JP2010082524A - Recycling method of cleaning liquid of vacuum washing apparatus - Google Patents

Recycling method of cleaning liquid of vacuum washing apparatus Download PDF

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JP2010082524A
JP2010082524A JP2008252910A JP2008252910A JP2010082524A JP 2010082524 A JP2010082524 A JP 2010082524A JP 2008252910 A JP2008252910 A JP 2008252910A JP 2008252910 A JP2008252910 A JP 2008252910A JP 2010082524 A JP2010082524 A JP 2010082524A
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cleaning
vacuum
cleaning liquid
distillation apparatus
liquid
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Takeo Sakashita
武雄 坂下
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Dowa Thermotech Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a recycling method of a cleaning liquid, a method capable of removing low boiling or high boiling components that are close to a boiling point range of a hydrocarbon based cleaning liquid. <P>SOLUTION: The cleaning liquid after washing is collected and, using a vacuum distillation apparatus 5, factionated into cleaning liquid components and impurity components of different boiling points to recycle the cleaning liquid components. Mist or gaseous components, which are unfactionated by the vacuum distillation apparatus 5 and sucked into a vacuum pump 8 for the distillation apparatus for exhausting therefrom, are liquefied by a condenser 11 and an after-cooler 12 which are installed along the exhaustion passage of the vacuum pump 8 for the distillation apparatus 5, and then discarded. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、炭化水素系洗浄液を用いた真空洗浄装置における洗浄液の再生方法に関するものである。   The present invention relates to a cleaning liquid regeneration method in a vacuum cleaning apparatus using a hydrocarbon-based cleaning liquid.

金属の熱処理の前後やプレス工程後の洗浄工程において、従来の有機溶剤系洗浄液に代わって、近年、炭化水素系洗浄液を用いた真空洗浄装置が用いられている。このような真空洗浄装置は、例えば特許文献1に開示されている。   In recent years, before and after heat treatment of metals and after the pressing process, vacuum cleaning apparatuses using hydrocarbon-based cleaning liquids have been used in place of conventional organic solvent-based cleaning liquids. Such a vacuum cleaning apparatus is disclosed in Patent Document 1, for example.

従来、真空洗浄装置の炭化水素系洗浄液は、図4に示す方法によって再生されている。すなわち、真空洗浄装置2内で被洗浄物を洗浄した後の洗浄液は、一旦汚染液タンク4に回収され、真空蒸留装置5へ送られる。真空蒸留装置5において、炭化水素系洗浄液の成分が蒸留され、再生液タンク6から洗油タンク3へ送られて、洗浄液として再利用される。真空蒸留装置5内で蒸留されない高沸点の成分は、廃液タンク7へ送られて廃棄される。さらに、真空蒸留装置5で分留されずに、真空蒸留装置5を真空排気する際に蒸留装置用真空ポンプ8側へ流れたミスト状またはガス状の成分は、蒸留装置用真空ポンプ8の排気通路の入口側に設けられたコンデンサ11(凝縮器)、蒸留装置用真空ポンプ8の排気通路の出口側に設けられたアフタークーラ12により液化され、それらの成分も、洗油タンク3へ戻されて再利用される。   Conventionally, the hydrocarbon-based cleaning liquid of the vacuum cleaning apparatus is regenerated by the method shown in FIG. That is, the cleaning liquid after cleaning the object to be cleaned in the vacuum cleaning apparatus 2 is once collected in the contaminated liquid tank 4 and sent to the vacuum distillation apparatus 5. In the vacuum distillation apparatus 5, the components of the hydrocarbon-based cleaning liquid are distilled and sent from the regenerated liquid tank 6 to the oil cleaning tank 3 and reused as the cleaning liquid. Components having a high boiling point that are not distilled in the vacuum distillation apparatus 5 are sent to the waste liquid tank 7 and discarded. Further, when the vacuum distillation apparatus 5 is evacuated without being fractionated by the vacuum distillation apparatus 5, the mist or gaseous component that has flowed to the distillation apparatus vacuum pump 8 side is exhausted from the distillation apparatus vacuum pump 8. The condenser 11 (condenser) provided on the inlet side of the passage and the aftercooler 12 provided on the outlet side of the exhaust passage of the vacuum pump 8 for distillation apparatus are liquefied, and these components are also returned to the oil washing tank 3. And reused.

