JP2010110920A - Metal mask for screen printing and method for manufacturing it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an improved metal mask for screen printing capable of thickening the height of the printing of a printing material, securing a required height of printing which is required recently, and obtaining required linearity. <P>SOLUTION: The metal mask includes: first layer metal plating 3 in which a first layer bridge or a mesh 31 is formed on the upper layer being a squeegee face side of a printing pattern opening 2; and second layer metal plating 4 in which a second layer bridge or a mesh 41 thinned out to an interval of ≤1/2 of the first layer bridge or the mesh is formed on the lower layer integrally formed with the first layer metal plating and becoming the side of a face to be printed of the printing pattern opening. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a screen printing metal mask and a method of manufacturing the same.

  Conventionally, for example, for mounting various electronic components, it is possible to perform high-precision pattern printing when applying and forming a printing material made of solder paste, conductor paste, sealing adhesive ribs, etc. on a mounting substrate. Screen printing is adopted. In particular, when high-precision pattern printing is desired, a screen printing plate is used as a plate material for screen printing.

  The screen printing plate is formed by covering a stretchable mesh with a material for preventing the printing material from bleeding, such as an emulsion, and opening only a pattern-shaped opening to be printed. Synthetic fiber meshes such as nylon and tetron and stainless steel meshes are used for the screen printing plate. Among these, stainless steel mesh is mainly used for precision printing. However, when printing with high printing material, the printing material is affected by the mesh diameter to increase the mesh diameter. The linearity of the film was poor, the pattern shape became jagged, and the printing material could not be drawn straight.

JP 2007-307717 A

  In conventional screen printing plates, in order to increase the printing height of the printing material consisting of sealing adhesive ribs, etc., it is necessary to secure the printing height by using a material having a thick wire diameter. However, when a material with a large wire diameter of the ridge is used, there is a problem that a desired printed shape cannot be obtained because printing straightness is poor. In general, printing can be performed with fine lines having a thin wire diameter, but printing has been difficult when the printing height of a printing material such as an adhesive rib is recently required.

  The present invention has been made to solve the above-described problems, and can increase the printing height of the printing material, ensure the desired printing height required in recent years, and obtain the desired linearity. It is related with the metal mask for screen printing improved so that it might be, and its manufacturing method.

  In the metal mask for screen printing according to the present invention, in which a printing pattern opening penetrating from the squeegee surface side to the printing surface side is formed, a bridge or a mesh is formed in multiple layers by metal plating in the printing pattern opening portion. It is a thing.

  In the metal mask for screen printing according to the present invention, in which a printing pattern opening penetrating from the squeegee surface side to the printing surface side is formed, the first layer is formed in the upper layer portion on the squeegee surface side in the printing pattern opening portion. The first layer metal plating formed with the bridge or mesh, and the first layer bridge or mesh formed integrally with the first layer metal plating and on the lower layer portion on the printed surface side of the printed pattern opening. And a second layer metal plating formed with a mesh or a second layer bridge thinned at intervals of 1/2 or less.

  In addition, the print pattern is formed integrally with the first layer metal plating in which the first layer bridge or mesh is formed on the upper layer portion on the squeegee surface side of the print pattern opening and the first layer metal plating. A second-layer metal plating in which a second-layer bridge or mesh thinned at an interval of 1/2 or less of the first-layer bridge or mesh is formed in the lower layer portion on the printed surface side of the opening; It is formed integrally with the second layer of metal plating, and is provided with a third layer of metal plating for forming a belt-like convex portion only in the peripheral portion on the printed surface side of the print pattern opening.

  In addition, the print pattern is formed integrally with the first layer metal plating in which the first layer bridge or mesh is formed on the upper layer portion on the squeegee surface side of the print pattern opening and the first layer metal plating. The lower layer portion on the printing surface side of the opening portion is provided with a first layer bridge or mesh and a second layer metal plating on which a second layer bridge or mesh is formed that is staggered and arranged alternately. Is.

