JP2010109118A5 - - Google Patents

Download PDF

Info

Publication number
JP2010109118A5
JP2010109118A5 JP2008279146A JP2008279146A JP2010109118A5 JP 2010109118 A5 JP2010109118 A5 JP 2010109118A5 JP 2008279146 A JP2008279146 A JP 2008279146A JP 2008279146 A JP2008279146 A JP 2008279146A JP 2010109118 A5 JP2010109118 A5 JP 2010109118A5
Authority
JP
Japan
Prior art keywords
substrate
processing apparatus
processing liquid
supplies
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008279146A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010109118A (ja
JP5373367B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008279146A priority Critical patent/JP5373367B2/ja
Priority claimed from JP2008279146A external-priority patent/JP5373367B2/ja
Publication of JP2010109118A publication Critical patent/JP2010109118A/ja
Publication of JP2010109118A5 publication Critical patent/JP2010109118A5/ja
Application granted granted Critical
Publication of JP5373367B2 publication Critical patent/JP5373367B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2008279146A 2008-10-30 2008-10-30 基板処理装置および基板処理方法 Active JP5373367B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008279146A JP5373367B2 (ja) 2008-10-30 2008-10-30 基板処理装置および基板処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008279146A JP5373367B2 (ja) 2008-10-30 2008-10-30 基板処理装置および基板処理方法

Publications (3)

Publication Number Publication Date
JP2010109118A JP2010109118A (ja) 2010-05-13
JP2010109118A5 true JP2010109118A5 (cg-RX-API-DMAC7.html) 2011-12-15
JP5373367B2 JP5373367B2 (ja) 2013-12-18

Family

ID=42298277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008279146A Active JP5373367B2 (ja) 2008-10-30 2008-10-30 基板処理装置および基板処理方法

Country Status (1)

Country Link
JP (1) JP5373367B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5775339B2 (ja) * 2011-03-22 2015-09-09 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156776U (cg-RX-API-DMAC7.html) * 1988-04-20 1989-10-27
JPH02309638A (ja) * 1989-05-24 1990-12-25 Fujitsu Ltd ウエハーエッチング装置
JPH11354617A (ja) * 1998-06-10 1999-12-24 Sumiere Sez Kk 基板処理装置および基板処理方法
TW399743U (en) * 1999-09-15 2000-07-21 Ind Tech Res Inst Wafer back protection device
JP3953265B2 (ja) * 1999-10-06 2007-08-08 株式会社荏原製作所 基板洗浄方法及びその装置
JP3778815B2 (ja) * 2001-06-21 2006-05-24 大日本スクリーン製造株式会社 基板洗浄装置
JP2007227764A (ja) * 2006-02-24 2007-09-06 Dainippon Screen Mfg Co Ltd 基板表面処理装置、基板表面処理方法および基板処理装置
JP2008218456A (ja) * 2007-02-28 2008-09-18 Mitsumi Electric Co Ltd 洗浄方法

Similar Documents

Publication Publication Date Title
JP2018043005A5 (cg-RX-API-DMAC7.html)
JP2010516567A5 (cg-RX-API-DMAC7.html)
BR112015029003A2 (pt) dispositivo de suporte de bocal tendo uma cabeça carregando bocal
JP2011222960A5 (cg-RX-API-DMAC7.html)
JP2008198974A5 (cg-RX-API-DMAC7.html)
JP2015192141A5 (cg-RX-API-DMAC7.html)
JP2014147990A5 (cg-RX-API-DMAC7.html)
ATE533378T1 (de) Behälter und auftragelement
EP2656772A3 (en) Dishwasher
JP2015517214A5 (cg-RX-API-DMAC7.html)
WO2014012883A3 (en) Drum cleaner
MX2017008491A (es) Aparato de tobera de pulverizacion para aplicaciones de secado por pulverizacion.
KR20180084640A (ko) 기판 처리 장치, 기판 처리 방법 및 컴퓨터 판독 가능한 기록 매체
ATE482035T1 (de) Vorrichtung zum behandeln von werkstücken oder dergleichen
WO2009144073A3 (de) Reinigungsvorrichtung und verfahren zur reinigung eines werkstücks
JP2014525824A (ja) スチール素材等の材料又は構造物を洗浄するための装置
WO2008151743A3 (de) Flächenreinigungskopf
JP2010109118A5 (cg-RX-API-DMAC7.html)
JP2015034731A5 (cg-RX-API-DMAC7.html)
DK1870113T3 (da) Desinfektionsindretning omfattende spraymiddel
CN103958127A (zh) 用于分配低温流体射流的包括稳定室的装置
WO2017088002A3 (de) Einrichtung zur reinigung von gegenständen
JP2005211767A5 (cg-RX-API-DMAC7.html)
JP2015174013A (ja) 回転ノズル
JP2018192382A5 (cg-RX-API-DMAC7.html)