JP2010079144A - Apparatus for manufacturing liquid crystal display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stabilize alignment of liquid crystal molecules by preventing liquid crystal from absorbing ultraviolet light to generate heat at a high temperature, and to enhance manufacturing efficiency of a liquid crystal display. <P>SOLUTION: An apparatus for manufacturing a liquid crystal display includes: a stage 1, which has a concave portion 16 wherein a cooling medium brought into contact with one surface of a substrate for liquid crystal display to cool the substrate is stored, formed at a center thereof and which sucks a part near a peripheral edge of one surface of the substrate for the liquid crystal display to a top surface thereof to hold the substrate; a plurality of wires 45, which are stretched on the side of an opening of the concave portion 16 and support the one surface of the substrate for liquid crystal display held on the stage 1; probers 2, which are disposed in the vicinity of at least two adjacent end parts of the stage 1 and are provided with a plurality of terminals connected to a plurality of electrodes of the substrate for liquid crystal display held on the stage 1 to supply power; and a light source device which is disposed above the stage 1 and irradiates the substrate for liquid crystal display held on the stage 1 with ultraviolet light. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an apparatus for manufacturing a liquid crystal display device in which liquid crystal molecules are aligned in a predetermined direction by irradiating ultraviolet rays in a state where an electric field is applied to a liquid crystal display substrate in which liquid crystals are sealed. Specifically, the liquid crystal absorbs ultraviolet rays. The present invention relates to an apparatus for manufacturing a liquid crystal display device that suppresses heat generation to a high temperature and stabilizes the alignment of liquid crystal molecules, and can improve the manufacturing efficiency of the liquid crystal display device.

  A conventional manufacturing apparatus of this type of liquid crystal display device has a liquid crystal display panel in which a liquid crystal material mixed with liquid crystal and a monomer is sealed between a pair of substrates placed in an ultraviolet irradiation device, and a voltage application device and a substrate are placed between the substrates. A liquid crystal display panel is irradiated with ultraviolet rays from a high-pressure mercury lamp of an ultraviolet irradiation device in a state where liquid crystal molecules are inclined by applying a voltage, and the above monomers are polymerized and polymerized, thereby defining the alignment direction of the liquid crystal molecules. (For example, refer to Patent Document 1).

Such a liquid crystal display device manufacturing apparatus can align liquid crystal molecules in a non-contact manner by controlling the alignment film by rubbing the alignment film, thereby suppressing the occurrence of defects. It has the feature that it can do.
JP 2003-228050 A

  However, in such a conventional apparatus for manufacturing a liquid crystal display device, the liquid crystal sometimes absorbs ultraviolet rays and generates heat at 80 ° C. or more, and the liquid crystal loses the switching function of transmission and blocking of light and an appropriate image is obtained. There was a risk of a problem that the display could not be performed.

  The problem of the heat generation of the liquid crystal can be dealt with by irradiating the ultraviolet rays at a constant time interval in a time-sharing manner. In this case, however, there is a problem that the manufacturing efficiency of the liquid crystal display device is deteriorated.

  In addition, to deal with the problem of heat generation of the liquid crystal, it is conceivable to support the liquid crystal display substrate with a plurality of pins, for example, to cool the substrate by blowing cold air. In this case, the liquid crystal display substrate is pinned. In this case, the liquid crystal around the pin partly moves due to the pin pressure, and the alignment state around the pin or the distribution of the polymer changes.

  Therefore, the present invention addresses such problems, suppresses the liquid crystal from absorbing ultraviolet rays and generating heat to a high temperature, thereby stabilizing the alignment of the liquid crystal molecules and improving the manufacturing efficiency of the liquid crystal display device. An object of the present invention is to provide an apparatus for manufacturing a liquid crystal display device.