特開2006−231273号公報JP 2006-231273 A

ところが、炭化水素系洗浄液は単一成分ではないため、成分ごとに、沸点が異なっている。そして、真空洗浄装置で洗浄される被洗浄材には、水分や炭化水素系洗浄液の沸点範囲に近い低沸点成分や高沸点成分が付着している。しかしながら、上記の真空蒸留装置5では、炭化水素系洗浄液と沸点が近い成分を分留することが困難であり、このような成分が蒸留装置用真空ポンプ8に流れて、そのまま洗浄液として再利用していた。そのため、洗浄液に不純物が溜まり、洗浄性が低下するうえ、洗浄後の乾燥不良を生じ、油煙を発生させることがあった。それを防ぐためには、洗浄液を定期的に入れ替えなければならなかった。   However, since the hydrocarbon-based cleaning liquid is not a single component, the boiling point differs for each component. And the low boiling point component and high boiling point component close | similar to the boiling point range of a water | moisture content or a hydrocarbon type washing | cleaning liquid have adhered to the to-be-cleaned material wash | cleaned with a vacuum cleaning apparatus. However, in the vacuum distillation apparatus 5 described above, it is difficult to fractionate components having a boiling point close to that of the hydrocarbon-based cleaning liquid, and such components flow to the distillation apparatus vacuum pump 8 and are reused as cleaning liquid. It was. As a result, impurities accumulate in the cleaning liquid, resulting in poor cleaning performance, poor drying after cleaning, and generation of oily smoke. To prevent this, the cleaning solution had to be replaced periodically.

本発明の目的は、炭化水素系洗浄液の沸点範囲に近い低沸点成分や高沸点成分を除去できる洗浄液の再生方法を提供することにある。   An object of the present invention is to provide a cleaning liquid regeneration method that can remove low-boiling components and high-boiling components close to the boiling range of hydrocarbon-based cleaning liquids.

上記問題を解決するため、本発明は、真空洗浄装置で用いられる洗浄液の再生方法であって、洗浄後の洗浄液を回収して、真空蒸留装置により、沸点の異なる洗浄液成分と不純物成分とを分留して前記洗浄液成分を再生し、前記真空蒸留装置で分留されずに、前記真空蒸留装置から排気する蒸留装置用真空ポンプに吸引された成分を、前記真空ポンプの排気通路に沿って設けられた凝縮器および冷却器により液化させて廃棄することを特徴とする真空洗浄装置の洗浄液の再生方法を提供する。   In order to solve the above problems, the present invention is a method for regenerating a cleaning liquid used in a vacuum cleaning apparatus, which collects the cleaning liquid after cleaning and separates cleaning liquid components and impurity components having different boiling points with a vacuum distillation apparatus. The components of the cleaning liquid are regenerated and the components sucked into the vacuum pump for the distillation apparatus that is exhausted from the vacuum distillation apparatus without being fractionated by the vacuum distillation apparatus are provided along the exhaust passage of the vacuum pump. Provided is a method for regenerating a cleaning liquid in a vacuum cleaning apparatus, wherein the cleaning liquid is liquefied and discarded by a condenser and a cooler.

真空蒸留装置で分留されない成分には不純物が多く含まれるため、これを廃棄することにより、再生された洗浄液の汚れを低減し、安定した洗浄工程を継続できるようになる。   Since the components that are not fractionated by the vacuum distillation apparatus contain a large amount of impurities, discarding the components reduces the contamination of the regenerated cleaning liquid and allows a stable cleaning process to be continued.

