JP2010127625A - Quartz oscillator holding device and electrode processing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a quartz oscillator holding device for holding a quartz oscillator, and an electrode processing system which is equipped with the device. <P>SOLUTION: In the electrode processing system for applying predetermined processings on the electrodes of the quartz oscillator 9, where the leads extending to both main surfaces of a quartz piece in parallel to each other from a pair of electrodes are fixed to a fixing member 96; the holder 81 for holding the quartz oscillator 9 is equipped with the second fitting structure 810, fitted to the first fitting structure 960 formed to the fixing member 96 and the fitting state of the first and second fitting structures 960 and 810 is kept, by sucking the openings provided to the second fitting structure 810. According to this constitution, the quartz oscillator 9 can be held firmly with proper position accuracy. Furthermore, since the particles produced by the friction of the first and second fitting structures 960 and 810, when the quartz oscillator 9 is held, are sucked from the openings of the second fitting structure 810, the quartz oscillator 9 can be held, while preventing adhesion of the particles to the quartz oscillator 9. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a crystal resonator holding device that holds a crystal resonator and an electrode processing system including the crystal resonator holding device.

  In recent years, sensors (so-called “odor sensors”) that detect the concentration of trace amounts of chemical substances such as alcohol in the air have been used in various situations, and have a crystal resonator as one of such odor sensors. Things are known. In an odor sensor using a crystal resonator, a sensitive film that adsorbs molecules to be detected such as alcohol is formed on one or both of a pair of electrodes provided on a quartz piece, and gas molecules are formed on the sensitive film. By adsorbing, the frequency of the voltage between the pair of electrodes changes. The odor sensor detects the concentration of the detection target based on this change in frequency.

  In Patent Document 1, as a method for producing a chemical substance identification film (that is, a sensitive film) used for detecting a trace amount of a chemical substance, a metal oxide precursor in a vapor state is brought into contact with the substrate and the metal oxide is deposited on the substrate surface. A step of forming a precursor layer, a step of hydrolyzing a metal oxide precursor layer to form a metal oxide layer, and fixing a host compound that includes a predetermined chemical substance on the surface of the metal oxide layer A method of alternately laminating metal oxide layers and receiving layers by repeating the step of forming a receiving layer by forming a receiving layer is disclosed.

  As a method for forming a thin film in which a plurality of types of layers are laminated, for example, in Patent Document 2, a solid support such as an electrode is used as a protein solution and an organic polymer ion having a polarity opposite to that of the protein. There has been proposed a method of forming protein thin films laminated in an arbitrary order by immersing them alternately in a solution.

  In Patent Document 3, a plurality of treatment tanks such as a treatment tank in which a treatment liquid containing a substance having a positive charge is stored and a treatment tank in which a treatment liquid containing a substance having a negative charge is stored are linearly arranged, and a roll An organic EL (Electro Luminescence) element, etc. by feeding a long substrate in a shape from one side of a plurality of treatment tanks, sequentially passing through the plurality of treatment tanks and winding on the other side of the plurality of treatment tanks A technique for mass-producing alternating laminated films used in the field has been proposed. Further, in Patent Document 4, an annular fiber material is rotated and moved along a circulation path, and sequentially passed through treatment liquids in a plurality of treatment tanks provided on the circulation path. A technique for mass-producing alternating adsorption films used as filters by alternately adsorbing an electrolyte polymer and a negative electrolyte polymer has been proposed.

On the other hand, in manufacturing a crystal resonator used for an odor sensor, in order to simultaneously form a sensitive film on a plurality of crystal resonators, a holding device that holds the plurality of crystal resonators is required. In Patent Document 5, although the field is different from the manufacturing of an odor sensor, a plurality of air suction holes for adsorbing a plurality of light emitting elements are provided at predetermined intervals as an apparatus for holding a plurality of components in a semiconductor device mounting apparatus. A vacuum suction section is disclosed.
JP 2007-61752 A JP-A-9-107952 JP 2007-152247 A JP 2001-62286 A JP 2007-201259 A

  By the way, as a device for holding a plurality of crystal units, a clamp that holds a crystal unit by supporting a metal fixing member attached to a wiring extending upward from the electrodes of the crystal unit from below is considered. In this case, particles may be generated by contact between the lower surface of the metal fixing member and the upper surface of the metal clamp. When such particles are mixed into the processing liquid in the processing tank, or enter the processing space in the processing chamber and adhere to the electrodes of the crystal resonator, film formation defects occur. Further, when releasing the holding of the crystal resonator by the clamp, for example, when separating the clamp on the left and right sides and separating from the fixing member of the crystal resonator, each clamp holding each of the many crystal resonators A moving space is required, and the apparatus becomes large.

  The present invention has been made in view of the above problems, and has as its main object to hold a crystal resonator while preventing particles from adhering to the crystal resonator, and suppresses the enlargement of the crystal resonator holding device. That is also the purpose.