  In addition, the print pattern is formed integrally with the first layer metal plating in which the first layer bridge or mesh is formed on the upper layer portion on the squeegee surface side of the print pattern opening and the first layer metal plating. A second-layer metal plating having a second-layer bridge or mesh formed in a staggered manner in a lower layer portion on the printing surface side of the opening and staggered from the first-layer bridge or mesh; It is formed integrally with the metal plating of the layer, and is provided with a metal plating of the third layer for forming a belt-like convex portion only at the peripheral portion on the printed surface side of the printing pattern opening.

  In addition, the squeegee surface side of the metal plating of the first layer has an introduction opening for introducing the printing material into the printing pattern opening of the first layer as a reception window for the printing material during screen printing. It further comprises a top metal plating.

  In the method for manufacturing a metal mask for screen printing according to the present invention, a step of preparing a conductive base material, a printed pattern opening on the squeegee surface side on the conductive base material, and a first layer on the opening. A step of forming a first resist for providing a bridge or a mesh; and a first layer bridge or a printed pattern opening on the squeegee surface side, excluding a region where the first resist is formed on the conductive base material. Forming a first-layer metal plating on which a mesh is formed; a printed pattern opening on the printed surface side on the first-layer metal plating and the first resist; and a first layer in the opening. A step of forming a second resist for providing a second layer bridge or mesh thinned at a distance of 1/2 or less of the bridge or mesh, and a second resist is formed on the first layer metal plating. Except The step of forming the second layer metal plating in which the second layer bridge or mesh thinned at the interval of 1/2 or less of the first layer bridge or mesh is formed in the printed pattern opening on the printing surface side And removing the first resist and the second resist, and then integrally peeling the first layer metal plating and the second layer metal plating from the conductive base material.

  Also, a step of preparing a conductive base material, and a step of forming a first resist for providing a printed pattern opening on the squeegee surface side and a first layer bridge or mesh on the opening on the conductive base material Then, on the conductive base material, except for the region where the first resist is formed, the first layer metal plating in which the first layer bridge or mesh is formed in the printed pattern opening on the squeegee surface side is formed. A step of forming a conductive film on the printed surface side of the first layer of metal plating and the first resist, and printing on the printed surface side of the first layer of metal plating and the first resist. A step of forming a pattern resist and a second resist for providing a second layer bridge or mesh that is staggered and shifted to the first layer bridge or mesh in the opening, and a first layer metal plating On top, the second resist Except for the formed area, the second layer metal plating in which the second layer bridge or mesh is formed in the printed pattern opening on the printing surface side so as to be shifted from the first layer bridge or mesh. And removing the first resist and the second resist, and then removing the first layer metal plating and the second layer metal plating integrally from the conductive base material. Is.

  Further, a step of forming a third layer of metal plating on the second layer of metal plating and the second resist, excluding a region where the third resist is formed, a first resist, a second resist, and a second resist The method further includes a step of removing the first resist, the second metal plating, and the third metal plating from the conductive base material after removing the three resists. .

  In addition, the squeegee surface side of the metal plating of the first layer has an introduction opening for introducing the printing material into the printing pattern opening of the first layer as a reception window for the printing material during screen printing. The method further includes a step of forming the uppermost metal plating. This step may be performed before the formation of the first-layer resist or after the metal plating is integrally peeled off from the conductive base material.

  According to this invention, at the time of screen printing, the printing material becomes easy to pass by the shearing action when passing through the mesh part by multilayering the bridge or mesh of the printing pattern opening, while the metal mask is printed. Also when peeling from the surface, the shearing action improves the slipping property. As a result, it is possible to increase the printing height of the printing material and to obtain desired linearity.

Embodiment 1 FIG.
FIG. 1 is an enlarged cross-sectional view showing the main structure of a metal mask for screen printing according to Embodiment 1 of the present invention.

