JP2010083290A - Carriage set and braking device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce burden and risk of a worker, regarding a carriage set and a braking device. <P>SOLUTION: This carriage set 10 includes a plurality of carriages 11 to 13 provided with top plates 18 on which loading objects 14 are put. Heights H1 to H3 from a floor surface to the top plates 18 are made different in each of the carriages 11 to 13. As a result, the plurality of carriages 11 to 13 can be stored in a nested state with each other while the loading objects 14 are placed on the top plates 18. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a carriage set and a braking device.

  In a semiconductor device mass production factory, processes such as film formation are performed using a semiconductor manufacturing apparatus such as a sputtering apparatus. Such a semiconductor manufacturing apparatus is provided with a heavy component such as a sputter target, and an operation of replacing the heavy component is performed after a certain period of use.

  Heavy parts are received at a mass production factory window, stocked in a clean room storage area, and transported from the storage area to a point of use where semiconductor manufacturing equipment is located during replacement work.

At this time, the subsequent heavy parts are stacked one after another on the previously received heavy parts in the storage area. Therefore, when the lower heavy parts are to be taken out, the target heavy parts are output. It is necessary to evacuate heavy parts in order from the top until they come. Such work is a heavy labor for the worker and causes a delay in carrying out the heavy parts to the use point. Furthermore, when evacuating the stocked heavy parts in order from the top, there is a possibility that human damage may occur due to work mistakes, which will cause danger to the worker.
JP 2001-240209 A JP 2001-240056 A Japanese Patent Laid-Open No. 10-273055 Utility Model Registration No. 3002526

  The purpose is to reduce the burden and danger on the operator regarding the bogie set and the braking device.

  According to one aspect of the present invention, by having a plurality of carriages provided with a top plate on which a load is placed, the height from the floor surface to the top board is set to a different height in each of the plurality of carriages. There is provided a cart set in which a plurality of carts can be nested and accommodated in a state where the load is placed on the top plate.

  According to another aspect of the present invention, a drooping piece that hangs vertically, a link member that is connected to the dripping piece and is displaced according to the inclination of the drooping piece, and a movement in the dropping direction by the link member And the flexible sheet is released from the link member and falls when the inclination of the hanging piece exceeds a predetermined value, and the flexible sheet is applied to the wheel of the carriage. A braking device is provided that brakes the carriage with a conductive sheet rolled in.

  According to the disclosed cart set, a plurality of carts can be accommodated in a nested manner with the load mounted on the top board, so there is no need to stack and store multiple loads, and the load can be moved from the storage location. Becomes easy.

  Further, according to the disclosed braking device, the link member is displaced by utilizing the inclination of the hanging piece due to gravity, and the flexible sheet is dropped by the displacement to be caught in the carriage, so that electric power is not required. Therefore, handling becomes easy.

(1) First Embodiment In this embodiment, a cart set suitable for handling heavy parts in a semiconductor device mass production factory will be described.

  FIG. 1 is a perspective view of a cart set according to the first embodiment.

  The carriage set 10 includes first to third carriages 11 to 13. Each carriage 11 to 13 has a top plate 18 made of a metal plate such as a stainless steel plate or an aluminum plate, and a load 14 is placed on the top plate 18.

  In particular, by providing a plurality of holes 18 a in the top plate 18, when using each carriage 11 to 13 without placing the load 14, it is possible to distribute the downflow in the clean room to the opening 18 a, It is possible to prevent the downflow from being disturbed by the carts 11 to 13.

  Note that the hole 18a does not need to be formed when disturbance of downflow does not become a problem.

  Although the load 14 is not particularly limited, it is preferable to use each of the carriages 11 to 13 to move consumable parts of a semiconductor manufacturing apparatus such as a sputtering target. In that case, the consumable part may be placed on each of the carts 11 to 13 alone, or may be placed in a dedicated case.

  Each carriage 11 to 13 has a frame 15 to which the top plate 18 is fixed, and a turnable caster 16 is provided at the lower end of the frame 15. The material of the frame 15 is not particularly limited, but in this embodiment, a metal square such as an aluminum square or a stainless square is used.