  According to the first aspect of the present invention, a pair of electrodes are formed on both main surfaces of the plate-shaped crystal piece, and a pair of electrodes extending from the pair of electrodes to the main surfaces of the crystal piece approximately in parallel. A crystal resonator holding device for holding a crystal resonator in which wiring is fixed to a fixing member, and a second fitting that fits with a first fitting structure having a concave or convex portion formed on the fixing member. The structure and the fitting state between the first fitting structure and the second fitting structure are maintained by performing suction from an opening provided in the second fitting structure and connected to the suction mechanism, and A flow path for releasing the fitting state by stopping the suction.

  A second aspect of the present invention is the crystal unit holding device according to the first aspect, wherein one of the first fitting structure and the second fitting structure is fitted with a plurality of protrusions. It has a shaped part.

  The invention according to claim 3 is the crystal resonator holding device according to claim 2, wherein the first fitting structure has a plurality of protrusions protruding toward the second fitting structure. The second fitting structure has a plurality of recesses that fit into the plurality of projections.

  The invention according to claim 4 is the crystal resonator holding device according to claim 3, wherein each of the plurality of convex portions has a truncated cone shape.

  The invention according to claim 5 is the crystal resonator holding device according to claim 3 or 4, wherein the fixing member of the crystal resonator is a pair of through holes into which the pair of wires are inserted. And a plurality of convex portions formed by fixing the pair of wires to the block inside the pair of through holes and projecting outward from the pair of through holes. And an insulating member.

  The invention according to claim 6 is the crystal resonator holding device according to any one of claims 1 to 5, wherein one of the first fitting structure and the second fitting structure is formed of metal, The other is formed of glass or resin.

  The invention according to claim 7 is the crystal resonator holding device according to any one of claims 1 to 6, wherein the second fitting structure that holds the fixing member of another crystal resonator by suction and the It further comprises another combination of flow paths.

  According to an eighth aspect of the present invention, a pair of electrodes are formed on both main surfaces of the plate-shaped crystal piece, and a pair of electrodes extending from the pair of electrodes to the main surfaces of the crystal piece approximately in parallel. A crystal resonator holding device according to any one of claims 1 to 7, which is an electrode processing system for performing predetermined processing on an electrode of a crystal resonator in which wiring is fixed to a fixing member, and holds the crystal resonator. A plurality of processing devices each performing predetermined processing on at least one electrode by applying a processing material to at least one of the pair of electrodes of the crystal resonator, and the crystal resonator holding device And a transport mechanism for transporting from one processing device to another processing device among the plurality of processing devices, and the crystal resonator holding device is held by a holding portion provided in the one processing device. The crystal resonator The quartz crystal unit is received from the holding unit by adsorbing a member, and the quartz crystal is placed in the holding unit provided in the other processing apparatus by releasing the adsorption of the fixing member in the other processing apparatus. Pass the vibrator.

  The invention according to claim 9 is the electrode processing system according to claim 8, wherein the processing by the one processing apparatus is processing for forming a thin film on the at least one electrode.

  According to the present invention, it is possible to hold the crystal resonator while preventing adhesion of particles to the crystal resonator, and it is possible to suppress an increase in size of the crystal resonator holding device.

FIG. 1 is a plan view showing an electrode processing system 100 according to an embodiment of the present invention. The electrode processing system 100 performs a process of forming a thin film (hereinafter referred to as “ethyl alcohol-sensitive film”) that selectively adsorbs ethyl alcohol (C ₂ H ₅ OH) on the electrodes of a plurality of crystal resonators. The crystal resonator processed by the electrode processing system 100 is used as a sensor for measuring the concentration of ethyl alcohol (so-called “odor sensor”).

  As shown in FIG. 1, the electrode processing system 100 includes a tray 111 on which a plurality of crystal resonators before processing are placed, a carrier 8 that holds the plurality of crystal resonators, and a sulfuric acid-based process on the electrodes of the crystal resonators. A pretreatment device 12 that performs a pretreatment to remove dust, metal, organic matter, and the like on the electrode by applying a liquid, a thiol bond treatment device 13 that performs a thiol bond treatment on the electrode of the crystal resonator on which the pretreatment has been performed, An inorganic film forming apparatus 14 for performing a process of forming an inorganic film on the electrode of the crystal resonator on which the pretreatment has been performed (more precisely, forming a precursor film that becomes an inorganic film by hydrolysis in a subsequent process). , An organic film forming device 16 that performs a process of forming an organic film on an inorganic film formed on an electrode of the crystal resonator, a cleaning device 17 that performs a cleaning process on the crystal resonator after each process, Dry against crystal A drying device 18 that performs processing, a tray 112 on which a plurality of processed crystal resonators are placed, and one of the processing devices that performs processing on the crystal resonators, from one processing device to another processing device. And a transport mechanism 19 for transporting the carrier 8. The transport mechanism 19 has a mechanism for moving the carrier 8 in the horizontal direction and the vertical direction.

  FIG. 2 is a view showing one main surface of one crystal resonator 9, and FIG. 3 is a view showing the other main surface of the crystal resonator 9. 2 and 3, the crystal resonator 9 includes a substantially disc-shaped crystal piece 95. As shown in FIG. 2, one main surface 951 of the crystal piece 95 (hereinafter referred to as "first main part"). A substantially circular first electrode 91 formed on the surface 951 ”) and a substantially rectangular auxiliary portion 911 electrically connected to the first electrode 91.