また、前記真空洗浄装置から排気する洗浄装置用真空ポンプに吸引された成分を、前記洗浄装置用真空ポンプの排気通路に沿って設けられた凝縮器および冷却器により液化させて廃棄することが好ましい。   Further, it is preferable that the components sucked into the vacuum pump for the cleaning device exhausted from the vacuum cleaning device are liquefied and discarded by the condenser and the cooler provided along the exhaust passage of the vacuum pump for the cleaning device. .

本発明によれば、炭化水素系洗浄液の沸点範囲に近い低沸点成分および高沸点成分を除去して、洗浄液を再生できるので、洗浄液に混入する不純物を低減し、劣化を抑制して、洗浄性が低下することなく洗浄サイクルを保持することができる。   According to the present invention, the low-boiling component and the high-boiling component close to the boiling range of the hydrocarbon-based cleaning liquid can be removed and the cleaning liquid can be regenerated. The cleaning cycle can be maintained without lowering.

以下、本発明の実施の形態を、図を参照して説明する。なお、本明細書および図面において、実質的に同一の機能構成を有する要素においては、同一の符号を付する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in this specification and drawing, the same code | symbol is attached | subjected in the element which has substantially the same function structure.

図1は、本発明にかかる真空洗浄装置の洗浄液の再生方法の概略を示すブロック図である。   FIG. 1 is a block diagram showing an outline of a method for regenerating a cleaning liquid in a vacuum cleaning apparatus according to the present invention.

真空洗浄装置2内で、被洗浄材に対する洗浄工程が行われる。被洗浄材は図示しない入口扉から真空洗浄装置2へ搬入され、入口扉を閉めた後、洗浄工程が開始される。本発明で用いられる洗浄液は、ナフテン系またはパラフィン系等の炭化水素系洗浄液である。被洗浄材の洗浄を40〜50℃で行うと、減圧乾燥時に、洗浄液の蒸発潜熱で被洗浄材の表面温度が低下し、残留する洗浄液を十分に乾燥させるために必要な熱量が不足する。そのため、洗浄液の温度を例えば90℃以上にして、被洗浄材を洗浄と同時に加熱する。一方、金属の熱処理の前後の洗浄工程において用いられる洗浄液の引火点は80℃程度である。したがって、洗浄液が引火しないように、真空洗浄装置2内を常に真空に保つ必要があり、洗浄工程の開始前に、洗浄装置用真空ポンプ9により、真空洗浄装置2内を真空排気する。   In the vacuum cleaning device 2, a cleaning process for the material to be cleaned is performed. The material to be cleaned is carried into the vacuum cleaning apparatus 2 from an entrance door (not shown), and after the entrance door is closed, the cleaning process is started. The cleaning liquid used in the present invention is a naphthenic or paraffinic hydrocarbon cleaning liquid. When the material to be cleaned is cleaned at 40 to 50 ° C., the surface temperature of the material to be cleaned decreases due to the latent heat of vaporization of the cleaning liquid during drying under reduced pressure, and the amount of heat necessary to sufficiently dry the remaining cleaning liquid is insufficient. Therefore, the temperature of the cleaning liquid is set to 90 ° C. or higher, for example, and the material to be cleaned is heated simultaneously with the cleaning. On the other hand, the flash point of the cleaning liquid used in the cleaning process before and after the heat treatment of the metal is about 80 ° C. Therefore, it is necessary to always keep the inside of the vacuum cleaning device 2 in vacuum so that the cleaning liquid does not ignite, and the vacuum cleaning device 2 is evacuated by the cleaning device vacuum pump 9 before the start of the cleaning process.

