JP2010134368A - 上層膜形成組成物、上層膜およびパターン形成方法 - Google Patents
上層膜形成組成物、上層膜およびパターン形成方法 Download PDFInfo
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- JP2010134368A JP2010134368A JP2008312515A JP2008312515A JP2010134368A JP 2010134368 A JP2010134368 A JP 2010134368A JP 2008312515 A JP2008312515 A JP 2008312515A JP 2008312515 A JP2008312515 A JP 2008312515A JP 2010134368 A JP2010134368 A JP 2010134368A
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Abstract
【解決手段】フォトレジスト膜の表面上に上層膜を形成するために用いられる上層膜形成組成物であって、該組成物は、前記フォトレジスト膜を現像する現像液に溶解する樹脂成分(A)とアミド基含有化合物(B)とを含有する上層膜形成組成物である。
【選択図】なし
Description
本発明の上層膜形成組成物の一実施形態は、フォトレジスト膜の表面上に上層膜を形成するために用いられる上層膜形成組成物であって、前記フォトレジスト膜を現像する現像液に溶解する樹脂成分(A)とアミド基含有化合物(B)とを含有するものである。
本実施形態の上層膜形成組成物に含まれる樹脂成分(A)は、フォトレジスト膜を現像する現像液に溶解する樹脂から成る成分である。
樹脂成分(A)を構成する樹脂の製造方法は、特に制限はなく、樹脂成分(A)を構成する樹脂は、例えば、適当な開始剤や連鎖移動剤の存在下、重合溶媒中で、対応する一以上のラジカル重合性単量体や他の繰り返し単位を得るために用いられる単量体(以下、これらの単量体を総称して「樹脂成分(A)を構成する樹脂を製造するために用いられる単量体」と記す場合がある)をラジカル重合する方法などを挙げることができる。
コータ/デベロッパ(1)(商品名:CLEAN TRACK ACT8、東京エレクトロン社製)を用い、8インチシリコンウエハ上に、上層膜形成組成物として樹脂成分(A)を後述する溶剤に溶解させたものをスピンコートし、90℃、60秒の条件で予備焼成(PB)を行い、膜厚90nmの上層膜を形成する。この上層膜の膜厚を、光干渉式膜厚測定装置(商品名:ラムダエースVM−2010、大日本スクリーン製造社製)を用いて測定する。なお、このときの膜厚を初期膜厚という。次いで、上層膜が形成されたウエハの表面に、上記コータ/デベロッパ(1)のリンスノズルから超純水を60秒間吐出させた後、回転数4000rpmで15秒間振り切り、スピンドライする。その後、上層膜の膜厚を上記光干渉式膜厚測定装置にて再度測定し、初期膜厚に対する膜厚の変化比率を算出する。算出した変化比率が3%以内であれば「媒体(液浸液)に対して安定」と評価する。また、「現像液に対して溶解し得る」とは、現像液としてアルカリ性水溶液を用いた場合、レジストパターン上に上層膜の残渣がなく、上層膜が除去されることをいう。なお、残渣の有無は目視で行う。
本実施形態の上層膜形成組成物は、アミド基含有化合物(B)を含有する。前記アミド基含有化合物(B)としては、例えば、N−t−ブトキシカルボニルジ−n−オクチルアミン、N−t−ブトキシカルボニルジ−n−ノニルアミン、N−t−ブトキシカルボニルジ−n−デシルアミン、N−t−ブトキシカルボニルジシクロヘキシルアミン、N−t−ブトキシカルボニル−1−アダマンチルアミン、N−t−ブトキシカルボニル−2−アダマンチルアミン、N−t−ブトキシカルボニル−N−メチル−1−アダマンチルアミン、(S)−(−)−1−(t−ブトキシカルボニル)−2−ピロリジンメタノール、(R)−(+)−1−(t−ブトキシカルボニル)−2−ピロリジンメタノール、N−t−ブトキシカルボニル−4−ヒドロキシピペリジン、N−t−ブトキシカルボニルピロリジン、N−t−ブトキシカルボニルピペラジン、N−t−ブトキシカルボニルピペリジン、N,N−ジ−t−ブトキシカルボニル−1−アダマンチルアミン、N,N−ジ−t−ブトキシカルボニル−N−メチル−1−アダマンチルアミン、N−t−ブトキシカルボニル−4,4’−ジアミノジフェニルメタン、N,N’−ジ−t−ブトキシカルボニルヘキサメチレンジアミン、N,N,N’N’−テトラ−t−ブトキシカルボニルヘキサメチレンジアミン、N,N’−ジ−t−ブトキシカルボニル−1,7−ジアミノヘプタン、N,N’−ジ−t−ブトキシカルボニル−1,8−ジアミノオクタン、N,N’−ジ−t−ブトキシカルボニル−1,9−ジアミノノナン、N,N’−ジ−t−ブトキシカルボニル−1,10−ジアミノデカン、N,N’−ジ−t−ブトキシカルボニル−1,12−ジアミノドデカン、N,N’−ジ−t−ブトキシカルボニル−4,4’−ジアミノジフェニルメタン、N−t−ブトキシカルボニルベンズイミダゾール、N−t−ブトキシカルボニル−2−メチルベンズイミダゾール、N−t−ブトキシカルボニル−2−フェニルベンズイミダゾール等のN−t−ブトキシカルボニル基含有アミノ化合物のほか、ホルムアミド、N−メチルホルムアミド、N,N−ジメチルホルムアミド、アセトアミド、N−メチルアセトアミド、N,N−ジメチルアセトアミド、プロピオンアミド、ベンズアミド、ピロリドン、N−メチルピロリドン、N−アセチル−1−アダマンチルアミン、イソシアヌル酸トリス(2−ヒドロキシエチル)を例示することができる。N−t−ブトキシカルボニル基含有アミノ化合物が好ましい。
本実施形態の上層膜形成組成物には、樹脂成分(A)及びアミド基含有化合物(B)を溶解することを目的として溶剤(C)を添加するのが好ましい。この溶剤は、フォトレジスト膜上に塗布する際に、フォトレジスト膜とインターミキシングを発生する等の、リソグラフィ性能を劣化させることが殆どないものを使用することが好ましい。
また、本実施形態の上層膜形成組成物には、塗布性、消泡性、レベリング性などを向上させる目的で界面活性剤などを配合することもできる。
次に、本発明のパターン形成方法の一実施形態について説明する。本実施形態のパターン形成方法は、(i)基板上にフォトレジストを塗布してフォトレジスト膜を形成する工程と、(ii)該フォトレジスト膜に上層膜を形成する工程と、(iii)該フォトレジスト膜および上層膜に液浸媒体を介して、所定のパターンを有するマスクを通して放射線を照射し、次いで現像することにより、レジストパターンを形成する工程とを含むパターン形成方法である。
前記樹脂成分(A)として、放射線照射時の水に安定な膜を形成でき、レジストパターン形成後の現像液に溶解する樹脂(A−1)〜(A−4)を以下に示す方法により合成した。
ヘキサヒドロフタル酸2−メタクリロイルオキシエチル:46.95g(85モル%)、及び開始剤2,2’−アゾビス−(2−メチルプロピオン酸メチル):6.91gをイソプロパノール100gに溶解させた単量体溶液を準備した。
ヘキサヒドロフタル酸2−メタクリロイルオキシエチル:50.0g、及び開始剤(2,2’−アゾビス−(2−メチルプロピオン酸メチル)):3.24gをイソプロパノール50gに溶解させた単量体溶液を準備した。
ヘキサヒドロフタル酸2−メタクリロイルオキシエチル:48.15g(95モル%)、及び2−アクリロイルアミノ−2−メチル−1−プロパンスルホン酸:1.85g(5モル%)と、開始剤2,2’−アゾビス−(2−メチルプロピオン酸メチル):3.28gとをイソプロパノール50gに溶解させた単量体溶液を準備した。
2,2−アゾビス(2−メチルイソプロピオン酸メチル):25.0gをメチルエチルケトン:25.0gに溶解させた混合溶液を準備した。
(実施例1)
樹脂成分(A)として樹脂(A−1)95部、樹脂(A−2)5部、N−t−ブトキシカルボニル−4−ヒドロキシピペリジン(B−1)0.05部、溶剤(炭素数4〜10のアルコール)として4−メチル−2−ペンタノール(表1における「溶剤(C−1)」)100部を混合し、2時間撹拌した後、孔径200nmのフィルターでろ過することにより、実施例1の上層膜用組成物溶液を調製した。
表1に示す組成物を用いた以外は、実施例1と同様の手法にて、実施例2〜8及び比較例1〜4の各上層膜用組成物溶液を調製した。
B−1:N−t−ブトキシカルボニル−4−ヒドロキシピペリジン
B−2:N−t−ブトキシカルボニルジシクロヘキシルアミン
BR−1:トリエチルアミン
C−1:4−メチル−2−ペンタノール
(参考例1)感放射線性樹脂組成物用樹脂の合成