  Further, as shown in FIG. 3, the crystal resonator 9 includes a second electrode 92 formed on the other main surface 952 of the crystal piece 95 (hereinafter referred to as “second main surface 952”), and a second electrode 92. A substantially rectangular auxiliary portion 921 electrically connected to the electrode 92 is provided. In the present embodiment, the first electrode 91 and the auxiliary part 911, and the second electrode 92 and the auxiliary part 921 are formed of gold (Au). The diameter of the crystal piece 95 is about 9 millimeters (mm).

  As shown in FIGS. 2 and 3, the crystal resonator 9 further includes a lead 971 that is a lead wire connected to the first electrode 91 via the auxiliary portion 911, and a second electrode via the auxiliary portion 921. A lead 972 that is a lead wire connected to the terminal 92 is provided. Leads 971 and 972, which are a pair of wires of the crystal unit 9, extend from the first electrode 91 and the second electrode 92 to both main surfaces of the crystal piece 95 (that is, the first main surface 951 and the second main surface 952). 2 and 3 extends substantially in parallel and is fixed to the fixing member 96 in a state of being aligned in the left-right direction in FIGS. 2 and 3. In the present embodiment, the surfaces of the leads 971 and 972 are covered with gold.

  The ends of the leads 971 and 972 on the crystal piece 95 side (hereinafter referred to as “supporters”) 9711 and 9721 are divided into two portions so as to sandwich the crystal piece 95, and the crystal pieces 95 are supported by the supporters 9711 and 9721. It is fixed to the leads 971 and 972 and the fixing member 96 (collectively referred to as “base”). As shown in FIG. 2, the supporter 9711 of the lead 971 is bonded to the auxiliary part 911 on the first main surface 951 of the crystal piece 95 with a conductive adhesive, and the supporter 9721 of the lead 972 is shown in FIG. As described above, the second main surface 952 of the crystal piece 95 is bonded to the auxiliary portion 921 with a conductive adhesive. In the crystal unit 9, a first electrode 91 and a second electrode 92, which are a pair of electrodes formed on both main surfaces 951 and 952 of the crystal piece 95, are connected to one power source via leads 971 and 972. The

  As shown in FIGS. 2 and 3, the fixing member 96 includes a metal block 961 in which a pair of through holes into which the leads 971 and 972 are inserted, and the inside of the pair of through holes. A pair of insulating members 962 for fixing the leads 971 and 972 to the block 961 and electrically insulating the leads 971 and 972 and the block 961 are provided. Upper portions of the pair of insulating members 962 are two convex portions 963 projecting outside from the pair of through holes of the block 961. In this embodiment mode, the insulating member 962 is formed of glass or resin. In addition, each through hole of the block 961 has a substantially cylindrical shape, and the convex portion 963 of each insulating member 962 has a substantially truncated cone shape in which the area of the cross section by the horizontal plane gradually decreases as the distance from the block 961 increases.

  When the insulating member 962 is glass, the pair of through holes of the block 961 has two cup-shaped molds from the upper side of the block 961 (the inner shape of the cup-shaped mold corresponds to the shape of the convex portion 963. ), And the lead 971 and 972 are inserted into the pair of through holes of the block 961, and the glass paste having a low melting point is filled into the through holes from the lower side of the block 961 and baked to thereby form the convex portion. 963 is formed. In addition, when the insulating member 962 is a resin, the convex portion 963 is formed by performing insert molding with the resin in the same state as described above.

  4 and 5 are a front view and a right side view showing the carrier 8, respectively. As shown in FIGS. 4 and 5, the carrier 8 is a holder that is a plurality of crystal resonator holding devices that respectively hold a plurality of crystal resonators 9 arranged in a direction substantially parallel to the main surface of the crystal resonator 9. 81, and the plurality of holders 81 are arranged in a direction substantially perpendicular to the main surface of the crystal unit 9. Each holder 81 is positioned above the fixing members 96 (see FIGS. 2 and 3) of the plurality of crystal resonators 9 and holds the plurality of crystal resonators 9 by attracting the fixing members 96.

  6 is an enlarged view showing the vicinity of one crystal resonator 9 held by the holder 81, and FIG. 7 is a view showing a part of the holder 81 excluding the crystal resonator 9 from FIG. . In FIG. 6, in order to facilitate understanding of the drawing, the fixing member 96 and the holder 81 are drawn in a cross section, and similarly in FIG. 7, the holder 81 is drawn in a cross section. As shown in FIGS. 6 and 7, the holder 81 includes a holder main body 811 formed of metal, and a main flow path connected to a suction mechanism provided outside the holder 81 inside the holder main body 811. 812 and a plurality of branch channels 814 extending downward from the main channel 812 are formed. On the lower surface of the holder main body 811, a plurality of recesses 813 are formed that fit into two protrusions 963 (see FIG. 6) included in the fixing members 96 of the plurality of crystal resonators 9. It is connected to the branch channel 814 through an opening formed in the inner surface of the recess 813 (in this embodiment, the upper portion of each recess 813).