洗浄工程は、先ず、洗油タンク3の洗浄液を被洗浄材に噴射してシャワー粗洗浄を行う。粗洗浄後の洗浄液は、汚染液タンク4へ送られる。次に、粗洗浄で洗浄できなかった被洗浄材の付着成分を洗浄するために、洗油タンク3から供給された洗浄液によって浸漬洗浄を行い、浸漬洗浄後の洗浄液は、洗油タンク3へ戻される。さらに、真空蒸留装置5で蒸留された再生液が再生液タンク6から供給されてシャワー仕上げ洗浄を行い、仕上げ洗浄後の洗浄液は、洗油タンク3へ戻される。その後、真空洗浄装置2内を予め設定された圧力になるまで真空排気し、洗浄液が付着した被洗浄材の真空乾燥を行う。   In the cleaning process, first, the cleaning liquid in the oil cleaning tank 3 is sprayed onto the material to be cleaned to perform the shower rough cleaning. The cleaning liquid after the rough cleaning is sent to the contaminated liquid tank 4. Next, in order to clean the adhered components of the material to be cleaned that could not be cleaned by rough cleaning, immersion cleaning is performed with the cleaning liquid supplied from the oil cleaning tank 3, and the cleaning liquid after immersion cleaning is returned to the oil cleaning tank 3. It is. Further, the regenerated liquid distilled in the vacuum distillation apparatus 5 is supplied from the regenerated liquid tank 6 to perform shower finishing cleaning, and the cleaning liquid after the final cleaning is returned to the oil cleaning tank 3. Thereafter, the inside of the vacuum cleaning apparatus 2 is evacuated until a preset pressure is reached, and the material to be cleaned to which the cleaning liquid adheres is vacuum dried.

真空排気の際に真空洗浄装置2から吸引された油煙は、ミストトラップ13により捕集される。ミストトラップ13内で冷却され、液化された成分は、被洗浄材の真空乾燥後に真空洗浄装置2内を大気圧まで復圧させた後、汚染液タンク4へ流される。なお、ミストトラップ13と汚染液タンク4との圧力が異なるため、ミストトラップ13と汚染液タンク4の間に、図1に示すように、クッションタンク19を設けるのが好ましい。ミストトラップ13からコンデンサ14に送られるミスト状またはガス状の成分の処理については後述する。   The oil smoke sucked from the vacuum cleaning device 2 during the vacuum evacuation is collected by the mist trap 13. The components cooled and liquefied in the mist trap 13 are returned to the atmospheric pressure after the vacuum cleaning apparatus 2 is returned to the atmospheric pressure after the material to be cleaned is vacuum dried, and then flowed to the contaminated liquid tank 4. Since the pressures of the mist trap 13 and the contaminated liquid tank 4 are different, it is preferable to provide a cushion tank 19 between the mist trap 13 and the contaminated liquid tank 4 as shown in FIG. The processing of the mist or gaseous component sent from the mist trap 13 to the capacitor 14 will be described later.

その後、真空洗浄装置2の図示しない出口扉を開けて被洗浄材を取り出し、出口扉を閉めて、一連の洗浄工程が終了する。   Thereafter, the outlet door (not shown) of the vacuum cleaning device 2 is opened to take out the material to be cleaned, the outlet door is closed, and a series of cleaning steps is completed.

以下、真空蒸留装置5による洗浄液の処理について説明する。   Hereinafter, the processing of the cleaning liquid by the vacuum distillation apparatus 5 will be described.

汚染液タンク4から真空蒸留装置5へ、洗浄液が送られる。真空蒸留装置5は、図2に示すように、容器21下部の外周にヒータ22が設けられ、容器21内の上部には、冷却器23が設けられている。汚染液タンク4から配管24を介して容器21に到達した洗浄液は、容器21下部に液体25として溜まり、ヒータ22で加熱される。加熱により蒸発した成分は、冷却器23で冷却されて液化され、受け皿26に溜まった後、配管27から図1の再生液タンク6へ送られる。そして、再生液タンク6から洗油タンク3へ戻って、新たな洗浄液として再利用される。あるいは、直接、仕上げ洗浄用の洗浄液として真空洗浄装置2内に噴射される。なお、容器21内のヒータ22部分と冷却器23部分との境界部分に、分留をより効果的にするためにデミスター28が設けられる。   The cleaning liquid is sent from the contaminated liquid tank 4 to the vacuum distillation apparatus 5. As shown in FIG. 2, the vacuum distillation apparatus 5 is provided with a heater 22 on the outer periphery of the lower part of the container 21, and a cooler 23 is provided on the upper part of the container 21. The cleaning liquid that has reached the container 21 from the contaminated liquid tank 4 via the pipe 24 is accumulated as a liquid 25 in the lower part of the container 21 and is heated by the heater 22. The component evaporated by heating is cooled and liquefied by the cooler 23, collected in the receiving tray 26, and then sent from the pipe 27 to the regenerated liquid tank 6 of FIG. And it returns to the oil washing tank 3 from the regeneration liquid tank 6, and is reused as a new washing | cleaning liquid. Alternatively, it is directly injected into the vacuum cleaning device 2 as a cleaning liquid for finishing cleaning. A demister 28 is provided at the boundary between the heater 22 portion and the cooler 23 portion in the container 21 in order to make the fractionation more effective.

