JP2010111748A - Adhesive layer forming liquid and adhesive layer forming process - Google Patents

Adhesive layer forming liquid and adhesive layer forming process Download PDF

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JP2010111748A
JP2010111748A JP2008284502A JP2008284502A JP2010111748A JP 2010111748 A JP2010111748 A JP 2010111748A JP 2008284502 A JP2008284502 A JP 2008284502A JP 2008284502 A JP2008284502 A JP 2008284502A JP 2010111748 A JP2010111748 A JP 2010111748A
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adhesive layer
layer forming
concentration
forming liquid
copper
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JP5522617B2 (en
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Mutsuyuki Kawaguchi
睦行 河口
Takeshi Amaya
剛 天谷
Yuko Fujii
祐子 藤井
Masami Tsutae
雅美 傳江
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MEC Co Ltd
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Priority to TW098136181A priority patent/TWI488998B/en
Priority to CN200910207412A priority patent/CN101736331A/en
Priority to US12/610,437 priority patent/US20100108531A1/en
Priority to KR1020090105915A priority patent/KR101312802B1/en
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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/04Non-macromolecular additives inorganic
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/02Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0361Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/073Displacement plating, substitution plating or immersion plating, e.g. for finish plating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)
  • Paints Or Removers (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an adhesive layer forming liquid capable of easily maintaining the performance of forming an adhesive layer and ensuring adhesive property to a resin certainly, and to provide an adhesive layer forming process using the liquid. <P>SOLUTION: The adhesive layer forming liquid for forming the adhesive layer for bonding a copper and a resin to each other is an aqueous solution comprising an acid, a stannous salt, a stannic salt, a complexing agent, and a stabilizing agent, and is prepared to set the value of B/A to 0.010-1.000 on the preparation, wherein A represents the concentration (unit: mass%) of the stannous salt as the concentration of bivalent tin ions, and B represents the concentration (unit: mass%) of the stannic salt as the concentration of tetravalent tin ions. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、銅と樹脂を接着させるための接着層を形成する接着層形成液、及びこれを用いた接着層形成方法に関する。   The present invention relates to an adhesive layer forming liquid for forming an adhesive layer for bonding copper and a resin, and an adhesive layer forming method using the same.

一般的な多層配線板は、表面に銅からなる導電層を有する内層基板が、プリプレグを挟んで他の内層基板や銅箔と積層プレスされて製造されている。導電層間は、孔壁が銅めっきされたスルーホールとよばれる貫通孔により、電気的に接続されている。前記内層基板の導電層表面には、プリプレグとの接着性を向上させるために、下記特許文献1及び2などに記載のスズめっき液によりスズめっき層(接着層)を形成する場合がある。   A general multilayer wiring board is manufactured by laminating and pressing an inner layer substrate having a conductive layer made of copper on the surface with another inner layer substrate or a copper foil with a prepreg interposed therebetween. The conductive layers are electrically connected by a through-hole called a through-hole whose hole wall is plated with copper. In order to improve the adhesion to the prepreg, a tin plating layer (adhesion layer) may be formed on the surface of the inner layer substrate with a tin plating solution described in Patent Literatures 1 and 2 below.

しかし、特許文献1及び2に記載のスズめっき液は、第一スズ塩をスズ源として用いるため、使用時の空気酸化等により2価のスズイオン(Sn2+)が4価のスズイオン(Sn4+)に酸化されてしまい、めっき付着性が低下し、ひいては樹脂との密着性が低下してしまうという問題があった。 However, since the tin plating solutions described in Patent Documents 1 and 2 use a stannous salt as a tin source, divalent tin ions (Sn 2+ ) are converted into tetravalent tin ions (Sn 4+ ) by air oxidation during use. There is a problem that the plating adhesion is lowered and the adhesion with the resin is lowered.

上記問題に対して、下記特許文献3及び4には、金属スズを使用して4価のスズイオンを2価のスズイオンに再生させる方法が提案されている。   In order to solve the above problem, Patent Documents 3 and 4 below propose a method of regenerating tetravalent tin ions into divalent tin ions using metallic tin.

特公平6−66553号公報Japanese Examined Patent Publication No. 6-66553 特表2004−536220号公報Special table 2004-536220 gazette 特開平5−222540号公報JP-A-5-222540 特開平5−263258号公報Japanese Patent Laid-Open No. 5-263258

しかし、上記特許文献3及び4の方法では、スズめっき液中の成分の調整が困難で、実用性に乏しい。   However, in the methods of Patent Documents 3 and 4, it is difficult to adjust the components in the tin plating solution, and the practicality is poor.

本発明は、上記実情に鑑みてなされたものであり、接着層の形成性能を容易に維持できる上、樹脂との密着性を確保できる接着層形成液、及びこれを用いた接着層形成方法を提供する。   The present invention has been made in view of the above circumstances, and an adhesive layer forming liquid capable of easily maintaining the adhesive layer forming performance and ensuring adhesion with a resin, and an adhesive layer forming method using the same. provide.