  In order to achieve the above object, a plurality of pixels are formed in a matrix between a pair of substrates, the liquid crystal is sealed, and a plurality of electrodes for driving the pixels are formed on at least two adjacent edges. An apparatus for manufacturing a liquid crystal display device, in which the liquid crystal display substrate is irradiated with ultraviolet rays while the electrodes of the liquid crystal display substrate are energized and an electric field is applied to the pixels, and the liquid crystal molecules are aligned in a predetermined direction. A recess that stores a cooling medium that contacts and cools the one surface of the liquid crystal display substrate at the center, and that adsorbs and holds the peripheral portion of the one surface of the liquid crystal display substrate on the upper surface. A plurality of wires that are stretched on the opening side of the recessed portion and that support the one surface of the liquid crystal display substrate held on the stage, and are disposed in the vicinity of at least two adjacent edges of the stage. And A prober provided with a plurality of terminals that are connected to the plurality of electrodes of the liquid crystal display substrate held on the stage and energized, and an ultraviolet ray is disposed on the liquid crystal display substrate held on the stage and held on the stage A light source device that irradiates the light source.

  With such a configuration, the vicinity of the peripheral edge of one surface of the liquid crystal display substrate in which a plurality of pixels are formed in a matrix between a pair of substrates and the liquid crystal is sealed is adsorbed on the upper surface of the stage having a concave portion formed in the center. And supporting one surface of the liquid crystal display substrate held on the stage by a plurality of wires stretched on the opening side of the recessed portion, storing the cooling medium in the recessed portion, and using this cooling medium for liquid crystal display A plurality of electrodes formed on at least two adjacent edges of a liquid crystal display substrate with a plurality of prober terminals disposed in the vicinity of at least two adjacent edges of the stage cooled in contact with one surface of the substrate The liquid crystal display substrate is irradiated with ultraviolet rays by a light source device disposed above the stage with an electric field applied to each pixel, and the liquid crystal molecules are aligned in a predetermined direction.

  On the bottom surface of the recessed portion of the stage, there was provided an ejection port for ejecting the cooling medium and spraying it onto one surface of the liquid crystal display substrate held by suction on the stage. As a result, the cooling medium is ejected from the ejection port provided on the bottom surface of the recessed portion of the stage and sprayed onto one surface of the liquid crystal display substrate held by suction on the stage.

  Furthermore, the cooling medium is water cooled to a predetermined temperature. Thus, one surface of the liquid crystal display substrate is cooled with water cooled to a predetermined temperature.

  And it is provided with at least one beam part which cross | intersects the said some wire, and supports the said some wire from the downward direction. As a result, the plurality of wires are supported from below by at least one beam portion that crosses the plurality of wires.

  According to the liquid crystal display device manufacturing apparatus of the first aspect, the liquid crystal display substrate can be cooled by the cooling medium, and the liquid crystal can efficiently suppress the absorption of ultraviolet rays and the generation of heat to a high temperature. Accordingly, the alignment of the liquid crystal molecules can be stabilized, and a liquid crystal display device with high display quality can be stably manufactured. In addition, since it is not necessary to perform ultraviolet irradiation in a time-sharing manner, the manufacturing efficiency of the liquid crystal display device can be improved. Furthermore, since the liquid crystal display substrate that is attracted and held on the stage is supported by the wire from below, the deflection of the liquid crystal display substrate can be suppressed. In addition, since the liquid crystal display substrate is not received by the pins, the liquid crystal around the pins is partially moved by the pin pressure, which may change the alignment state or polymer distribution around the pins. There is no. Therefore, the alignment of liquid crystal molecules can be further stabilized.

  According to the second aspect of the present invention, it is possible to prevent the generation of an air layer at the contact interface between the liquid crystal display substrate and the cooling medium, thereby improving the cooling efficiency of the liquid crystal display substrate.

  Furthermore, according to the invention which concerns on Claim 3, the water cooled to predetermined temperature can be used as a cooling medium, and it is safe and hygienic, and handling of a cooling medium is easy.

  And according to the invention which concerns on Claim 4, the bending of a wire can be suppressed and the bending of the board | substrate for liquid crystal displays can be suppressed further. Therefore, the alignment of the liquid crystal molecules can be further stabilized. In this case, since the wire supports the liquid crystal display substrate, the contact between the liquid crystal display substrate and the wire is a line contact, and the cooling medium can be brought into substantially uniform contact with one surface of the substrate. Therefore, one surface of the liquid crystal display substrate can be cooled substantially uniformly, and the occurrence of uneven alignment of the liquid crystal can be suppressed.

  Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. 1 is a front view showing an embodiment of an apparatus for manufacturing a liquid crystal display device according to the present invention, FIG. 2 is a sectional view taken along line OO in FIG. 1, FIG. 3 is a partial sectional plan view of FIG. 1 is a right side view of FIG. In this liquid crystal display manufacturing apparatus, a plurality of pixels are formed in a matrix between a pair of substrates, and ultraviolet rays are applied to the liquid crystal display substrate while an electric field is applied to each pixel of the liquid crystal display substrate in which the liquid crystal is sealed. This is for irradiating and orienting liquid crystal molecules in a predetermined direction, and comprises a stage 1, a prober 2, a light source device 3, a conveying means 4, an alignment camera 5, and an air knife 6.

  The liquid crystal display substrate 7 used here has a COA (Color filter On Array) configuration in which a color filter is continuously formed on the top of the TFT. As shown in FIG. The display area 9 is provided in a matrix, and the size of the counter electrode substrate 11 is made larger than the size of the TFT substrate 10 as shown in FIG. A plurality of electrodes 12 for supplying drive signals to the plurality of pixels 8 to at least two edge portions 11b and 11c (see FIG. 5) adjacent to each other on the surface 11a of the counter electrode substrate 11 on the TFT substrate 10 side. A plurality of electrode groups 13 having a plurality of the electrodes arranged side by side. In FIG. 6, reference numeral 14 denotes a liquid crystal layer, and reference numeral 15 denotes a sealing material.

  The stage 1 adsorbs and holds the liquid crystal display substrate 7. As shown in FIGS. 2 and 7, the stage 1 is formed with a recessed portion 16 in the central portion and is in contact with one surface of the liquid crystal display substrate 7. Cooling water as a cooling medium to be cooled can be stored, for example, domestic water, industrial water or pure water, and the upper surface of the side wall 17 surrounding the recessed portion 16 is formed as a smooth surface, and a plurality of suction jets 18 are formed on the upper surface. And sucking air from each suction jet 18 to adsorb the vicinity of the periphery of the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 to the upper surface of the side wall 17, and air from each suction jet 18 The liquid crystal display substrate 7 is levitated and floated. Note that pipes (not shown) are connected to the respective suction jets 18. Further, the ends of these pipes are combined into one and connected to two switching valves. One of the switching valves is connected to a suction pump (not shown) and the other is connected to an air compressor (not shown). Has been. In this case, when the liquid crystal display substrate 7 is held by suction on the stage 1, the switching valve is switched to the suction pump side to suck air from the suction outlet 18. When coarse alignment adjustment is performed between the liquid crystal display substrate 7 and the prober 2 described later, and when the liquid crystal display substrate 7 is carried out, the switching valve is switched to the air compressor side, and the air is discharged from the suction outlet 18. Is ejected to float the liquid crystal display substrate 7.

  Here, on the bottom surface of the recessed portion 16, cooling water is ejected and discharged to the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7 sucked and held on the stage 1, and the cooling water is discharged. And a discharge port (not shown). In addition, the said discharge port is connected and provided in the some drainage groove | channel 20 provided crossing vertically and horizontally as shown in FIG. Moreover, each said jet nozzle 19 is provided inside the some island 21 enclosed by the drainage groove 20, and makes the one end of the water supply path 43 into each jet nozzle 19 as shown in FIG. A water supply pipe (not shown) is connected to the other end of the water supply path 43, and the end of the water supply pipe is connected to a water supply pump that pumps cooling water from a water storage tank (not shown). Further, a drain pipe (not shown) is connected to the discharge port, and the end of the drain pipe is connected to a water storage tank so that the cooling water can be circulated and used.

  A plurality of photosensors 22 are provided in each island 21 on the bottom surface of the recessed portion 16. The photo sensor 22 inspects the lighting state of the liquid crystal display substrate 7 and receives the transmitted light of the liquid crystal display substrate 7.

  Further, a plurality of lift pins 23 are provided in the drainage groove 20 on the bottom surface of the recessed portion 16. These lift pins 23 support the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 and move up and down together, and the tip positions of the lift pins 23 are formed at substantially the same height. . Further, the periphery of the lift pin 23 is subjected to water leakage prevention treatment so that the cooling water does not leak through the lift pin 23.