真空蒸留装置5内は、蒸留装置用真空ポンプ8により、真空排気される。図2の容器21内で蒸発した液体のうち、冷却により液化されて再生液タンク6に回収されなかった成分は、ミスト状またはガス状になって、蒸留装置用真空ポンプ8側へ排出される。ミスト状またはガス状になる成分の多くは、炭化水素系洗浄液の沸点範囲に近い不純物である。   The inside of the vacuum distillation apparatus 5 is evacuated by a distillation apparatus vacuum pump 8. Of the liquid evaporated in the container 21 of FIG. 2, the components that have been liquefied by cooling and not recovered in the regenerated liquid tank 6 become mist or gas and are discharged to the vacuum pump 8 side of the distillation apparatus. . Many of the components that become mist or gas are impurities close to the boiling range of the hydrocarbon-based cleaning liquid.

容器21下部に収容された液体25は、所定の温度まで上昇すると、排出管29から廃液タンクに送られる。   When the liquid 25 stored in the lower portion of the container 21 rises to a predetermined temperature, it is sent from the discharge pipe 29 to the waste liquid tank.

本発明で用いられる炭化水素系洗浄液は、IPAやアセトン等の単一成分の有機系洗浄液とは異なり、通常、単一成分ではなく、成分ごとに沸点が異なる。図3は、炭化水素系洗浄液および洗浄後の洗浄液から検出される不純物である低沸点成分と高沸点成分の沸点を示し、炭化水素系洗浄液の沸点範囲を太線で示している。防錆油等の低沸点成分は、炭化水素系洗浄液の沸点範囲の低い部分と一部が重なり、高沸点成分の金属加工油は、炭化水素系洗浄液の沸点範囲の高い部分と一部が重なっている。   The hydrocarbon-based cleaning liquid used in the present invention is different from the single-component organic cleaning liquid such as IPA or acetone, and usually has a boiling point for each component, not a single component. FIG. 3 shows the boiling points of the low-boiling component and the high-boiling component, which are impurities detected from the hydrocarbon-based cleaning liquid and the cleaning liquid after cleaning, and the boiling range of the hydrocarbon-based cleaning liquid is indicated by a bold line. Low boiling point components such as rust preventive oil partially overlap with the low boiling range part of the hydrocarbon cleaning liquid, and high boiling point metal processing oil overlaps with the high boiling point part of the hydrocarbon cleaning liquid. ing.

真空蒸留装置5では、液体25の温度を例えば図3の一点鎖線で示す温度になるようにヒータ22を制御することにより、高沸点成分はほとんど気化しないため、残留した液体25の成分はほとんどが高沸点成分、すなわち不純物となる。ヒータ22により長時間加熱されると、容器21内に溜まった液体25が煮詰まった状態で温度が上昇してくる。液体25の温度が、図3に示す金属加工油の沸点範囲まで上昇すると、洗浄液として再生するのに適しない高沸点成分が蒸発してしまうため、液温が所定温度以上になったときには、廃液タンク7へ送るようにする。   In the vacuum distillation apparatus 5, the high boiling point component is hardly vaporized by controlling the heater 22 so that the temperature of the liquid 25 becomes, for example, the temperature indicated by the one-dot chain line in FIG. 3. It becomes a high boiling point component, that is, an impurity. When heated by the heater 22 for a long time, the temperature rises in a state where the liquid 25 accumulated in the container 21 is boiled. When the temperature of the liquid 25 rises to the boiling range of the metalworking oil shown in FIG. 3, high boiling point components that are not suitable for regeneration as a cleaning liquid will evaporate. Therefore, when the liquid temperature exceeds a predetermined temperature, the waste liquid Send to tank 7.