本発明の接着層形成液は、銅と樹脂を接着させるための接着層を形成する接着層形成液であって、
酸、第一スズ塩、第二スズ塩、錯化剤、及び安定化剤を含む水溶液であり、
調製時において、前記第一スズ塩の濃度を2価スズイオンの濃度としてA質量%とし、前記第二スズ塩の濃度を4価スズイオンの濃度としてB質量%としたときに、B/Aの値が0.010以上1.000以下となるように調製されたことを特徴とする。
The adhesive layer forming liquid of the present invention is an adhesive layer forming liquid for forming an adhesive layer for bonding copper and a resin,
An aqueous solution comprising an acid, stannous salt, stannic salt, complexing agent, and stabilizer;
At the time of preparation, when the concentration of the stannous salt was A mass% as the concentration of divalent tin ions and the concentration of the stannic salt was B mass% as the concentration of tetravalent tin ions, the value of B / A It was prepared so that it might become 0.010 or more and 1.000 or less.

また、本発明の接着層形成方法は、銅と樹脂を接着させるための接着層を形成する接着層形成方法であって、
上記本発明の接着層形成液で銅表面を処理する工程を含むことを特徴とする。
The adhesive layer forming method of the present invention is an adhesive layer forming method for forming an adhesive layer for bonding copper and a resin,
It includes a step of treating the copper surface with the adhesive layer forming liquid of the present invention.

なお、上記本発明における「銅」は、純銅からなるものであってもよく、銅合金からなるものであってもよい。また、本明細書において「銅」は、純銅又は銅合金をさす。   In addition, the “copper” in the present invention may be made of pure copper or a copper alloy. In this specification, “copper” refers to pure copper or a copper alloy.

本発明の接着層形成液、及びこれを用いた接着層形成方法によれば、接着層の形成性能を容易に維持できる上、樹脂との密着性を確保できる。   According to the adhesive layer forming liquid of the present invention and the adhesive layer forming method using the same, the formation performance of the adhesive layer can be easily maintained, and the adhesion to the resin can be ensured.

本発明は、銅と樹脂を接着させるために、銅表面上に銅−スズ合金を主成分とする接着層を形成する接着層形成液、及びこれを用いた接着層形成方法を対象とする。上記銅表面としては、例えば、半導体ウェハー、電子基板、リードフレームなどの電子部品、装飾品、建材などに使用される銅箔(電解銅箔、圧延銅箔)の表面や、銅めっき膜(無電解銅めっき膜、電解銅めっき膜)の表面、あるいは線状、棒状、管状、板状などの種々の用途の銅材の表面が例示できる。以下、本発明の接着層形成液の含有成分について説明する。   The present invention is directed to an adhesive layer forming liquid for forming an adhesive layer mainly composed of a copper-tin alloy on a copper surface in order to bond copper and a resin, and an adhesive layer forming method using the same. Examples of the copper surface include the surface of copper foil (electrolytic copper foil, rolled copper foil) used for electronic parts such as semiconductor wafers, electronic substrates, lead frames, ornaments, and building materials, and copper plating films (nothing). Examples thereof include the surface of an electrolytic copper plating film and an electrolytic copper plating film), or the surface of a copper material for various uses such as a linear shape, a rod shape, a tubular shape, and a plate shape. Hereinafter, the components contained in the adhesive layer forming liquid of the present invention will be described.

(酸)
本発明の接着層形成液に含まれる酸は、pH調整剤、及びスズイオンの安定化剤として機能する。上記酸としては、塩酸、硫酸、硝酸、ホウフッ化水素酸、リン酸などの無機酸や、ギ酸、酢酸、プロピオン酸、酪酸などのカルボン酸、メタンスルホン酸、エタンスルホン酸などのアルカンスルホン酸、ベンゼンスルホン酸、フェノールスルホン酸、クレゾールスルホン酸などの芳香族スルホン酸などの水溶性有機酸が例示できる。このうち、硫酸、塩酸が、接着層の形成速度や第二スズ塩の溶解性などの点から好ましい。酸の好ましい濃度は、1〜50質量%であり、より好ましくは3〜30質量%、さらに好ましくは5〜20質量%の範囲である。上記範囲内であれば、密着性に優れた接着層を容易に形成できる。
(acid)
The acid contained in the adhesive layer forming liquid of the present invention functions as a pH adjuster and a tin ion stabilizer. Examples of the acid include inorganic acids such as hydrochloric acid, sulfuric acid, nitric acid, borofluoric acid, and phosphoric acid, carboxylic acids such as formic acid, acetic acid, propionic acid, and butyric acid, alkanesulfonic acids such as methanesulfonic acid and ethanesulfonic acid, Examples thereof include water-soluble organic acids such as aromatic sulfonic acids such as benzenesulfonic acid, phenolsulfonic acid, and cresolsulfonic acid. Of these, sulfuric acid and hydrochloric acid are preferable from the viewpoint of the formation rate of the adhesive layer and the solubility of the stannic salt. A preferable concentration of the acid is 1 to 50% by mass, more preferably 3 to 30% by mass, and still more preferably 5 to 20% by mass. If it is in the said range, the contact bonding layer excellent in adhesiveness can be formed easily.