The metal mask 1 for screen printing according to the present invention is formed with a printing pattern opening 2 for forming a printing material composed of an adhesive rib for bonding an electronic component protective cover for protecting or sealing the electronic component, for example. ing. The metal mask 1 for screen printing has a multilayer bridge or mesh in the opening so that the printing height of the printing material becomes about 150 μm when screen printing is performed with a total thickness of about 230 μm, for example. Designing the volume of
The first layer (squeegee side) 3 of the screen printing metal mask 1 has, for example, a plate thickness of 100 μm and each width of the first layer bridge or mesh 31 that is intermittently bridged on the upper layer portion of the print pattern opening 2. The first metal plating 3 is formed so as to be 50 μm. As the metal plating 3 of the first layer, Ni or Ni alloy is used. In particular, Ni—Co alloy has the effect of increasing the toughness and preventing the bridge or mesh from being damaged easily by adding Co. Next, the second layer (printed surface side) 4 of the screen printing metal mask 1 is formed on the first layer 3 with a plate thickness of 100 μm, for example. The second-layer bridge or mesh 41 that is intermittently bridged is thinned out by half of the first-layer bridge or mesh 31, and the second-layer bridge or mesh 41 has a width of 50 μm and the first-layer bridge or mesh 41 It is formed by the second layer metal plating 4 so as to overlap every other portion with respect to 31. Ni or Ni alloy is used as the metal plating 4 of the second layer. Further, the third layer (printed surface side) 5 of the screen printing metal mask 1 is formed on the second layer 4 with a plate thickness of, for example, 30 μm, but only the peripheral portion of the printing pattern opening 2. It is formed by the metal plating 5 of the third layer so as to form a strip shape. Here, by forming the belt-like convex portion 5 as the third layer only in the peripheral portion of the print pattern opening portion 2, the space portion 51 is formed inside the belt-like convex portion 5, so that it is desired to touch it. There is an effect that there is no interference with an electronic component or an electronic circuit arranged on a non-mounting substrate or wafer. As the metal plating 5 of the third layer, Ni or Ni alloy is used.

  According to the method of manufacturing the screen printing metal mask 1 of the present invention, a conductive base material (SUS or the like) is prepared, and the printed pattern opening 2 and the upper layer portion of the opening are intermittently laid on the conductive base material. Except for the step of forming the first resist for providing the first layer bridge or mesh 31 to be formed and the region where the first resist is formed on the conductive base material, for example, the plate thickness is 100 μm, and the printed pattern opening 2 Forming a first-layer metal plating 3 having a width of the first-layer bridge or mesh 31 of 50 μm, and a printed pattern opening 2 on the first-layer metal plating 3 and the first resist. And a step of forming a second resist for providing a first layer bridge or mesh 41 thinned out to half of the first layer bridge or mesh 31 in the lower layer portion of the opening, Metal plating Except for the region where the second resist is formed on 3, for example, a plate thickness of 100 μm is formed on the first layer 3, but the two layers are intermittently laid on the lower layer of the print pattern opening 2 The eye bridge or mesh 41 is thinned out to ½ of the first layer bridge or mesh 31, and the second layer bridge or mesh 41 is 50 μm in width and is alternately arranged with respect to the first layer bridge or mesh 31. A step of forming a second layer of metal plating 4 so as to overlap directly therewith, and a strip pattern only on the periphery of the printed pattern opening 2 and the opening on the second layer of metal plating 4 and the second resist. Except for the step of forming the third resist for providing the convex portion 5 and the region where the third resist is formed on the second-layer metal plating 4, the thickness of the second layer 4 is 30 μm, for example. Print pattern opening 2 formed on top A step of forming a third-layer metal plating 5 having a strip shape only in the peripheral portion, and removing the first resist, the second resist, and the third resist together, and then removing the first layer from the conductive base material The method includes a step of integrally peeling the metal plating 3, the second-layer metal plating 4, and the third-layer metal plating 5. Further, the first resist, the second resist, and the third resist may be deleted separately after the metal plating forming process of each layer without being removed together. The number of layers of the bridge or mesh may be a three or more layer structure by changing the thickness of the bridge or mesh layer depending on the height of the printing material and the characteristics of the printing material. Note that these metal masks can be manufactured as a multi-layered metal mask by substantially the same method as the conventional method.