  In the holder 81, suction is performed from the opening provided in each recess 813 through the main channel 812 and each branch channel 814 by the suction mechanism connected to the main channel 812, so that as shown in FIG. 813 and the fitting state of the convex portion 963 of the fixing member 96 corresponding to each concave portion 813 are maintained, and the fitting state is released by stopping the suction by the suction mechanism. In the following description, the two convex portions 963 formed on the fixing member 96 of one crystal resonator 9 are collectively referred to as a “first fitting structure 960” and the holder 81 that fits the first fitting structure 960 is used. The two concave portions 813 are collectively referred to as “second fitting structure 810”. Although not depicted in FIGS. 6 and 7, the holder 81 is connected to the second fitting structure 810 (that is, the two recesses 813) and the second fitting structure 810 that hold the fixing member 96 of the crystal unit 9 by suction. And a plurality of combinations with the two branch flow paths 814.

  Next, the flow of processing for the electrodes of the crystal unit 9 by the electrode processing system 100 shown in FIG. A and FIG. A description will be given with reference to FIG. In the electrode processing system 100, first, the carrier 8 is moved in the horizontal direction by the transport mechanism 19, and a plurality of crystal resonators 9 before processing are positioned above the tray 111 on which the pretreatment is performed. FIG. 9 is a view showing a part of the tray 111. In the tray 111, the fixing member 96 of each crystal resonator 9 is positioned above the crystal piece 95, and the two convex portions 963 of the first fitting structure 960 are provided. A crystal resonator 9 is placed so as to protrude upward. The lower end portion of the crystal piece 95 is inserted into the slit 113 provided in the tray 111 and supported in the slit 113.

  Subsequently, when the carrier 8 is lowered toward the tray 111 by the transport mechanism 19 shown in FIG. 1, the two convex portions of the first fitting structure 960 provided on the upper surface of the fixing member 96 of each crystal resonator 9. As shown in FIG. 6, 963 is inserted into the two recesses 813 of the second fitting structure 810 provided on the lower surface of the holder 81 of the carrier 8. At the same time, suction is performed from the opening formed in the concave portion 813 of the holder 81 by the suction mechanism connected to the holder 81, whereby the convex portion 963 of the fixing member 96 is attracted to the holder 81 in the concave portion 813. In the electrode processing system 100, by continuing the suction from the openings in the recesses 813 of the plurality of holders 81, the first fitting structure 960 of each crystal resonator 9 and the second fitting structure 810 of the holder 81 (That is, a state in which each crystal resonator 9 is sucked and held by the holder 81) is maintained.

  When the plurality of crystal resonators 9 are received from the tray 111 by the carrier 8 shown in FIG. 1, the carrier 8 is raised by the transport mechanism 19, moved in the horizontal direction above the pretreatment device 12, and further lowered. A plurality of crystal resonators 9 sucked and held by the carrier 8 are carried into the pretreatment device 12. In the pretreatment device 12, a treatment tank in which a sulfuric acid-based treatment liquid is stored is provided in the treatment tank, and a holding part having the same shape as the tray 111 shown in FIG. 9 is provided at the bottom of the treatment tank. Is provided. In the electrode processing system 100, the plurality of crystal resonators 9 are immersed in the processing liquid in the processing tank of the preprocessing apparatus 12, and the descent of the carrier 8 is stopped in a state of being very close to the holding unit in the processing liquid. At this time, the lower end portion of each crystal resonator 9 is inserted to some extent in the slit of the holding portion, and the carrier 8 is positioned above the liquid level of the processing liquid in the processing tank.

  And the suction from the opening formed in each recessed part 813 (refer FIG. 6) of the some holder 81 is stopped, and adsorption | suction of the fixing member 96 (refer FIG. 6) of the some crystal oscillator 9 is cancelled | released. The plurality of crystal resonators 9 are inserted away from the holder 81 to the back of the slit of the holding portion of the pretreatment device 12 and supported by the slit portion. In other words, when the suction in the holder 81 is stopped, the plurality of crystal resonators 9 are transferred from the holder 81 to the holding unit of the pretreatment device 12. In the carrier 8, when the crystal unit 9 is transferred to the holding unit of the pretreatment device 12, air is blown from the opening provided in each concave portion 813 of each holder 81, so that the carrier 8 A quick separation of the crystal unit 9 may be realized.

  When the plurality of crystal resonators 9 are held by the holding unit of the pretreatment device 12 illustrated in FIG. 1, the carrier 8 rises to the outside of the pretreatment device 12, and the first electrodes 91 of the plurality of crystal resonators 9 and The second electrode 92 (see FIGS. 2 and 3) is immersed in the treatment liquid for a predetermined time in the treatment tank of the pretreatment device 12 (that is, included in the treatment liquid in the first electrode 91 and the second electrode 92). The pretreatment for the first electrode 91 and the second electrode 92 is performed (step S11). When the pretreatment for the first electrode 91 and the second electrode 92 is completed, the carrier 8 is lowered toward the treatment tank in the pretreatment device 12 by the transport mechanism 19 and is held in a holding portion provided in the pretreatment device 12. By adsorbing the fixing member 96 while fitting the first fitting structure 960 of the plurality of crystal resonators 9 and the second fitting structure 810 of the holder 81, the plurality of crystal resonators 9 are removed from the holding portion. receive.