(第一スズ塩)
本発明では、スズ源として第一スズ塩を使用する。第一スズ塩としては、硫酸第一スズ、ホウフッ化第一スズ、フッ化第一スズ、硝酸第一スズ、酸化第一スズ、塩化第一スズ、ギ酸第一スズ、酢酸第一スズなどが例示できる。第一スズ塩の好ましい濃度は、2価スズイオンの濃度として0.05〜10.00質量%の範囲であり、より好ましくは0.10〜5.00質量%の範囲であり、さらに好ましくは0.50〜3.00質量%の範囲である。上記範囲内であれば、密着性に優れた接着層を容易に形成できる。
(Stannous salt)
In the present invention, stannous salt is used as a tin source. Examples of stannous salts include stannous sulfate, stannous borofluoride, stannous fluoride, stannous nitrate, stannous oxide, stannous chloride, stannous formate, and stannous acetate. It can be illustrated. The preferable concentration of the stannous salt is in the range of 0.05 to 10.00% by mass as the concentration of divalent tin ions, more preferably in the range of 0.10 to 5.00% by mass, and still more preferably 0. The range is from 50 to 3.00 mass%. If it is in the said range, the contact bonding layer excellent in adhesiveness can be formed easily.

(第二スズ塩)
本発明の接着層形成液は、その調製時において、上記第一スズ塩に加えて第二スズ塩が添加される。これにより、連続使用した場合でも、接着層形成液中の2価のスズイオンが空気酸化等により4価のスズイオンへ酸化されることを抑制できる。上記第二スズ塩としては、酸性溶液に可溶な第二スズ塩の中から特に制限なく使用できるが、溶解性の観点から、上記酸との塩類が好ましい。例えば、硫酸第二スズ、フッ化第二スズ、硝酸第二スズ、塩化第二スズ、ギ酸第二スズ、酢酸第二スズなどが例示できる。第二スズ塩の好ましい濃度は、4価スズイオンの濃度として0.01〜5.00質量%の範囲であり、より好ましくは0.01〜1.50質量%の範囲である。上記範囲内であれば、密着性に優れた接着層を容易に形成できる。
(Stannic salt)
In the adhesive layer forming liquid of the present invention, a stannic salt is added in addition to the stannous salt at the time of preparation. Thereby, even when it uses continuously, it can suppress that the bivalent tin ion in a contact bonding layer formation liquid is oxidized to a tetravalent tin ion by air oxidation etc. As the stannic salt, any stannic salt that is soluble in an acidic solution can be used without particular limitation, but salts with the acid are preferable from the viewpoint of solubility. Examples thereof include stannic sulfate, stannic fluoride, stannic nitrate, stannic chloride, stannic formate, and stannic acetate. A preferable concentration of the stannic salt is in a range of 0.01 to 5.00% by mass, more preferably in a range of 0.01 to 1.50% by mass as a concentration of tetravalent tin ions. If it is in the said range, the contact bonding layer excellent in adhesiveness can be formed easily.

本発明の接着層形成液は、その調製時において、上記第一スズ塩の濃度を2価スズイオンの濃度としてA質量%とし、上記第二スズ塩の濃度を4価スズイオンの濃度としてB質量%としたときに、B/Aの値が0.010以上1.000以下となるように調製される。ここで、「調製時」とは、接着層形成液を構成する各成分を配合する際の配合時を指し、具体的には第一スズ塩と第二スズ塩とを配合する際の配合時を指す。接着層形成液の調製時にB/Aの値を0.010以上とすることにより、連続使用した場合でも、接着層の形成性能を容易に維持できる。また、接着層形成液の調製時にB/Aの値を1.000以下とすることにより、樹脂との密着性を確保できる。上記効果をより有効に発揮させるには、接着層形成液の調製時のB/Aの値が0.050以上0.500以下となるように調製することが好ましい。   In the preparation of the adhesive layer forming liquid of the present invention, the concentration of the stannous salt is A mass% as the concentration of divalent tin ions, and the concentration of the stannic salt is B mass% as the concentration of tetravalent tin ions. The B / A value is adjusted to 0.010 or more and 1.000 or less. Here, "at the time of preparation" refers to the time of blending when the components constituting the adhesive layer forming liquid are blended, specifically, when blending the stannous salt and the stannic salt Point to. By setting the value of B / A to 0.010 or more during the preparation of the adhesive layer forming liquid, the formation performance of the adhesive layer can be easily maintained even when continuously used. Moreover, adhesiveness with resin is securable by making the value of B / A into 1.000 or less at the time of preparation of an adhesive layer formation liquid. In order to exhibit the above effect more effectively, it is preferable to prepare so that the value of B / A at the time of preparation of the adhesive layer forming liquid is 0.050 or more and 0.500 or less.