  In order to reduce vibrations from the running surface, it is preferable to use an air-filled caster 16 or a caster provided with a vibration damping cushion between the caster 16 and the frame 15. The former is useful when the load 14 is relatively heavy, and the latter is useful when it is light.

  A handle 17 is fixed to the upper surface of the top plate 18 to be gripped when the operator moves the carts 11 to 13. The handle is made of, for example, a stainless round bar or an aluminum round bar.

  According to such a cart set 10, the load 14 is placed on the top plate 18 by setting the heights H 1 to H 3 from the floor surface to the top plate 18 to be different in each of the carts 11 to 13. In this state, the carts 11 to 13 can be accommodated in a nested manner.

  At this time, the distance D between the top plates 18 of the carts 11 to 13 adjacent in the vertical direction is set wider than the height of the load 14 so that the upper surface of the load 14 does not hit the cart above it.

  The distance D is not particularly limited, but is set to 15 cm to 50 cm, for example, 20 cm in this embodiment.

  Moreover, when the load 14 mounted on each trolley | bogie 11-13 is the same thing, in the arbitrary two of each trolley | bogie 11-13, it is that the space | interval D of adjacent top plates 18 is made the same. preferable.

  FIG. 2 is a schematic diagram for explaining a method of using the cart set 10.

  In this example, the load 14 is received from the package reception desk of the semiconductor factory, and the load 14 is placed on the third carriage 13 and moved to the storage location A in the clean room.

  When arriving at the storage location A, the third carriage 13 is accommodated together with the other carriages 11 and 12 in a nested manner. Thereby, space saving of the cart set 10 in the accommodated state is achieved.

  Moreover, in this state, the load 14 on the first to third carriages 11 to 13 is placed on each of the carriages 11 to 13 independently. It is only necessary to move the trolley that is installed, and there is no need to move other trolleys.

  For example, when there is a request for the load 14 on the second carriage 12 from the use point, only the second carriage 12 may be moved to the use point as shown in the figure. At this time, since it is not necessary to move the 1st and 3rd trolley | bogies 11 and 13, the significant burden reduction of the operator at the time of the said operation | work can be achieved. In particular, when the load 14 is a heavy component such as a sputtering target, it is possible to obtain such a benefit of reducing the burden.

  As described above, according to the cart set 10 according to the present embodiment, since the carts 11 to 13 are accommodated in a nested manner with the load 14 placed thereon, it is necessary to stack and store a plurality of loads 14. There is no.

  Therefore, the load 14 can be easily moved from the storage location, so that the burden on the operator can be reduced and the load 14 can be provided to the use point in a just-in-time manner. .

  In particular, in a mass production factory for semiconductor devices that handle a semiconductor substrate having a diameter of 300 mm, the weight of a consumable part of a semiconductor manufacturing apparatus such as a sputter target reaches as much as 50 kg. If this cart set 10 is used to move such heavy parts, it is possible to prevent danger to the worker when handling heavy parts, and also to ensure safety in the clean room.

(2) Second Embodiment In the first embodiment, the handle 17 is fixed to the top plate 18, but in this embodiment, the handle 17 is detachable.

  FIG. 3 is an enlarged perspective view of a main part of the cart set according to the present embodiment. In FIG. 3, the same elements as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and the description thereof is omitted below.

  As shown in FIG. 3, in the present embodiment, sleeves 20 are fixed to the four corners of the top plate 18 of each carriage 11 to 13. A fitting projection 17a is provided at both ends of the handle 17, and the handle 17 is attached to and detached from the carriages 11 to 13 by inserting or lifting the fitting projection 17a into the sleeve 20. Be free.

  FIG. 4 is a schematic diagram for explaining a method of using the cart set 10.

  In this example, the load 14 is received from the package reception window of the semiconductor factory and is loaded on the second carriage 12. Then, while the operator pushes the handle 17 fitted to one edge of the top plate 18 of the second carriage 12, the second carriage 12 is moved to the storage place A in the clean room, and the second carriage 12 is moved. Are accommodated together with other carts 11 and 13 in a nested manner.