  A plurality of wires 45 are stretched on the opening side of the recessed portion 16. The plurality of wires 45 are in contact with the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 sucked and held on the stage 1 to support the liquid crystal display substrate 7 from below, and surround the islands 21 described above. For example, a metal wire or a metal net stretched on the upper end portion of the wire holding frame 46 projecting into the recessed portion 16.

  The prober 2 is disposed on at least two adjacent edge portions 44a and 44b (see FIG. 2) of a frame-like prober holding portion 44 provided so as to surround the stage 1. This prober 2 is provided with a plurality of prober units 2a provided with a plurality of terminals 27 connected to a plurality of electrodes 12 formed on the edge of the liquid crystal display substrate 7 and energized. A plurality of electrodes formed on the counter electrode substrate 11 of the liquid crystal display substrate 7 placed on the stage 1 with the tip end portion 27 protruding above the upper surface of the side wall 17 of the stage 1 (see FIG. 7). 12 can be brought into contact with each other. The plurality of terminals 27 are contact pins formed so as to be retractable so that the terminals 27 contract when an external pressing force is applied and return to the original state when the pressing force is removed. The plurality of electrodes 12 of the substrate 7 are brought into contact with each other at a substantially constant pressure. The prober holding portion 44 is formed so as to be movable in the X-axis and Y-axis directions, and is formed so as to be rotatable about the center thereof. The terminal 27 of the prober 2 is connected to the electrode 12 of the liquid crystal display substrate 7. Alignment can be performed.

  The stage 1 and the prober holding portion 44 are accommodated inside a housing 24 provided so as to surround them, and a liquid crystal display is provided on the stage 1 through a loading / unloading port 25 formed on the side surface of the housing 24. The board | substrate 7 for work can be carried in / out. Further, a shutter 26 that opens and closes the carry-in / out port 25 by rotating in the direction indicated by the broken line in FIG. 4 is attached to the carry-in / out port 25. It is designed not to leak.

  A light source device 3 is disposed above the stage 1. The light source device 3 irradiates the liquid crystal display substrate 7 held on the stage 1 with ultraviolet rays. As shown in FIG. 3, a plurality of lamp units 29 each having a plurality of flash lamps 28 are arranged in a matrix. Has been established. The lamp unit 29 is provided, for example, with four flash lamps 28 and surrounding the flash lamps 28. The lamp unit 29 has an opening on the lower surface side, multi-reflects and uniformizes the light emitted from the flash lamp 28, and the light is emitted from the openings. And a reflector 30 to be discharged. The rear end portion of the reflector 30 is formed so as to be removable from the front end portion, so that the flash lamp 28 can be easily replaced.

  The light source device 3 is movable in the X-axis and Y-axis directions in a plane parallel to the stage 1 by a moving means (not shown), and moves back and forth within the plane with a predetermined amplitude while the flash lamp 28 is lit. By swinging left and right (in the X-axis and Y-axis directions), the region of the surface of the liquid crystal display substrate 7 corresponding between the adjacent lamp units 29 can be uniformly irradiated with ultraviolet rays.

  Further, a drive circuit as shown in FIG. 8 is connected to the four flash lamps 28, and the switching transistors 31a to 31d shown in FIG. The flash lamps 28 are sequentially turned on for a predetermined time with a predetermined delay time.

Here, the lighting of the four flash lamps 28 will be described with reference to the timing chart of FIG.
First, for example, when an AC voltage of 200 V AC is supplied, the AC voltage is converted into a direct current by the AC / DC converter 32 shown in FIG. As a result, a predetermined charge is accumulated in the capacitor 33 as shown in FIG. Further, a weak current is supplied to the flash lamps 28a to 28d as shown in FIG. 5B, and the flash lamps 28a to 28d are simmered (preliminarily lit). In this simmer discharge state, since the flash lamp 28 emits white light, the flash lamp 28 can be used as a backlight for lighting inspection of the liquid crystal display substrate 7. Subsequently, when an A flash pulse as shown in FIG. 5C is supplied to the switching transistor 31a, the switching transistor 31a is turned on to supply a DC voltage to the flash lamp 28a. Lights for 200 μs. Thereafter, as shown in FIGS. 3D to 3F, the BD flash pulses are sequentially supplied to the switching transistors 31b to 31d with a delay of time Td. As a result, the switching transistors 31b to 31d are sequentially turned ON / OFF, and the flash lamps 28b to 28d are sequentially turned on, for example, for Tw = 200 μs in the same manner as described above. Then, the A to D flash pulses are repeatedly supplied for a predetermined time, and the flash lamps 8a to 8d are sequentially turned on to obtain a predetermined irradiation light quantity.