(錯化剤)
本発明の接着層形成液に含まれる錯化剤は、下地の銅表面に配位してキレートを形成し、銅表面に接着層を形成しやすくするものである。例えば、チオ尿素、1,3−ジメチルチオ尿素、1,3−ジエチル−2−チオ尿素などのチオ尿素類や、チオグリコール酸などのチオ尿素誘導体などが使用できる。錯化剤の好ましい濃度は、1〜30質量%の範囲であり、より好ましくは1〜20質量%の範囲である。この範囲内であれば、接着層の形成速度を低下させずに密着性に優れた接着層を形成できる。また、この範囲内であれば、平滑性の良好な接着層を形成できる。
(Complexing agent)
The complexing agent contained in the adhesive layer forming liquid of the present invention coordinates to the underlying copper surface to form a chelate and facilitates formation of the adhesive layer on the copper surface. For example, thioureas such as thiourea, 1,3-dimethylthiourea, 1,3-diethyl-2-thiourea, and thiourea derivatives such as thioglycolic acid can be used. A preferable concentration of the complexing agent is in the range of 1 to 30% by mass, and more preferably in the range of 1 to 20% by mass. Within this range, an adhesive layer having excellent adhesion can be formed without reducing the formation speed of the adhesive layer. Moreover, if it exists in this range, an adhesive layer with favorable smoothness can be formed.

(安定化剤)
本発明の接着層形成液に含まれる安定化剤は、銅表面の近傍において、反応に必要な各成分の濃度を維持するための添加剤である。上記安定化剤としては、例えば、エチレングリコール、ジエチレングリコール、プロピレングリコール、トリプロピレングリコールなどのグリコール類、セロソルブ、カルビトール、ブチルカルビトールなどのグリコールエステル類などが例示できる。上記安定化剤の好ましい濃度は、1〜80質量%の範囲であり、より好ましくは5〜80質量%、さらに好ましくは10〜80質量%の範囲である。上記範囲内であれば、銅表面の近傍において、反応に必要な各成分の濃度を容易に維持できる。
(Stabilizer)
The stabilizer contained in the adhesive layer forming liquid of the present invention is an additive for maintaining the concentration of each component necessary for the reaction in the vicinity of the copper surface. Examples of the stabilizer include glycols such as ethylene glycol, diethylene glycol, propylene glycol, and tripropylene glycol, and glycol esters such as cellosolve, carbitol, and butyl carbitol. A preferable concentration of the stabilizer is in the range of 1 to 80% by mass, more preferably 5 to 80% by mass, and still more preferably 10 to 80% by mass. If it is in the said range, the density | concentration of each component required for reaction can be easily maintained in the vicinity of the copper surface.

本発明の接着層形成液には、上記成分の他、次亜リン酸などの還元剤、光沢剤、pH調整剤、防腐剤など必要に応じて適宜添加することができる。これらの添加成分の含有量は、例えば0.1〜20質量%程度である。   In addition to the above components, a reducing agent such as hypophosphorous acid, a brightener, a pH adjuster, a preservative and the like can be appropriately added to the adhesive layer forming liquid of the present invention as necessary. The content of these additive components is, for example, about 0.1 to 20% by mass.

本発明の接着層形成液は、上記の各成分を水に溶解させることにより、容易に調製することができる。上記水としては、イオン性物質や不純物を除去した水が好ましく、例えばイオン交換水、純水、超純水などが好ましい。   The adhesive layer forming liquid of the present invention can be easily prepared by dissolving each of the above components in water. As the water, water from which ionic substances and impurities have been removed is preferable. For example, ion exchange water, pure water, ultrapure water, and the like are preferable.

本発明の接着層形成液を用いて接着層を形成する場合、例えば下記のような条件で形成できる。   When forming an adhesive layer using the adhesive layer forming liquid of the present invention, for example, it can be formed under the following conditions.

まず、銅表面を酸などで洗浄する。次に、上記接着層形成液に銅表面を浸漬し、5秒〜5分間、揺動浸漬処理をする。この際の接着層形成液の温度は、20〜70℃(好ましくは20〜40℃)程度であればよい。その後、水洗、乾燥することで接着層(スズめっき層)が形成される。   First, the copper surface is washed with an acid or the like. Next, the copper surface is immersed in the adhesive layer forming liquid, and a rocking immersion treatment is performed for 5 seconds to 5 minutes. The temperature of the adhesive layer forming liquid at this time may be about 20 to 70 ° C. (preferably 20 to 40 ° C.). Then, an adhesive layer (tin plating layer) is formed by washing with water and drying.