  The plurality of crystal resonators 9 sucked and held by the carrier 8 are unloaded from the pretreatment device 12 and loaded into the cleaning device 17. In the same manner as the transfer from the carrier 8 to the pretreatment device 12, the washing is performed in the washing device 17. By releasing the adsorption of the fixing member 96 by the carrier 8, a plurality of holding parts (having the same shape as the tray 111 in FIG. 9, which is the same in the following description) provided in the cleaning device 17. A crystal unit 9 is passed. Then, the first electrode 91 and the second electrode 92 of the crystal resonator 9 are given pure water as a treatment liquid, whereby the first electrode 91 and the second electrode 92 are cleaned (step S12). When the cleaning process is completed, the carrier 8 attracts the fixing member 96 of the crystal resonator 9 to receive the plurality of crystal resonators 9 from the holding unit of the cleaning device 17.

The plurality of crystal resonators 9 are unloaded from the cleaning device 17 and loaded into the drying device 18, and the holding member 96 provided in the drying device 18 is released into the holding unit provided in the drying device 18 by releasing the adsorption of the fixing member 96 by the carrier 8. A crystal unit 9 is passed. In the drying device 18, the crystal resonator 9 is dried by injecting a dry gas such as nitrogen (N ₂ ) gas toward the plurality of crystal resonators 9 (step S 13). When the drying process is completed, the carrier 8 sucks the fixing member 96 of the crystal unit 9 to receive the plurality of crystal units 9 from the holding unit of the drying device 18.

  Subsequently, the plurality of crystal resonators 9 are unloaded from the drying device 18 and loaded into the thiol bond processing device 13, and the adsorption of the fixing member 96 by the carrier 8 is released, whereby the inside of the processing tank of the thiol bond processing device 13 is released. A plurality of crystal resonators 9 are transferred to the holding portion provided in the. In the thiol bond processing apparatus 13, the first electrode 91 and the second electrode 92 of each crystal resonator 9 are immersed in a processing liquid containing a thiol compound in the processing tank for a predetermined time, whereby the first electrode 91 and A thiol bonding process is performed on the second electrode 92 (step S14). When the thiol bonding process is completed, the carrier 8 attracts the fixing member 96 of the crystal resonator 9 to receive the plurality of crystal resonators 9 from the holding unit of the thiol bond processing device 13. The plurality of crystal resonators 9 are transported from the thiol bond processing device 13 to the cleaning device 17 and subjected to a cleaning process (step S15), and dried from the cleaning device 17 in the same manner as in the above-described step S12 and step S13. It is conveyed to the apparatus 18 and subjected to a drying process (step S16).

  Next, a plurality of crystal resonators 9 are unloaded from the drying device 18 and loaded into the inorganic film forming device 14, and the adsorption of the fixing member 96 by the carrier 8 is released, whereby the inside of the processing chamber of the inorganic film forming device 14 is released. A plurality of crystal resonators 9 are transferred to the holding portion provided in the. In the inorganic film forming apparatus 14, a processing material containing a processing material (a metal oxide precursor in this embodiment) is supplied into the processing chamber, whereby the processing material is supplied to the first electrode 91 and the second electrode 92. Is formed, and a metal oxide precursor thin film (in this embodiment, a metal alkoxide film) is formed on the first electrode 91 and the second electrode 92 (step S17). When the generation of the precursor thin film is completed, the carrier 8 attracts the fixing member 96 of the crystal resonator 9 to receive the plurality of crystal resonators 9 from the holding unit of the inorganic film forming apparatus 14.

  Further, the plurality of crystal resonators 9 are unloaded from the inorganic film forming apparatus 14 and loaded again into the cleaning apparatus 17, and the holding of the fixing member 96 by the carrier 8 is released. A plurality of crystal resonators 9 are passed to the section. In the cleaning device 17, the first electrode 91 and the second electrode 92 are cleaned by applying pure water to the first electrode 91 and the second electrode 92 of the crystal unit 9 (step S <b> 18). At this time, on the first electrode 91 and the second electrode 92, the thin metal oxide precursor is hydrolyzed to form an inorganic film that is a metal oxide thin film.

  When the cleaning process is completed, the carrier 8 attracts the fixing member 96 of the crystal resonator 9 to receive the plurality of crystal resonators 9 from the holding unit of the cleaning device 17, and the plurality of crystal resonators 9 are connected to the cleaning device. It is carried out from 17 and carried into the drying device 18 again. In the same manner as described above, after the crystal resonator 9 is subjected to a drying process (step S19), it is unloaded from the drying device 18 and loaded into the organic film forming device 16.