  Thereafter, when there is a request for replacement of parts from a use point such as an installation location of the semiconductor manufacturing apparatus, the handle 17 is removed from one edge of the top board 18 of the second carriage 12 and the other edge of the top board 18 is removed. Put the handle 17 into the box. In this state, the operator pulls the handle 17 and puts the load 14 on the second carriage 12 and moves it to the use point.

  When the second carriage 12 moves from the reception window to the use point, the second carriage 12 passes under the first carriage 11. Therefore, it is preferable to open the opposite side surfaces 15a and 15b of the frame 15 of the first carriage 11 so as to allow the second carriage 12 to pass so that the carriages 11 and 12 do not interfere with each other when passing. .

  As described above, according to the cart set 10 according to the present embodiment, the handle 17 is made detachable. Therefore, when moving the load 14 to the use point, the carriage 17 is moved by moving the carriage 17 by reattaching the handle 17 on one edge of the top plate 18 to the opposite edge. be able to. Thereby, compared with 1st Embodiment, it becomes possible to increase the freedom degree of the movement at the time of pulling out each trolley | bogie 11-13 accommodated in the nested form.

(3) Third Embodiment FIG. 5 is a perspective view of a cart set 10 according to the present embodiment. In FIG. 5, the same elements as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and the description thereof is omitted below.

  As FIG. 5 shows, in the trolley | bogie set 10 which concerns on this embodiment, the connection member 23 which connects each handle 17 of the trolley | bogies 11-13 accommodated in the nested form is provided.

  When connecting, it is only necessary to fit the recess 23a of the connecting member 23 to each handle 17, and a complicated mechanism including a movable part for connection is not necessary.

  The material of the connecting member 23 is not particularly limited. The connecting member 23 can be made of any metal material such as stainless steel or aluminum.

  According to such a cart set 10, when the operator holds the connecting member 23, the plurality of carts 11 to 13 can be integrally moved in a nested state. It is possible to reduce the burden on the operator as compared with the case of moving to the position.

(4) 4th Embodiment FIG. 6: is a side view of the raising / lowering cart 30 with which the cart set 10 which concerns on this embodiment is provided.

  The elevating carriage 30 includes a base 32 and casters 31 provided on the base 32. Among these, on the base 32, two-stage X-shaped links 38 and 39 that can be moved up and down by a hydraulic pump 36 are provided, and the top plate 34 moves up and down by the movement of the X-shaped links 38 and 39.

  Further, the carriage 32 is provided with a handle 33 for an operator to hold when moving, and a foot pedal 37 for sending oil to the hydraulic pump 36.

  FIG. 7 is a schematic diagram for explaining a method of using the cart set 10 according to the present embodiment.

  In this example, as a result of using the first to third carts 11 to 13 individually as in the first embodiment and lowering the mounted items to use points, the loaded vehicles are not loaded and the cart 11 has finished its role. ~ 13 are housed in use points in a nested manner.

  Such carts 11 to 13 are preferably returned to the storage location A in order to organize the inside of the clean room.

  Therefore, in the present embodiment, the lifting cart 30 is placed under the third cart 13 at the bottom, and the first cart 11 is lifted from below by the lifting cart 30 so that the carts 11 to 13 are overlapped. Move to storage location A at once.

  According to this, since each trolley | bogie 11-13 can be returned to the storage location A only by one movement, compared with the case where each trolley | bogie 11-13 is moved separately, a burden of an operator is significantly increased. It becomes possible to reduce.

(5) Fifth Embodiment FIG. 8 is a side view of a carriage according to the present embodiment. In FIG. 8, the same elements as those described in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description thereof is omitted below.

  In the present embodiment, the first carriage 11 is provided with a braking device 50 for preventing the first carriage 11 from moving freely when the floor surface is inclined.

  The braking device 50 has a hanging piece 52 and an angle 53 made of stainless steel square bars. Among these, a pair of magnets 51 are fixed to the lower end of the drooping piece 52 and the frame 15 opposed thereto so that the magnetic poles are attracted to each other.