さらに、この接着層の表面をスズ剥離液で処理してもよい。接着層の表面にスズ剥離液を接触させることにより、より平滑で、薄い接着層を形成することができるからである。   Further, the surface of the adhesive layer may be treated with a tin stripping solution. This is because a smoother and thinner adhesive layer can be formed by bringing the tin stripping solution into contact with the surface of the adhesive layer.

上記スズ剥離液としては、スズをエッチングできる液であればよく、例えば、硝酸水溶液、塩酸、硫酸水溶液、これらの混合溶液等の酸性溶液等が使用できる。酸性溶液の酸濃度としては、0.1〜10質量%の範囲であることが好ましく、0.3〜5質量%の範囲であることがより好ましい。この範囲内であれば、接着層の厚みを適切な範囲内に容易に制御できる。特に、硝酸水溶液は、剥離速度が速いため好ましい。なお、スズ剥離液には、界面活性剤、pH調整剤などのその他の添加剤を加えてもよい。   The tin stripping solution may be any solution that can etch tin. For example, an acidic solution such as a nitric acid aqueous solution, hydrochloric acid, a sulfuric acid aqueous solution, or a mixed solution thereof can be used. The acid concentration of the acidic solution is preferably in the range of 0.1 to 10% by mass, and more preferably in the range of 0.3 to 5% by mass. Within this range, the thickness of the adhesive layer can be easily controlled within an appropriate range. In particular, an aqueous nitric acid solution is preferable because of its high peeling rate. In addition, you may add other additives, such as surfactant and a pH adjuster, to a tin stripping solution.

上記表面剥離工程において、接着層表面とスズ剥離液(好ましくは硝酸水溶液)との接触時間は、5〜120秒が好ましく、10〜30秒がより好ましい。この範囲内であれば、接着層の厚みを適切な範囲内に容易に制御できる。スズ剥離液を接触させる方法としては、浸漬やスプレーなどによる接液処理方法を採用できる。なお、この際のスズ剥離液の温度は、25〜35℃程度である。   In the surface peeling step, the contact time between the adhesive layer surface and the tin peeling solution (preferably nitric acid aqueous solution) is preferably 5 to 120 seconds, more preferably 10 to 30 seconds. Within this range, the thickness of the adhesive layer can be easily controlled within an appropriate range. As a method of bringing the tin stripping solution into contact, a liquid contact processing method such as immersion or spraying can be employed. In this case, the temperature of the tin stripping solution is about 25 to 35 ° C.

なお、接着層の適切な厚みとは、0.02μm以下、好ましくは0.001〜0.02μm、さらに好ましくは0.003〜0.02μmである。接着層の厚みを0.001μm以上にすると、樹脂層との接着性を容易に確保できる。一方、接着層の厚みを0.02μm以下にすると、後工程において接着層の除去が必要な場合に、接着層を容易に除去できる。   The appropriate thickness of the adhesive layer is 0.02 μm or less, preferably 0.001 to 0.02 μm, and more preferably 0.003 to 0.02 μm. When the thickness of the adhesive layer is 0.001 μm or more, the adhesiveness with the resin layer can be easily secured. On the other hand, when the thickness of the adhesive layer is 0.02 μm or less, the adhesive layer can be easily removed when it is necessary to remove the adhesive layer in a later step.

上記接着層に接着させる樹脂層の構成樹脂は、特に限定されないが、アクリロニトリル/スチレン共重合樹脂(AS樹脂)、アクリロニトリル/ブタジエン/スチレン共重合樹脂(ABS樹脂)、フッ素樹脂、ポリアミド、ポリエチレン、ポリエチレンテレフタレート、ポリ塩化ビニリデン、ポリ塩化ビニル、ポリカーボネート、ポリスチレン、ポリサルホン、ポリプロピレン、液晶ポリマー等の熱可塑性樹脂や、エポキシ樹脂、フェノール樹脂、ポリイミド、ポリウレタン、ビスマレイミド・トリアジン樹脂、変性ポリフェニレンエーテル、シアネートエステル等の熱硬化性樹脂、あるいは紫外線硬化性エポキシ樹脂、紫外線硬化性アクリル樹脂等の紫外線硬化性樹脂等を挙げることができる。これらの樹脂は官能基によって変性されていてもよく、ガラス繊維、アラミド繊維、その他の繊維などで強化されていてもよい。   The resin constituting the resin layer to be bonded to the adhesive layer is not particularly limited, but acrylonitrile / styrene copolymer resin (AS resin), acrylonitrile / butadiene / styrene copolymer resin (ABS resin), fluororesin, polyamide, polyethylene, polyethylene Thermoplastic resins such as terephthalate, polyvinylidene chloride, polyvinyl chloride, polycarbonate, polystyrene, polysulfone, polypropylene, liquid crystal polymer, epoxy resin, phenol resin, polyimide, polyurethane, bismaleimide / triazine resin, modified polyphenylene ether, cyanate ester, etc. And UV curable resins such as UV curable epoxy resins and UV curable acrylic resins. These resins may be modified with functional groups, and may be reinforced with glass fibers, aramid fibers, other fibers, and the like.