  In the electrode processing system 100, by releasing the adsorption of the fixing member 96 by the carrier 8, a plurality of crystal resonators 9 are passed to a holding unit provided in the processing tank of the organic film forming apparatus 16, and a plurality of crystals The first electrode 91 and the second electrode 92 of the vibrator 9 are immersed in the processing liquid stored in the processing tank for a predetermined time (that is, included in the processing liquid in the first electrode 91 and the second electrode 92). An organic film that selectively adsorbs ethyl alcohol on the inorganic film formed on the first electrode 91 and the second electrode 92 (that is, an organic substance). (Thin film) is formed (step S20).

  When the film formation of the organic film is completed, the carrier 8 sucks the fixing member 96 of the crystal resonator 9 to receive the plurality of crystal resonators 9 from the holding unit of the organic film forming apparatus 16. The plurality of crystal resonators 9 are transported from the organic film forming device 16 to the cleaning device 17 and subjected to a cleaning process (step S21), and further transferred from the cleaning device 17 to the drying device 18 and subjected to a drying process. (Step S22).

  In the control unit of the electrode processing system 100, the number of processes in steps S17 to S22 is counted, and when it is confirmed that the predetermined number has not been reached (step S23), the processes in steps S17 to S22 are repeated. Thus, an inorganic film and an organic film are formed on the first electrode 91 and the second electrode 92. In this way, the processes of steps S17 to S22 are repeated a predetermined number of times (for example, 10 times) (step S23), whereby the first electrode 91 and the second electrode 91 of the crystal unit 9 shown in FIGS. An ethyl alcohol sensitive film in which inorganic films and organic films are alternately laminated is formed on the electrode 92. The processed crystal resonator 9 on which the ethyl alcohol sensitive film is formed is transferred from the carrier 8 to the tray 112. Note that depending on the performance required for the crystal unit 9 and the like, the processing in steps S17 to S22 may be performed only once.

  In the odor sensor using the crystal resonator 9, ethyl alcohol molecules are adsorbed on the ethyl alcohol sensitive film on the first electrode 91 and the second electrode 92, so that the gap between the first electrode 91 and the second electrode 92 is reduced. The frequency of the voltage changes, and the concentration of ethyl alcohol is determined based on the frequency.

  In the electrode processing system 100, a plurality of crystal resonators 9 that are simultaneously attracted and held by the carrier 8 are referred to as one set of crystal resonators 9. Thus, the processes shown in steps S11 to S23 described above are performed in parallel. Thereby, an ethyl alcohol sensitive film can be efficiently formed on the first electrode 91 and the second electrode 92 of the crystal unit 9. In the electrode processing system 100, a plurality of carriers 8 and a plurality of transport mechanisms 19 may be provided, whereby the formation of the ethyl alcohol sensitive film is more efficiently performed.

  As described above, in the carrier 8 of the electrode processing system 100, the holder 81 includes the second fitting structure 810 that fits the first fitting structure 960 formed on the fixing member 96 of the crystal unit 9, By performing suction from the opening provided in the second fitting structure 810, the fitting state between the first fitting structure 960 and the second fitting structure 810 is maintained. Thereby, the crystal unit 9 can be held firmly and with high positional accuracy. Further, since particles generated by friction between the first fitting structure 960 and the second fitting structure 810 are held when holding the crystal unit 9, the particles are sucked from the opening provided in the second fitting structure 810. The crystal unit 9 can be held while preventing the particles from adhering to the crystal unit 9.

  Further, in the carrier 8, each processing apparatus of the electrode processing system 100 from the holder 81 (that is, a pretreatment apparatus 12 that performs a predetermined process on the electrode of the crystal unit 9, a thiol bond processing apparatus 13, an inorganic film forming apparatus 14, an organic Since the crystal resonator 9 can be transferred to the film forming device 16, the cleaning device 17 and the drying device 18) only by suction and release of the fixing member 96, the fixing member 96 is supported so as to be supported from below. Compared to the device, the holder 81 and the carrier 8 can be prevented from being enlarged because the holder 81 is not moved or deformed when the crystal unit 9 is delivered.

  As described above, the holder 81 and the carrier 8 that can suppress an increase in the size of the apparatus even when the number of the crystal resonators 9 to be held is increased are particularly suitable for holding a plurality of crystal resonators 9. Therefore, the holder 81 and the carrier 8 are suitable for the electrode processing system 100 that is required to perform processing on a plurality of crystal resonators 9 at the same time. It is suitable for an electrode processing system 100 including an apparatus for performing a film forming process on a facing electrode.

  In the above embodiment, in the crystal unit 9, the convex portion 963 of the first fitting structure 960 has a truncated cone shape, and in the holder 81, the concave portion 813 of the second fitting structure 810 fits the convex portion 963. It is a trapezoid. As described above, when the first fitting structure 960 and the second fitting structure 810 are fitted, the area of the cross section of the convex portion 963 passing through the lower opening of the concave portion 813 is gradually increased. Thereby, the convex part 963 and the recessed part 813 can be smoothly fitted. Further, even when the center of the convex portion 963 and the center of the concave portion 813 are slightly shifted, the convex portion 963 is adsorbed while moving toward the center of the concave portion 813 along the inner surface of the concave portion 813. Therefore, the crystal unit 9 can be held with higher positional accuracy. Further, since the convex portion 963 and the concave portion 813 have a simple shape, the convex portion 963 of the fixing member 96 of the crystal resonator 9 and the concave portion 813 of the holder 81 can be easily formed. 9 and the manufacturing cost of the electrode processing system 100 can be reduced.

