JP2010122237A5 - - Google Patents

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Publication number
JP2010122237A5
JP2010122237A5 JP2010022869A JP2010022869A JP2010122237A5 JP 2010122237 A5 JP2010122237 A5 JP 2010122237A5 JP 2010022869 A JP2010022869 A JP 2010022869A JP 2010022869 A JP2010022869 A JP 2010022869A JP 2010122237 A5 JP2010122237 A5 JP 2010122237A5
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JP
Japan
Prior art keywords
control layer
layer
processing chamber
selected light
transmissive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010022869A
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English (en)
Japanese (ja)
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JP2010122237A (ja
JP5086381B2 (ja
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Publication date
Priority claimed from US10/682,597 external-priority patent/US7718133B2/en
Application filed filed Critical
Publication of JP2010122237A publication Critical patent/JP2010122237A/ja
Publication of JP2010122237A5 publication Critical patent/JP2010122237A5/ja
Application granted granted Critical
Publication of JP5086381B2 publication Critical patent/JP5086381B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2010022869A 2003-10-09 2010-02-04 多層試料処理装置 Expired - Fee Related JP5086381B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/682,597 US7718133B2 (en) 2003-10-09 2003-10-09 Multilayer processing devices and methods
US10/682,597 2003-10-09

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006533851A Division JP2007508542A (ja) 2003-10-09 2004-08-16 多層試料処理装置および方法

Publications (3)

Publication Number Publication Date
JP2010122237A JP2010122237A (ja) 2010-06-03
JP2010122237A5 true JP2010122237A5 (cg-RX-API-DMAC7.html) 2011-06-02
JP5086381B2 JP5086381B2 (ja) 2012-11-28

Family

ID=34422558

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006533851A Pending JP2007508542A (ja) 2003-10-09 2004-08-16 多層試料処理装置および方法
JP2010022869A Expired - Fee Related JP5086381B2 (ja) 2003-10-09 2010-02-04 多層試料処理装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2006533851A Pending JP2007508542A (ja) 2003-10-09 2004-08-16 多層試料処理装置および方法

Country Status (9)

Country Link
US (2) US7718133B2 (cg-RX-API-DMAC7.html)
EP (2) EP1682271B1 (cg-RX-API-DMAC7.html)
JP (2) JP2007508542A (cg-RX-API-DMAC7.html)
CN (1) CN1867406B (cg-RX-API-DMAC7.html)
AT (1) ATE448876T1 (cg-RX-API-DMAC7.html)
AU (1) AU2004283174B2 (cg-RX-API-DMAC7.html)
CA (1) CA2541900A1 (cg-RX-API-DMAC7.html)
DE (1) DE602004024229D1 (cg-RX-API-DMAC7.html)
WO (1) WO2005039769A1 (cg-RX-API-DMAC7.html)

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