本発明によって得られた接着層は、絶縁樹脂、エッチングレジスト、ソルダーレジスト、導電性樹脂、導電性ペースト、導電性接着剤、誘電体樹脂、穴埋め用樹脂、フレキシブルカバーレイフィルム等との接着性を確保できる。よって、本発明によれば、銅層と樹脂層との接着性を確保できるため、例えば、信頼性の高い配線基板を提供できる。   The adhesive layer obtained by the present invention has an adhesive property with insulating resin, etching resist, solder resist, conductive resin, conductive paste, conductive adhesive, dielectric resin, hole filling resin, flexible coverlay film, etc. It can be secured. Therefore, according to this invention, since the adhesiveness of a copper layer and a resin layer is securable, a reliable wiring board can be provided, for example.

次に、本発明の実施例について比較例と併せて説明する。なお、本発明は下記の実施例に限定して解釈されるものではない。   Next, examples of the present invention will be described together with comparative examples. In addition, this invention is limited to a following example and is not interpreted.

(新液による処理)
以下の表1に示す配合の接着層形成液(温度:30℃)を1リットルずつ準備した。なお、いずれの接着層形成液についても、表1に示す成分を除いた残部はイオン交換水とした。そして、テストピースとして100mm×100mmにカットした電解銅箔(三井金属鉱業社製 3EC-III、厚み35μm)を準備し、このテストピースを上記各液(新液)中に一枚ずつ入れて、30秒間の揺動浸漬処理を行った。その後、処理したテストピースを水洗し、すぐに0.7質量%硝酸水溶液(温度:30℃)で20秒間の揺動浸漬処理を行った後、水洗、乾燥処理を行った。
(Treatment with new solution)
One liter of an adhesive layer forming solution (temperature: 30 ° C.) having the composition shown in Table 1 below was prepared. In any adhesive layer forming liquid, the remainder excluding the components shown in Table 1 was ion-exchanged water. Then, an electrolytic copper foil (3EC-III made by Mitsui Mining & Smelting Co., Ltd., thickness 35 μm) cut to 100 mm × 100 mm as a test piece is prepared, and this test piece is put into each of the above solutions (new solutions) one by one. A rocking immersion treatment for 30 seconds was performed. Thereafter, the treated test piece was washed with water and immediately subjected to a rocking immersion treatment with a 0.7 mass% nitric acid aqueous solution (temperature: 30 ° C.) for 20 seconds, followed by washing with water and drying treatment.

(古液による処理)
上記とは別に、以下の表1に示す配合の接着層形成液(温度:30℃)を1リットルずつ準備して、各液を攪拌しながら上記と同様のテストピースを上記と同様の条件で24時間かけて500枚処理し続けた。次いで、処理後の各液(古液)中に上記と同様のテストピースを一枚ずつ入れて、上記と同様の条件で処理した。その後、処理したテストピースを水洗し、すぐに0.7質量%硝酸水溶液(温度:30℃)で20秒間の揺動浸漬処理を行った後、水洗、乾燥処理を行った。
(Treatment with old liquid)
Separately from the above, prepare 1 liter of an adhesive layer forming solution (temperature: 30 ° C.) having the composition shown in Table 1 below, and stir each solution under the same conditions as above. 500 sheets were continuously processed over 24 hours. Next, one test piece similar to the above was put into each of the treated liquids (old liquid) one by one and processed under the same conditions as described above. Thereafter, the treated test piece was washed with water and immediately subjected to a rocking immersion treatment with a 0.7 mass% nitric acid aqueous solution (temperature: 30 ° C.) for 20 seconds, followed by washing with water and drying treatment.

(密着性)
処理後の各テストピースをサンプリングし、接着層を介して感光性液状ソルダーレジスト(日立化成工業社製 SR-7200)を約20μmの厚みで塗布し、硬化させた。その後、JIS C 6471に準拠して、ピール強度(N/mm)を測定した。結果を表1に示す。
(Adhesion)
Each test piece after the treatment was sampled, and a photosensitive liquid solder resist (SR-7200, manufactured by Hitachi Chemical Co., Ltd.) was applied to the thickness of about 20 μm through the adhesive layer and cured. Thereafter, peel strength (N / mm) was measured in accordance with JIS C 6471. The results are shown in Table 1.