  When either the hanging piece 52 or the frame 15 has magnetism, one of the magnets 51 of the pair may be omitted, and the hanging piece 52 or the frame 15 itself may be attracted to the magnet 15.

  On the other hand, the angle 53 is fixed to the frame 15 and supports the hanging piece 52 in a swingable manner with the shaft 53a as a fulcrum.

  As shown in the dotted circle, a lateral through hole 15c is provided at the upper end of the frame 15, and the link member 54 is inserted into the through hole 15c. The link member 54 is made of, for example, a stainless steel plate, and one end of the link member 54 is rotatably connected to the upper end of the hanging piece 52 on a shaft 54a.

  An opening 54 b is formed at the other end of the link member 54. The brake control rod 55 is inserted into the opening 54b. However, when the floor surface is not inclined as shown in the drawing, the cut 55a on the side surface of the brake control rod 55 is fitted into the opening 54b, and the brake control rod 55 is inserted. The movement in the dropping direction is locked by the link member 54.

  The material of the braking control rod 55 is not particularly limited, but a stainless round rod is used in the present embodiment.

  A guide piece 56 having a hole (not shown) through which the brake control rod 55 is inserted is provided on the side surface of the frame 15, and the lateral movement of the brake control rod 55 is restricted by the guide piece 56. The

  The lower end of the braking control rod 55 is located in the vicinity of the caster 16, and the flexible sheet 58 is fixed to the lower end.

  The flexible sheet 58 is preferably a resin sheet having a large frictional resistance with the floor surface, and in the present embodiment, a resin sheet made of a fluororesin is used.

  FIG. 9 is an enlarged cross-sectional view of a main part for explaining the operation of the braking device 50.

  When the floor surface is not inclined, the brake control rod 55 is locked by the opening 54b of the link member 54 as described above.

  On the other hand, when the floor surface is inclined, the hanging piece 52 is inclined with respect to the frame 15 as shown in FIG. 9, and when the inclination becomes a predetermined value or more, the hanging piece 52 is attracted to the frame 15 side by the magnetic force between the pair of magnets 51. The inclination of the hanging piece 52 is fixed.

  At this time, on the upper side of the shaft 53 a, the link member 54 is displaced in the lateral direction as indicated by an arrow X in accordance with the inclination of the hanging piece 52. When the displacement exceeds a predetermined amount, the notch 55a of the braking control rod 55 is disengaged from the opening 54b, and the braking control rod 55 is released from the link member 54.

  As a result, the braking control rod 55 and the flexible sheet 58 fixed thereto fall as indicated by an arrow Y, and the flexible sheet 58 is caught from the front in the traveling direction on the caster 16 that has started to move due to the inclination of the floor surface. The first carriage 11 is braked by the frictional force between the flexible sheet 58 and the floor surface.

  Such a braking function can be exhibited not only when each of the carriages 11 to 13 is used alone, but also when the carriages 11 to 13 are housed in a nested manner.

  In this example, the braking device 50 is provided for one caster 16 of the first carriage 11, but by providing the braking device 50 for the two front and rear casters 16, it seems to move either forward or backward. In this case, the first carriage 11 may be braked.

  Further, in the above description, the braking device 50 is provided on the first carriage 11, but the braking device 50 may be provided on any of the first to third carriages 11 to 13.

  Further, when the carts 11 to 13 are accommodated in a nested manner as in the first embodiment, the carts 11 to 13 are mechanically interfered by using the height of the handle 17 (see FIG. 1). You may make it make it. If it does in this way, by providing the braking device 50 only in any one trolley | bogie, a trolley | bogie interferes and the whole trolley | bogie set 10 can be braked.

  According to the present embodiment described above, even if each carriage 11-13 starts to move freely due to the inclination of the floor surface, the flexible sheet 58 is caught in the caster 16 at the initial stage of movement, so each carriage 11-11 The amount of 13 movements can be minimized.

  As a result, when the floor surface is inclined or when the floor surface is shaken due to an earthquake, the stationary carts 11 to 13 move freely and damage other equipment in the clean room. It is possible to prevent the article 14 from being damaged.

