsorption mechanism is provided in the microprobe.

  The invention according to claim 8 is the color filter substrate correcting device according to claim 5, wherein an ultrasonic vibration mechanism is provided in the microprobe.

  In such a configuration, the microprobe can be vibrated by ultrasonic waves.

  According to the present invention, not only the foreign matter adhering to the colored layer but also other members constituting the color filter substrate, that is, the foreign matter adhering to each of the transparent electrode, the photo spacer, and the alignment control protrusion, are also colored color filter layer, transparent Foreign matter can be removed without damaging the electrodes, photo spacers, and alignment control protrusions.

  Hereinafter, an exemplary embodiment of the present invention will be described with reference to the drawings.

FIG. 1 schematically shows a cross-sectional configuration of a color filter substrate.
A black matrix 2, R, G, and B colored layers 3, 3 ′, 3 ″ and a transparent electrode 4 are laminated in this order on the glass substrate 1, and further, alignment control protrusions at predetermined positions above the black matrix 2. 5 and the photo spacer 6 are formed by a photolithography technique.
The foreign matter 7 to be removed and corrected by the present invention is a foreign matter attached to the surface of the color filter substrate, more specifically, the transparent electrode, the alignment control protrusion, and the surface of the photo spacer as shown in FIG.
In addition, the present correction method and correction apparatus can remove foreign matters (not shown) attached to the surface of the colored layer when the colored layers 3, 3 ′, 3 ″ are formed before the transparent electrode 4 is formed. It can also be applied to corrections.

FIG. 2 shows the overall configuration of a correction device including a micromanipulator. A built-in micromanipulator (manufactured by Suruga Seiki Co., Ltd.) is attached to the gantry of the correction device.
The correction device basically includes a microscope 18 and a correction head. The target foreign matter is detected and confirmed with the microscope 18 and the foreign matter is corrected with the correction head. Regarding the correction method, there are known techniques such as tape repair and laser repair. These are portal-type mounts called gantry, and are generally driven using LM guides.

  The micromanipulator is provided with a microprobe 16 on each of the left and right arms 12, and the microprobe 16 is a glass pipette type of 20 μmφ and 40 μmφ. The microprobe 16 can be used with a cutting knife, a metal needle, etc. in addition to the pipette, but it has been difficult to completely remove the adhered foreign matter by damaging the target surface. The mounting of a micropipette was a preferred embodiment.

  The micromanipulator includes a cable connector 11, a probe mounting arm 12, a probe mounting arm fixing screw 13, a probe fixing screw 14, a probe rotation fixing screw 15, a glass pipette, a mounting bracket 17, and the like. Further, a tube is connected to one end of the micropipette 16, and filters 19, 19 ′ and a pump (not shown) are connected to the end of the tube. It can be used by switching between 'and suction sides 21 and 21'.

  When the adhered foreign matter 7 is detected again based on information from the foreign matter detection device, the tip of the micropipette 16 is brought into contact with the attached foreign matter 7, and the micropipette is moved in the X and Y directions to adhere. It is possible to peel off foreign matter. At this time, the micropipette is brought into contact with the adhered foreign matter, but it can be prevented from coming into contact with members other than the foreign matter. The peeled adhered foreign matter is removed from the location by air blow from a micropipette or vacuum suction. When adsorbing, the above-described filters 19 and 19 ′ are used so that the piping is not clogged.

  Furthermore, an ultrasonic transducer can be connected to the mounting bracket 17. By attaching an ultrasonic vibrator between the bracket and the probe holder and vibrating the microprobes 16 and 16 'at a constant frequency, the adhered foreign matter can be easily peeled off.

  Regarding the operation of the glass pipette attached to each arm, for example, by moving the pipette of the right-hand arm in the X and Y axis directions, the operation of separating the adhered foreign matter is performed, and at the same time, the foreign matter separated by air blow is blown off. An operation can be employed in which the blown-off foreign matter is vacuum-sucked with a glass pipette attached to the left hand arm, and the foreign matter is removed.

  As another example of operation, the glass pipette of the right hand arm is moved in the X and Y axis directions to remove and remove the adhered foreign matter, and at the same time, the glass pipette of the left hand arm performs air blowing. At the same time, it is possible to perform an operation of adsorbing the adhered foreign matter peeled off by the glass pipette of the right hand arm.

  In the case of tape repair, the foreign matter adhering to the colored layer was damaged by polishing marks on the colored layer due to R (curvature) of the tape when the foreign matter was completely removed. On the other hand, when the micromanipulator was used to peel off using the lever principle, only the foreign matter could be peeled off. Therefore, it can be removed without damaging the colored layer.

It is a figure of the sectional view which shows typically a mode that the foreign material adhered to the color filter substrate surface. It is a figure explaining the structure of the color filter board | substrate correction apparatus provided with a micromanipulator.

Explanation of symbols

1. Transparent substrate 2, black matrix 3, 3 ′, 3 ″ colored layer (R, G, B)
4, transparent electrode 5, orientation control protrusion 6, photo spacer 7, adhered foreign material 11, cable connector 12, probe mounting arm 13, probe mounting arm fixing screw 14, probe fixing screw 15, probe rotation fixing screw 16, probe (Glass pipette)
17, mounting bracket 18, microscope 19, 19 'filter 20, solenoid valve switching unit 21, 21' suction port 22, 22 'blow port

Claims (8)

  A method of correcting a color filter substrate, wherein a micromanipulator having a microprobe is moved to a predetermined position on the color filter substrate, and foreign matter adhering to the color filter substrate is removed by a manipulation operation of the microprobe. .   The method for correcting a color filter substrate according to claim 1, wherein the manipulation operation is an operation of blowing off adhered foreign matter by air blowing from the microprobe.   The method for correcting a color filter substrate according to claim 1, wherein the manipulation operation is an operation of adsorbing adhering foreign matter by adsorption from the microprobe.   2. The operation according to claim 1, wherein the manipulation operation is a combination of an operation of blowing off adhered foreign matter by air blow from the microprobe and an operation of attracting attached foreign matter by suction from the microprobe. Method for correcting color filter substrate.   A mechanism for moving at least a micromanipulator including a microprobe to a predetermined position on the color filter substrate; and a mechanism for removing foreign matter adhering to the color filter substrate by a manipulation operation of the microprobe. Color filter substrate correction device.   6. The correction device for a color filter substrate according to claim 5, wherein an air blow mechanism is provided on the microprobe.   The color filter substrate correcting device according to claim 5, wherein an adsorption mechanism is provided in the microprobe.   The color filter substrate correcting device according to claim 5, wherein an ultrasonic vibration mechanism is provided in the microprobe.

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