  When a printing material made of a liquid UV resin (adhesive) or the like is applied by screen printing by using the screen printing metal mask 1 of the present invention completed by the above manufacturing method, the printing pattern opening 2 and its one layer are applied. When passing through the mesh portion composed of the eye bridge or mesh 31 and the second layer bridge or mesh 41, the shearing action of the printing material itself can be effectively utilized, and as a result, the printing height of the printing material is required. The height can be secured freely. That is, at the time of screen printing, the printing material easily passes through the print pattern opening 2 and the mesh portion including the first layer bridge or mesh 31 and the second layer bridge or mesh 41, while the metal mask 1 is covered. When peeling from the printing surface, the metal mask 1 can be easily pulled out by the shearing action of the printing material itself. As a result, the printing height of the printing material can be increased and desired linearity can be obtained. Is. Further, by controlling the aperture ratio of the print pattern opening 2, a great effect that the printing height of the printing material can be freely designed is obtained.

  In the first embodiment, the third layer (printed surface side) 5 of the screen printing metal mask 1 is formed, but there must be a problem of interference with electronic components arranged on the mounting substrate. For example, the third-layer metal plating 5 may not be formed. The first-layer bridge or mesh 31 and the second-layer bridge or mesh 41 may have a mesh structure having a bridge or mesh portion. Further, the bridge or mesh in the printed pattern opening 2 has been described as having a two-layer structure, but it may also be a three-layer structure or more. In this case, the number of lower-layer bridges or meshes is arranged so that it is less than half the number of upper layers.

Embodiment 2. FIG.
FIG. 2 is an enlarged cross-sectional view showing a main structure of a screen printing metal mask according to Embodiment 2 of the present invention.

  In the first embodiment, the first layer bridge or mesh 31 laid over the upper layer portion of the printing pattern opening 2 of the first layer (squeegee side) 3 of the screen printing metal mask 1, and the screen printing metal mask 1. 2nd layer (printed surface side) 4 of the second layer bridge or mesh 41 to be laid on the lower layer of the printed pattern opening 2 is directly below the first layer bridge or mesh 31 every other layer. In the second embodiment, as shown in FIG. 2, the first layer 3 of the screen printing metal mask 1 is extended over the upper layer portion of the printing pattern opening 2 as shown in FIG. The first-layer bridge or mesh 32 to be formed and the second-layer bridge or mesh 42 to be laid on the lower layer portion of the print pattern opening 2 of the second layer 4 of the screen printing metal mask 1 are mutually connected. In which are arranged in a zigzag pattern by shifting the difference. Thus, when a printing material such as a liquid UV resin (adhesive) is applied by screen printing, a staggered mesh comprising the print pattern opening 2 and its first layer bridge or mesh 32 and second layer bridge or mesh 42. When passing through the section, the shearing action of the printing material itself can be effectively utilized, and as a result, the printing height of the printing material can be freely ensured to the required height. That is, during screen printing, the printing material easily passes through the printing pattern opening 2 and its staggered bridge or mesh portion, while the printing material itself is removed when the metal mask 1 is peeled off the printing surface. Due to the shearing action, the metal mask 1 can be easily pulled out. As a result, the printing height of the printing material can be increased, and the desired linearity can be obtained. In addition, since the staggered bridge or mesh portion has a large shearing effect, there is an effect that the removal property is improved even in the case of a printing material having a high viscosity and a high thixotropy. Further, by controlling the aperture ratio of the print pattern opening 2, a great effect that the printing height of the printing material can be freely designed is obtained.