蒸留装置用真空ポンプ8の排気通路の入口側には、コンデンサ(凝縮器)11が設けられている。真空蒸留装置5から排出されたミスト状またはガス状の洗浄液の成分のうち、主に低沸点成分がコンデンサ11による凝縮で液化され、廃液タンク7へ送られる。コンデンサ11によって液化しない成分は、蒸留装置用真空ポンプ8を通過する。   A condenser (condenser) 11 is provided on the inlet side of the exhaust passage of the distillation apparatus vacuum pump 8. Of the components of the mist or gaseous cleaning liquid discharged from the vacuum distillation apparatus 5, mainly low boiling point components are liquefied by condensation by the condenser 11 and sent to the waste liquid tank 7. Components that are not liquefied by the condenser 11 pass through the vacuum pump 8 for distillation apparatus.

蒸留装置用真空ポンプ8の出口側には、アフタークーラ12が設けられている。ここで、蒸留装置用真空ポンプ8を通過した高沸点成分が冷却されて液化し、廃液タンク7へ送られる。液化する洗浄液の成分を含まなくなった空気は、大気中に放出される。真空蒸留装置5によって分留できずに蒸留装置用真空ポンプ8側へ流れる成分には不純物が多く、従来は回収して洗浄液として再利用していたが、これを廃棄することにより、洗油タンク3へ戻して再生される洗浄液に含まれる不純物を低減させることができる。これにより、効率的に洗浄を行い、一定の洗浄サイクルを保つことができる。   An aftercooler 12 is provided on the outlet side of the vacuum pump 8 for the distillation apparatus. Here, the high boiling point component that has passed through the distillation apparatus vacuum pump 8 is cooled and liquefied, and is sent to the waste liquid tank 7. The air that does not contain the component of the cleaning liquid to be liquefied is released into the atmosphere. The components that cannot be fractionated by the vacuum distillation apparatus 5 and flow to the vacuum pump 8 side of the distillation apparatus have many impurities, and they have been collected and reused as cleaning liquids in the past. The impurities contained in the cleaning liquid regenerated by returning to 3 can be reduced. Thereby, it can wash | clean efficiently and can maintain a fixed washing | cleaning cycle.

汚染液タンク4の液がなくなると、洗油タンク3内の洗浄液を真空蒸留装置5へ送り、上記と同様の工程により洗浄液の処理を行う。これにより、浸漬洗浄時に洗浄液に混入した不純物等を廃棄するとともに蒸留した洗浄液を再利用し、洗油タンク3内の洗浄油を清浄に保つことができる。   When the liquid in the contaminated liquid tank 4 runs out, the cleaning liquid in the oil cleaning tank 3 is sent to the vacuum distillation apparatus 5 and the cleaning liquid is processed in the same process as described above. Thereby, the impurities mixed in the cleaning liquid during the immersion cleaning can be discarded and the distilled cleaning liquid can be reused to keep the cleaning oil in the oil cleaning tank 3 clean.