  Furthermore, the braking device 50 utilizes the inclination of the hanging piece 52 due to gravity and does not require any electrical power, so that it is not necessary to manage the power supply and is easy to handle.

  Moreover, since the magnet 51 is provided on the hanging piece 52 and the frame 15, the inclination of the hanging piece 52 can be forcibly fixed by the magnetic force, and the braking control rod 55 is reliably released from the link member 54 and dropped. Is possible.

  By the way, the braking device 50 is effective for braking the carts 11 to 13 that are about to move from a stationary state, but the braking device 50 is also used when an operator pushes the carts 11 to 13 on an inclined floor surface. May work unnecessarily.

  FIG. 10 is an enlarged cross-sectional view of a stopper 60 for disabling the braking device 50 in such a case.

  The stopper 60 is inserted between the pair of magnets 51, and engages with each magnet 51 by the locking groove 60a. Thereby, since the space | interval of the hanging piece 52 and the flame | frame 15 is maintained constant, even if the link member 54 (refer FIG. 9) does not displace and the floor surface inclines, the braking device 50 does not operate | move. Thereby, when the operator is pushing each cart 11-13 on the inclined floor, it can prevent that each cart 11-13 is braked by braking device 50, and a cart can be moved smoothly. .

  The material of the stopper 60 is not particularly limited, but is preferably martensitic stainless steel. Since stainless steel is a magnetic material, the pair of magnets 51 can be reliably fixed by a magnetic force.

  As mentioned above, although each embodiment was described in detail, the use of the cart set of an indication is not limited to the mass production process of a semiconductor device. For example, the disclosed cart set can be used in a mass production process of electronic components other than semiconductor devices or in a factory handling heavy items.

  The following additional notes are disclosed for each embodiment described above.

(Supplementary note 1) Having a plurality of carriages with a top plate on which a load is placed,
By making the height from the floor surface to the top plate different in each of the plurality of carts, the plurality of carts can be nested and accommodated in a state where the load is placed on the top plate. A cart set characterized by that.

(Appendix 2) A handle provided on each of the plurality of carts,
The cart set according to appendix 1, further comprising a coupling member that couples the handles of the plurality of carts and allows the carts to move integrally.

  (Supplementary note 3) The cart set according to supplementary note 1, further comprising a handle provided detachably on each of the plurality of carts.

(Appendix 4) At least one of the plurality of carts is provided with a frame to which the top plate is fixed,
The cart set according to appendix 3, wherein the opposite side surfaces of the frame are opened to a size that allows the other cart to pass therethrough.

  (Additional remark 5) It further has the raising / lowering trolley | bogie which piles up and moves the said multiple trolley | bogie by lifting the lowest trolley | bogie from the bottom among these trolley | bogies accommodated in the nested form. The cart set in any one of -4.

(Appendix 6) At least one of the carts is
A hanging piece hanging vertically,
A link member connected to the hanging piece and displaced in accordance with the inclination of the hanging piece;
A flexible sheet in which the movement in the dropping direction is locked by the link member,
When the inclination of the drooping piece exceeds a predetermined value, the flexible sheet is released from the link member and dropped, and the flexible sheet is caught in a wheel of the carriage to brake the carriage. The trolley set according to any one of supplementary notes 1 to 5, characterized by:

(Appendix 7) At least one of the carts is
A frame on which the top plate is fixed and provided with lateral through holes;
An angle fixed to the frame;
A notch is formed on the side surface, and a brake control rod having the flexible sheet fixed to the lower end;
The link member is inserted into the through hole of the frame and has an opening into which the cut of the brake control rod is fitted.
The hanging piece is supported so as to be swingable around an axis provided at the angle,
The hanging piece above the shaft and the link member are connected to each other so as to be rotatable.
When the link member is laterally displaced according to the inclination of the hanging piece, and the inclination of the hanging piece becomes a predetermined value or more, the notch of the braking control rod is disengaged from the opening of the link member, The cart set according to appendix 6, wherein the brake control rod falls.