  Conveying means 4 is provided on the side of the stage 1. This transport means 4 carries in and out the liquid crystal display substrate 7 with respect to the stage 1, and the surface opposite to the stage 1 side of the liquid crystal display substrate 7, that is, the upper surface 11d of the counter electrode substrate 11 (FIG. 6) is a robot provided with a plurality of arms 34 that adsorb and hold. The transport means 4 moves forward and backward in the Y-axis direction on the rail 35 shown in FIG. 4, and the head portion 36 rotates 360 ° around the rotation shaft 37. A plurality of suction cups and suction ports 38 are formed at the center of each suction cup on the lower surface of each arm 34. Further, as shown in FIG. 2, each suction port 38 is connected to a groove 39 formed inside the arm 34, and is connected to, for example, a hole 40 (see FIG. 3) formed in the root portion of each arm 34. Suction can be performed by another suction pump through a tube (not shown).

  An alignment camera 5 is provided above the stage 1. The alignment camera 5 detects an alignment mark provided on the liquid crystal display substrate 7 and aligns the electrode 12 of the liquid crystal display substrate 7 and the terminal 27 of the prober 2. The prober holding portion 44 is moved together with the prober holding portion 44 in the X-axis and Y-axis directions, and is rotated about the center of the prober holding portion 44 as an axis.

  An air knife 6 is provided on the carry-in and carry-out side of the liquid crystal display substrate 7 of the stage 1. The air knife 6 is for rapidly drying by blowing compressed air on one surface of the liquid crystal display substrate 7, that is, the back surface 10a (see FIG. 6) of the TFT substrate 10, and is not shown by piping. Connected to an air compressor. Note that the gas to be injected is not limited to air, and may be an inert gas such as nitrogen or argon.

Next, the operation of the liquid crystal display device manufacturing apparatus configured as described above and the manufacturing of the liquid crystal display device will be described with reference to the flowchart of FIG.
First, in step S 1, the liquid crystal display substrate 7 is attracted to the lower surface of the arm 34 of the transport means 4 by the transport means 4 and is transported in the Y-axis direction and positioned on the stage 1. .

  In step S <b> 2, the lift pins 23 are raised and the tips of the lift pins 23 are brought into contact with the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7. When the tip of the lift pin 23 comes into contact with the liquid crystal display substrate 7, this is detected by a sensor (not shown), and the suction of the liquid crystal display substrate 7 to the arm 34 of the transport means 4 is released. As a result, the liquid crystal display substrate 7 is transferred from the transport means 4 to the lift pins 23. The transport means 4 moves in the Y-axis direction and retracts to its original position when the delivery of the liquid crystal display substrate 7 is completed.

  In step S <b> 3, as shown in FIG. 7, the lift pins 23 are lowered in the Z-axis direction and the liquid crystal display substrate 7 is placed on the stage 1. At this time, the lift pins 23 are further lowered and separated from the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7. When the liquid crystal display substrate 7 is placed on the stage 1, this is detected by a sensor (not shown) and controlled by the control means to drive the air compressor (not shown) and switch the switching valve to the air compressor side. Air is ejected from the suction outlet 18 on the upper surface of the side wall 17 of the recessed portion 16 to float the liquid crystal display substrate 7. In this state, the liquid crystal display substrate 7 is pushed in the diagonal direction by a pressing pin (not shown) and pressed against positioning protrusions (not shown) provided at two adjacent edges of the stage 1 in the diagonal direction. . Thereby, the liquid crystal display substrate 7 is arranged at a predetermined position on the stage 1, and coarse alignment adjustment between the electrode 12 of the liquid crystal display substrate 7 and the terminal 27 of the prober 2 is performed. Thereafter, the switching valve is switched to the suction pump side and sucked from the suction outlet 18 to hold the liquid crystal display substrate 7 on the upper surface of the side wall 17 of the recessed portion 16 by suction. At this time, the plurality of terminals 27 of the prober 2 provided on the prober holding portion 44 are pushed down by the liquid crystal display substrate 7, and the plurality of electrodes 12 provided on the edge of the counter electrode substrate 11 of the liquid crystal display substrate 7. Press contact. The liquid crystal display substrate 7 has the back surface 10 a of the TFT substrate 10 supported from below by a plurality of wires 45 stretched on the upper end of the wire holding frame 46 on the opening side of the recessed portion 16. Thereby, the bending of the liquid crystal display substrate 7 is suppressed.