従来、真空蒸留装置5から排出されるミスト状またはガス状の成分は、真空蒸留装置5により回収される成分とほぼ等しいものと考えられており、洗油タンク3に戻して再利用されていた。しかしながら、本発明者は、洗油タンク3の洗浄液の劣化について調査および考察を行った結果、真空蒸留装置5で回収される成分と排出される成分とは異なり、排出される成分に不純物が多いことを突き止め、本発明に至った。真空蒸留装置5で回収される成分と排出される成分とが異なる原因として、凝固潜熱の違いが影響していることが考えられる。この違いにより、不純物が真空蒸留装置5で回収できずに排出され、これを再利用した従来の方法では、洗浄液の寿命が短かった。本発明によれば、洗浄液の寿命が、従来例に比べて数倍に延びることが確認された。さらに、コンデンサ11とアフタークーラ12で除去される成分が異なる原因も、凝固潜熱の違いであると考えられる。したがって、コンデンサ11、アフタークーラ12で回収された液は、いずれも廃棄することが必要である。   Conventionally, the mist-like or gaseous component discharged from the vacuum distillation apparatus 5 is considered to be almost equal to the component recovered by the vacuum distillation apparatus 5, and has been returned to the oil washing tank 3 and reused. . However, as a result of investigating and considering the deterioration of the cleaning liquid in the oil cleaning tank 3, the present inventor has many impurities in the discharged component, unlike the component recovered by the vacuum distillation apparatus 5 and the discharged component. As a result, the present invention has been achieved. As a cause of the difference between the component recovered by the vacuum distillation apparatus 5 and the component discharged, it is considered that the difference in latent heat of solidification has an influence. Due to this difference, impurities are discharged without being recovered by the vacuum distillation apparatus 5, and in the conventional method in which this is reused, the life of the cleaning liquid is short. According to the present invention, it has been confirmed that the life of the cleaning liquid extends several times as compared with the conventional example. Furthermore, it is thought that the cause of the difference in the components removed by the capacitor 11 and the aftercooler 12 is also the difference in solidification latent heat. Therefore, it is necessary to discard both the liquid collected by the condenser 11 and the aftercooler 12.

さらに、真空洗浄装置2の真空排気を行う洗浄装置用真空ポンプ9にも、同様に、排気通路の入口側にコンデンサ14、出口側にアフタークーラ15が設けられている。したがって、ミストトラップ13を通過した成分のうち、主に低沸点成分がコンデンサ14によって液化され、廃液タンク7へ送られる。コンデンサ14によって液化しない成分は、洗浄装置用真空ポンプ9を通過し、さらに、主に高沸点成分がアフタークーラ15により冷却されて液化し、廃液タンク7へ送られる。液化する洗浄液の成分を含まなくなった空気は、大気中に放出される。   Further, the cleaning device vacuum pump 9 for performing vacuum exhaust of the vacuum cleaning device 2 is similarly provided with a condenser 14 on the inlet side of the exhaust passage and an after cooler 15 on the outlet side. Therefore, among the components that have passed through the mist trap 13, mainly low boiling point components are liquefied by the condenser 14 and sent to the waste liquid tank 7. Components that are not liquefied by the condenser 14 pass through the vacuum pump 9 for the cleaning device, and further, high-boiling components are cooled and liquefied mainly by the aftercooler 15 and sent to the waste liquid tank 7. The air that does not contain the component of the cleaning liquid to be liquefied is released into the atmosphere.

以上、本発明の好適な実施形態について説明したが、本発明はかかる例に限定されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において、各種の変更例または修正例に想到しうることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to this example. It is obvious for those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims. It is understood that it belongs to.

本発明は、洗浄液と沸点の異なる不純物を分留して、洗浄液を再生する方法に適用できる。   The present invention can be applied to a method of regenerating a cleaning liquid by fractionating impurities having a boiling point different from that of the cleaning liquid.

本発明にかかる洗浄液の再生方法を実施する装置の概略を示すブロック図。The block diagram which shows the outline of the apparatus which enforces the reproduction | regeneration method of the washing | cleaning liquid concerning this invention. 真空蒸留装置の概略を示す縦断面図。The longitudinal cross-sectional view which shows the outline of a vacuum distillation apparatus. 洗浄液と不純物の沸点を示すグラフ。The graph which shows the boiling point of a washing | cleaning liquid and an impurity. 従来の洗浄液の再生方法を実施する装置の概略を示すブロック図。The block diagram which shows the outline of the apparatus which enforces the reproduction | regenerating method of the conventional washing | cleaning liquid.