  Further, the first fitting structure 960 provided on the fixing member 96 of the crystal unit 9 has a plurality of convex portions 963 projecting toward the second fitting structure 810 of the holder 81, and the second of the holder 81 Since the fitting structure 810 has a plurality of recesses 813 that fit with the plurality of projections 963, the thickness of the block 961 of the fixing member 96 can be made larger than when the first fitting structure 960 is provided with a recess. Can be small.

  As described above, in the fixing member 96 of the crystal resonator 9, the first fitting structure 960 is formed of glass or resin, and the second fitting structure 810 of the holder 81 is formed of metal, so that the first fitting structure 960 is formed. When the joint structure 960 and the second fitting structure 810 are fitted, the generation of particles is suppressed as compared with the case where both fitting structures are made of metal. Further, the fixing member 96 of the crystal unit 9 includes a metal block 961 and an insulating member 962 that fixes the leads 971 and 972 to the block 961 through a pair of through holes of the block 961. Of these, the portion projecting to the outside from the pair of through holes is the convex portion 963 of the first fitting structure 960, so that the convex portion of the first fitting structure is formed separately from the insulating member 962. Thus, the structures of the fixing member 96 and the crystal unit 9 can be simplified. Further, by using the metal block 961, the fixing member 96, which is a relatively small member, can be made rigid easily and at low cost.

  As mentioned above, although embodiment of this invention has been described, this invention is not limited to the said embodiment, A various change is possible.

  For example, the second fitting structure 810 of the holder 81 is not necessarily required to have the two concave portions 813, and one concave portion may be provided in the holder 81 as the second fitting structure 810. In this case, the first fitting structure 960 of the fixing member 96 of the crystal resonator 9 has one or a plurality of convex portions that are fitted to the one concave portion. When the first fitting structure 960 has only one convex portion, the shape of the convex portion is a shape other than a columnar shape or a truncated cone shape (for example, a truncated pyramid shape). Is preferred. Thereby, it is possible to reliably prevent the quartz crystal vibrator 9 held by the holder 81 from rotating around the first fitting structure 960. Further, when the first fitting structure 960 has a plurality of convex portions (for example, two convex portions in which the first fitting structure 960 is arranged in the longitudinal direction of the concave portion that fits into the groove-shaped concave portion. ), The change in the orientation of the crystal unit 9 held by the holder 81 is reliably prevented regardless of the shape of each of the convex portions. For this reason, the shape of the convex part which the 1st fitting structure 960 has can be made into a simple thing like a column shape or a truncated cone shape, and the manufacturing cost of the crystal oscillator 9 or the holder 81 is reduced. be able to.

  The second fitting structure 810 of the holder 81 may have three or more concave portions. In this case, the first fitting structure 960 of the crystal resonator 9 is fitted to these concave portions. It has three or more convex parts. As a result, similarly to the above, regardless of the shape of the convex portion of the first fitting structure 960, a change in the orientation of the crystal unit 9 held by the holder 81 is reliably prevented. For this reason, the manufacturing cost of the crystal unit 9 and the holder 81 can be reduced by simplifying the shape of the convex portion of the first fitting structure 960.

  Conversely, a convex part may be provided as the second fitting structure 810 of the holder 81, and a concave part may be provided as the first fitting structure 960 of the crystal unit 9. When the second fitting structure 810 has a plurality of convex portions, the crystal resonator 9 held by the holder 81 is held regardless of the shape of the convex portion of the second fitting structure 810 as described above. Since the change in direction is reliably prevented, the manufacturing cost of the crystal unit 9 and the holder 81 can be reduced by simplifying the shape of the convex portion of the second fitting structure 810. That is, one of the first fitting structure 960 and the second fitting structure 810 has a plurality of convex portions that fit into the other, thereby simplifying the shape of the convex portion. The manufacturing cost of the crystal unit 9 and the holder 81 can be reduced.

  The first fitting structure 960 of the fixing member 96 and the second fitting structure 810 of the holder 81 may be formed of a material different from that of the above embodiment, but the first fitting structure 960 and the second fitting structure 960 may be formed. One of the combined structures 810 is made of metal and the other is made of glass or resin, so that the one fitting structure can be made rigid easily and at low cost, and the first fitting Generation of particles at the time of fitting between the structure 960 and the second fitting structure 810 can be suppressed.

  The first fitting structure 960 of the fixing member 96 does not necessarily need to be formed as a part of the insulating member 962, and is a protrusion formed on the upper surface of the block 961 at a position away from the pair of through holes of the block 961. A concave or concave portion may be the first fitting structure 960.