(Supplementary Note 8) The carriage has a frame to which the top plate is fixed,
The cart set according to appendix 6, wherein at least one of the hanging piece and the frame is provided with a magnet that attracts the hanging piece to the frame side by a magnetic force when the hanging piece is inclined.

  (Additional remark 9) The cart set of Additional remark 8 characterized by inserting the stopper which keeps these space | intervals constant between the said drooping piece and the said flame | frame.

  (Supplementary note 10) The cart set according to any one of supplementary notes 1 to 9, wherein a difference in height between the top plates is the same in any two of the carts.

(Supplementary note 11) A hanging piece hanging vertically,
A link member connected to the hanging piece and displaced in accordance with the inclination of the hanging piece;
A flexible sheet in which the movement in the dropping direction is locked by the link member,
When the inclination of the drooping piece becomes a predetermined value or more, the flexible sheet is released from the link member and dropped, and the flexible sheet is caught in a wheel of the carriage to brake the carriage. Brake device characterized.

FIG. 1 is a perspective view of a cart set according to the first embodiment. Drawing 2 is a mimetic diagram for explaining the usage method of the cart set concerning a 1st embodiment. FIG. 3 is an enlarged perspective view of a main part of the carriage set according to the second embodiment. FIG. 4 is a schematic diagram for explaining a method of using the carriage set according to the second embodiment. FIG. 5 is a perspective view of a cart set according to the third embodiment. FIG. 6 is a side view of the elevating carriage 30 provided in the carriage set according to the fourth embodiment. FIG. 7 is a schematic diagram for explaining a method of using the carriage set according to the fourth embodiment. FIG. 8 is a side view of the carriage according to the fifth embodiment. FIG. 9 is an enlarged cross-sectional view of a main part for explaining the operation of the braking apparatus according to the fifth embodiment. FIG. 10 is an enlarged cross-sectional view of a stopper for disabling the brake device according to the fifth embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Cart set, 11-13 ... 1st-3rd cart, 14 ... Mounted thing, 15 ... Frame, 16, 31 ... Caster, 17, 33 ... Handle, 17a ... Fitting protrusion, 18, 34 ... Top plate 18a ... hole, 20 ... sleeve, 23 ... connecting member, 23a ... concave, 30 ... lifting carriage, 32 ... base, 36 ... hydraulic pump, 38,39 ... X-link, 50 ... brake device, 51 ... magnet, 52 ... drooping piece, 53 ... angle, 53a, 54a ... shaft, 54 ... link member, 54b ... opening, 55 ... brake control rod, 55a ... notch, 56 ... guide piece, 58 ... flexible sheet, 60 ... stopper.

Claims (5)

It has a plurality of carts with a top plate on which the load can be placed,
By making the height from the floor surface to the top plate different in each of the plurality of carriages, the plurality of carriages can be accommodated in a nested manner in a state where the load is placed on the top board. A cart set characterized by that. A handle provided on each of the plurality of carts;
The cart set according to claim 1, further comprising: a coupling member that couples the handles of the plurality of carts and allows the carts to move integrally.   2. The elevator further comprises a lifting carriage that moves the plurality of carriages in a stacked manner by lifting a bottom carriage from the bottom of the plurality of carriages accommodated in a nested manner. The cart set according to 2. At least one of the carts is
A hanging piece hanging vertically,
A link member connected to the hanging piece and displaced in accordance with the inclination of the hanging piece;
A flexible sheet in which the movement in the dropping direction is locked by the link member,
When the inclination of the drooping piece exceeds a predetermined value, the flexible sheet is released from the link member and dropped, and the flexible sheet is caught in a wheel of the carriage to brake the carriage. The cart set according to any one of claims 1 to 3. A hanging piece hanging vertically,
A link member connected to the hanging piece and displaced in accordance with the inclination of the hanging piece;
A flexible sheet in which the movement in the dropping direction is locked by the link member,
The flexible sheet is released from the link member and dropped when the inclination of the hanging piece becomes a predetermined value or more, and the flexible sheet is caught in a wheel of the carriage to brake the carriage. Brake device characterized.

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