下記繰り返し単位(M−1)を構成するための化合物53.93g(50モル%)、下記繰り返し単位(M−2)を構成するための化合物35.38g(40モル%)、下記繰り返し単位(M−3)を構成するための化合物10.69g(10モル%)を、2−ブタノン200gに溶解し、更にジメチル2,2’−アゾビス(2−メチルプロピオネート)5.58gを投入した単量体溶液を準備した。一方、温度計及び滴下漏斗を備えた500mlの三つ口フラスコに100gの2−ブタノンを投入し、30分窒素パージした。窒素パージの後、フラスコ内をマグネティックスターラーで攪拌しながら80℃になるように加熱した。滴下漏斗を用い、予め準備しておいた単量体溶液を3時間かけて滴下した。滴下開始時を重合開始時間とし、重合反応を6時間実施した。重合終了後、重合溶液は水冷により30℃以下に冷却した。冷却後、2000gのメタノールに投入し、析出した白色粉末をろ別した。ろ別された白色粉末を、400gのメタノールにてスラリー状で2度洗浄した。その後、ろ別し、50℃にて17時間乾燥し、白色粉末の共重合体を得た(74g、収率74%)。
東ソー社製の高速GPC装置(型式「HLC−8120」)に東ソー社製のGPCカラム(商品名「G2000HXL」;2本、「G3000HXL」;1本、「G4000HXL」;1本)を用い、流量1.0ml/分、溶出溶剤テトラヒドロフラン、カラム温度40℃の分析条件で、単分散ポリスチレンを標準とするゲルパーミエーションクロマトグラフィ(GPC)により測定した。また、分散度Mw/Mnは測定結果より算出した。
各重合体の13C−NMR分析は、日本電子(株)製「JNM−EX270」を用い、測定した。
感放射線性樹脂組成物用樹脂(α−1):100部、トリフェニルスルホニウム・ノナフルオロ−n−ブタンスルホネート:1.5部、1−(4−n−ブトキシナフタレン−1−イル)テトラヒドロチオフェニウム・ノナフルオロ−n−ブタンスルホネート:6部、R−(+)−(tert−ブトキシカルボニル)−2−ピペリジンメタノール:0.65部、プロピレングリコールモノメチルエーテルアセテート:2400部を混合し、2時間撹拌した後、孔径200nmのフィルターでろ過することにより、感放射線性樹脂組成物を調製した。
前述のように調製された各上層膜用組成物溶液を用いて得られる上層膜について、以下の各種測定及び評価を行った。尚、これらの結果を表1に示す。
8インチシリコンウェハ上に、商品名「CLEAN TRACK ACT8」を使用して、下層反射防止膜用組成物(商品名「ARC29A」、ブルワー・サイエンス社製)をスピンコートし、205℃×60秒の条件でPBを行うことにより、膜厚77nmの塗膜(下層反射防止膜)を形成した。形成した下層反射防止膜上に、前記感放射線性樹脂組成物をスピンコートし、90℃×60秒の条件でPBを行うことにより膜厚120nmの塗膜(フォトレジスト膜)を形成した。
焦点深度(DOF)の評価と同様の手法にて、線幅90nmライン・アンド・スペースパターンのベストフォーカスでの断面形状を、走査型電子顕微鏡(型番「S−4200」、日立計測器社製)にて観察した。尚、図1は、ライン・アンド・スペースパターンの形状を模式的に示す断面図である。
Claims (6)
- 液侵露光において、フォトレジスト膜の表面上に上層膜を形成するために用いられる上層膜形成組成物であって、
該組成物は、前記フォトレジスト膜を現像する現像液に溶解する樹脂成分(A)とアミド基含有化合物(B)とを含有する上層膜形成組成物。 - 前記アミド基含有化合物(B)が、N−t−ブトキシカルボニル基含有アミノ化合物である請求項1に記載の上層膜形成組成物。
- 前記樹脂成分(A)が、スルホン酸基を有する樹脂を含む請求項1〜3のいずれか一項に記載の上層膜形成組成物。
- 請求項1〜4のいずれか一項に記載の上層膜形成組成物から得られる上層膜。
- (i)基板上にフォトレジストを塗布してフォトレジスト膜を形成する工程と、
(ii)該フォトレジスト膜に請求項5に記載の上層膜を形成する工程と、
(iii)該フォトレジスト膜および上層膜に液浸媒体を介して、所定のパターンを有するマスクを通して放射線を照射し、次いで現像することにより、レジストパターンを形成する工程とを含むパターン形成方法。
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