  In the electrode processing system 100, an ethyl alcohol sensitive film is formed on both the first electrode 91 and the second electrode 92 of the crystal unit 9, and the ethyl alcohol sensitive film is at least of the first electrode 91 and the second electrode 92. It only has to be formed on one side. In place of the ethyl alcohol sensitive membrane, for example, toxic gas, flammable gas, smoke (smoke in the case of fire), specific dangerous materials, environmental hormones, specific pollutants (soil pollutants, etc.), ethyl alcohol, A thin film that selectively adsorbs a metabolite caused by ingestion of a drug or a metabolite caused by a disease may be formed, or a thin film of various materials such as proteins may be formed.

  In the electrode processing system 100, pretreatment, thiol bonding treatment, inorganic film formation treatment, organic film formation treatment are performed on the first electrode 91 and the second electrode 92 of the crystal resonator 9 held and transported by the carrier 8. Although the cleaning process and the drying process are performed, the carrier 8 may be used together with a device that performs various other processes on the crystal unit 9.

It is a top view which shows an electrode processing system. It is a figure which shows one main surface of a crystal oscillator. It is a figure which shows the other main surface of a crystal oscillator. It is a front view of a carrier. It is a side view of a carrier. It is a figure which shows the crystal oscillator vicinity. It is a figure which shows a part of holder. It is a figure which shows the flow of the process with respect to the electrode of a crystal oscillator. It is a figure which shows the flow of the process with respect to the electrode of a crystal oscillator. It is a side view which shows a part of tray which mounted the crystal oscillator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 9 Crystal oscillator 12 Pre-processing apparatus 13 Thiol bond processing apparatus 14 Inorganic film forming apparatus 16 Organic film forming apparatus 17 Cleaning apparatus 18 Drying apparatus 19 Transport mechanism 81 Holder 91 1st electrode 92 2nd electrode 95 Crystal piece 96 Fixing member 100 Electrode Processing system 810 Second fitting structure 812 Main flow path 813 Concavity 814 Branch flow path 951 First main surface 952 Second main surface 960 First fitting structure 961 Block 962 Insulating member 963 Protruding portion 971, 972 Lead S11-S23 Step

Claims (9)

A crystal in which a pair of electrodes are formed on both main surfaces of the plate-shaped crystal piece and a pair of wires extending from the pair of electrodes to the main surfaces of the crystal piece in parallel with each other are fixed to a fixing member. A crystal resonator holding device for holding a resonator,
A second fitting structure fitted with a first fitting structure having a concave or convex portion formed on the fixing member;
The suction is stopped while maintaining the fitting state between the first fitting structure and the second fitting structure by performing suction from an opening provided in the second fitting structure and connected to the suction mechanism. A flow path for releasing the fitting state by
A crystal resonator holding device comprising: The crystal resonator holding device according to claim 1,
One of said 1st fitting structure and said 2nd fitting structure has a some convex-shaped site | part which fits the other, The crystal oscillator holding | maintenance apparatus characterized by the above-mentioned. The crystal resonator holding device according to claim 2,
The first fitting structure has a plurality of protrusions protruding toward the second fitting structure;
The crystal resonator holding device, wherein the second fitting structure has a plurality of recesses that fit into the plurality of projections. The crystal resonator holding device according to claim 3,
Each of the plurality of convex portions has a truncated cone shape. The crystal resonator holding device according to claim 3 or 4,
The fixing member of the crystal resonator is
A metal block formed with a pair of through holes into which the pair of wirings are inserted;
An insulating member that fixes the pair of wires to the block inside the pair of through holes and that protrudes to the outside from the pair of through holes becomes the plurality of convex portions;
A crystal resonator holding device comprising: A crystal resonator holding device according to any one of claims 1 to 5,
One of the first fitting structure and the second fitting structure is formed of metal, and the other is formed of glass or resin. The crystal resonator holding device according to any one of claims 1 to 6,
The crystal resonator holding device, further comprising another combination of the second fitting structure for sucking and holding the fixing member of another crystal resonator and the flow path. A crystal in which a pair of electrodes are formed on both main surfaces of the plate-shaped crystal piece and a pair of wires extending from the pair of electrodes to the main surfaces of the crystal piece in parallel with each other are fixed to a fixing member. An electrode processing system for performing predetermined processing on electrodes of a vibrator,
A crystal resonator holding device according to any one of claims 1 to 7, which holds the crystal resonator;
A plurality of processing devices each performing a predetermined process on the at least one electrode by applying a processing material to at least one of the pair of electrodes of the crystal resonator;
A transport mechanism for transporting the quartz crystal holding device from one processing device to another processing device among the plurality of processing devices;
With
The crystal unit holding device receives the crystal unit from the holding unit by adsorbing the fixing member of the crystal unit held by a holding unit provided in the one processing apparatus, and the other An electrode processing system in which the quartz crystal vibrator is transferred to a holding portion provided in the other processing apparatus by releasing the suction of the fixing member in the processing apparatus. The electrode processing system according to claim 8,
The electrode processing system characterized in that the processing by the one processing apparatus is processing for forming a thin film on the at least one electrode.

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