  In step S <b> 4, the alignment camera 5 is turned on to image the alignment marks 41 provided at the four corners of the liquid crystal display substrate 7. In this case, as shown in FIG. 11A, when the alignment mark 41 is deviated from the center of the field of view 42 of the alignment camera 5, the control means (not shown) controls the alignment camera 5 based on the captured image of the alignment mark 41. The displacement amount of the alignment mark 41 from the center of the field of view 42, that is, the displacement amount and the rotation angle in the X-axis and Y-axis directions is calculated, and the prober holder 44 is moved in the X-axis and Y-axis directions according to these displacement amounts and rotation angles. And rotated to position the alignment mark 41 at the center of the field of view 42 of the alignment camera 5 as shown in FIG. As a result, the terminal 27 of the prober 2 is accurately aligned with the electrode 12 of the liquid crystal display substrate 7.

  In step S5, the light source device 3 is driven. In this case, first, a weak current is supplied to the flash lamps 28a to 28d of the plurality of lamp units 29, and the flash lamps 28a to 28d are subjected to simmer discharge. Accordingly, each of the flash lamps 28a to 28d emits white light. At the same time, a plurality of electrodes 12 of the liquid crystal display substrate 7 are energized from a signal source (not shown) through the prober 2, and a predetermined amount of electric field is applied to the plurality of pixels 8 to drive each pixel 8 ON. As a result, the white light can be transmitted through the liquid crystal display substrate 7, and the transmitted light is detected by the plurality of photosensors 22 provided on the bottom surface of the recessed portion 16 of the stage 1, and the lighting state of the liquid crystal display substrate 7 is detected. Check.

  In step S6, when it is confirmed that the entire surface of the liquid crystal display substrate 7 is turned on, the water supply pump is driven to pump the cooling water from the water storage tank, and this cooling water is provided on the bottom surface of the recessed portion 16 of the stage 1. 19, sprayed on the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7. At this time, since the back surface 10 a of the TFT substrate 10 of the liquid crystal display substrate 7 and the plurality of wires 45 are in line contact, the cooling water sprayed on the back surface 10 a of the TFT substrate 10 is recessed in the TFT substrate 10. The liquid crystal display substrate 7 can be efficiently cooled by hitting substantially the entire surface of the portion facing the portion 16. Thereafter, the cooling water is discharged from the discharge port through the drain groove 20, returned to the water storage tank, cooled to a predetermined temperature by a separately provided chiller, and circulated for use.

  In step S7, A to D flash pulses shown in FIGS. 9C to 9F are applied to the switching transistors 31a to 31d shown in FIG. 8 with a delay time Td while a predetermined amount of electric field is applied to each pixel 8. The flash lamps 28a to 28d are sequentially turned on for a time Tw in order. In this case, the A to D flash pulses are repeatedly supplied for a predetermined time until a predetermined irradiation light quantity is obtained. Therefore, unlike the case where the flash lamps 28a to 28d are turned on at the same time, a large amount of irradiation energy is not supplied in a concentrated manner, and the irradiation energy can be dispersed and the heat generation of the liquid crystal can be further suppressed. it can. During the execution of step S7, the light source device 3 is swung with a predetermined amplitude in the X-axis and Y-axis directions, and the ultraviolet rays are evenly distributed in the region of the liquid crystal display substrate 7 corresponding to the space between the adjacent lamp units 29. Is irradiated. Thereby, the liquid crystal molecules in the display region 9 of the liquid crystal display substrate 7 can be uniformly aligned in a predetermined direction.

