JP2010133848A5 - - Google Patents
Info
- Publication number
- JP2010133848A5 JP2010133848A5 JP2008310869A JP2008310869A JP2010133848A5 JP 2010133848 A5 JP2010133848 A5 JP 2010133848A5 JP 2008310869 A JP2008310869 A JP 2008310869A JP 2008310869 A JP2008310869 A JP 2008310869A JP 2010133848 A5 JP2010133848 A5 JP 2010133848A5
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- measurement
- measurement table
- shaft
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 description 67
- 230000007246 mechanism Effects 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 11
- 230000003028 elevating effect Effects 0.000 description 10
- 230000007723 transport mechanism Effects 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000012546 transfer Methods 0.000 description 6
- 239000003638 chemical reducing agent Substances 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008310869A JP5159587B2 (ja) | 2008-12-05 | 2008-12-05 | 表面形状測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008310869A JP5159587B2 (ja) | 2008-12-05 | 2008-12-05 | 表面形状測定装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010133848A JP2010133848A (ja) | 2010-06-17 |
JP2010133848A5 true JP2010133848A5 (enrdf_load_stackoverflow) | 2011-09-22 |
JP5159587B2 JP5159587B2 (ja) | 2013-03-06 |
Family
ID=42345280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008310869A Active JP5159587B2 (ja) | 2008-12-05 | 2008-12-05 | 表面形状測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5159587B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109539936B (zh) * | 2018-12-31 | 2025-02-07 | 台州市众祥汽车科技有限公司 | 散热器面罩总成双导轨线性滑移检具 |
GB202018030D0 (en) * | 2020-11-17 | 2020-12-30 | Spts Technologies Ltd | Spin rinse dryer with improved drying characteristics |
CN112729070B (zh) * | 2020-12-25 | 2025-06-24 | 天地宁夏支护装备有限公司 | 用于表面测量的带锁的表面轮廓规 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6080708A (ja) * | 1983-10-11 | 1985-05-08 | Caterpillar Mitsubishi Ltd | 3次元測定機に対する被測定物搬入出装置 |
JPS62163717U (enrdf_load_stackoverflow) * | 1986-04-09 | 1987-10-17 | ||
JPH09210660A (ja) * | 1996-01-30 | 1997-08-12 | Sekisui Chem Co Ltd | 撮像式検査装置 |
-
2008
- 2008-12-05 JP JP2008310869A patent/JP5159587B2/ja active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5205237B2 (ja) | 被測定物の高さ調整装置及びこれを備えた表面形状測定装置 | |
JP2010133847A5 (enrdf_load_stackoverflow) | ||
KR101856875B1 (ko) | 웨이퍼 캐리어 두께 측정장치 | |
JP4632962B2 (ja) | 同軸度・直角度測定装置及びその方法 | |
KR101447573B1 (ko) | 테이퍼 롤러 베어링 토크 측정기 | |
US4679330A (en) | Concentricity gauge | |
TWI715566B (zh) | 基板處理裝置及基板處理方法 | |
KR20150042708A (ko) | 기판 처리 장치 및 기판 처리 방법 | |
KR101433854B1 (ko) | 연주기 세그먼트 롤 베어링 틈새 검사장치 | |
EP3082155B1 (en) | Substrate processing apparatus and substrate processing method | |
JP5426151B2 (ja) | 表面形状測定装置 | |
JP5159587B2 (ja) | 表面形状測定装置 | |
JP2010132422A5 (enrdf_load_stackoverflow) | ||
JP4185071B2 (ja) | ガントリー装置{gantryapparatus} | |
JP2010133848A5 (enrdf_load_stackoverflow) | ||
JP4417130B2 (ja) | ガラス基板の垂直保持装置 | |
CN207372829U (zh) | 一种管件的校正器 | |
JP2004011892A (ja) | ギアユニットのエンドプレー測定方法及び測定装置 | |
CN210014738U (zh) | 一种用于产品内径检测的通止规检测机构 | |
CN116972792A (zh) | 一种轴承内外环厚度检测设备 | |
KR200408111Y1 (ko) | 롤 표면 자동 탐상장치 | |
JP7521893B2 (ja) | チャックテーブルの固定方法 | |
JP3387778B2 (ja) | 円筒形ワークの外形検査用接触式センサ | |
JP7249218B2 (ja) | 研削装置 | |
CN105563197A (zh) | 刀库装置 |