In the method of manufacturing the screen printing metal mask 1 according to the second embodiment, the first layer bridge or mesh 32 that is laid over the upper layer portion of the printing pattern opening 2 of the first layer 3 of the screen printing metal mask 1; In order to arrange the second layer bridges or meshes 42 laid on the lower layer of the printed pattern opening 2 of the second layer 4 of the screen printing metal mask 1 in a staggered manner, the first layer The metal plating 3 is formed, and a step of forming a conductive film on the printed surface side of the first resist and the first-layer metal plating 3 is added.
In the second embodiment, the third layer (printed surface side) 5 of the screen printing metal mask 1 is formed. However, there must be a problem of interference with electronic components arranged on the mounting substrate. For example, the third-layer metal plating 5 may not be formed. The first-layer bridge or mesh 31 and the second-layer bridge or mesh 41 may have a mesh structure having a bridge or mesh portion. Further, the bridge or mesh in the printed pattern opening 2 has been described as having a two-layer structure, but it may also be a three-layer structure or more. In this case, the lower-layer bridge or mesh is arranged at a position that is approximately ½ position away from the upper layer.

Embodiment 3 FIG.
FIG. 3 is an enlarged cross-sectional view showing the main structure of a metal mask for screen printing according to Embodiment 3 of the present invention.

  In the first embodiment, the screen printing metal mask 1 having the three-layer structure has been described. However, in the third embodiment, as shown in FIG. 3, the first layer of the screen printing metal mask having the three-layer structure is used. The printing material is introduced into the printing pattern opening 2 of the first layer 3 on the upper side (squeegee side) of the eyes 3 as a reception window for printing materials made of liquid UV resin (adhesive) or the like during screen printing. 4 is a metal mask 1 for screen printing having a four-layer structure in which an uppermost surface metal plating 7 having an opening 6 for introduction is additionally provided. Here, the introduction opening 6 formed in the metal plating 7 of the uppermost surface layer is formed at the same position as the printing pattern opening 2 of the first layer 3. As a result, a printing material such as a liquid UV resin (adhesive) is received in the opening 6 for introducing the metal plating 7 on the surface layer and smoothly introduced into the printing pattern opening 2 in the first layer 3. Therefore, the printing height of the printing material can be ensured.

Embodiment 4 FIG.
FIG. 4 is an enlarged cross-sectional view showing a main structure of a screen printing metal mask according to Embodiment 4 of the present invention.

  In the second embodiment, the screen printing metal mask 1 having the three-layer structure has been described. In the fourth embodiment, as shown in FIG. 4, the first layer of the three-layer structure screen printing metal mask is used. The printing material is introduced into the printing pattern opening 2 of the first layer 3 on the upper side (squeegee side) of the eyes 3 as a reception window for printing materials made of liquid UV resin (adhesive) or the like during screen printing. 4 is a metal mask 1 for screen printing having a four-layer structure in which an uppermost surface layer 7 having an introduction opening 6 is additionally provided. Here, the introduction opening 6 formed in the uppermost surface layer 7 is formed at the same position as the printing pattern opening 2 of the first layer 3. Thereby, a printing material such as a liquid UV resin (adhesive) is received in the introduction opening 6 of the surface layer 7 and smoothly introduced into the printing pattern opening 2 of the first layer 3. Therefore, the printing height of the printing material can be ensured.

It is an expanded sectional view which shows the principal part structure of the metal mask for screen printing in Embodiment 1 of this invention. It is an expanded sectional view which shows the principal part structure of the metal mask for screen printing in Embodiment 2 of this invention. It is an expanded sectional view which shows the principal part structure of the metal mask for screen printing in Embodiment 3 of this invention. It is an expanded sectional view which shows the principal part structure of the metal mask for screen printing in Embodiment 1 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal mask for screen printing 2 Print pattern opening part 3 1st layer metal plating 31 and 32 1st layer bridge or mesh 4 2nd layer metal plating 41 and 42 2nd layer bridge or mesh 5 3rd layer Metal plating (band-like convex part)
51 Space 6 Introducing opening 7 Metal plating of the uppermost surface layer

Claims (13)