  In step S8, the liquid crystal display substrate 7 is irradiated with a predetermined amount of ultraviolet rays in the same manner as in step S7 with the application of the electric field to each pixel 8 removed. As a result, the alignment of the liquid crystal molecules of each pixel 8 is fixed, and the liquid crystal molecules are prevented from returning to the initial state after the electric field applied to each pixel 8 is removed, thereby stabilizing the alignment of the liquid crystal molecules. it can.

  In step S <b> 9, the light source device 3 is turned OFF, the water supply pump is stopped, and the cooling water in the recessed portion 16 of the stage 1 is drained.

  In step S <b> 10, the transport unit 4 is moved in the Y-axis direction to position the arm 34 above the stage 1. Next, the suction pump of the stage 1 is stopped, and the suction of the liquid crystal display substrate 7 to the upper surface of the side wall 17 of the recessed portion 16 is released.

  In step S11, the switching valve is switched and the air compressor is driven, and air is ejected from the suction ejection port 18 to float the liquid crystal display substrate 7. Thereafter, the lift pins 23 are raised to lift the liquid crystal display substrate 7 until the upper surface 11 d of the counter electrode substrate 11 contacts the lower surface of the arm 34. When the sensor detects that the liquid crystal display substrate 7 is in contact with the arm 34, the suction pump of the transport means 4 is driven to attract the liquid crystal display substrate 7 to the lower surface of the arm 34, and the liquid crystal display substrate 7 is lifted by the lift pin. 23 to the conveying means 4. When the delivery of the liquid crystal display substrate 7 is completed, the lift pins 23 are lowered to a predetermined position.

  In step S <b> 12, the transport unit 4 moves in the Y-axis direction and carries out the liquid crystal display substrate 7. At this time, compressed air is jetted from the air knife 6 provided on the carry-in and carry-out sides of the stage 1, and the cooling water attached to the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7 is blown off to dry the substrate.

  In the above embodiment, the case where the liquid crystal display substrate 7 is irradiated with the predetermined amount of ultraviolet rays in the state where the application of the electric field to each pixel 8 is removed in step S8 has been described, but the present invention is not limited to this. In step S7, when the alignment of the liquid crystal molecules can be obtained sufficiently stably, step S8 may be omitted.

  Further, in the above embodiment, the case where the prober 2 is provided in the frame-like prober holding portion 44 provided so as to be movable surrounding the stage 1 has been described. However, the present invention is not limited to this, and the prober 2 is not limited to the stage. The at least two adjacent edges of 1 may be provided so as to be movable in the X-axis and Y-axis directions and to be rotatable about the center of the prober 2 as an axis. In this case, the alignment camera 5 is preferably provided so that both the electrode 12 of the liquid crystal display substrate 7 and the tip of the terminal 27 of the prober 2 can be observed. Alternatively, in step S3, if the electrode 12 of the liquid crystal display substrate 7 and the terminal 27 of the prober 2 can be aligned within a predetermined allowable range, the prober 2 is fixed to the edge of the stage 1. It may be provided. In this case, step S4 can be omitted, and the alignment camera 5 may not be provided.

  Furthermore, although the case where the plurality of electrodes 12 of the liquid crystal display substrate 7 are provided on the counter electrode substrate 11 side has been described in the above embodiment, the present invention is not limited to this and may be provided on the TFT substrate 10 side. . In this case, when the liquid crystal display substrate 7 is placed on the stage 1, the prober 2 is retracted to the standby position on the side of the stage 1, and the liquid crystal display substrate 7 is placed on the stage 1. It is preferable that the terminals 27 of the prober 2 are brought into contact with each electrode from above by moving to above the plurality of electrodes on the substrate.

  In the above embodiment, the case where the back surface 10a of the TFT substrate 10 is brought into contact with the cooling water has been described. However, the present invention is not limited to this, and the upper surface 11d of the counter electrode substrate 11 may be brought into contact with the cooling water. . In this case, the light source device 3 is disposed on the bottom surface of the recessed portion 16 of the stage 1, and a waterproof type is used as the flash lamp 28.

  In the above embodiment, the case where cooling water is used as the cooling medium has been described. However, the present invention is not limited to this, and any antifreezing liquid or the like can be used as long as it can be cooled by contacting one surface of the substrate. It can be anything.