符号の説明Explanation of symbols

2 真空洗浄装置
3 洗油タンク
4 汚染液タンク
5 真空蒸留装置
6 再生液タンク
7 廃液タンク
8 蒸留装置用真空ポンプ
9 洗浄装置用真空ポンプ
11、14 コンデンサ
12、15 アフタークーラ
13 ミストトラップ
19 クッションタンク
21 容器
22 ヒータ
23 冷却器
24、27 配管
25 液体
26 受け皿
28 デミスター
29 排出管
2 Vacuum cleaning device 3 Oil washing tank 4 Contaminated liquid tank 5 Vacuum distillation device 6 Recycled liquid tank 7 Waste liquid tank 8 Vacuum pump for distillation device 9 Vacuum pump for cleaning device 11, 14 Capacitor 12, 15 After cooler 13 Mist trap 19 Cushion tank 21 Container 22 Heater 23 Cooler 24, 27 Piping 25 Liquid 26 Receptacle 28 Demister 29 Discharge pipe

Claims (2)

真空洗浄装置で用いられる洗浄液の再生方法であって、
洗浄後の洗浄液を回収して、真空蒸留装置により、沸点の異なる洗浄液成分と不純物成分とを分留して前記洗浄液成分を再生し、
前記真空蒸留装置で分留されずに、前記真空蒸留装置から排気する蒸留装置用真空ポンプに吸引された成分を、前記真空ポンプの排気通路に沿って設けられた凝縮器および冷却器により液化させて廃棄することを特徴とする、真空洗浄装置の洗浄液の再生方法。
A method for regenerating a cleaning liquid used in a vacuum cleaning apparatus,
The washing liquid after washing is collected, and the washing liquid component having different boiling points and the impurity component are fractionated by a vacuum distillation apparatus to regenerate the washing liquid component,
The components sucked into the vacuum pump for distillation apparatus exhausted from the vacuum distillation apparatus without being fractionated by the vacuum distillation apparatus are liquefied by a condenser and a cooler provided along the exhaust passage of the vacuum pump. A method for regenerating a cleaning liquid of a vacuum cleaning apparatus, characterized by:
前記真空洗浄装置から排気する洗浄装置用真空ポンプに吸引された成分を、前記洗浄装置用真空ポンプの排気通路に沿って設けられた凝縮器および冷却器により液化させて廃棄することを特徴とする、請求項1に記載の真空洗浄装置の洗浄液の再生方法。   The component sucked into the vacuum pump for cleaning device exhausted from the vacuum cleaning device is liquefied by a condenser and a cooler provided along the exhaust passage of the vacuum pump for cleaning device and discarded. A method for regenerating a cleaning liquid in a vacuum cleaning apparatus according to claim 1.
JP2008252910A 2008-09-30 2008-09-30 Recycling method of cleaning liquid of vacuum washing apparatus Withdrawn JP2010082524A (en)

Priority Applications (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013161644A1 (en) * 2012-04-25 2013-10-31 株式会社Ihi Vacuum cleaning device
CN113600541A (en) * 2021-08-19 2021-11-05 富兰克科技(深圳)股份有限公司 Low-emission environment-friendly single-station intelligent water-oil universal cleaning machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013161644A1 (en) * 2012-04-25 2013-10-31 株式会社Ihi Vacuum cleaning device
JP2013226513A (en) * 2012-04-25 2013-11-07 Ihi Corp Vacuum cleaning device
CN104245162A (en) * 2012-04-25 2014-12-24 株式会社Ihi Vacuum cleaning device
US9636716B2 (en) 2012-04-25 2017-05-02 Ihi Corporation Vacuum cleaning device
CN113600541A (en) * 2021-08-19 2021-11-05 富兰克科技(深圳)股份有限公司 Low-emission environment-friendly single-station intelligent water-oil universal cleaning machine

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