In a metal mask for screen printing in which a printing pattern opening penetrating from the squeegee surface side to the printing surface side is formed,
A metal mask for screen printing, wherein bridges or meshes are formed in multiple layers in the printed pattern opening by metal plating. In a metal mask for screen printing in which a printing pattern opening penetrating from the squeegee surface side to the printing surface side is formed,
A first-layer metal plating in which a first-layer bridge or mesh is formed on the upper layer portion on the squeegee surface side of the printed pattern opening;
2 formed integrally with the first layer of metal plating, and thinned at a space of 1/2 or less of the first layer bridge or mesh on the lower layer portion on the printing surface side of the printing pattern opening. A second layer metal plating on which a layer bridge or mesh is formed;
A metal mask for screen printing, characterized by comprising: In a metal mask for screen printing in which a printing pattern opening penetrating from the squeegee surface side to the printing surface side is formed,
A first-layer metal plating in which a first-layer bridge or mesh is formed on the upper layer portion on the squeegee surface side of the printed pattern opening;
2 formed integrally with the first layer of metal plating, and thinned at a space of 1/2 or less of the first layer bridge or mesh on the lower layer portion on the printing surface side of the printing pattern opening. A second layer metal plating on which a layer bridge or mesh is formed;
A third-layer metal plating formed integrally with the second-layer metal plating and forming a band-shaped convex portion only in the peripheral portion on the printed surface side of the print pattern opening;
A metal mask for screen printing, characterized by comprising:   The bridge or mesh in the printed pattern opening of the metal mask has a three-layer structure or more, and the number of bridges or meshes in the lower layer is arranged so that the number of bridges or meshes is ½ or less of the upper layer. The metal mask for screen printing according to claim 2 or 3. In a metal mask for screen printing in which a printing pattern opening penetrating from the squeegee surface side to the printing surface side is formed,
A first-layer metal plating in which a first-layer bridge or mesh is formed on the upper layer portion on the squeegee surface side of the printed pattern opening;
Two layers formed integrally with the first metal plating and arranged in a staggered manner in the lower layer on the printed surface side of the print pattern opening, staggered from the first bridge or mesh. A second layer of metal plating formed with an eye bridge or mesh;
A metal mask for screen printing, characterized by comprising: In a metal mask for screen printing in which a printing pattern opening penetrating from the squeegee surface side to the printing surface side is formed,
A first-layer metal plating in which a first-layer bridge or mesh is formed on the upper layer portion on the squeegee surface side of the printed pattern opening;
Two layers formed integrally with the first metal plating and arranged in a staggered manner in the lower layer on the printed surface side of the print pattern opening, staggered from the first bridge or mesh. A second layer of metal plating formed with an eye bridge or mesh;
A third-layer metal plating formed integrally with the second-layer metal plating and forming a band-shaped convex portion only in the peripheral portion on the printed surface side of the print pattern opening;
A metal mask for screen printing, characterized by comprising:   The bridge or mesh in the printed pattern opening of the metal mask has a three-layer structure or more, and the lower-layer bridge or mesh has a structure that is arranged at a position shifted from the upper layer by a half position. A metal mask for screen printing according to claim 5 or 6.   The uppermost layer having an introduction opening on the squeegee surface side of the first metal plating that serves as a reception window for the printing material during screen printing and introduces the printing material into the first pattern printing pattern opening The metal mask for screen printing according to any one of claims 2 to 7, further comprising: Preparing a conductive base material;
Forming a first resist for providing a printed pattern opening on the squeegee surface side and a first layer bridge or mesh on the opening on the conductive base material;
On the conductive base material, except for the region where the first resist is formed, the first layer metal plating in which the first layer bridge or mesh is formed in the printed pattern opening on the squeegee surface side is formed. Process,
The printed pattern opening on the printing surface side on the first-layer metal plating and the first resist, and the opening is thinned at a distance of 1/2 or less of the first-layer bridge or mesh. Forming a second resist to provide a layer bridge or mesh;
Except for the region where the second resist is formed on the metal plating of the first layer, the print pattern opening on the printing surface side is thinned at an interval of 1/2 or less of the first layer bridge or mesh. Forming a second layer metal plating on which the formed second layer bridge or mesh is formed;
Removing the first resist and the second resist, and then integrally peeling the first layer metal plating and the second layer metal plating from the conductive base material;