(スズめっき付着性)
以下の表1に示す配合の接着層形成液の新液(温度:30℃)と、以下の表1に示す配合の接着層形成液を上記と同様の条件で24時間かけて500枚処理し続けた古液(温度:30℃)とを1リットルずつ準備した。そして、テストピースとして100mm×100mmにカットした電解銅箔(三井金属鉱業社製 3EC-III、厚み35μm)を準備し、このテストピースを上記各液(新液及び古液)中に一枚ずつ入れて、外観観察にて3秒未満でめっきがついたものを○、3〜10秒でめっきが付いたものを△、10秒以内にめっきが付かなかったものを×として、スズめっき付着性(接着層の形成性能)を評価した。
(Tin plating adhesion)
500 sheets of the new adhesive layer forming liquid (temperature: 30 ° C.) having the composition shown in Table 1 below and the adhesive layer forming liquid having the composition shown in Table 1 are processed for 24 hours under the same conditions as described above. The continued old liquid (temperature: 30 ° C.) was prepared 1 liter at a time. Then, an electrolytic copper foil (3EC-III made by Mitsui Mining & Smelting Co., Ltd., thickness 35 μm) cut into 100 mm × 100 mm is prepared as a test piece, and this test piece is put in each of the above solutions (new solution and old solution) one by one. Put the plating in less than 3 seconds in the appearance observation, mark the one with plating in 3 to 10 seconds, and mark the one without plating within 10 seconds as x. (Adhesive layer formation performance) was evaluated.

Figure 2010111748
Figure 2010111748

表1に示すように、本発明の実施例1〜11は、比較例1〜4に比べ、ピール強度(密着性)及びスズめっき付着性のいずれについても良好な結果が得られた。   As shown in Table 1, in Examples 1 to 11 of the present invention, better results were obtained for both peel strength (adhesion) and tin plating adhesion than Comparative Examples 1 to 4.

(Sn4+の添加によるSn2+の空気酸化の抑制効果)
接着層形成液にSn4+を予め添加しておくことにより、Sn2+の空気酸化が抑制されることを確認するために、以下の実験を行った。
(Inhibition effect of Sn 2+ air oxidation by addition of Sn 4+ )
In order to confirm that the air oxidation of Sn 2+ is suppressed by adding Sn 4+ to the adhesive layer forming solution in advance, the following experiment was performed.

表1の比較例4と同じ配合の接着層形成液を1リットル準備し、この液を温度30℃でテストピースを一切処理せずに2時間攪拌し、攪拌後の液を比較例5の接着層形成液(新液)とした。この比較例5の各成分の濃度は、表1の実施例4の新液と同じであった。そして、テストピースとして100mm×100mmにカットした電解銅箔(三井金属鉱業社製 3EC-III、厚み35μm)を準備し、このテストピースを上記比較例5の新液中に入れて、30秒間の揺動浸漬処理を行った。その後、処理したテストピースを水洗し、すぐに0.7質量%硝酸水溶液(温度:30℃)で20秒間の揺動浸漬処理を行った後、水洗、乾燥処理を行った。   1 liter of an adhesive layer forming liquid having the same composition as Comparative Example 4 in Table 1 was prepared, and this liquid was stirred at a temperature of 30 ° C. for 2 hours without any treatment of the test piece. A layer forming liquid (new liquid) was used. The concentration of each component of Comparative Example 5 was the same as that of the new solution of Example 4 in Table 1. Then, an electrolytic copper foil (3EC-III manufactured by Mitsui Kinzoku Mining Co., Ltd., thickness 35 μm) cut into 100 mm × 100 mm was prepared as a test piece, and this test piece was placed in the new solution of Comparative Example 5 above for 30 seconds. A rocking immersion treatment was performed. Thereafter, the treated test piece was washed with water and immediately subjected to a rocking immersion treatment with a 0.7 mass% nitric acid aqueous solution (temperature: 30 ° C.) for 20 seconds, followed by washing with water and drying treatment.

上記とは別に、上述した比較例5の新液を1リットル準備し、この液を攪拌しながら上記と同様のテストピースを上記と同様の条件で24時間かけて500枚処理し続けた。次いで、処理後の液(古液)中に上記と同様のテストピースを入れて、上記と同様の条件で処理した。その後、処理したテストピースを水洗し、すぐに0.7質量%硝酸水溶液(温度:30℃)で20秒間の揺動浸漬処理を行った後、水洗、乾燥処理を行った。   Separately from the above, 1 liter of the new liquid of Comparative Example 5 described above was prepared, and 500 test pieces similar to those described above were continuously processed over 24 hours under the same conditions as above while stirring the liquid. Subsequently, the test piece similar to the above was put in the liquid after treatment (the old liquid), and the treatment was performed under the same conditions as described above. Thereafter, the treated test piece was washed with water and immediately subjected to a rocking immersion treatment with a 0.7 mass% nitric acid aqueous solution (temperature: 30 ° C.) for 20 seconds, followed by washing with water and drying treatment.

処理後の各テストピースについて、上記と同様に密着性の評価を行った。また、上記比較例5の新液及び古液について、それぞれ上記と同様にスズめっき付着性の評価を行った。これらの評価結果について、上述した実施例4の結果とともに表2に示す。   About each test piece after a process, adhesiveness evaluation was performed similarly to the above. Moreover, the tin plating adhesiveness of each of the new solution and the old solution of Comparative Example 5 was evaluated in the same manner as described above. About these evaluation results, it shows in Table 2 with the result of Example 4 mentioned above.