  Furthermore, in the above-described embodiment, the case where the plurality of wires 45 are stretched on the opening side of the recessed portion 16 has been described. However, the present invention is not limited to this, and as shown in FIG. You may provide the at least 1 beam part 47 which cross | intersects across the opposite side of the wire holding frame 46, and supports the some wire 45 from the downward direction. Thereby, the bending of the wire 45 is suppressed and the bending of the liquid crystal display substrate 7 can be further suppressed. In this case, since the plurality of wires 45 are in contact with the back surface 10a of the TFT substrate 10 of the liquid crystal display substrate 7, the line contact between the back surface 10a of the TFT substrate 10 and the plurality of wires 45 is maintained. The cooling efficiency of the liquid crystal display substrate 7 by the cooling water is maintained substantially the same as when the liquid crystal display substrate 7 is supported only by the wires 45.

  In the above description, the case where the TFT substrate 10 has a COA configuration has been described. However, the present invention is not limited to this, and any device can be used as long as the alignment of liquid crystal molecules can be controlled by ultraviolet irradiation. It may be.

It is a front view which shows embodiment of the manufacturing apparatus of the liquid crystal display device by this invention. FIG. 2 is a cross-sectional view taken along line OO in FIG. 1. It is a fragmentary sectional top view of FIG. It is a side view of FIG. It is a top view which shows the example of 1 structure of the liquid crystal display substrate used for the said manufacturing apparatus. It is a center line sectional view of the above-mentioned substrate for liquid crystal display. FIG. 3 is a cross-sectional view taken along the line P-P in FIG. 2. It is explanatory drawing which shows one structural example of the drive circuit of the light source device used for the said manufacturing apparatus. It is a timing chart which drives the said light source device. 3 is a flowchart illustrating a method for manufacturing a liquid crystal display device according to the present invention. It is explanatory drawing shown about alignment with the substrate for liquid crystal displays and a prober performed using an alignment camera. It is sectional drawing which shows the state which supported the liquid crystal display substrate mounted in the stage of the said manufacturing apparatus with the some wire and beam part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Stage 2 ... Prober 3 ... Light source device 4 ... Conveyance means 6 ... Air knife 7 ... Substrate for liquid crystal display 12 ... Electrode 16 ... Recessed part 17 ... Side wall 19 ... Jet outlet 22 ... Photo sensor 27 ... Terminal 28, 28a-28d ... Flash lamp 29 ... Lamp unit 45 ... Wire 47 ... Beam

Claims (4)

Each electrode of a liquid crystal display substrate in which a plurality of pixels are formed in a matrix between a pair of substrates to seal a liquid crystal, and a plurality of electrodes for driving the pixels are formed at least at two adjacent edges. In a state where an electric field is applied to each pixel and an electric field is applied to each pixel, the liquid crystal display substrate is irradiated with ultraviolet rays to align the molecules of the liquid crystal in a predetermined direction.
A recess that stores a cooling medium that contacts and cools one surface of the liquid crystal display substrate in the center, and a stage that adsorbs and holds a peripheral portion of one surface of the liquid crystal display substrate on the upper surface;
A plurality of wires that are stretched on the opening side of the recessed portion and support the one surface of the liquid crystal display substrate held on the stage;
A prober provided with a plurality of terminals disposed near at least two adjacent edges of the stage and connected to the plurality of electrodes of the liquid crystal display substrate held on the stage and energized;
A light source device disposed above the stage and irradiating a liquid crystal display substrate held on the stage with ultraviolet rays;
An apparatus for manufacturing a liquid crystal display device, comprising:   2. The liquid crystal display according to claim 1, further comprising: a jet outlet that jets the cooling medium onto the one surface of the liquid crystal display substrate that is sucked and held by the stage on the bottom surface of the recessed portion of the stage. Equipment manufacturing equipment.   The apparatus for manufacturing a liquid crystal display device according to claim 1, wherein the cooling medium is water cooled to a predetermined temperature.   The liquid crystal display device according to any one of claims 1 to 3, further comprising at least one beam portion that crosses the plurality of wires and supports the plurality of wires from below. Manufacturing equipment.

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