A method for producing a metal mask for screen printing, comprising: Preparing a conductive base material;
Forming a first resist for providing a printed pattern opening on the squeegee surface side and a first layer bridge or mesh on the opening on the conductive base material;
On the conductive base material, except for the region where the first resist is formed, the first layer metal plating in which the first layer bridge or mesh is formed in the printed pattern opening on the squeegee surface side is formed. Process,
The printed pattern opening on the printing surface side on the first-layer metal plating and the first resist, and the opening is thinned at a distance of 1/2 or less of the first-layer bridge or mesh. Forming a second resist to provide a layer bridge or mesh;
Except for the region where the second resist is formed on the metal plating of the first layer, the print pattern opening on the printing surface side is thinned at an interval of 1/2 or less of the first layer bridge or mesh. Forming a second layer metal plating on which the formed second layer bridge or mesh is formed;
Forming a printed pattern opening on the printing surface side and a third resist for providing a belt-like convex portion only on the periphery of the opening on the second-layer metal plating and the second resist; ,
Forming a third-layer metal plating on the second-layer metal plating, excluding a region where a third resist is formed;
After the first resist, the second resist, and the third resist are removed, the first-layer metal plating, the second-layer metal plating, and the third-layer metal plating are integrated from the conductive base material. A step of peeling,
A method for producing a metal mask for screen printing, comprising: Preparing a conductive base material;
Forming a first resist for providing a printed pattern opening on the squeegee surface side and a first layer bridge or mesh on the opening on the conductive base material;
On the conductive base material, except for the region where the first resist is formed, the first layer metal plating in which the first layer bridge or mesh is formed in the printed pattern opening on the squeegee surface side is formed. Process,
Forming a conductive coating on the printed surface side of the first layer metal plating and the first resist;
On the first layer of metal plating and the first resist, a printed pattern opening on the printing surface side and two layers arranged in a staggered manner in the opening alternately staggered from the first layer bridge or mesh Forming a second resist to provide an eye bridge or mesh;
Two layers disposed on the first metal plating except for a region where a second resist is formed, and shifted from the first layer bridge or mesh in the printed pattern opening on the printing surface side. Forming a second layer of metal plating formed with eye bridges or meshes;
Removing the first resist and the second resist, and then integrally peeling the first layer metal plating and the second layer metal plating from the conductive base material;
A method for producing a metal mask for screen printing, comprising: Preparing a conductive base material;
Forming a first resist for providing a printed pattern opening on the squeegee surface side and a first layer bridge or mesh on the opening on the conductive base material;
On the conductive base material, except for the region where the first resist is formed, the first layer metal plating in which the first layer bridge or mesh is formed in the printed pattern opening on the squeegee surface side is formed. Process,
Forming a conductive coating on the printed surface side of the first layer metal plating and the first resist;
On the first layer of metal plating and the first resist, a printed pattern opening on the printing surface side and two layers arranged in a staggered manner in the opening alternately staggered from the first layer bridge or mesh Forming a second resist to provide an eye bridge or mesh;
Two layers disposed on the first metal plating except for a region where a second resist is formed, and shifted from the first layer bridge or mesh in the printed pattern opening on the printing surface side. Forming a second layer of metal plating formed with eye bridges or meshes;
Forming a printed pattern opening on the printing surface side and a third resist for providing a belt-like convex portion only on the periphery of the opening on the second-layer metal plating and the second resist; ,
Forming a third layer of metal plating on the second layer of metal plating, excluding a region where a third resist is formed;
After the first resist, the second resist, and the third resist are removed, the first-layer metal plating, the second-layer metal plating, and the third-layer metal plating are integrated from the conductive base material. A step of peeling
A method for producing a metal mask for screen printing, comprising:   The uppermost layer having an introduction opening on the squeegee surface side of the first metal plating that serves as a reception window for the printing material during screen printing and introduces the printing material into the first pattern printing pattern opening The method for producing a metal mask for screen printing according to any one of claims 9 to 12, further comprising a step of forming a metal plating.

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