Figure 2010111748
Figure 2010111748

表2に示すように、予めSn4+を添加した実施例4では、Sn2+の空気酸化による濃度減少が抑制され、Sn4+/Sn2+の値(即ちB/Aの値)の変化も抑制されていることが分かる。これにより、新液及び古液のいずれについても密着性及びスズめっき付着性の評価が良好であった。一方、Sn2+の空気酸化により生成したSn4+を含有する比較例5については、Sn2+の空気酸化による濃度減少(Sn4+の濃度増加)が顕著に見られた。その結果、比較例5の古液については、密着性及びスズめっき付着性のいずれもが劣化した。この結果から、接着層形成液に予めSn4+を添加した場合には、接着層形成液の劣化防止効果が得られるが、Sn2+の空気酸化により生成したSn4+では、接着層形成液の劣化防止効果が得られないことが分かる。 As shown in Table 2, in Example 4 was added in advance Sn 4+, concentration decreases due to air oxidation of Sn 2+ is suppressed, the change in the value of Sn 4+ / Sn 2+ (i.e. the value of B / A) is also suppressed I understand that Thereby, evaluation of adhesiveness and tin plating adhesiveness was favorable about both a new liquid and an old liquid. On the other hand, the comparative example 5 containing Sn 4+ produced by air oxidation of Sn 2+, (increasing concentrations of Sn 4+) density losses due to air oxidation of Sn 2+ was observed remarkably. As a result, both the adhesion and tin plating adhesion of the old solution of Comparative Example 5 were deteriorated. From this result, when Sn 4+ is added to the adhesive layer forming liquid in advance, an effect of preventing the deterioration of the adhesive layer forming liquid can be obtained. However, in Sn 4+ generated by air oxidation of Sn 2+ , the adhesive layer forming liquid is deteriorated. It can be seen that the prevention effect cannot be obtained.

Claims (8)

銅と樹脂を接着させるための接着層を形成する接着層形成液であって、
酸、第一スズ塩、第二スズ塩、錯化剤、及び安定化剤を含む水溶液であり、
調製時において、前記第一スズ塩の濃度を2価スズイオンの濃度としてA質量%とし、前記第二スズ塩の濃度を4価スズイオンの濃度としてB質量%としたときに、B/Aの値が0.010以上1.000以下となるように調製されたことを特徴とする接着層形成液。
An adhesive layer forming liquid for forming an adhesive layer for bonding copper and resin,
An aqueous solution comprising an acid, stannous salt, stannic salt, complexing agent, and stabilizer;
At the time of preparation, when the concentration of the stannous salt was A mass% as the concentration of divalent tin ions and the concentration of the stannic salt was B mass% as the concentration of tetravalent tin ions, the value of B / A Is an adhesive layer forming liquid prepared so that the ratio is 0.010 or more and 1.000 or less.
前記Aは、0.05〜10.00であり、
前記Bは、0.01〜5.00である請求項1に記載の接着層形成液。
Said A is 0.05-10.00,
The adhesive layer forming liquid according to claim 1, wherein B is 0.01 to 5.00.
前記錯化剤は、チオ尿素類及びチオ尿素誘導体から選択される少なくとも1つである請求項1又は2に記載の接着層形成液。   The adhesive layer forming liquid according to claim 1, wherein the complexing agent is at least one selected from thioureas and thiourea derivatives. 前記安定化剤は、グリコール類及びグリコールエステル類から選択される少なくとも1つである請求項1〜3のいずれか1項に記載の接着層形成液。   The adhesive layer forming liquid according to claim 1, wherein the stabilizer is at least one selected from glycols and glycol esters. 銅と樹脂を接着させるための接着層を形成する接着層形成方法であって、
請求項1〜4のいずれか1項に記載の接着層形成液で銅表面を処理する工程を含むことを特徴とする接着層形成方法。
An adhesive layer forming method for forming an adhesive layer for bonding copper and resin,
A method for forming an adhesive layer, comprising a step of treating a copper surface with the adhesive layer forming liquid according to claim 1.
前記銅表面を処理する工程は、前記接着層形成液に前記銅表面を浸漬する工程である請求項5に記載の接着層形成方法。   The adhesive layer forming method according to claim 5, wherein the step of treating the copper surface is a step of immersing the copper surface in the adhesive layer forming liquid. 前記銅表面を処理する工程の後、得られた接着層の表面をスズ剥離液で処理する工程を更に含む請求項5又は6に記載の接着層形成方法。   The method for forming an adhesive layer according to claim 5 or 6, further comprising a step of treating the surface of the obtained adhesive layer with a tin stripper after the step of treating the copper surface. 前記スズ剥離液は、硝酸水溶液である請求項7に記載の接着層形成方法。   The method for forming an adhesive layer according to claim 7, wherein the tin stripping solution is a nitric acid aqueous solution.
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